| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/15/2002 | US20020109133 Semiconductor chip and semiconductor device using the same, and method of fabricating semiconductor chip |
| 08/15/2002 | US20020109122 Clean aqueous planarizing solution consists of an etchant selected from oxalic acid, ascorbic acid and phosphoric acid and a buffer |
| 08/15/2002 | US20020109110 Laser scanning wafer inspection using nonlinear optical phenomena |
| 08/15/2002 | US20020109108 Illumination apparatus and projection exposure apparatus using the same |
| 08/15/2002 | US20020109106 Hybrid scanning system and methods for ion implantation |
| 08/15/2002 | US20020109105 Method of ion implantation |
| 08/15/2002 | US20020109103 Lithographic apparatus, method of manufacturing a device, and device manufactured thereby |
| 08/15/2002 | US20020109099 Apparatus for magnetically scanning and/or switching a charged-particle beam |
| 08/15/2002 | US20020109074 Semiconductor device, optoelectronic board, and production methods therefor |
| 08/15/2002 | US20020109000 Methods and systems for positioning substrates using spring force of phase-changeable bumps therebetween |
| 08/15/2002 | US20020108940 Circuit and method for heating an adhesive to package or rework a semiconductor die |
| 08/15/2002 | US20020108933 Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression |
| 08/15/2002 | US20020108930 Apparatus for removing native oxide layers from silicon wafers |
| 08/15/2002 | US20020108929 Use of ammonia for etching organic low-k dielectrics |
| 08/15/2002 | US20020108927 Method of fabricating ferroelectric memory transistors |
| 08/15/2002 | US20020108899 Ion processing element with composite media |
| 08/15/2002 | US20020108893 Apparatus and method for determining various processes of wafer fabrication |
| 08/15/2002 | US20020108862 Electroplating apparatus with vertical electrical contact |
| 08/15/2002 | US20020108861 Platen of conductive material is disposed proximate to the polishing pad and is configured to have a negative charge during planarization process; demetallization of a workpiece surface such as semiconductor |
| 08/15/2002 | US20020108851 Methods and apparatus for processing the surface of a microelectronic workpiece |
| 08/15/2002 | US20020108850 Cup-type plating apparatus |
| 08/15/2002 | US20020108847 Non-thermionic sputter material transport device, methods of use, and materials produced thereby |
| 08/15/2002 | US20020108842 Integrated transport carrier and conveyor system |
| 08/15/2002 | US20020108781 Printed wiring board and production thereof |
| 08/15/2002 | US20020108769 Plastic integrated circuit package and method and lead frame for making the package |
| 08/15/2002 | US20020108714 Processing chamber for atomic layer deposition processes |
| 08/15/2002 | US20020108712 Apparatus for plasma processing |
| 08/15/2002 | US20020108711 Gas distribution apparatus of semiconductor equipment |
| 08/15/2002 | US20020108710 Processing method for substrate |
| 08/15/2002 | US20020108707 Bonding method and apparatus |
| 08/15/2002 | US20020108643 Sulfuric acid recycle apparatus |
| 08/15/2002 | US20020108642 Substrate processing unit |
| 08/15/2002 | US20020108641 Single type of semiconductor wafer cleaning apparatus and method of using the same |
| 08/15/2002 | US20020108632 Method of reducing defects in anti-reflective coatings and semiconductor structures fabricated thereby |
| 08/15/2002 | US20020108574 Method of holding substrate and substrate holding system |
| 08/15/2002 | US20020108571 Heated and cooled vacuum chamber shield |
| 08/15/2002 | US20020108570 Method and apparatus of growing a thin film onto a substrate |
| 08/15/2002 | US20020108565 Apparatus and method for selectively restricting process fluid flow in semiconductor processing |
| 08/15/2002 | US20020108559 Liquid phase growth methods and liquid phase growth apparatus |
| 08/15/2002 | US20020108267 Method and apparatus for transporting substrates in oled process |
| 08/15/2002 | US20020108238 Semiconductor device mounting jig |
| 08/15/2002 | US20020108232 Fixture, carrier ring, and method for processing delicate workpieces |
| 08/15/2002 | CA2437322A1 Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge |
| 08/15/2002 | CA2433076A1 Fabrication of structures of metal/semiconductor compound by x-ray/euv projection lithography |
| 08/14/2002 | EP1231820A1 Ceramic heater |
| 08/14/2002 | EP1231685A2 Semiconductor laser and method of manufacturing the same |
| 08/14/2002 | EP1231649A2 Solar cell and method of manufacturing same |
| 08/14/2002 | EP1231646A2 Semiconductor memory capable of being driven at low voltage and its manufacture method |
| 08/14/2002 | EP1231645A2 Thin film SOI semiconductor device |
| 08/14/2002 | EP1231643A2 MOS field-effect transistor comprising Si and SiGe layers or Si and SiGeC layers as channel regions |
| 08/14/2002 | EP1231640A1 Semiconductor device |
| 08/14/2002 | EP1231636A2 Semiconductor device, production method therefor, and electrophotographic apparatus |
| 08/14/2002 | EP1231633A1 Material of heat-dissipating plate on which semiconductor is mounted, method for fabricating the same, and ceramic package produced by using the same |
| 08/14/2002 | EP1231631A2 MFMOS/MFMS non-volatile memory transistors and method of making same |
| 08/14/2002 | EP1231630A2 Method of fabricating ferroelectric memory transistors |
| 08/14/2002 | EP1231629A1 A method of forming metal connection elements in integrated circuits |
| 08/14/2002 | EP1231628A1 Method for roughening a surface of a semioconductor substrate |
| 08/14/2002 | EP1231627A2 Marking apparatus and process therefor |
| 08/14/2002 | EP1231626A1 Measurement arrangement |
| 08/14/2002 | EP1231617A1 Out-of-plane micro-device structures |
| 08/14/2002 | EP1231616A1 Out-of-plane micro-device structures |
| 08/14/2002 | EP1231615A1 Integrated inductor structure |
| 08/14/2002 | EP1231607A2 Nonvolatile magnetic storage device |
| 08/14/2002 | EP1231551A2 Process of simulating defects, which may appear during the semiconductor manufacturing process, as well as associated components |
| 08/14/2002 | EP1231528A2 Circuit configuration for the generation of a reference voltage |
| 08/14/2002 | EP1231524A2 Adaptive plasma characterization system |
| 08/14/2002 | EP1231516A2 Method of forming and adjusting optical system and exposure apparatus, and for determining specification thereof and related computer system |
| 08/14/2002 | EP1231514A1 Measurement of wavefront aberrations in a lithographic projection apparatus |
| 08/14/2002 | EP1231513A1 Lithographic projection apparatus with adjustable focal surface |
| 08/14/2002 | EP1231512A1 Composition for anti-reflective coating and method for manufacturing semiconductor device |
| 08/14/2002 | EP1231301A1 Epitaxial silicon wafer |
| 08/14/2002 | EP1231300A1 Plating method and device, and plating system |
| 08/14/2002 | EP1231248A1 Conductive and resistive materials with electrical stability for use in electronics devices |
| 08/14/2002 | EP1231242A1 Curable organosiloxane compositions and semiconductor devices |
| 08/14/2002 | EP1230828A1 Method for obtaining an extreme ultraviolet radiation source and its use in lithography |
| 08/14/2002 | EP1230752A1 Virtual laser operator |
| 08/14/2002 | EP1230711A1 Arrangement for electrically connecting chips in a circuit that is embodied in a three-dimensional manner |
| 08/14/2002 | EP1230684A1 Semiconductor component and method for the production thereof |
| 08/14/2002 | EP1230682A2 Bandgap reference circuit and related method |
| 08/14/2002 | EP1230680A2 Method for integrating a chip in a printed board and integrated circuit |
| 08/14/2002 | EP1230679A2 Method for producing a support element for an integrated circuit (ic) component |
| 08/14/2002 | EP1230678A1 Self-aligned metal caps for interlevel metal connections |
| 08/14/2002 | EP1230677A1 Process for forming shallow isolating regions in an integrated circuit and an integrated circuit thus formed |
| 08/14/2002 | EP1230676A1 Advanced flip-chip join package |
| 08/14/2002 | EP1230675A1 Dmos transistor having a trench gate electrode and method of making the same |
| 08/14/2002 | EP1230674A1 Crosslinked resin and method for making oxides using same |
| 08/14/2002 | EP1230673A1 Integrated circuit plating using highly-complexed copper plating baths |
| 08/14/2002 | EP1230672A1 Method for treating a surface of an sic semiconductor layer and schottky contact |
| 08/14/2002 | EP1230671A2 System and method for providing defect free rapid thermal processing |
| 08/14/2002 | EP1230670A1 Device and method for cleaning substrates |
| 08/14/2002 | EP1230668A2 Method and apparatus for producing uniform process rates |
| 08/14/2002 | EP1230667A2 Method and apparatus for controlling the volume of a plasma |
| 08/14/2002 | EP1230666A1 Plasma processing systems and method therefor |
| 08/14/2002 | EP1230665A1 Plasma processing system with dynamic gas distribution control |
| 08/14/2002 | EP1230664A1 Materials and gas chemistries for processing systems |
| 08/14/2002 | EP1230663A1 Temperature control system for plasma processing apparatus |
| 08/14/2002 | EP1230421A1 Method of modifying source chemicals in an ald process |
| 08/14/2002 | EP1230340A1 Methods and apparatus for the electronic, homogeneous assembly and fabrication of devices |
| 08/14/2002 | EP1230334A1 Non-corrosive cleaning composition for removing plasma etching residues |
| 08/14/2002 | EP1230311A1 Deposition of fluorosilsesquioxane films |