Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2003
03/19/2003CN1404117A Local forming process of self-aligning metal silicide
03/19/2003CN1404116A Local forming process of metal silicide layer
03/19/2003CN1404115A Local forming process of metal silicide layer
03/19/2003CN1404114A local forming process of self-aligning metal silicide
03/19/2003CN1404113A Prepn of nitride-oxide film
03/19/2003CN1404112A Growth process of monochip-type oxide layer
03/19/2003CN1404111A Method for producing semiconductor device using low-dielectric constant film and chip structure
03/19/2003CN1404110A Forming method of sacrificial oxide layer
03/19/2003CN1404109A Prepn of porous low-dielectric constant material
03/19/2003CN1404108A RF probe with thermal conducting sleeve
03/19/2003CN1404107A Spraying nozzle for wet processing, wet processing apparatus and method
03/19/2003CN1404106A Local forming process of self-aligning metal silicide
03/19/2003CN1404105A Polysilicon layer forming process with deuterium during semiconductor production
03/19/2003CN1404104A Making process of lower storage electrode for capacitor
03/19/2003CN1404103A Diagnosing method for service life of semiconductor manufacturing apparatus
03/19/2003CN1404102A Substrate processing system of equipment information for managing substrate processing equipment
03/19/2003CN1404101A Semiconductor and producing method thereof
03/19/2003CN1404066A Thin film magnetic storing device containing storage unit with magnetic tunel junction
03/19/2003CN1403966A Generating process of optimal cutting number in virtual multi-medium capacitor extraction
03/19/2003CN1403877A Nonaqueous protective film stripping liquid handling apparatus and nonaqueous protective film stripping liquid handling method
03/19/2003CN1403876A Stripping liquid for photoetching colloid and photoetching colloid stripping method using the same stripping liquid
03/19/2003CN1403853A Storing capacitance structure for planar display and its forming process
03/19/2003CN1403627A High-density plasma chemical vapour-phase deposition equipment
03/19/2003CN1403626A Vacuum exhaust system and monitoring and controlling method thereof
03/19/2003CN1403352A Goods conveyer
03/19/2003CN1403214A Decision system during dry cleaning for semiconductor manufacture equipment, dry cleaning method and dry cleaning system
03/19/2003CN1103499C Radiation sheet for remaking and replacing of lead-wire bonding chip and package structure thereof
03/19/2003CN1103497C Bulk and strained silicon formed on insulator with local selective oxidation
03/19/2003CN1103496C Method for forming shielding wire adjacement to signal wire
03/19/2003CN1103495C Testing apparatus for non-packaged semiconductor chip
03/19/2003CN1103494C Producing method of semi-conductor
03/19/2003CN1103493C Method for reducing the micro load produced during nitride etching
03/19/2003CN1103492C Method for forming flat internal metal dielectric layer
03/19/2003CN1103382C Plasma chemical vapour phase deposition apparatus
03/19/2003CA2666671A1 Single crystal gan substrate, method of growing same and method of producing same
03/18/2003USRE38038 Exposure method and projection exposure apparatus
03/18/2003USRE38037 Modular semiconductor power device
03/18/2003US6536032 Method of processing exposure mask-pattern data, simulation using this method, and recording medium
03/18/2003US6536031 Method for generating behavior model description of circuit and apparatus for logic verification
03/18/2003US6536030 Macroblock for use in layout design of semiconductor integrated circuit, storage medium for storing intellectual property including information on the macroblock, and layout design method using the macroblock
03/18/2003US6536028 Standard block architecture for integrated circuit design
03/18/2003US6536023 Method and system for hierarchical metal-end, enclosure and exposure checking
03/18/2003US6536015 Apparatus and method of correcting layout pattern data, method of manufacturing semiconductor devices and recording medium
03/18/2003US6536013 Memory embedded semiconductor integrated circuit and a method for designing the same
03/18/2003US6535785 Gas apparatus comprising power sources, detectors, display screens and controllers for modulating power amplitude, cycles and frequency
03/18/2003US6535783 Method and apparatus for the integration of sensor data from a process tool in an advanced process control (APC) framework
03/18/2003US6535781 Apparatus for modifying coordinates
03/18/2003US6535779 Apparatus and method for endpoint control and plasma monitoring
03/18/2003US6535778 Process control method and process control apparatus
03/18/2003US6535776 Method for localizing and isolating an errant process step
03/18/2003US6535774 Incorporation of critical dimension measurements as disturbances to lithography overlay run to run controller
03/18/2003US6535535 Laser irradiation method, laser irradiation apparatus, and semiconductor device
03/18/2003US6535453 Semiconductor memory device
03/18/2003US6535417 Semiconductor storage device
03/18/2003US6535413 Positioning and joining electronic structures of silicon, by annealing conductors causing silicon to diffuse and form joints such as terminals for transistors; process control; efficiency
03/18/2003US6535412 Semiconductor memory device capable of switching output data width
03/18/2003US6535371 Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly
03/18/2003US6535288 Machine readable code to trigger data collection
03/18/2003US6535280 Phase-shift-moiré focus monitor
03/18/2003US6535274 Projection exposure device
03/18/2003US6535273 Microlithographic illumination system with depolarizer
03/18/2003US6535271 Exposure apparatus
03/18/2003US6535101 Low loss high Q inductor
03/18/2003US6535098 Integrated helix coil inductor on silicon
03/18/2003US6535090 Compact high-frequency circuit device
03/18/2003US6535056 Semiconductor integrated circuit device
03/18/2003US6535043 Clock signal selection system, method of generating a clock signal and programmable clock manager including same
03/18/2003US6535034 High performance integrated circuit devices adaptable to use lower supply voltages with smaller device geometries
03/18/2003US6535012 Universal wafer carrier for wafer level die burn-in
03/18/2003US6535009 Configuration for carrying out burn-in processing operations of semiconductor devices at wafer level
03/18/2003US6535003 Contact structure having silicon finger contactor
03/18/2003US6534998 Semiconductor device and control method thereof
03/18/2003US6534978 Electronic component
03/18/2003US6534948 Motor driving circuit, a method for driving a motor, and a semiconductor integrated circuit device
03/18/2003US6534921 Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system
03/18/2003US6534879 Semiconductor chip and semiconductor device having the chip
03/18/2003US6534878 Optimizing the power connection between chip and circuit board for a power switch
03/18/2003US6534877 Semiconductor copper bond pad surface protection
03/18/2003US6534875 Semiconductor part for component mounting, mounting structure and mounting method
03/18/2003US6534874 Semiconductor device and method of producing the same
03/18/2003US6534871 Device including an epitaxial nickel silicide on (100) Si or stable nickel silicide on amorphous Si and a method of fabricating the same
03/18/2003US6534869 Method for reducing stress-induced voids for 0.25 μm micron and smaller semiconductor chip technology by annealing interconnect lines prior to ILD deposition and semiconductor chip made thereby
03/18/2003US6534868 Semiconductor device and method for fabricating the same
03/18/2003US6534867 Semiconductor device, semiconductor element and method for producing same
03/18/2003US6534866 Dual damascene interconnect
03/18/2003US6534865 Method of enhanced fill of vias and trenches
03/18/2003US6534864 Semiconductor memory device and method of fabricating the same
03/18/2003US6534863 Common ball-limiting metallurgy for I/O sites
03/18/2003US6534858 Assembly and methods for packaged die on pcb with heat sink encapsulant
03/18/2003US6534857 Thermally balanced power transistor
03/18/2003US6534855 Miniaturized audio devices having integrated circuits and coaxial connections; signal transmitters and receivers; portable telephones
03/18/2003US6534851 Modular semiconductor substrates
03/18/2003US6534849 Tape having implantable conductive lands for semiconductor packaging process and method for manufacturing the same
03/18/2003US6534848 Electrical coupling of a stiffener to a chip carrier
03/18/2003US6534845 Semiconductor device
03/18/2003US6534841 Electrical and electronic apparatus having three-dimensional dielectric multilayers, used in computers
03/18/2003US6534840 Semiconductor device having self-aligned structure
03/18/2003US6534837 Semiconductor device
03/18/2003US6534836 MOSFET semiconductor device
03/18/2003US6534835 Damascene structure with low dielectric constant insulating layers
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