H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2002
12/05/2002	DE10154272A1 Verfahren zum Erzeugen einer angehobenen Spannung für einen nichtflüchtigen ferroelektrischen Speicher A method for generating a boosted voltage for a nonvolatile ferroelectric memory
12/05/2002	DE10151080C1 Device for producing extreme ultraviolet radiation used in the semiconductor industry comprises a discharge chamber surrounded by electrode housings through which an operating gas flows under a predetermined pressure
12/05/2002	DE10135151A1 Aus einem Tragkörper und darauf gasgelagerten und drehangetriebenen Substrathalter bestehende Anordnung From a support body and on gas bearings and rotationally driven substrate holder existing arrangement
12/05/2002	DE10132882A1 Production of a thin layer comprises charging a stack of substrates into a reactor, introducing a gas containing a reactant and chemically absorbing a part of the reactant
12/05/2002	DE10127778A1 Transporteinrichtung für flache Gegenstände Transport device for flat objects
12/05/2002	DE10127580A1 In-situ-Maskentechnik zur Produktion von III-V Halbleiter-Bauelementen In-situ mask technology for the production of III-V semiconductor devices
12/05/2002	DE10127234A1 Transistor, used as a MOS transistor, has a contact region containing praseodymium silicide between a semiconductor region and a metallic conducting region
12/05/2002	DE10127227A1 Katadioptrisches Reduktionsobjektiv A catadioptric reduction objective
12/05/2002	DE10126955A1 Integrierte Schaltung mit energieabsorbierender Struktur Integrated circuit with energy absorbing structure
12/05/2002	DE10126579A1 Production of a gate stack having a gate oxide layer and a polysilicon layer covering a substrate section used in ultra-high integrated semiconductor storage devices involves applying a thick nitride layer on the polysilicon layer
12/05/2002	DE10126508A1 Device for packaging electronic components by injection molding used for e.g. chip size packaging comprises electronic components arranged on a first side of a system support in a predetermined position
12/05/2002	DE10125629A1 Siliciumsubnitrid Siliciumsubnitrid
12/05/2002	DE10125594A1 Halbleiterspeichereinrichtung sowie Verfahren zu deren Herstellung A semiconductor memory device, as well as processes for their preparation
12/05/2002	DE10125497A1 Verfahren zur Herstellung eines Kontaktsubstrats sowie Kontaktsubstrat A method of forming a contact substrate, and contact substrate
12/05/2002	DE10125019A1 Hohlraumstruktur, Mehrfach-Hohlraumstruktur und Verfahren zum Herstellen einer Hohlraumstruktur Cavity structure, multiple cavity structure and method of making a hollow structure
12/05/2002	DE10124144A1 Eliminating morphological and crystallographic defects in semiconductor surfaces comprises producing semiconductor substrate, and surface treating substrate by activating and tempering
12/05/2002	DE10123770A1 Verfahren zur Herstellung einer DRAM-Zelle mit epitaktisch vergrössertem Abstand zwischen Trenchkontakt und Transfertransistor sowie entsprechende Halbleiterstruktur A process for preparing a DRAM cell with increased distance between epitaxially Trench Contact and transfer transistor as well as corresponding semiconductor structure
12/05/2002	DE10123280A1 Production of contact bumps used in the production of flip-chip assemblies comprises applying copper to a support element, applying tin to the copper, and heating the copper and tin to a temperature at which remelting occurs
12/05/2002	CA2447913A1 Folded-fin heat sink assembly and method of manufacturing same
12/05/2002	CA2446818A1 Semi-insulating silicon carbide without vanadium domination
12/04/2002	EP1263134A2 Method for making an accurate miniature semiconductor resonator
12/04/2002	EP1263062A2 Organic semiconductor device and process of manufacturing the same
12/04/2002	EP1263057A1 Nitride light-detector with a low dislocation density
12/04/2002	EP1263053A1 Nonvolatile semiconductor storage device and production method therefor
12/04/2002	EP1263052A2 Bipolar transistor and method of manufacture thereof
12/04/2002	EP1263051A1 Bitline contacts in a memory cell array
12/04/2002	EP1263050A1 Bitline contacts in a memory cell array
12/04/2002	EP1263049A1 Memory cell array with ferroelectric capacitor, method for manufacturing the same, and ferroelectric memory device
12/04/2002	EP1263048A1 Ferroelectric memory device and its manufacturing method, and hybrid device
12/04/2002	EP1263043A1 Electronic element with a shielding
12/04/2002	EP1263037A2 Non-volatile semiconductor memory device and method for fabricating the same
12/04/2002	EP1263036A2 Barrier film deposition over metal for reduction in metal dishing after CMP
12/04/2002	EP1263035A1 Method for sealing via sidewalls in porous low-k dielectric layers
12/04/2002	EP1263034A2 Method of channel implant for improving nmos esd robustness
12/04/2002	EP1263033A1 Fabrication of analog core CMOS, digital core CMOS, and I/O CMOS transistors
12/04/2002	EP1263032A1 Low dielectric constant insulating film, method of forming it, and electric circuit using it
12/04/2002	EP1263031A1 Method for producing group iii nitride compound semiconductor and group iii nitride compound semiconductor device
12/04/2002	EP1263030A2 Method for processing heteroepitaxial semiconducting layers on silicon substrates
12/04/2002	EP1263029A2 GaN semiconductor device
12/04/2002	EP1263028A1 Exposure mask, method for manufacturing the mask, and exposure method
12/04/2002	EP1263027A2 Method of making stacked MIMCap between Cu dual-damascene levels
12/04/2002	EP1263026A2 Wafer planarization apparatus
12/04/2002	EP1263025A1 Removable shield arrangement for plasma reactors
12/04/2002	EP1263024A2 Single wafer type cleaning method and apparatus
12/04/2002	EP1263023A1 Apparatus for treatment on one side of a wafer-like object
12/04/2002	EP1263022A1 Substrate cleaning system
12/04/2002	EP1262997A1 Method of erasing a FAMOS memory cell and corresponding memory cell
12/04/2002	EP1262996A1 Semiconductor integrated circuit device
12/04/2002	EP1262993A2 Mram memory array
12/04/2002	EP1262992A2 Magnetic recording element, magnetic memory, magnetic recording method, method for fabricating a magnetic recording element, and method for fabricating a magnetic memory
12/04/2002	EP1262848A2 Remote maintenance method, industrial device, and semiconductor device
12/04/2002	EP1262835A2 Compact stage of low mass with device for fine positioning in six degrees of freedom for microlithography
12/04/2002	EP1262834A1 Lithography information control system
12/04/2002	EP1262833A1 Lithography information control system
12/04/2002	EP1262832A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
12/04/2002	EP1262831A2 Antireflective coating compositions
12/04/2002	EP1262830A1 Polymer for chemically amplified resist and chemically amplified resist composition containing the same
12/04/2002	EP1262804A1 Semiconductor device and method for manufacture thereof
12/04/2002	EP1262782A2 Mounting spring elements on semiconductor devices, and wafer-level testing methodology
12/04/2002	EP1262578A1 Crystalline thin film and process for production thereof, element employing crystalline thin film, circuit employing element, and device employing element or circuit
12/04/2002	EP1262533A1 Pressure sensitive adhesive sheet for semiconductor wafer processing
12/04/2002	EP1262430A2 Transport device for flat objects
12/04/2002	EP1262094A1 Method for producing bond pads on a printed circuit
12/04/2002	EP1262020A2 High sheet mos resistor method and apparatus
12/04/2002	EP1262002A1 Quantum well intermixing
12/04/2002	EP1261989A1 Metal-insulator-metal capacitor and a method for producing same
12/04/2002	EP1261988A1 Group iii nitride based fets and hemts with reduced trapping and method for producing the same
12/04/2002	EP1261987A2 Single tunnel gate oxidation process for fabricating nand flash memory
12/04/2002	EP1261986A1 Quantum well intermixing
12/04/2002	EP1261985A2 Method and apparatus for supporting a substrate
12/04/2002	EP1261984A2 Substrate thermal management system
12/04/2002	EP1261938A1 Reinforced integrated circuit
12/04/2002	EP1261878A2 Precision stage
12/04/2002	EP1261831A1 Processing machine with lockdown rotor
12/04/2002	EP1261755A1 Device and method for carrying out plasma enhanced surface treatment of substrates in a vacuum
12/04/2002	EP1261754A2 Methods for preparing ruthenium metal films
12/04/2002	EP1261752A1 Method and apparatus for repairing lithography masks using a charged particle beam system
12/04/2002	EP1261676A1 Hydrofluoroether as a heat-transfer fluid
12/04/2002	EP1261454A1 Dressing apparatus and polishing apparatus
12/04/2002	EP1261434A2 Apparatus for the application of developing solution to a semiconductor wafer
12/04/2002	EP1016136B1 Microelectronics structure comprising a low voltage part provided with protection against a high voltage part and method for obtaining said protection
12/04/2002	EP0893799B1 Data line disturbance free memory block divided flash memory and microcomputer having flash memory therein
12/04/2002	EP0860023B1 A flip-chip assembly
12/04/2002	EP0848223B1 Vertical heat treatment device
12/04/2002	EP0692141B1 Stripping, passivation and corrosion inhibition of semiconductor substrates
12/04/2002	EP0463165B1 Method for producing a semiconductor device comprising a conductive layer
12/04/2002	CN2524372Y Chip tester
12/04/2002	CN2524371Y Detector for chip tester
12/04/2002	CN2524370Y Detector for chip tester
12/04/2002	CN1383580A Electronic device manufacture
12/04/2002	CN1383579A Structure evaluating method, method for mfg. semiconductor devices, and recording medium
12/04/2002	CN1383352A Display device and its mfg. method
12/04/2002	CN1383218A Process for preparing plarization controllable photoelectric device
12/04/2002	CN1383217A Conductive membrane forming method, defect compensating method, photoelectric component and its mfg. method
12/04/2002	CN1383214A Polysilicon film transistor of liquid crystal display device and its mfg. method
12/04/2002	CN1383211A Semiconductor integrated circuit device contg. nonvolatile semiconductor storage
12/04/2002	CN1383208A Semiconductor device and its mfg. method
12/04/2002	CN1383206A 半导体器件 Semiconductor devices
12/04/2002	CN1383202A Conductor pattern formed by magnetic force
12/04/2002	CN1383201A Method for making shallow-recess isolating structure

1 ... 4857 4858 4859 4860 4861 4862 4863 4864 4865 4866 4867 4868 4869 4870 4871 4872 4873 4874 4875 4876 4877 ... 6590