H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2002
08/21/2002	EP1233276A1 Boundary scan delay chain for crosschip delay measurement
08/21/2002	EP1232998A1 Low-permittivity porous siliceous film, semiconductor devices having such films, and coating composition for forming the film
08/21/2002	EP1232838A1 Frog-leg type transfer system
08/21/2002	EP1232835A2 Wafer planarization apparatus and planarization method thereof
08/21/2002	EP1232828A1 Wire bonding, severing, and ball forming
08/21/2002	EP1232677A2 Flip chip package, circuit board thereof and packaging method thereof
08/21/2002	EP1232528A2 Dram with bitlines in two metallisation levels
08/21/2002	EP1232527A2 High performance output buffer with esd protection
08/21/2002	EP1232526A1 Method and apparatus for personalization of semiconductor
08/21/2002	EP1232525A2 Conductive interconnection
08/21/2002	EP1232524A1 Method of protective coating bga solder alloy spheres
08/21/2002	EP1232523A1 Method in the fabrication of a silicon bipolar transistor
08/21/2002	EP1232522A2 Method of etching carbon-containing silicon oxide films
08/21/2002	EP1232521A2 Silicon layer highly sensitive to oxygen and method for obtaining same
08/21/2002	EP1232520A1 Pendeoepitaxial growth of gallium nitride layers on sapphire substrates
08/21/2002	EP1232519A2 Optimized decoupling capacitor using lithographic dummy filler
08/21/2002	EP1232517A1 Plasma focus light source with improved pulse power system
08/21/2002	EP1232513A1 Stabilized oscillator circuit for plasma density measurement
08/21/2002	EP1232504A1 Method of manufacturing a spin valve structure
08/21/2002	EP1232419A1 Fabrication of finely featured devices by liquid embossing
08/21/2002	EP1232384A1 Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
08/21/2002	EP1232294A2 Metallizing method for dielectrics
08/21/2002	EP1232293A2 Method for regulating sputtering processes
08/21/2002	EP1171644A4 Method and apparatus for controlling polymerized teos build-up in vacuum pump lines
08/21/2002	EP1080053B1 Ferroelectric thick-layer structures based on lead perovskites and method for their production
08/21/2002	EP0608376B1 Voltage variable capacitor
08/21/2002	CN2507136Y Stress reduced chip package
08/21/2002	CN1365595A Method and apparatus for manufacturing organic EL display
08/21/2002	CN1365534A Radio frequency power source for genrating an inducively coupled plasma
08/21/2002	CN1365522A Si Ge C semiconductor crystal and production method thereof
08/21/2002	CN1365520A Method for producing a semiconductor memory element
08/21/2002	CN1365519A Printed circuit substrate transfer device
08/21/2002	CN1365518A Electrostatic chuck and treating device
08/21/2002	CN1365517A Component and method for the production thereof
08/21/2002	CN1365516A Semiconductor device and process for designing mask
08/21/2002	CN1365514A Method for manufacturing a transistor
08/21/2002	CN1365513A Polysilicon semiconductor thin film substrate, method for producing the same, semiconductor device, and electronic device
08/21/2002	CN1365512A Improved ladder boat for supporting wafers
08/21/2002	CN1365448A X-ray plane detector
08/21/2002	CN1365445A Apparatus for detecting defect
08/21/2002	CN1365444A Through hole inspecting method and device
08/21/2002	CN1365403A Silicom wafer and method for producing silicon wafer crystal
08/21/2002	CN1365400A Method for producing ceramic and apparatus for producing the same, semicondcutor device and piezoelectric device
08/21/2002	CN1365399A Method for producing ceramic and apparatus for producing the same, semiconductor device and piezoelectric device
08/21/2002	CN1365343A Systhetic quartz glass member, photolithography apparatus, and method for producing photolithography apparatus
08/21/2002	CN1365247A Luminous device and its producing method
08/21/2002	CN1365152A Storage device having independant triode transistor and its operation and producing method
08/21/2002	CN1365151A Semiconductor integrated circuit device and its producing method
08/21/2002	CN1365149A Semiconductor integrated circuit device and electronic device using them
08/21/2002	CN1365147A Charge pump circuit and working method using its non-volatile storage
08/21/2002	CN1365146A Semiconductor device and its producing method
08/21/2002	CN1365143A 半导体装置 Semiconductor device
08/21/2002	CN1365142A Method for producing cylindrical capacitor of semicondcutor device
08/21/2002	CN1365141A Method for producing lug
08/21/2002	CN1365140A Method for producing semiconductor device and semiconductor device
08/21/2002	CN1365139A Method for removing oxide on silicon surface under low temperature and epitaxial growth
08/21/2002	CN1365138A Gas projector and etching device comprising said projector
08/21/2002	CN1365136A Method for producing III family nitride single/multiple layer heterogeneous strain film
08/21/2002	CN1365135A Optical mask, its producing method, image forming method and method for producing semicondcutor device
08/21/2002	CN1365117A Heat auxiliary switching of magnetic random access storage device
08/21/2002	CN1089490C Resin tablet for sealing semiconductor
08/21/2002	CN1089488C Ultrasonic vibration binding chip mounter
08/21/2002	CN1089487C Thermal processing apparatus for semiconductor wafers
08/21/2002	CN1089486C Method of formulation of crystalline semiconductor film
08/21/2002	CN1089281C Process for making parylene coating
08/20/2002	US6438733 IC substrate noise modeling with improved surface gridding technique
08/20/2002	US6438460 Method of using a specimen sensing end effector to determine the thickness of a specimen
08/20/2002	US6438458 Substrate conveying system in semiconductor manufacturing apparatus
08/20/2002	US6438449 Substrate transport apparatus and transport teaching system
08/20/2002	US6438441 Semiconductor factory automation system and method for resetting process recipe by employing trace file
08/20/2002	US6438440 Method and system for managing semiconductor manufacturing equipment
08/20/2002	US6438439 Equipment evaluation and design
08/20/2002	US6438438 Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
08/20/2002	US6438436 Production scheduling management system, and method of managing production scheduling
08/20/2002	US6438199 Illumination system particularly for microlithography
08/20/2002	US6438059 Fuse programming circuit for programming fuses
08/20/2002	US6438052 Semiconductor memory device having dummy cells around memory cells for serving as compensating capacitor and power supply system incorporated therein
08/20/2002	US6438034 Semiconductor device
08/20/2002	US6438030 Non-volatile memory, method of manufacture, and method of programming
08/20/2002	US6438028 Semiconductor integrated circuit device, production and operation method thereof
08/20/2002	US6438026 Magnetic field element having a biasing magnetic layer structure
08/20/2002	US6438022 Memory cell configuration
08/20/2002	US6438019 Ferroelectric random access memory (FeRAM) having storage capacitors with different coercive voltages
08/20/2002	US6438013 Semiconductor integrated circuit and method for adjusting characteristics of the same
08/20/2002	US6437990 Multi-chip ball grid array IC packages
08/20/2002	US6437989 Circuit board with an electronic component and a method for producing a connection between the circuit board and the component
08/20/2002	US6437968 Capacitive element
08/20/2002	US6437966 Ferroelectric capacitor
08/20/2002	US6437961 Electrostatic discharge circuit having power-up and power-down protection
08/20/2002	US6437858 Aberration measuring method, aberration measuring system and aberration measuring mask
08/20/2002	US6437852 Exposure system
08/20/2002	US6437721 Semiconductor integrated circuit apparatus for performing DA/AD conversion with high accuracy using a potential distribution of a string resistor
08/20/2002	US6437669 Microwave to millimeter wave frequency substrate interface
08/20/2002	US6437651 Oscillating circuit
08/20/2002	US6437632 Signal selecting circuit
08/20/2002	US6437629 Semiconductor device with circuit for adjusting input/output terminal capacitance
08/20/2002	US6437592 Characterization of a semiconductor/dielectric interface by photocurrent measurements
08/20/2002	US6437590 Integrated semiconductor device with wafer-level burn-in circuit and function decision method of wafer-level burn-in circuit
08/20/2002	US6437584 Membrane probing system with local contact scrub
08/20/2002	US6437550 Voltage generating circuit and reference voltage source circuit employing field effect transistors

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