H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2002
11/07/2002	US20020163065 Chip carrier, and method of testing a chip using the chip carrier
11/07/2002	US20020163062 Multiple material stacks with a stress relief layer between a metal structure and a passivation layer
11/07/2002	US20020163061 Microelectronic device fabricating method, integrated circuit, and intermediate construction
11/07/2002	US20020163060 Component of gallium arsenide and fabrication method
11/07/2002	US20020163059 Device with epitaxial base
11/07/2002	US20020163058 Semiconductor high dielectric constant decoupling capacitor structures and process for fabrication
11/07/2002	US20020163057 Reversible field-programmable electric interconnects
11/07/2002	US20020163056 Method and apparatus for reducing isolation stress in integrated circuits
11/07/2002	US20020163055 Flip-chip assembly of protected micromechanical devices
11/07/2002	US20020163052 Compact sensing apparatus having an angled sensor formed in a dual-piece monolithic substrate
11/07/2002	US20020163050 Electronic circuit structure with improved dielectric properties
11/07/2002	US20020163049 Semiconductor device and fabrication method thereof
11/07/2002	US20020163047 Semiconductor device
11/07/2002	US20020163045 Low dielectric constant shallow trench isolation
11/07/2002	US20020163044 Low dielectric constant shallow trench isolation
11/07/2002	US20020163043 Semiconductor device forming method
11/07/2002	US20020163041 Silicon-on-insulator (SOI) substrate, method for fabricating SOI substrate and SOI MOSFET using the SOI substrate
11/07/2002	US20020163039 High dielectric constant materials as gate dielectrics (insulators)
11/07/2002	US20020163038 Semiconductor device and method for fabricating the same
11/07/2002	US20020163037 Semiconductor device having LDD-type source/drain regions and fabrication method thereof
11/07/2002	US20020163036 Semiconductor Device
11/07/2002	US20020163035 Semiconductor device and manufacturing method thereof
11/07/2002	US20020163034 Cell array region of a nor-type mask ROM device and fabricating method therefor
11/07/2002	US20020163032 Nonvolatile memory and method of manufacturing the same
11/07/2002	US20020163030 Floating gate memory device using composite molecular material
11/07/2002	US20020163029 Zero mask high density metal/insulator/metal capacitor
11/07/2002	US20020163028 Methods of forming gap fill and layers formed thereby
11/07/2002	US20020163027 Method of fabricating a vertical quadruple conduction channel insulated gate transistor, and an integrated circuit including this kind of transistor
11/07/2002	US20020163026 Capacitor and method of manufacturing the same
11/07/2002	US20020163025 Mixed metal nitride and boride barrier layers
11/07/2002	US20020163024 Structure and method for fabricating semiconductor structures and devices ultilizing lateral epitaxial overgrowth of a monocrystallaline material layer on a compliant substrate
11/07/2002	US20020163022 Semiconductor device and method of manufacturing the same
11/07/2002	US20020163020 Retrograde well structure for a CMOS imager
11/07/2002	US20020163019 Interconnect substrate with circuits for field-programmability and testing of multichip modules and hybrid circuits
11/07/2002	US20020163018 Radio frequency semiconductor apparatus
11/07/2002	US20020163016 Semiconductor device
11/07/2002	US20020163014 Bipolar transistor with graded base layer
11/07/2002	US20020163012 Semiconductor triode device having a compound-semiconductor channel layer
11/07/2002	US20020163011 Transistors including gate dielectric layers having different nitrogen concentrations and related structures
11/07/2002	US20020163010 Wide bandgap semiconductor structure, semiconductor device including the structure, and methods of forming the structure and device
11/07/2002	US20020163000 Semiconductor device and method of fabricating the same
11/07/2002	US20020162999 Polysilicon doped transistor
11/07/2002	US20020162997 Semiconductor chip
11/07/2002	US20020162996 Chemical mechanical polishing system and method for planarizing substrates in fabricating semiconductor devices
11/07/2002	US20020162975 High output extreme ultraviolet source
11/07/2002	US20020162974 High temperature EUV source nozzle
11/07/2002	US20020162973 Methods and systems for processing a device, methods and systems for modeling same and the device
11/07/2002	US20020162945 CMOS photodiode having reduced dark current and improved light sensitivity and responsivity
11/07/2002	US20020162938 Facilities connection bucket for pre-facilitation of wafer fabrication equipment
11/07/2002	US20020162880 Apparatus and method for removing interconnections
11/07/2002	US20020162770 Carrier assembly for semiconductor ic (integrated circuit) packages
11/07/2002	US20020162750 Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs
11/07/2002	US20020162742 Cluster tool with vacuum wafer transfer module
11/07/2002	US20020162738 Methods of producing ultra -low resistivity tantalum films.
11/07/2002	US20020162736 Forming opening in dielectric layer, exposing an upper surface of lower metal feature; treating opening and upper surface of lower metal feature with plasma containing ammonia (NH3); followed by plasma containing nitrogen and hydrogen
11/07/2002	US20020162728 Transport apparatus and method
11/07/2002	US20020162684 Mounting substrate and structure having semiconductor element mounted on substrate
11/07/2002	US20020162679 Package level pre-applied underfills for thermo-mechanical reliability enhancements of electronic assemblies
11/07/2002	US20020162677 Process for fabricating a component, such as a capacitor in an integrated circuit, and integrated-circuit component
11/07/2002	US20020162630 Semiconductor substrate-supporting apparatus
11/07/2002	US20020162629 Apparatus for manufacturing semiconductor device
11/07/2002	US20020162628 Manufacturing method and manufacturing apparatus of thin-film laminate
11/07/2002	US20020162579 For removing unwanted film layers, such as a thick photoresist layer from a wafer surface after solder bumping
11/07/2002	US20020162578 Wet dip method for photoresist and polymer stripping without buffer treatment step
11/07/2002	US20020162572 Method for removing residual particles from a polished surface
11/07/2002	US20020162571 Planar clean method applicable to shallow trench isolation
11/07/2002	US20020162570 Method and device for treating a substrate
11/07/2002	US20020162506 Cleaning a semiconductor wafer by mounting on a wafer holding chuck with a rotating motion, a reservoir comprising cleaning chemicals and cylindrical brush
11/07/2002	US20020162505 Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films
11/07/2002	US20020162500 Deposition of tungsten silicide films
11/07/2002	US20020162217 Apparatus for placing a semiconductor chip as a flipchip on a substrate
11/07/2002	US20020162181 Multiple vertical wafer cleaner
11/07/2002	DE10218990A1 Electronic storage element consists of a silicon substrate, neighboring channels, gate electrodes, primary and secondary insulation layers, and transition regions
11/07/2002	DE10215666A1 TTO-Nitridliner für verbesserten Kragenschutz und TTO-Zuverlässigkeit TTO-nitride liner for improved protection collar and TTO reliability
11/07/2002	DE10215117A1 Thin film magnetic memory suitable for stable data read-out and writing
11/07/2002	DE10147011A1 Chemisch verstärkte Resistzusammensetzung und Verfahren zur Bildung eines gemusterten Films unter Verwendung derselben A chemically amplified resist composition and method for forming a patterned film using the same
11/07/2002	DE10120686A1 Verfahren zur Erzeugung dünner homogener Schichten mit Hilfe der Siebdrucktechnik, Vorrichtung zur Durchführung des Verfahren und ihre Verwendung Method for producing thin homogenous layers with the aid of screen printing technology, apparatus for performing the method and their use
11/07/2002	DE10116059A1 Lithogroph mit bewegter Linse und Verfahren zum Herstellen digitaler Hologramme in einem Speichermedium Lithogroph with a moving lens and method for producing digital holograms in a storage medium
11/07/2002	CA2445592A1 Eeprom cell with asymmetric thin window
11/06/2002	EP1255426A1 High temperature EUV source nozzle
11/06/2002	EP1255334A1 Fault tolerant electrical circuit and method
11/06/2002	EP1255305A2 Method of producing Cu (In, Ga) (Se,S)2 semiconductor film
11/06/2002	EP1255302A2 Method for fabricating forward and reverse blocking devices
11/06/2002	EP1255296A2 Semi-conductor wafer handling method
11/06/2002	EP1255295A1 Semiconductor device, metal laminated plate for fabricating circuit on semiconductor, and method of fabricating circuit
11/06/2002	EP1255294A1 Wafer transfer control apparatus and method for transferring wafer
11/06/2002	EP1255293A1 Method and device for chip mounting
11/06/2002	EP1255292A1 Chip mounting method
11/06/2002	EP1255291A2 Forming low resistivity P-type gallium nitride
11/06/2002	EP1255290A2 A method to form a low parasitic capacitance CMOS device
11/06/2002	EP1255289A2 Method for processing a coating film and method for manufacturing a semiconductor element with use of the same method
11/06/2002	EP1255288A2 Component on GaAs and method for making the same
11/06/2002	EP1255287A1 Substrate processing method, and apparatus therefor
11/06/2002	EP1255286A1 Monitor, method of monitoring, polishing device, and method of manufacturing semiconductor wafer
11/06/2002	EP1255285A1 Method and apparatus for handling arranged part
11/06/2002	EP1255284A1 Semiconductor manufacturing/testing ceramic heater
11/06/2002	EP1255283A2 Cutting apparatus and cutting method
11/06/2002	EP1255282A2 Thin-plate supporting container
11/06/2002	EP1255281A2 Semiconductor device and method for fabricating the same
11/06/2002	EP1255280A2 Apparatus and method for dicing semiconductor wafers

1 ... 4883 4884 4885 4886 4887 4888 4889 4890 4891 4892 4893 4894 4895 4896 4897 4898 4899 4900 4901 4902 4903 ... 6590