| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/11/2002 | US20020089052 Semiconductor device and a method of manufacturing the same |
| 07/11/2002 | US20020089043 Semiconductor package with shortened electric signal paths |
| 07/11/2002 | US20020089042 Semiconductor leadframe for staggered board attach |
| 07/11/2002 | US20020089041 Lead-frame design modification to facilitate removal of resist tape from the lead-frame |
| 07/11/2002 | US20020089040 Semiconductor device having a ball grid array and a fabrication process thereof |
| 07/11/2002 | US20020089038 Fully-depleted-collector silicon-on-insulator (SOI) bipolar transistor useful alone or in SOI BiCMOS |
| 07/11/2002 | US20020089037 Semiconductor memory device and method for manufacturing the same |
| 07/11/2002 | US20020089036 Semiconductor device, method of manufacturing the same and method of designing the same |
| 07/11/2002 | US20020089035 Semiconductor integrated circuit device suppressing a junction leak and method of manufacturing the same |
| 07/11/2002 | US20020089034 Isolating region forming methods |
| 07/11/2002 | US20020089033 Semiconductor device and semiconductor assembly apparatus for semiconductor device |
| 07/11/2002 | US20020089032 Processing method for forming dislocation-free silicon-on-insulator substrate prepared by implantation of oxygen |
| 07/11/2002 | US20020089031 Novel method of body contact for SOI mosfet |
| 07/11/2002 | US20020089030 Semiconductor substrate with functional circuit structures and dummy structures |
| 07/11/2002 | US20020089029 Method and apparatus for integrating flash eprom and sram cells on a common substrate |
| 07/11/2002 | US20020089028 High voltage breakdown isolation semiconductor device and manufacturing process for making the device |
| 07/11/2002 | US20020089027 Apparatus for filling apertures in a film layer on a semiconductor structure |
| 07/11/2002 | US20020089024 Magnetoresistive memory device |
| 07/11/2002 | US20020089023 Low leakage current metal oxide-nitrides and method of fabricating same |
| 07/11/2002 | US20020089022 Semiconductor arrangement with transistor gate insulator |
| 07/11/2002 | US20020089021 Semiconductor device with an anti-doped region |
| 07/11/2002 | US20020089020 N-channel metal oxide semiconductor (nmos) driver circuit and method of making same |
| 07/11/2002 | US20020089019 MOSFET device |
| 07/11/2002 | US20020089018 Semiconductor device |
| 07/11/2002 | US20020089016 Thin layer semi-conductor structure comprising a heat distribution layer |
| 07/11/2002 | US20020089013 Semiconductor device allowing electrical writing and erasing of information and method of manufacturing the same |
| 07/11/2002 | US20020089012 Memory device, method of manufacturing the same, and integrated circuit |
| 07/11/2002 | US20020089010 Semiconductor device comprising a non-volatile memory cell |
| 07/11/2002 | US20020089009 Capacitance dielectric film and method of manufacturing the same |
| 07/11/2002 | US20020089008 Method of fabricating a stacked poly-poly and MOS capacitor using a SiGe integration scheme |
| 07/11/2002 | US20020089007 Vertical mosfet |
| 07/11/2002 | US20020089006 Field-effect transistor and corresponding manufacturing method |
| 07/11/2002 | US20020089005 Ferroelectric storage read-write memory |
| 07/11/2002 | US20020089004 Multi-trench region for accumulation of photo-generated charge in a CMOS imager |
| 07/11/2002 | US20020089003 Transistor in a semiconductor device and method of manufacturing the same |
| 07/11/2002 | US20020089002 Nonvolatile semiconductor memory device and process for same |
| 07/11/2002 | US20020089001 Power lateral diffused mos transistor |
| 07/11/2002 | US20020088998 Three-dimensional memory array and method of fabrication |
| 07/11/2002 | US20020088997 Integrated circuit and circuit configuration for supplying power to an integrated circuit |
| 07/11/2002 | US20020088996 Memory device comprising single transistor having functions of RAM and ROM and methods for operating and manufacturing the same |
| 07/11/2002 | US20020088994 Semiconductor device with a super lattice buffer |
| 07/11/2002 | US20020088993 Heterojunction bipolar transistor capable of restraining the conductivity modulation of the ballast layer |
| 07/11/2002 | US20020088991 Power semiconductor device containing at least one zener diode provided in chip periphery portion |
| 07/11/2002 | US20020088988 Light emitting semiconductor package |
| 07/11/2002 | US20020088987 Optical device and method for manufacturing the same, and electronic apparatus |
| 07/11/2002 | US20020088984 Semiconductor chip mounting substrate, electrooptical device, liquid-crystal device, electroluminescent device, and electronic equipment |
| 07/11/2002 | US20020088982 LCD with increased pixel opening sizes |
| 07/11/2002 | US20020088979 Semiconductor laminated substrate, semiconductor crystal substrate and semiconductor device and method of manufacturing the same |
| 07/11/2002 | US20020088978 Method of manufacturing an active matrix substrate |
| 07/11/2002 | US20020088976 Semiconductor device and method of manufacturing the same |
| 07/11/2002 | US20020088974 Method for evaulating of molding material with dams formed on a semiconductor substrate to define slits for capturing the fillers contained in the molding material |
| 07/11/2002 | US20020088972 Abrupt pn junction diode formed using chemical vapor deposition processing |
| 07/11/2002 | US20020088971 Semiconductor device and method of manufacturing the same |
| 07/11/2002 | US20020088970 Self-assembled quantum structures and method for fabricating same |
| 07/11/2002 | US20020088951 Method and apparatus for detecting aberrations in an optical system |
| 07/11/2002 | US20020088950 Ion production device for ion beam irradiation apparatus |
| 07/11/2002 | US20020088949 Semiconductor processing apparatus having a moving member and a force compensator therefor |
| 07/11/2002 | US20020088843 Solder ball pitcher |
| 07/11/2002 | US20020088797 Method and apparatus for improving exhaust gas consumption in an exhaust conduit |
| 07/11/2002 | US20020088780 Control of laser machining |
| 07/11/2002 | US20020088776 Plasma processing apparatus suitable for power supply of higher frequency |
| 07/11/2002 | US20020088774 Variable time etching system according to the accumulated number of devices being processed and a method for etching in the same manner |
| 07/11/2002 | US20020088771 Physical vapor deposition apparatus with modified shutter disk and cover ring |
| 07/11/2002 | US20020088769 Method of inspecting an anisotropic etch in a microstructure |
| 07/11/2002 | US20020088716 Depositing a copper alloy seed layer over a surface of a substrate, copper alloy seed layer comprising an alloying material selected from the group of aluminum, magnesium |
| 07/11/2002 | US20020088715 For electroplating a metal on a semiconductor substrate; for forming electrical contacts on the semiconductor substrate using a liquid conductor |
| 07/11/2002 | US20020088713 Providing metal seed layer substantially free of discontinuities disposed on substrate by contacting metal seed layer disposed on a substrate with electroplating bath comprising one or more sources of copper in electrolyte |
| 07/11/2002 | US20020088709 Method and apparatus for forming interconnects, and polishing liquid and polishing method |
| 07/11/2002 | US20020088708 Cup type plating apparatus |
| 07/11/2002 | US20020088707 Method for improving thermal stability of fluorinated amorphous carbon low dielectric constant materials |
| 07/11/2002 | US20020088646 Structure equipped with electrical contacts formed through the substrate of this structure and process for obtaining such a structure |
| 07/11/2002 | US20020088634 QFN package and a fabrication method thereof |
| 07/11/2002 | US20020088632 Integrated circuit package including opening exposing portion of an IC |
| 07/11/2002 | US20020088610 Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator |
| 07/11/2002 | US20020088608 Method and apparatus for heating a wafer, and method and apparatus for baking a photoresist film on a wafer |
| 07/11/2002 | US20020088558 Method and apparatus for separating composite member using fluid |
| 07/11/2002 | US20020088556 Spatula for separation of thinned wafer from mounting carrier |
| 07/11/2002 | US20020088548 Apparatus for generating inductively coupled plasma |
| 07/11/2002 | US20020088546 Dry etching apparatus |
| 07/11/2002 | US20020088545 Gas injector comprising block of ceramic material having gas injection holes extending therethrough, and etching apparatus incorporating the same |
| 07/11/2002 | US20020088544 Substrate processing apparatus |
| 07/11/2002 | US20020088543 Integrated system for processing semiconductor wafers |
| 07/11/2002 | US20020088542 Plasma processing apparatus |
| 07/11/2002 | US20020088540 Method for joining large substrates |
| 07/11/2002 | US20020088537 Wafer scale molding of protective caps |
| 07/11/2002 | US20020088524 System for making wallboard or backerboard sheets including aerated concrete |
| 07/11/2002 | US20020088478 Holding substrate in tank and filling tank with gas mixture comprising water vapor, ozone and an additive acting as a scavenger |
| 07/11/2002 | US20020088477 Process for removing chemical mechanical polishing residual slurry |
| 07/11/2002 | US20020088476 Using reducing gas plasma selected from mixture of nitrogen/hydrogen or mixture of ammonia/hydrogen in vacuum chamber to clean semiconductor wafer surface |
| 07/11/2002 | US20020088400 Plasma processing apparatus including a plurality of plasma processing units having reduced variation |
| 07/11/2002 | US20020088399 Processing apparatus and method for processing workpiece |
| 07/11/2002 | US20020088393 Coating film forming apparatus and coating film forming method |
| 07/11/2002 | US20020088117 Chromium adhesion layer for copper vias in low-k technology |
| 07/11/2002 | US20020088101 Method of fixing a plurality of lower members each having reference bore for installing upper member, and fixing jigs |
| 07/11/2002 | US20020088069 Wafer cleaning apparatus |
| 07/11/2002 | DE10162222A1 Optical test system for testing integrated circuits via optical coupling uses a device under test to hold an optical fibre in optical alignment by applying an alignment holder |
| 07/11/2002 | DE10150507A1 Verbindungsverfahren und Verbindungsstruktur von Anschlussflächenelektroden und Prüfverfahren für den Verbindungszustand derselben Connection method and connection structure of pad electrodes and test methods for the connection state of the same |
| 07/11/2002 | DE10148885A1 Verfahren zur Wärmebehandlung eines Halbleiterwafers und ein Halbleiterwafer, der durch dasselbe hergestellt wird A method for heat treating a semiconductor wafer and a semiconductor wafer which is prepared by the same |
| 07/11/2002 | DE10134019A1 Integrierte Halbleiterschaltung A semiconductor integrated circuit |
| 07/11/2002 | DE10128211C1 Storage cell used as dynamic random access memory storage cell in integrated circuits comprises a substrate with a trench containing a trench capacitor, a selectively grown epitaxial layer, a selective transistor, and a conductive contact |