| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/13/2002 | US6432802 Method for fabricating semiconductor device |
| 08/13/2002 | US6432801 Gate electrode in a semiconductor device and method for forming thereof |
| 08/13/2002 | US6432800 Inspection of defects on the circumference of semiconductor wafers |
| 08/13/2002 | US6432799 Method of manufacturing semiconductor integrated circuit device |
| 08/13/2002 | US6432798 Extension of shallow trench isolation by ion implantation |
| 08/13/2002 | US6432797 Simplified method to reduce or eliminate STI oxide divots |
| 08/13/2002 | US6432795 Method of fabricating a cylindrical capacitor storage node having HSG silicon on inner wall thereof in a semiconductor device |
| 08/13/2002 | US6432794 Process for fabricating capacitor |
| 08/13/2002 | US6432793 Reducing current leakage; using sulfur trioxide |
| 08/13/2002 | US6432792 Substrate and method for manufacturing the same |
| 08/13/2002 | US6432790 Method of manufacturing photomask, photomask, and method of manufacturing semiconductor integrated circuit device |
| 08/13/2002 | US6432789 Method of forming a well isolation bipolar transistor |
| 08/13/2002 | US6432788 Method for fabricating an emitter-base junction for a gallium nitride bipolar transistor |
| 08/13/2002 | US6432787 Method and apparatus for providing low-GIDL dual workfunction gate doping with borderless diffusion contact |
| 08/13/2002 | US6432786 Forming a nitrogen-containing gate oxide layer on a silicon substrate, depositing polysilicon layer on gate oxide layer and doping and flourine ion implantation of the polysilicon layer, heat treating so fluorine enters gate oxide layer |
| 08/13/2002 | US6432785 Method for fabricating ultra short channel PMOSFET with buried source/drain junctions and self-aligned silicide |
| 08/13/2002 | US6432784 Method of forming L-shaped nitride spacers |
| 08/13/2002 | US6432783 Method for doping a semiconductor device through a mask |
| 08/13/2002 | US6432782 8 bit per cell non-volatile semiconductor memory structure utilizing trench technology and dielectric floating gate |
| 08/13/2002 | US6432781 Inverted MOSFET process |
| 08/13/2002 | US6432780 Method for suppressing boron penetrating gate dielectric layer by pulsed nitrogen plasma doping |
| 08/13/2002 | US6432779 Reduction to metal, or hydride thereof |
| 08/13/2002 | US6432778 Method of forming a system on chip (SOC) with nitride read only memory (NROM) |
| 08/13/2002 | US6432777 Method for increasing the effective well doping in a MOSFET as the gate length decreases |
| 08/13/2002 | US6432776 Method of manufacturing semiconductor device |
| 08/13/2002 | US6432775 Trench DMOS transistor structure having a low resistance path to a drain contact located on an upper surface |
| 08/13/2002 | US6432774 Method of fabricating memory cell with trench capacitor and vertical transistor |
| 08/13/2002 | US6432773 Multilayer dielectric; anisotropic etching |
| 08/13/2002 | US6432772 Method of forming a lower storage node of a capacitor |
| 08/13/2002 | US6432771 DRAM and MOS transistor manufacturing |
| 08/13/2002 | US6432770 Semiconductor arrangement having capacitive structure and manufacture thereof |
| 08/13/2002 | US6432769 Semiconductor integrated circuit device and process for manufacture the same |
| 08/13/2002 | US6432768 Method of fabricating memory device and logic device on the same chip |
| 08/13/2002 | US6432767 Method of fabricating semiconductor device |
| 08/13/2002 | US6432766 Method of fabricating a SRAM device |
| 08/13/2002 | US6432765 Multilayer; forming oxide, etching |
| 08/13/2002 | US6432764 Methods of forming resistors |
| 08/13/2002 | US6432763 Field effect transistor having doped gate with prevention of contamination from the gate during implantation |
| 08/13/2002 | US6432762 Memory cell for EEPROM devices, and corresponding fabricating process |
| 08/13/2002 | US6432761 Apparatus and method for independent threshold voltage control of memory cell and select gate in a split-EEPROM |
| 08/13/2002 | US6432759 Method of forming source and drain regions for CMOS devices |
| 08/13/2002 | US6432758 Recrystallization method of polysilicon film in thin film transistor |
| 08/13/2002 | US6432757 Method of manufacturing liquid crystal display panel by poly-crystallizing amorphous silicon film using both a laser and lamp lights |
| 08/13/2002 | US6432756 Semiconductor device and fabricating method thereof |
| 08/13/2002 | US6432755 Thin film transistor and manufacturing method therefor |
| 08/13/2002 | US6432754 Double SOI device with recess etch and epitaxy |
| 08/13/2002 | US6432752 Stereolithographic methods for fabricating hermetic semiconductor device packages and semiconductor devices including stereolithographically fabricated hermetic packages |
| 08/13/2002 | US6432751 Overcoatings; plasma sputtering, curing |
| 08/13/2002 | US6432749 Method of fabricating flip chip IC packages with heat spreaders in strip format |
| 08/13/2002 | US6432748 Substrate structure for semiconductor package and manufacturing method thereof |
| 08/13/2002 | US6432747 Repair method for broken or missing microcircuit package terminal lead |
| 08/13/2002 | US6432744 Wafer-scale assembly of chip-size packages |
| 08/13/2002 | US6432743 Method of manufacturing semiconductor device |
| 08/13/2002 | US6432739 Method for generating electrical conducting or semiconducting structures in two or three dimensions, a method for erasing the same structures and an electric field generator/modulator for use with the method for generating |
| 08/13/2002 | US6432738 Single-layer-electrode type two-phase charge coupled device having smooth charge transfer |
| 08/13/2002 | US6432737 Method for forming a flip chip pressure sensor die package |
| 08/13/2002 | US6432734 Method of manufacturing a display unit of a flat display panel having a wide viewing angle |
| 08/13/2002 | US6432730 Plasma processing method and apparatus |
| 08/13/2002 | US6432729 Method for characterization of microelectronic feature quality |
| 08/13/2002 | US6432728 Method for integration optimization by chemical mechanical planarization end-pointing technique |
| 08/13/2002 | US6432727 Method for eliminating a static electricity on a semiconductor wafer |
| 08/13/2002 | US6432725 Methods for crystallizing metallic oxide dielectric films at low temperature |
| 08/13/2002 | US6432724 Buried ground plane for high performance system modules |
| 08/13/2002 | US6432622 Mixture of acetone, butyrolactone and ester |
| 08/13/2002 | US6432621 Developer is reaction product of base and phenolic carboxylic compound |
| 08/13/2002 | US6432620 Exposure, development, discharging development solution |
| 08/13/2002 | US6432619 Forming photosensitive mask; simplification |
| 08/13/2002 | US6432618 Forming, etching, stripping cycles |
| 08/13/2002 | US6432594 Charged particle beam microlithography |
| 08/13/2002 | US6432546 Microelectronic piezoelectric structure and method of forming the same |
| 08/13/2002 | US6432540 Flame retardant molding compositions |
| 08/13/2002 | US6432521 Forming at low temperature |
| 08/13/2002 | US6432511 Thermoplastic adhesive preform for heat sink attachment |
| 08/13/2002 | US6432494 Protective coating by high rate arc plasma deposition |
| 08/13/2002 | US6432493 Method of carrying out plasma-enhanced chemical vapor deposition |
| 08/13/2002 | US6432479 Method for in-situ, post deposition surface passivation of a chemical vapor deposited film |
| 08/13/2002 | US6432473 High dielectric; controlling particle size |
| 08/13/2002 | US6432353 Method for producing oxide type ceramic sintered body |
| 08/13/2002 | US6432318 Dielectric etch process reducing striations and maintaining critical dimensions |
| 08/13/2002 | US6432317 Method to produce masking |
| 08/13/2002 | US6432291 Simultaneous electroplating of both sides of a dual-sided substrate |
| 08/13/2002 | US6432282 Method and apparatus for supplying electricity uniformly to a workpiece |
| 08/13/2002 | US6432261 Plasma etching system |
| 08/13/2002 | US6432260 Inductively coupled ring-plasma source apparatus for processing gases and materials and method thereof |
| 08/13/2002 | US6432259 Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates |
| 08/13/2002 | US6432257 Dresser for polishing cloth and method for manufacturing such dresser and polishing apparatus |
| 08/13/2002 | US6432255 Method and apparatus for enhancing chamber cleaning |
| 08/13/2002 | US6432253 Cover with adhesive preform and method for applying same |
| 08/13/2002 | US6432239 Method of producing ceramic multilayer substrate |
| 08/13/2002 | US6432218 Multistage flowing of cleaning solutions for valves |
| 08/13/2002 | US6432214 Cleaning apparatus |
| 08/13/2002 | US6432212 Scrubbing films and substrates with water for cleaning for semiconductors |
| 08/13/2002 | US6432209 Mixture of hydroxylamine partially neutralized with a weak carboxylic acid and an organic solvent such as an alkyl sulfoxide, pyrrolidinone or a sulfone removes photoresist with reduced metal corrosion |
| 08/13/2002 | US6432208 Plasma processing apparatus |
| 08/13/2002 | US6432207 Method and structure for baking a wafer |
| 08/13/2002 | US6432205 Gas feeding system for chemical vapor deposition reactor and method of controlling the same |
| 08/13/2002 | US6432204 Temperature and humidity controlled processing system |
| 08/13/2002 | US6432203 Heated and cooled vacuum chamber shield |
| 08/13/2002 | US6432199 Apparatus and method for processing a substrate |
| 08/13/2002 | US6432198 Method for growing a semiconductor crystal from a semiconductor melt |