Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2003
03/13/2003US20030049942 Low temperature gate stack
03/13/2003US20030049941 Method to form a DRAM capacitor using low temperature reoxidation
03/13/2003US20030049940 Method for manufacturing field effect transistor
03/13/2003US20030049939 Spray member and method for using the same
03/13/2003US20030049938 Method of wet etching low dielectric constant materials
03/13/2003US20030049936 Semiconductor device having local interconnection layer and method for manufacturing the same
03/13/2003US20030049935 Method for removing residual particles from a polished surface
03/13/2003US20030049934 Methods and apparatus for etching metal layers on substrates
03/13/2003US20030049933 Apparatus for handling liquid precursor material for semiconductor processing
03/13/2003US20030049932 Technique for high efficiency metalorganic chemical vapor deposition
03/13/2003US20030049931 Alternating layers of a nitrogen-containing compound and a refractory metal compound onto a substrate
03/13/2003US20030049930 Method of fabricating a high-voltage transistor with a multi-layered extended drain structure
03/13/2003US20030049929 Method of manufacturing a semiconductor apparatus using chemical mechanical polishing
03/13/2003US20030049928 Method of manufacturing heat dissipation device
03/13/2003US20030049927 Method of forming metal wiring line
03/13/2003US20030049926 Method for manufacturing bit line
03/13/2003US20030049925 High-density inter-die interconnect structure
03/13/2003US20030049924 Microelectronic fabrication having formed therein terminal electrode structure providing enhanced barrier properties
03/13/2003US20030049923 Method to improve the reliability of thermosonic gold to aluminum wire bonds
03/13/2003US20030049922 Rectangular contact used as a low voltage fuse element
03/13/2003US20030049921 Semiconductor constructions
03/13/2003US20030049920 Manufacturing method of semiconductor device
03/13/2003US20030049919 Semiconductor device having smooth refractory metal silicide layers and process for fabrication thereof
03/13/2003US20030049918 Method for improving the electrical isolation between the contact and gate in a self-aligned contact mosfet device structure
03/13/2003US20030049917 Method for fabricating semiconductor device
03/13/2003US20030049916 Development of an intermediate-temperature buffer layer for the growth of high-quality GaxInyAlzN epitaxial layers by molecular beam epitaxy
03/13/2003US20030049915 Semiconductor device, method of fabricating the same and semiconductor device fabricating apparatus
03/13/2003US20030049914 Semiconductor device having cavities with submicrometer dimensions generated by a swelling process
03/13/2003US20030049912 Method of forming chalcogenide comprsing devices and method of forming a programmable memory cell of memory circuitry
03/13/2003US20030049911 Method of semiconductor device isolation
03/13/2003US20030049910 Monotonic Dynamic-Static Pseudo-NMOS Logic Circuit
03/13/2003US20030049909 Manufacturing method of a semiconductor device having a polysilicon electrode
03/13/2003US20030049908 Method for fabricating a capacitor
03/13/2003US20030049907 Semiconductor device and manufacturing method therefor
03/13/2003US20030049906 Method for producing transistors in integrated semiconductor circuits
03/13/2003US20030049905 Method of manufacturing semiconductor device
03/13/2003US20030049904 Method for fabricating a split gate flash memory cell
03/13/2003US20030049903 Semiconductor device and method of manufacturing the same
03/13/2003US20030049902 Semiconductor processing methods of forming devices on a substrate, forming device arrays on a substrate, forming conductive lines on a substrate, and forming capacitor arrays on a substrate, and integrated circuitry
03/13/2003US20030049901 Perovskite-type material forming methods, capacitor dielectric forming methods, and capacitor constructions
03/13/2003US20030049900 Graded composition gate insulators to reduce tunneling barriers in flash memory devices
03/13/2003US20030049898 Method for fabricating a P-N heterojunction device utilizing HVPE grown III-V compound layers and resultant device
03/13/2003US20030049896 Method for making an active pixel sensor
03/13/2003US20030049895 Semiconductor integrated electronic device and corresponding manufacturing method
03/13/2003US20030049894 Si-based resonant interband tunneling diodes and method of making interband tunneling diodes
03/13/2003US20030049893 Method for isolating semiconductor devices
03/13/2003US20030049892 Thin film semiconductor device containing polycrystalline Si-Ge alloy and method for producing thereof
03/13/2003US20030049890 Method for depaositing a leading wire layer of the semiconductor
03/13/2003US20030049888 Semiconductor device and method of making the same
03/13/2003US20030049885 Semiconductor package, method of manufacturing the same, and semiconductor device
03/13/2003US20030049884 Apparatus with compliant electrical terminals, and methods for forming same
03/13/2003US20030049883 Semiconductor package production method and semiconductor package
03/13/2003US20030049882 Wire bonded microelectronic device assemblies and methods of manufacturing same
03/13/2003US20030049881 Article to be processed having ID, and production method thereof
03/13/2003US20030049878 Micromechanical component and corresponding production method
03/13/2003US20030049876 Method of manufacturing semiconductor devices
03/13/2003US20030049874 Test element group, method of manufacturing a test element group, method of testing a semiconductor device, and semiconductor device
03/13/2003US20030049871 Chip manufacturing method for cutting test pads from integrated circuits by sectioning circuit chips from circuit substrate
03/13/2003US20030049580 Susceptor pocket profile to improve process performance
03/13/2003US20030049571 Exposing a substrate with the patterned photoresist to a vapor which penetrates the surface and heating for a time to cause the photoresist to flow
03/13/2003US20030049570 Forming a film of a chemically amplified resist on a substrate, exposing to light, developing and rinsing with an alkaline liquid
03/13/2003US20030049567 Coating a photoresist pattern on a mask oxide layer, exposing and developing
03/13/2003US20030049566 Heating the antireflective compound so as to vaporize it, and then pyrolizing to form stable diradicals which are polymerized on a substrate surface
03/13/2003US20030049565 Photoresist composition and method of forming a photoresist pattern with a controlled remnant ratio
03/13/2003US20030049558 Vacuum processing method, vacuum processing apparatus, semiconductor device manufacturing method and semiconductor device
03/13/2003US20030049548 Integrated circuits; dielectrics; photolithography
03/13/2003US20030049546 Charged-particle-beam microlithography reticles including exposure alignment marks associated with individual subfields
03/13/2003US20030049545 Reduced distortion; microelectronics, semiconductors, integrated circuits
03/13/2003US20030049500 Rare earth-containing oxide member
03/13/2003US20030049460 Low dielectric constant material and method of processing by CVD
03/13/2003US20030049425 Semiconductor device, mounting circuit board, method of producing the same, and method of producing mounting structure using the same
03/13/2003US20030049412 Process of forming a pattern on a substrate
03/13/2003US20030049411 No-flow underfill material and underfill method for flip chip devices
03/13/2003US20030049390 Feedback control of plasma-enhanced chemical vapor deposition processes
03/13/2003US20030049388 Silicon carbide deposited by high density plasma chemical-vapor deposition with bias
03/13/2003US20030049381 Methods utilizing scanning probe microscope tips and products therefor or produced thereby
03/13/2003US20030049376 Feedback control of sub-atmospheric chemical vapor deposition processes
03/13/2003US20030049372 Vapor deposition; gas flow; controlling heaters; monitoring temperature; uniformity
03/13/2003US20030049115 Personal guided transport vehicle
03/13/2003US20030049102 Elastically expandable positioning device
03/13/2003US20030049101 Method for transporting boards, load port apparatus, and board transport system
03/13/2003US20030048960 Exposure method and apparatus, and device manufacturing method using the same
03/13/2003US20030048940 Defect inspection method and defect inspection equipment
03/13/2003US20030048939 Method of and apparatus for inspection of articles by comparison with a master
03/13/2003US20030048872 Method of making <200 nm wavelength fluoride crystal lithogrphy/laser optical elements
03/13/2003US20030048825 Semiconductor laser device and optical disk recording and reproducing apparatus
03/13/2003US20030048822 Semiconductor light-emitting device and manufacturing method therefor, and LED lamp and LED display
03/13/2003US20030048686 Semiconductor memory device
03/13/2003US20030048679 Methods of forming contact holes using multiple insulating layers and integrated circuit devices having the same
03/13/2003US20030048676 Antiparallel magnetoresistive memory cells
03/13/2003US20030048674 Nonvolatile semiconductor memory device
03/13/2003US20030048673 Test mode decoder in a flash memory
03/13/2003US20030048667 High-speed data programmable nonvolatile semiconductor memory device
03/13/2003US20030048666 Graded composition metal oxide tunnel barrier interpoly insulators
03/13/2003US20030048663 Low voltage non-volatile memory cell
03/13/2003US20030048661 Nonvolatile semiconductor memory
03/13/2003US20030048658 Magnetic element with an improved magnetoresistance ratio and fabricating method thereof
03/13/2003US20030048657 Four terminal memory cell, a two-transistor SRAM cell, a SRAM array, a computer system, a process for forming a SRAM cell, a process for turning a SRAM cell off, a process for writing a SRAM cell and a process for reading data from a SRAM cell
03/13/2003US20030048656 Four terminal memory cell, a two-transistor sram cell, a sram array, a computer system, a process for forming a sram cell, a process for turning a sram cell off, a process for writing a sram cell and a process for reading data from a sram cell
03/13/2003US20030048653 Semiconductor integrated circuit device and contactless electronic device
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