Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2003
03/19/2003EP1294018A1 Silicon on insulator substrate and method for manufacturing said substrate
03/19/2003EP1294017A2 Chip manufacturing method for cutting test pads from integrated circuits by sectioning circuit chips from circuit substrate
03/19/2003EP1294016A1 Formation of self-organized stacked islands for self-aligned contacts of low dimensional structures
03/19/2003EP1294015A1 Method for patterning a conductive polycrystalline layer
03/19/2003EP1294014A2 Plate manipulation device
03/19/2003EP1293987A1 Nonvolatile semiconductor memory device and method of manufacturing the same
03/19/2003EP1293834A2 Illumination apparatus
03/19/2003EP1293829A2 Device for exposure of a peripheral area of a wafer
03/19/2003EP1293791A2 Semiconductor integrated circuit device and device for testing same
03/19/2003EP1293788A2 Integrated semiconductor device
03/19/2003EP1293741A1 Heat treatment apparatus
03/19/2003EP1293592A2 Silicon semiconductor substrate and preparation thereof
03/19/2003EP1293591A2 Silicon semiconductor substrate and method for production thereof
03/19/2003EP1293508A1 Organometallic precursor for forming metal pattern
03/19/2003EP1293316A1 Dicing method and apparatus
03/19/2003EP1293297A1 Polishing pad
03/19/2003EP1292993A1 Method for manufacturing high efficiency photovoltaic devices at enhanced deposition rates
03/19/2003EP1292992A2 Methods for forming rough ruthenium-containing layers and structures/methods using same
03/19/2003EP1292991A1 Vertical mos transistor with buried gate and method for making same
03/19/2003EP1292990A2 Trench mosfet with double-diffused body profile
03/19/2003EP1292989A1 A semiconductor device
03/19/2003EP1292984A1 Damascene architecture electronic storage and method for making same
03/19/2003EP1292983A2 Method of producing trench capacitor buried strap
03/19/2003EP1292982A2 Gate oxidation for vertical trench device
03/19/2003EP1292981A2 Integrated circuit vertical trench device and method of forming thereof
03/19/2003EP1292980A2 Method to etch poly si gate stacks on raised sti structure
03/19/2003EP1292979A2 Method and apparatus for a direct buried strap for same level interconnections for semiconductor devices
03/19/2003EP1292978A2 Dual damascene process utilizing a low-k dual dielectric
03/19/2003EP1292977A2 Insitu diffusion barrier and copper metallization for improving reliability of semiconductor devices
03/19/2003EP1292976A1 Method for making a soi semiconductor substrate with thin active semiconductor layer
03/19/2003EP1292975A1 Method for making substrates and resulting substrates
03/19/2003EP1292974A1 Method for making an electronic component with self-aligned drain and gate, in damascene architecture
03/19/2003EP1292973A2 Method to restore hydrophobicity in dielectric films and materials
03/19/2003EP1292972A2 Plasma rie polymer removal
03/19/2003EP1292971A2 Ceria slurry and process for the chemical-mechanical polishing of silicon dioxide
03/19/2003EP1292970A1 Thin film forming method
03/19/2003EP1292969A2 Patterning method using a removable inorganic antireflection coating
03/19/2003EP1292968A2 Displacement device
03/19/2003EP1292951A2 Structure and process for vertical transistor trench capacitor dram cell
03/19/2003EP1292862A2 Multipass multiphoton absorption method and apparatus
03/19/2003EP1292838A2 Diagnosting reliability of vias by e-beam probing
03/19/2003EP1292834A2 Systems for testing integrated circuits during burn-in
03/19/2003EP1292798A1 Optical apparatus and methods for shrinking electronic components
03/19/2003EP1292726A1 Single crystal diamond prepared by cvd
03/19/2003EP1292718A2 Method for depositing metal and metal oxide films and patterned films
03/19/2003EP1292648A2 Heterostructure with rear-face donor doping
03/19/2003EP1292529A1 Vertical transistor comprising a mobile gate and a method for the production thereof
03/19/2003EP1292398A1 Process and system for determining acceptability of a fluid dispense
03/19/2003EP1292361A1 Methods utilizing scanning probe microscope tips and products therefor or produced thereby
03/19/2003EP1240556A4 Photolithography method, photolithography mask blanks, and method of making
03/19/2003EP1192657B1 Method of subdividing a wafer
03/19/2003EP1165412A4 Door assembly for semiconductor wafer manufacturing
03/19/2003EP1163311B1 Working liquids and methods for modifying structured wafers suited for semiconductor fabrication
03/19/2003EP1157253A4 Specimen topography reconstruction
03/19/2003EP1097111B1 Heating a substrate support in a substrate handling chamber
03/19/2003EP1044452B1 Programmable sub-surface aggregating metallization structure and method of making same
03/19/2003EP1044288B1 Method for forming a three-component nitride film containing metal and silicon
03/19/2003EP1010107B1 Routing method removing cycles in vertical constraint graph
03/19/2003EP0812470B1 A method of manufacturing a self-aligned vertical bipolar transistor on an soi
03/19/2003CN1404629A Semiconductor component which emits radiation, and method for producing the same
03/19/2003CN1404627A Method and apparatus for processing thin metal layer
03/19/2003CN1404626A A method for producing a metal film, a thin film device having such metal film and a liquid crystal display device having such thin film device
03/19/2003CN1404624A Pattern forming method and device and semiconductor device, electric circuit, display element module and luminous element
03/19/2003CN1404623A Device for fast and uniform heating of a substrate with infrared radiation
03/19/2003CN1404584A Organic polymeric antireflective coatings deposited by chemical vapor deposition
03/19/2003CN1404219A Making process and apparatus for high-frequency film bulk filter
03/19/2003CN1404192A Method for forming third main group nitride semiconductor layer and semiconductor device
03/19/2003CN1404160A Thin membrane transistor and producing method thereof
03/19/2003CN1404159A SCR with base triggering effect
03/19/2003CN1404158A Making process of phase grating image sensor
03/19/2003CN1404155A Non-volatile memory element and its manufacture
03/19/2003CN1404154A Semiconductor apparatus and producing method thereof
03/19/2003CN1404152A Nonvolatile semiconductor storage and its producing method and operating method
03/19/2003CN1404150A Semiconductor storage unit and semiconductor memory
03/19/2003CN1404149A Semiconductor device with electrostatic discharge protective circuit
03/19/2003CN1404146A Semiconductor device and production method thereof
03/19/2003CN1404142A Method for producing semiconductor substrate, semiconductor substrate, electrooptical apparatus and electronic equipment
03/19/2003CN1404141A Making process of charging-preventing nitride ROM
03/19/2003CN1404140A Analysis method of repair state of redundant bit in DRAM
03/19/2003CN1404139A Method of eliminating defect in high-density plasma dielectric layer
03/19/2003CN1404138A Integrated radio-frequency circuit
03/19/2003CN1404137A Double-embedding wet cleaning process without formed protrusion
03/19/2003CN1404136A Method of raising low-electric layer spreading capacity
03/19/2003CN1404135A Semiconductor device capable of depressing current concentration on welding pad and producing method thereof
03/19/2003CN1404134A Method for designing wiring connecting part and semiconductor device
03/19/2003CN1404133A Wiring design method
03/19/2003CN1404132A Making process of embedded intraconnection wire
03/19/2003CN1404131A Making process of embedded intraconnection wire structure
03/19/2003CN1404130A Method of reducing stress and erosion of shallow-channel isolating side wall oxide layer
03/19/2003CN1404129A Method of reducing stress of shallow-channel isolating side wall oxide layer
03/19/2003CN1404128A Forming process of shallow channel
03/19/2003CN1404127A Double-embedded structure with capacitor and its making process
03/19/2003CN1404126A Embedding process of making metal capacitor and its product
03/19/2003CN1404125A Making process of ferroelectric capacitor for memory
03/19/2003CN1404124A Chip support for protecting chip from breakdown by static electricity
03/19/2003CN1404123A Semiconductor device and checkup apparatus thereof
03/19/2003CN1404121A Method for manufacturing a chip
03/19/2003CN1404120A Method for removing stain from through-hole
03/19/2003CN1404119A Method for metering metal oxide semi-conductor field effect transistor threshold voltage
03/19/2003CN1404118A Local forming process of metal silicide layer
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