Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2002
11/06/2002EP1255202A2 High performance sub-system design & assembly
11/06/2002EP1255163A2 High output extreme ultraviolet source
11/06/2002EP1255162A1 Lithographic apparatus
11/06/2002EP1255161A1 Photosensitive resin composition
11/06/2002EP1254938A1 Method for thermally releasing adherend and apparatus for thermally releasing adherend
11/06/2002EP1254915A2 Acid-labile polymer and resist composition
11/06/2002EP1254874A1 Carbon-containing aluminum nitride sintered compact, and ceramic substrate for use in apparatus for manufacturing and inspecting semiconductor
11/06/2002EP1254742A2 Thermal mechanical planarization in intergrated circuits
11/06/2002EP1254591A1 Methods and apparatus for operating high energy accelerator in low energy mode
11/06/2002EP1254482A2 Bipolar transistor
11/06/2002EP1254480A1 Self-aligned dual damascene etch using a polymer
11/06/2002EP1254479A1 Wafer bonding techniques to minimize built-in stress of silicon microstructures and micro-mirrors
11/06/2002EP1254477A2 Method and apparatus for processing a microelectronic workpiece at an elevated temperature
11/06/2002EP1254401A1 Wafer manufacturing control
11/06/2002EP1254142A1 Novel aminosilyl borylalkanes, their production and use
11/06/2002EP1166180A4 Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
11/06/2002EP1105875B1 On-chip word line voltage generation for dram embedded in logic process
11/06/2002EP1101123B1 Particle beam current monitoring technique
11/06/2002EP1097026B1 Polishing pads for a semiconductor substrate
11/06/2002EP1074043A4 Process for ashing organic materials from substrates
11/06/2002EP1011922B1 Polishing pad for a semiconductor substrate
11/06/2002EP0985059B1 Composition and method for polishing a composite comprising titanium
11/06/2002EP0843895B1 Method of manufacturing a metal interconnect structure for an integrated circuit with improved electromigration reliability
11/06/2002EP0646962B1 Metal sheet processing method and lead frame processing method and semiconductor device manufacturing method
11/06/2002CN1378705A Transistor with notches gate
11/06/2002CN1378704A Method for manufacturing semiconductor memory device with reduced reflective coating
11/06/2002CN1378703A High temperature oxide deposition method for EEPROM device
11/06/2002CN1378702A Single step pendeo-and Lateral overgrowth of group III-nitride layers
11/06/2002CN1378694A Flash memory wordline tracking across whole chip
11/06/2002CN1378661A Polymer for chemically amplified resist and resist composition using same
11/06/2002CN1378515A Transport module with latching door
11/06/2002CN1378290A Photoelectric substrate device and its producing method, photoelectric device and electronic device
11/06/2002CN1378289A Non-voltile memory control circuit and its control method
11/06/2002CN1378288A Concaved stack capacitor and its contacted plug and their producing method
11/06/2002CN1378286A Method for readable memory medium and circuit parts verification and integrated circuit device
11/06/2002CN1378285A 半导体器件 Semiconductor devices
11/06/2002CN1378284A Semiconductor device having flat electrode and protruding electrode directly contact with it
11/06/2002CN1378276A Wiring and wiring production method and wiring board and wiring board production method
11/06/2002CN1378275A Method for producing shaded read-only memory with self-aligning metal silicide component unit
11/06/2002CN1378274A Method for manufacturing embedded DRAM
11/06/2002CN1378273A Method for modularizing integrated circuit of DRAM unit
11/06/2002CN1378272A Method for producing flash reference memory unit
11/06/2002CN1378271A Overlapped grid flash memory unit and its producing method
11/06/2002CN1378270A Self-aligning separate grid non-volatile storage unit and its producing method
11/06/2002CN1378269A Double metal grid complementary metal oxide semiconductor device and its processing method
11/06/2002CN1378268A Method for producing separate grid type flash memory
11/06/2002CN1378267A Method for improving separated grid type flash memory oxide layer quality
11/06/2002CN1378266A Method for producing metal layer virtual pattern
11/06/2002CN1378265A Method for producing double-metal mosaic structure
11/06/2002CN1378264A Automatic aligning contact method and sacrifical filling column
11/06/2002CN1378263A Method for forming self aligning float grid multicrystal silicone layer relative to active area for fast electric eraseable, programable read-only memory unit
11/06/2002CN1378262A Method for producing DRAM capacitor
11/06/2002CN1378261A Carrier band packaging processor
11/06/2002CN1378260A Film thickness monitoring method and substrate temperature detecting method
11/06/2002CN1378259A Multiple semiconductor die testing system with automatic identifying function
11/06/2002CN1378258A Multiple semiconductor die testing system and method with expandible channels
11/06/2002CN1378257A Testing structure device and method of semiconductor storage element
11/06/2002CN1378256A Chip wtih built-in aging circuit and its aging circuit and aging method
11/06/2002CN1378255A Measuring device and method for channel heat carrier effect
11/06/2002CN1378254A Method for producing chip, seal device, metal mold and runner and semiconductor device
11/06/2002CN1378253A Method for producing semiconductor module with raised source/drain area
11/06/2002CN1378252A Method for producing different-thickness oxide layer
11/06/2002CN1378251A Intra-metal dielectric layer structure and its forming method
11/06/2002CN1378250A Method for producing different-thickness grid oxide layer
11/06/2002CN1378249A Method for producing semiconductor module with low dielectric constant high heat conductance layer
11/06/2002CN1378248A Dry plasma etching system and method for III-V family compounds
11/06/2002CN1378247A Etching method for opening with high height-to-width ratio
11/06/2002CN1378246A Method and device for reducing particle pollution of plasma process
11/06/2002CN1378245A Method for forming funnel-shaped dielectric layer window in semiconductor
11/06/2002CN1378244A Production method of automatically aligning contact window opening
11/06/2002CN1378243A Method for producing semiconductor device having double grid oxide layers
11/06/2002CN1378242A Method for producing floating grid in flash memory
11/06/2002CN1378241A Method for improving sheet resistance measuring value stibility under low energy ion implanting
11/06/2002CN1378240A Method for producing semiconductor device
11/06/2002CN1378239A Optical mask structure and microphotograph process
11/06/2002CN1378238A Method for growing GaN crystal chip and GaN crystal chip
11/06/2002CN1378237A Semiconductor substrate made from III family nitride
11/06/2002CN1378236A Control device and method for liquid input and output
11/06/2002CN1378235A Cleaning method for reclaimed chip
11/06/2002CN1378223A Method for producing capacitor for compensating semiconductor element junction capacity temperature dependence
11/06/2002CN1378220A Multilayer spiral inductor structure having high inductance and high quality factor
11/06/2002CN1378101A Control method for forming small section oblique angle in metal film electrode and its product
11/06/2002CN1378093A Substrate device, electrooptic device and its producing method and electronic instrument
11/06/2002CN1377991A MOCVD equipment and process for growing ZnO film
11/06/2002CN1094033C Method and apparatus for mounting electronic parts on board
11/06/2002CN1093983C Integrated circuit arrangement with at least two components insulated from one another and production process
11/06/2002CN1093982C Production of electronic device
11/06/2002CN1093978C Semiconductor memory storage
11/06/2002CN1093890C Copper-to-sulfur atom ratio regulating technology for cuprous sulfide film
11/06/2002CN1093889C Dry method of preparing copperous sulfide film
11/06/2002CN1093781C Double fluid nozzle for cleaning, and device and method for cleaning and method for producing semiconductor device
11/05/2002US6477700 Reticle having discriminative pattern narrower in pitch than the minimum pattern width but wider than minimum width in the pattern recognition
11/05/2002US6477693 Method for manufacturing and designing a wiring of a channel of an electronic device and electronic apparatus
11/05/2002US6477692 Method and apparatus for channel-routing of an electronic device
11/05/2002US6477685 Method and apparatus for yield and failure analysis in the manufacturing of semiconductors
11/05/2002US6477447 Methods to generate numerical pressure distribution data for developing pressure related components
11/05/2002US6477440 Methods of treating a semiconductor wafer
11/05/2002US6477115 Semiconductor integrated circuit
11/05/2002US6477100 Semiconductor memory device with over-driving sense amplifier
11/05/2002US6477094 Memory repair circuit using antifuse of MOS structure
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