| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/13/2002 | US6432197 Process for the preparation of non-oxygen precipitating Czochralski silicon wafers |
| 08/13/2002 | US6432151 Preparing method of silica slurry for wafer polishing |
| 08/13/2002 | US6431968 Carrier head with a compressible film |
| 08/13/2002 | US6431964 Planarization apparatus and method |
| 08/13/2002 | US6431961 Apparatus and method for chamfering wafer |
| 08/13/2002 | US6431959 System and method of defect optimization for chemical mechanical planarization of polysilicon |
| 08/13/2002 | US6431953 CMP process involving frequency analysis-based monitoring |
| 08/13/2002 | US6431952 Apparatus and methods for substantial planarization of solder bumps |
| 08/13/2002 | US6431949 Planarization apparatus |
| 08/13/2002 | US6431948 Wafer cleaning apparatus |
| 08/13/2002 | US6431908 Spring electrical connectors for a megasonic cleaning system |
| 08/13/2002 | US6431814 Integrated wafer stocker and sorter with integrity verification system |
| 08/13/2002 | US6431811 Transfer device for semiconductor wafers |
| 08/13/2002 | US6431807 Wafer processing architecture including single-wafer load lock with cooling unit |
| 08/13/2002 | US6431806 Adapter device for carrier pods containing at least one flat object in an ultraclean atmosphere |
| 08/13/2002 | US6431800 Edged ceramic member and a method of manufacturing same |
| 08/13/2002 | US6431769 Substrate processing system and substrate processing method |
| 08/13/2002 | US6431432 Method for attaching solderballs by selectively oxidizing traces |
| 08/13/2002 | US6431320 Manual wafer lift |
| 08/13/2002 | US6431258 Process solution supplying apparatus |
| 08/13/2002 | US6431190 Fluid processing apparatus |
| 08/13/2002 | US6431186 Method of cleaning electronic components |
| 08/13/2002 | US6431185 Using high pressure water jets; prevent generation of mist |
| 08/13/2002 | US6431184 Apparatus and method for washing substrate |
| 08/13/2002 | US6431183 Using ozone; smooth semiconductor surfaces |
| 08/13/2002 | US6431182 Using gas mixture of oxygen, water or fluorine compound; semiconductor layers |
| 08/13/2002 | US6431114 Method and apparatus for plasma processing |
| 08/13/2002 | US6431113 Plasma vacuum substrate treatment process and system |
| 08/13/2002 | US6431112 Apparatus and method for plasma processing of a substrate utilizing an electrostatic chuck |
| 08/13/2002 | US6430841 Apparatus for drying batches of wafers |
| 08/13/2002 | US6430840 Method of and apparatus for drying a wafer using isopropyl alcohol |
| 08/13/2002 | US6430839 Method of transferring a material from first apparatus to second apparatus in the clean room and an assembly line |
| 08/13/2002 | US6430809 Method for bonding conductors, in particular beam leads |
| 08/13/2002 | US6430802 Clean box, clean transfer method and apparatus therefor |
| 08/08/2002 | WO2002062117A1 Method for jointing electronic parts |
| 08/08/2002 | WO2002062115A1 Plasma installation and method for producing a functional coating |
| 08/08/2002 | WO2002062111A2 Apparatus and method for atmospheric pressure reactive atom plasma processing for surface modification |
| 08/08/2002 | WO2002062069A1 Monitoring system for hostile environment |
| 08/08/2002 | WO2002061854A2 Method for structuring an oxide layer applied to a substrate material |
| 08/08/2002 | WO2002061846A1 Semiconductor device and fabrication method therefor |
| 08/08/2002 | WO2002061845A1 Semiconductor device and method of manufacturing the same |
| 08/08/2002 | WO2002061844A1 Correlated charge transfer device and a method of fabricating a correlated charge transfer device |
| 08/08/2002 | WO2002061843A1 Bipolar transistor and method for producing the same |
| 08/08/2002 | WO2002061842A1 Semiconductor crystal film and method for preparation thereof |
| 08/08/2002 | WO2002061840A1 Semiconductor integrated circuit device and production method therefor |
| 08/08/2002 | WO2002061838A1 A semiconductor circuit regulator |
| 08/08/2002 | WO2002061837A2 Modular display device and organic thin-film transistor |
| 08/08/2002 | WO2002061836A1 High voltage semiconductor device |
| 08/08/2002 | WO2002061835A1 Semiconductor device and its manufacturing method |
| 08/08/2002 | WO2002061834A2 Electronic part |
| 08/08/2002 | WO2002061833A2 Substrate for an electric component and method for the production thereof |
| 08/08/2002 | WO2002061832A1 Unmolded package for a semiconductor device |
| 08/08/2002 | WO2002061831A1 Method for coupling a chip to an isotropic coupling layer |
| 08/08/2002 | WO2002061827A1 Semiconductor device and its manufacturing method |
| 08/08/2002 | WO2002061824A2 Slurry and method for chemical mechanical polishing of copper |
| 08/08/2002 | WO2002061823A1 Integration of organic fill for dual damascene process |
| 08/08/2002 | WO2002061822A1 Method and apparatus for removing a carrier part from a carrier, and a product removed from a carrier |
| 08/08/2002 | WO2002061821A2 Method of preparing indium phosphide heterojunction bipolar transistors |
| 08/08/2002 | WO2002061820A1 Silicon germanium bipolar transistor |
| 08/08/2002 | WO2002061819A2 Method for ultra thin film formation |
| 08/08/2002 | WO2002061818A1 Sheet type heat treating device and method for processing semiconductors |
| 08/08/2002 | WO2002061817A1 Working shape prediction method, working requirement determination method, working method, working system, method of manufacturing semiconductor device, computer program, and computer program storage medium |
| 08/08/2002 | WO2002061816A1 Method for forming thin semiconductor film, method for fabricating semiconductor device, system for executing these methods and electrooptic device |
| 08/08/2002 | WO2002061813A1 Electron beam exposure device, electron beam forming member, and method of manufacturing the electron beam forming member |
| 08/08/2002 | WO2002061812A1 Electron beam exposure device and electron lens |
| 08/08/2002 | WO2002061811A2 Laser cleaning process for semiconductor material |
| 08/08/2002 | WO2002061810A1 Ammonium oxalate-containing polishing system and method |
| 08/08/2002 | WO2002061809A2 Configurable patterning device and a method of making integrated circuits using such a device |
| 08/08/2002 | WO2002061808A2 Heat treatment apparatus and wafer support ring |
| 08/08/2002 | WO2002061807A2 Method and system for rotating a semiconductor wafer in processing chambers |
| 08/08/2002 | WO2002061806A2 Dram cell having a capacitor structure fabricated partially in a cavity and method for operating same |
| 08/08/2002 | WO2002061802A2 Metal-to-metal antifuse structure and fabrication method |
| 08/08/2002 | WO2002061801A2 Dual gate process using self-assembled molecular layer |
| 08/08/2002 | WO2002061800A2 A method and system for electrostatic bonding |
| 08/08/2002 | WO2002061797A2 Icp window heater integrated with faraday shield or floating electrode between the source power coil and the icp window |
| 08/08/2002 | WO2002061752A2 Mram architecture and system |
| 08/08/2002 | WO2002061443A1 Nickel alloy probe card frame laminate |
| 08/08/2002 | WO2002061442A1 Planarizing interposer |
| 08/08/2002 | WO2002061172A1 Scanning deposition head for depositing particles on a wafer |
| 08/08/2002 | WO2002061167A2 Target/backing plate assemblies |
| 08/08/2002 | WO2002061010A2 Method for adhering substrates using light activatable adhesive film |
| 08/08/2002 | WO2002061008A2 Alkali metal-containing polishing system and method |
| 08/08/2002 | WO2002060828A2 Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces |
| 08/08/2002 | WO2002060811A2 Mems singulation process utilizing protective coating |
| 08/08/2002 | WO2002060669A1 Injection molded heat dissipation device |
| 08/08/2002 | WO2002060645A1 Non-slip polisher head backing film |
| 08/08/2002 | WO2002060643A2 Spherical drive assembly for chemical mechanical planarization |
| 08/08/2002 | WO2002060636A1 Ultraviolet laser ablative patterning of microstructures in semiconductors |
| 08/08/2002 | WO2002060632A2 Bonding tool with polymer coating |
| 08/08/2002 | WO2002056370A8 Integrated circuit and method for making same |
| 08/08/2002 | WO2002039131A3 Method for locating defects and measuring resistance in a test structure |
| 08/08/2002 | WO2002029853A3 Method for cutting a composite structure comprising one or more electronic compnents using a laser |
| 08/08/2002 | WO2002027755A3 Chamber configuration for confining a plasma |
| 08/08/2002 | WO2002023624A3 Field effect transistor and method of fabrication |
| 08/08/2002 | WO2002013233A3 Formation of self-aligned passivation for interconnect to minimize electromigration |
| 08/08/2002 | WO2002010858A3 Process for manufacturing a microelectronic device |
| 08/08/2002 | WO2002003423A3 Capacitor and capacitor contact process for stack capacitor drams |
| 08/08/2002 | WO2002001603A3 Bottom gate type thin film transistor, its manufacturing method and liquid crystal display device using the same |
| 08/08/2002 | WO2001096620A3 High purity niobium and products containing the same, and methods of making the same |
| 08/08/2002 | WO2001040124A9 Apparatus for providing ozonated process fluid and methods for using same |