| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/08/2002 | US20020105018 Semiconductor device and process for manufacturing the same |
| 08/08/2002 | US20020105017 Integrated circuit ferroelectric memory devices including plate lines directly on ferroelectric capacitors and methods of fabricating the same |
| 08/08/2002 | US20020105016 Memory cell configuration |
| 08/08/2002 | US20020105015 Semiconductor device and method of producing the same |
| 08/08/2002 | US20020105014 Body-tied-to-source with partial trench |
| 08/08/2002 | US20020105013 3-5 Group compound semiconductor and light emitting device |
| 08/08/2002 | US20020105011 Heterojunction bipolar transistor and method of making heterojunction bipolar transistor |
| 08/08/2002 | US20020104998 Semiconductor light-emitting element |
| 08/08/2002 | US20020104995 Light emitting device |
| 08/08/2002 | US20020104994 Method of manufacturing thin film transistor |
| 08/08/2002 | US20020104993 Gate technology for strained surface channel and strained buried channel MOSFET devices |
| 08/08/2002 | US20020104992 Display device and method of manufacturing the same |
| 08/08/2002 | US20020104991 Integrated circuit feature layout for improved chemical Mechanical polishing |
| 08/08/2002 | US20020104970 Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash field |
| 08/08/2002 | US20020104964 Apparatus and method for secondary electron emission microscope |
| 08/08/2002 | US20020104950 Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus |
| 08/08/2002 | US20020104877 Method of mounting electronic part |
| 08/08/2002 | US20020104874 Semiconductor chip package comprising enhanced pads |
| 08/08/2002 | US20020104873 Multilayer interconnection and method |
| 08/08/2002 | US20020104870 Wire bonding device |
| 08/08/2002 | US20020104832 Plasma processing apparatus and method |
| 08/08/2002 | US20020104825 Nanotopography removing method |
| 08/08/2002 | US20020104821 Reactive ion etching of silica structures |
| 08/08/2002 | US20020104764 Applying a voltage across a polishing pad and the substrate, while an electropolishing electrolyte is dispensed at an interface of the substrate and the polishing pad, and while pooling the electrolyte about the substrate |
| 08/08/2002 | US20020104756 Sputtering apparatus |
| 08/08/2002 | US20020104753 Electric supply unit and method for reducing arcing during sputtering |
| 08/08/2002 | US20020104751 Method and apparatus for ionized physical vapor deposition |
| 08/08/2002 | US20020104671 Cross substrate, method of mounting semiconductor element, and semiconductor device |
| 08/08/2002 | US20020104646 Multi-channel temperature control system for semiconductor processing facilities |
| 08/08/2002 | US20020104622 Wafer demount gas distribution tool |
| 08/08/2002 | US20020104619 Method and system for rotating a semiconductor wafer in processing chambers |
| 08/08/2002 | US20020104618 Wet strength of paper materials can be increased by treating a pulp suspension with a phenol-oxidizing enzyme system prior to the paper machine |
| 08/08/2002 | US20020104617 Method and apparatus for supplying gas used in semiconductor processing |
| 08/08/2002 | US20020104616 Wafer demount receptacle for separation of thinned wafer from mounting carrier |
| 08/08/2002 | US20020104562 Semiconductor crystal substrate having a thickness up to 150 mu m and a textured structure disposed on a surface |
| 08/08/2002 | US20020104556 Controlled fluid flow and fluid mix system for treating objects |
| 08/08/2002 | US20020104555 Exhaust apparatus, semiconductor device manufacturing system and method for manufacturing semiconductor device |
| 08/08/2002 | US20020104553 Error-preventing device and method for semiconductor fabrication equipment |
| 08/08/2002 | US20020104552 Determining and controlling chemical concentrations of processing streams used in a wet processing system for electronic components, such as semiconductor substrates. |
| 08/08/2002 | US20020104550 Treating exposed metallized (metal X) surfaces, with an alkaline, water-based solution of a first constituent comprised of the metal X and a second constituent that reacts with the first to form anticorrosive film and remove residues |
| 08/08/2002 | US20020104549 Cleaning the reaction chamber by removing high molecular weight micro-particles; inserting a photoresist coated wafer and introducing a mixture of hydrogen and nitrogen; reacting the gases with photoresist on the dummy |
| 08/08/2002 | US20020104482 Plasma-assisted processing apparatus |
| 08/08/2002 | US20020104481 System and method for modulated ion-induced atomic layer deposition (MII-ALD) |
| 08/08/2002 | US20020104478 Silicon carbide single crystal and process for producing the same |
| 08/08/2002 | US20020104477 Method of growing a polycrystalline silicon layer. method of growing a single crystal silicon layer and catalytic CVD apparatus |
| 08/08/2002 | US20020104467 Accelerated plasma clean |
| 08/08/2002 | US20020104453 Air bearing assembly |
| 08/08/2002 | US20020104449 Solder screen printing process |
| 08/08/2002 | US20020104422 Dual-cutting method devoid of useless strokes |
| 08/08/2002 | US20020104269 Polishing composition includes one or more photochemically reactive compounds, especially ketones, alkylhalides, azo compounds, aldehydes, amines, peroxides, titanium oxide, or combinations thereof. |
| 08/08/2002 | US20020104268 Slurry for chemical mechanical polishing |
| 08/08/2002 | US20020104231 Position measuring apparatus |
| 08/08/2002 | US20020104229 System and method for detecting position of semiconductor wafer |
| 08/08/2002 | US20020104206 Substrate processing apparatus |
| 08/08/2002 | US20020104205 Rotating semiconductor processing apparatus |
| 08/08/2002 | DE19540665C2 Halbleiterbauelement und Verfahren zu dessen Herstellung Semiconductor device and process for its preparation |
| 08/08/2002 | DE10108923C1 Nativer Feldeffekttransistor und Verfahren zu dessen Herstellung Native field effect transistor and method of producing the |
| 08/08/2002 | DE10104726A1 Verfahren zur Strukturierung einer auf einem Trägermaterial aufgebrachten Oxidschicht Process for structuring a layer applied to a carrier material oxide layer |
| 08/08/2002 | DE10104574A1 Substrat für ein elektrisches Bauelement und Verfahren zur Herstellung Substrate for an electrical component and method for preparing |
| 08/08/2002 | DE10062660A1 Halbleiterstruktur mit einer Siliciumoxynitrid -ARC-Schicht und Verfahren zur Herstellung desselben Of the same semiconductor structure with a silicon oxynitride -Arc layer and processes for preparing |
| 08/08/2002 | DE10048489C1 Polymer Stud Grid Array und Verfahren zur Herstellung eines derartigen Polymer Stud Grid Arrays Polymer stud grid array and methods for producing such a polymer stud grid array |
| 08/08/2002 | CA2436736A1 Ultraviolet laser ablative patterning of microstructures in semiconductors |
| 08/07/2002 | EP1229650A2 Output circuit, input circuit and input/output circuit |
| 08/07/2002 | EP1229649A2 Output circuit, input circuit and input/output circuit |
| 08/07/2002 | EP1229648A2 Output circuit, input circuit and input/output circuit |
| 08/07/2002 | EP1229595A2 Method of forming transparent, conductive film, method of compensating defective region of semiconductor layer, photovoltaic element, and method of producing photovoltaic element |
| 08/07/2002 | EP1229590A1 Correlated charge transfer device and a method of fabricating a correlated charge transfer device |
| 08/07/2002 | EP1229589A2 High voltage semiconductor device |
| 08/07/2002 | EP1229586A2 Interface device and system |
| 08/07/2002 | EP1229585A1 Integrated circuit with bipolar transistors having different emitter base junction widths |
| 08/07/2002 | EP1229583A1 Semiconductor device and its manufacturing method |
| 08/07/2002 | EP1229582A2 Thin-film semiconductor device and method of manufacturing the same |
| 08/07/2002 | EP1229581A2 Thin-film semiconductor device and method of manufacturing the same |
| 08/07/2002 | EP1229580A2 Electrochemical reduction of copper seed for reducing voids in electrochemical deposition |
| 08/07/2002 | EP1229579A2 Method to form a balloon shaped shallow trench isolation structure (STI) using a selective etching step |
| 08/07/2002 | EP1229578A1 Linear actuator with dustproof mechanism |
| 08/07/2002 | EP1229577A2 Flip chip semiconductor device in a moulded chip scale package (csp) and method of assembly |
| 08/07/2002 | EP1229576A2 Method of producing SOI MOSFET |
| 08/07/2002 | EP1229575A2 Nanotopography removing method |
| 08/07/2002 | EP1229574A2 Silicon-based film, formation method therefor and photovoltaic element |
| 08/07/2002 | EP1229572A1 Hot plate for semiconductor manufacture and testing |
| 08/07/2002 | EP1229571A1 Hot plate |
| 08/07/2002 | EP1229570A1 Hot plate |
| 08/07/2002 | EP1229569A2 Capacitor semiconductor device comprising the same and method of fabricating thereof |
| 08/07/2002 | EP1229552A1 One time programmable semiconductor nonvolatile memory device and method for production of same |
| 08/07/2002 | EP1229491A1 Integrated semiconductor circuit device, process of manufacturing the same, ic module and ic card |
| 08/07/2002 | EP1229462A1 Method and apparatus for analysing a source current waveform in a semiconductor integrated circuit |
| 08/07/2002 | EP1229394A2 Electrophotographic photosensitive member, process for its production, and electrophotographic apparatus |
| 08/07/2002 | EP1229388A2 Adhesive tape and process for removing photoresist |
| 08/07/2002 | EP1229387A2 Lithography apparatus, lithography method and method of manufacturing master print for transfer |
| 08/07/2002 | EP1229385A2 Method of correcting a photomask and method of manufacturing a semiconductor device |
| 08/07/2002 | EP1229380A1 Display device and method of manufacturing the same |
| 08/07/2002 | EP1229155A1 Silicon wafer, silicon epitaxial wafer, anneal wafer and method for producing them |
| 08/07/2002 | EP1229145A1 Method of depositing a thick dielectric film |
| 08/07/2002 | EP1229095A1 Adhesive agent, method for connecting wiring terminals and wiring structure |
| 08/07/2002 | EP1229094A2 Polishing composition and polishing method employing it |
| 08/07/2002 | EP1229093A1 Polishing composition and polishing method employing it |
| 08/07/2002 | EP1228534A1 Semiconductor non-volatile memory device |
| 08/07/2002 | EP1228533A1 Method of manufacturing a bipolar transistor semiconductor device |
| 08/07/2002 | EP1228530A1 Metal redistribution layer having solderable pads and wire bondable pads |