Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2002
07/11/2002DE10125967C1 DRAM cell arrangement used for a semiconductor storage device comprises a matrix arrangement of storage cells stacked over each other as layers, and a capacitor connected to the MOS transistor
07/11/2002DE10111499C1 Storage cell used as a DRAM storage cell comprises a substrate, a trench arranged in the substrate, an insulation collar arranged in the middle region of the trench, a dielectric layer
07/11/2002DE10106999C1 Behälter aus einer Leichtmetalllegierung und Verfahren zu seiner Herstellung Container made of a light metal alloy and process for its preparation
07/11/2002DE10100265A1 Beleuchtungssystem mit Rasterelementen unterschiedlicher Größe Lighting system with raster elements of different sizes
07/11/2002DE10065686A1 Production of a thin semiconductor wafer used in the production of IGBTs comprises using carrier material applied to different surfaces of the wafer, and processing
07/11/2002DE10065669A1 Verfahren zur Herstellung einer integrierten Halbleiterspeicheranordnung A process for producing an integrated semiconductor memory arrangement
07/11/2002DE10065664A1 Integrated ferroelectric or DRAM semiconductor memory device has capacitor modules arranged alternately on front and rear of substrate
07/11/2002DE10065663A1 Semiconductor switching arrangement used in storage devices comprises a semiconductor substrate, a contact element formed in one region on the substrate, and a contact region
07/11/2002DE10065525A1 Semiconductor arrangement used as a diode consists of a chip with an edge region consisting of a first layer of first conductivity and a second layer of opposing conductivity made up of partial layers
07/11/2002DE10065470A1 Heat sink for electrical or electronic components has casting skin removed from edge of cooling ribs formed integrally with base part
07/11/2002DE10065198A1 Lichtintegrator für eine Beleuchtungseinrichtung Light integrator for a lighting device
07/11/2002DE10064223C1 Verfahren zum Überwachen der Herstellung integrierter Schaltkreise abhängig von einem Wafer zu Waferlayoutversatz A method for monitoring the manufacture of integrated circuits depending on a wafer to wafer layout offset
07/11/2002DE10062892A1 Ignition device for multi-cylinder internal combustion engine, has spark plug switched to external fixed voltage to increase flow duration of secondary current
07/11/2002DE10061288A1 Vorrichtung und Verfahren zum Behandeln von Substraten Apparatus and method for processing substrates
07/11/2002DE10060631C1 Verfahren zum automatischen Überwachen der Herstellung von integrierten Schaltkreisen abhängig von der Anzahl ausgeführter Bearbeitungszyklen A method for automatically monitoring the manufacture of integrated circuits depending on the number of executed processing cycles
07/11/2002DE10059665C1 Verfahren zum thermischen Behandeln von Substraten Method for thermal treatment of substrates
07/10/2002EP1221720A2 Semiconductor device, method for manufacturing the same, and ink jet apparatus
07/10/2002EP1221715A2 High density metal capacitor using via etch stopping layer as field dielectric in dual-damascence interconnect process
07/10/2002EP1221699A2 Fuse circuit using capacitors as fuse elements
07/10/2002EP1221655A2 Integrated circuit and method of making an integrated circuit
07/10/2002EP1221634A2 Illumination system with array elements of different sizes
07/10/2002EP1221583A1 Method of measuring the thickness of an ultra-thin oxide layer
07/10/2002EP1221495A2 Magnetron sputtering system and photomask blank production method based on the same
07/10/2002EP1221492A2 Light alloy container and method for its production
07/10/2002EP1221357A1 Arrangement and method for cleaning a semiconductor device
07/10/2002EP1221179A1 Strongly textured atomic ridges and dots
07/10/2002EP1221178A1 Method for depositing nanolaminate thin films on sensitive surfaces
07/10/2002EP1221177A1 Conformal lining layers for damascene metallization
07/10/2002EP1221176A2 Method of etching a layer using sacrificial elements
07/10/2002EP1221175A1 Electric supply unit and a method for reducing sparking during sputtering
07/10/2002EP1221173A1 Process and apparatus for implanting oxygen ions into silicon wafers
07/10/2002EP1221172A1 Determining beam alignment in ion implantation using rutherford back scattering
07/10/2002EP1221073A1 A photolithography mask having a subresolution alignment mark window
07/10/2002EP1112221A4 Robotic gripping device for gripping an object having a handle on an upper surface
07/10/2002EP0976146B1 Device for conveying substrates through a substrate processing plant
07/10/2002EP0948813B1 Chip module and method for producing the same
07/10/2002EP0892985B1 Transport device for flat objects and process of transfer of these objects between the device and a treatment apparatus
07/10/2002EP0871888B1 Automated molecular biological diagnostic system
07/10/2002EP0843891B1 Process for producing a non-volatile memory cell
07/10/2002EP0820645B1 Bipolar silicon-on-insulator transistor with increased breakdown voltage
07/10/2002EP0812472B1 Method for forming a structure using redeposition
07/10/2002EP0809863B1 Hot carrier transistors and their manufacture
07/10/2002EP0600063B2 Method of manufacturing cmos semiconductor components with local interconnects
07/10/2002CN1358332A Multi-bit trench capacitor
07/10/2002CN1358331A Interposer and method of making same
07/10/2002CN1358329A Damascene structure and method for forming damascene structure
07/10/2002CN1358328A Method for removing residues with reduced ethcing of oxide
07/10/2002CN1358327A Method and apparatus for etching gold metal layer using titanium hardmask
07/10/2002CN1358326A Metal oxie thin films for high dielectric constant applications
07/10/2002CN1358325A Method and apparatus for side wall passivation for organic etch
07/10/2002CN1358324A Plasma processing system, apparatus, and mehtod for delivering RF power to plasma processing chamber
07/10/2002CN1358280A Mask manufacturing methods comprising patterns to control corner rounding
07/10/2002CN1358276A Inspection apparatus and sensor
07/10/2002CN1358275A Tester and holder for tester
07/10/2002CN1358224A Stripper composition for negative chemically amplified resist
07/10/2002CN1358131A Method for producing of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows
07/10/2002CN1357927A Photo-electric equipment and batch spherical semiconductor grain producing equipment
07/10/2002CN1357925A Thin film transistor and its manufacture
07/10/2002CN1357924A Semiconductor device and its manufacture
07/10/2002CN1357922A 半导体存储器 Semiconductor memory
07/10/2002CN1357920A Chip conducting lug and re-distributed wire layer configuration
07/10/2002CN1357919A Package structure and method for power type semiconductor chip
07/10/2002CN1357918A Chip type passive element structure and its packing making process
07/10/2002CN1357916A IC package structure and its manufacture
07/10/2002CN1357915A Method of producing isolating channel
07/10/2002CN1357914A High-voltage chamber parameter monitoring instrument for semiconductor chip processing system
07/10/2002CN1357913A Making process of protecting layer
07/10/2002CN1357912A Chip welding apparatus and/or lead binding apparatus with chip hold-down device
07/10/2002CN1357911A Flip chip for film packed spherical grid array assembly
07/10/2002CN1357910A Substrate-type semiconductor device packing method without glue overflow
07/10/2002CN1357909A Manufacture of MOS element
07/10/2002CN1357908A Bipolar transistors with indenpendent impurity distribution on the same chiop and its manufacture
07/10/2002CN1357907A Blade-type substrate cleaning method and apparatus
07/10/2002CN1357906A Method of improving homogeneity and reducing surface roughness of silicon medium
07/10/2002CN1357893A Method and device of using compressed data in far-end fuse box to initialize integrated circuit
07/10/2002CN1357639A Purifying agent recovering method
07/10/2002CN1357585A Chemical and mechanical polishing paste for metal and dielectric structure
07/10/2002CN1357443A Method and mold for making thermoplastic resin container
07/10/2002CN1357403A Chemical filter
07/10/2002CN1087520C Intermediate voltage generating circuit
07/10/2002CN1087504C High frequency static induction transistor having high output
07/10/2002CN1087503C Geometrical control of device corner threshold
07/10/2002CN1087502C Ballast monitoring for radio frequency power transistors
07/10/2002CN1087501C Method for making nonvolatile memory
07/10/2002CN1087500C Semiconductor memory and method of manufacturing the same
07/10/2002CN1087499C Semiconductor device and method for producing the same
07/10/2002CN1087498C Process for manufacturing semiconductor device
07/10/2002CN1087497C Semi-conductor device
07/10/2002CN1087496C 半导体装置 Semiconductor device
07/10/2002CN1087495C Automatic binding adhesive tape
07/10/2002CN1087494C Contact mask for manufacturing semiconductor device
07/10/2002CN1087492C Semiconductor device and process of fabrication thereof
07/10/2002CN1087445C Developing device for semiconductor device fabrication and its controlling method
07/10/2002CN1087444C Exposure method and apparatus
07/10/2002CN1087216C Injection molding apparatus and method for closing and clamping block press
07/10/2002CN1087198C Process and device for lacquering or coating substrate
07/09/2002USRE37786 Mixture of aminocarboxylic acid, oxidizer and water
07/09/2002US6418553 Circuit designing method for semiconductor device and computer-readable medium
07/09/2002US6418355 Lot supply system and lot supply method
07/09/2002US6418352 Integrated material management module