Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2002
10/31/2002US20020158568 Display device and method of manufacturing the same
10/31/2002US20020158395 Chemical mechanical polishing method and semiconductor device manufacturing method
10/31/2002US20020158366 Liquid transfer molding system for encapsulating semiconductor integrated circuits
10/31/2002US20020158348 Semiconductor structure and method for reducing charge damage
10/31/2002US20020158346 Semiconductor chip having pads with plural junctions for different assembly methods
10/31/2002US20020158342 Nanofabrication
10/31/2002US20020158340 Method for providing semiconductor device and corresponding semiconductor device
10/31/2002US20020158339 Wiring structure of a semiconductor integrated circuit and a method of forming the wiring structure
10/31/2002US20020158338 Semiconductor device and method of manufacturing the same
10/31/2002US20020158337 Multilayer interconnect structure containing air gaps and method for making
10/31/2002US20020158336 Ruthenium interconnect for an integrated circuit and method for its fabrication
10/31/2002US20020158333 Semiconductor device and method for manufacturing semiconductor device
10/31/2002US20020158331 Semiconductor device and its manufacturing method
10/31/2002US20020158328 Ceramic substrate for semiconductor fabricating device
10/31/2002US20020158326 Semiconductor device and semiconductor device manufacturing method
10/31/2002US20020158325 Semiconductor device and manufacturing method thereof
10/31/2002US20020158322 Low dielectric constant shallow trench isolation
10/31/2002US20020158315 Lead frame having semiconductor device mounted thereon and method for fabricating the same
10/31/2002US20020158314 Buried mesa semiconductor device
10/31/2002US20020158313 Heterojunction bipolar transistor and method for fabricating the same
10/31/2002US20020158312 Devices with patterned wells and method for forming same
10/31/2002US20020158311 Semiconductor device and method for fabricating the same
10/31/2002US20020158310 Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating film
10/31/2002US20020158309 High breakdown voltage transistor and method
10/31/2002US20020158308 Semiconductor component and method for fabricating it
10/31/2002US20020158306 Semiconductor device with a spiral inductor
10/31/2002US20020158303 Semiconductor device and method of fabricating same
10/31/2002US20020158302 Semiconductor device having a trench isolation structure and method for fabricating the same
10/31/2002US20020158301 Semiconductor substrate with smooth trench
10/31/2002US20020158300 Fault tolerant electrical circuit and method
10/31/2002US20020158299 Mask configurable smart power circuits - applications and GF-NMOS devices
10/31/2002US20020158298 Semiconductor device and active matrix type display
10/31/2002US20020158296 Solid imaging device and method of fabricating the same
10/31/2002US20020158295 Electrochemical device
10/31/2002US20020158292 Method of making field effect transistor
10/31/2002US20020158291 Salicide block for silicon-on-insulator (SOI) applications
10/31/2002US20020158290 High voltage device and method for fabricating the same
10/31/2002US20020158289 Method for fabricating SRAM cell
10/31/2002US20020158288 Semiconductor device and manufacturing method thereof
10/31/2002US20020158287 Trench-type MOSFET having a reduced device pitch and on-resistance
10/31/2002US20020158286 Symmetric device with contacts self aligned to gate
10/31/2002US20020158285 Nonvolatile floating-gate memory devices, and process of fabrication
10/31/2002US20020158284 Method and system for providing reducing thinning of field isolation structures in a flash memory device
10/31/2002US20020158283 Fabrication of integrated circuits with borderless vias
10/31/2002US20020158281 Stress-reduced layer system
10/31/2002US20020158280 Semiconductor memory device and fabrication method therefor
10/31/2002US20020158279 Semiconductor device and method of manufacturing thereof
10/31/2002US20020158278 Ferroelectric semiconductor memory device and a fabrication process thereof
10/31/2002US20020158277 Semiconductor integrated circuit device and manufacturing method therefor
10/31/2002US20020158273 Nonvolatile semiconductor memory device and a method of manufacturing the same
10/31/2002US20020158272 Semiconductor device
10/31/2002US20020158271 Semiconductor integrated circuit
10/31/2002US20020158270 Lateral transistor having graded base region, semiconductor integrated circuit and fabrication method thereof
10/31/2002US20020158269 Thin film transistor
10/31/2002US20020158258 Buffer layer of light emitting semiconductor device and method of fabricating the same
10/31/2002US20020158256 Optoelectronic material and device application, and method for manufacturing optoelectronic material
10/31/2002US20020158254 Memory system capable of operating at high temperatures and method for fabricating the same
10/31/2002US20020158251 Semiconductor device and method for fabricating the same
10/31/2002US20020158250 Semiconductor device and process for producing the same
10/31/2002US20020158248 Thin-film transistor and its manufacturing method
10/31/2002US20020158247 Method and system for reducing polymer build up during plasma etch of an intermetal dielectric
10/31/2002US20020158246 Semiconductor device and manufacturing method for the same
10/31/2002US20020158245 Structure and method for fabricating semiconductor structures and devices utilizing binary metal oxide layers
10/31/2002US20020158213 Ion implantation apparatus and insulating bushing therefor
10/31/2002US20020158199 Semiconductor inspection system
10/31/2002US20020158185 Method and system for improving focus accuracy in a lithography system
10/31/2002US20020158158 Dicing machine
10/31/2002US20020158110 Structure to accommodate increase in volume expansion during solder reflow
10/31/2002US20020158108 Apparatus and method for ball release
10/31/2002US20020158105 Soldering machine for tape carrier package outer leads
10/31/2002US20020158061 Ceramic heater
10/31/2002US20020158060 Wafer heating apparatus and ceramic heater, and method for producing the same
10/31/2002US20020158052 Method and system for processing one or more microstructures of a multi-material device
10/31/2002US20020158044 Magnetically patterning conductors
10/31/2002US20020158042 Apparatus and method for contacting a conductive layer
10/31/2002US20020157960 Electro-chemical deposition cell for face-up processing of single semiconductor substrates
10/31/2002US20020157958 Common electrode wire for plating
10/31/2002US20020157860 Interconnection structure of semiconductor element
10/31/2002US20020157857 Tape carrier having high flexibility with high density wiring patterns
10/31/2002US20020157794 Sample processing apparatus and method
10/31/2002US20020157793 Toroidal plasma source for plasma processing
10/31/2002US20020157791 Sample processing apparatus and method
10/31/2002US20020157790 First wafer doped with hydrogen ions or rare gas ions is bonded to a second wafer and then delaminated by heat treatment to produce bonded wafer
10/31/2002US20020157787 Fire retarding polypropylene composition
10/31/2002US20020157760 Method of producing ceramic multilayer substrate
10/31/2002US20020157692 Substrate dual-side processing apparatus
10/31/2002US20020157691 Substrate transfer device
10/31/2002US20020157688 Method for cleaning a substrate in selective epitaxial growth process
10/31/2002US20020157686 Process and apparatus for treating a workpiece such as a semiconductor wafer
10/31/2002US20020157685 Ultrasonic oscillation power supply used for the precise washing of semiconductors, liquid-crystal display or electronic devices
10/31/2002US20020157611 ALD reactor and method with controlled wall temperature
10/31/2002US20020157610 Method for forming a copper thin film
10/31/2002US20020157608 Performance evaluation method for plasma processing apparatus
10/31/2002US20020157598 Silicon wafer and method for producing silicon single crystal
10/31/2002US20020157597 Method for producing silicon epitaxial wafer
10/31/2002US20020157596 Forming low resistivity p-type gallium nitride
10/31/2002US20020157485 Mask for evaluating selective epitaxial growth process
10/31/2002US20020157421 Method for producing titania-doped fused silica glass
10/31/2002US20020157420 Method for producing fused silica and doped fused silica glass
10/31/2002US20020157245 Part mounter
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