Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2003
03/13/2003US20030048593 Capacitor and method for forming a capacitor
03/13/2003US20030048547 Projection Objective
03/13/2003US20030048518 Electro-optical component including a fluorinated poly(phenylene ether ketone) protective coating and related methods
03/13/2003US20030048428 Lithographic apparatus, device manufacturing method and device manufactured thereby
03/13/2003US20030048425 Exposure apparatus, method of controlling same, and method of manufacturing devices
03/13/2003US20030048395 Electric optical apparatus and manufacturing method of the same, projection display, and electronic instrument
03/13/2003US20030048314 Direct write TM system
03/13/2003US20030048142 Controllable and testable oscillator apparatus for an integrated circuit
03/13/2003US20030048112 Tester for semiconductor integrated circuits
03/13/2003US20030048110 Wafer probe station having environment control enclosure
03/13/2003US20030048109 Test pin unit
03/13/2003US20030048108 Structural design and processes to control probe position accuracy in a wafer test probe assembly
03/13/2003US20030048107 Apparatus and method for detection and measurement of environmental parameters
03/13/2003US20030047881 Sealing system and pressure chamber assembly including the same
03/13/2003US20030047849 Method of modifying the temperature stability of a low temperature cofired ceramics (LTCC)
03/13/2003US20030047815 Resin mold semiconductor device
03/13/2003US20030047814 Method for manufacturing flip chip package devices with a heat spreader
03/13/2003US20030047812 Thin film aluminum alloy and sputtering target to form the same
03/13/2003US20030047811 Diffusion barrier layer for semiconductor device and fabrication method thereof
03/13/2003US20030047810 Electronic device having multilayer interconnection structure
03/13/2003US20030047809 Embedding resin and wiring substrate using the same
03/13/2003US20030047808 Semiconductor container structure with diffusion barrier
03/13/2003US20030047803 Bonding silicon die to a substrate; operably disposing a spacer on substrate about silicon die; placing a first thermal conductor on silicon die wherein the first thermal conductor and silicon die are in direct surface contact
03/13/2003US20030047802 Ceramic substrate for a semiconductor production/inspection device
03/13/2003US20030047801 Semiconductor device and manufacturing method of the same
03/13/2003US20030047797 Bow control in an electronic package
03/13/2003US20030047796 Narrow channel field effect transistor and method of making the same
03/13/2003US20030047795 Compound semiconductor device, production method thereof, light-emitting device and transistor
03/13/2003US20030047794 Semiconductor device capable of suppressing current concentration in pad and its manufacture method
03/13/2003US20030047793 High-voltage vertical transistor with a multi-layered extended drain structure
03/13/2003US20030047792 High-voltage lateral transistor with a multi-layered extended drain structure
03/13/2003US20030047789 Semiconductor device and method of manufacturing the same
03/13/2003US20030047788 High-voltage lateral transistor with a multi-layered extended drain structure
03/13/2003US20030047785 Thin film transistor and matrix display device
03/13/2003US20030047784 Semiconductor device
03/13/2003US20030047782 Complementary MOS semiconductor device
03/13/2003US20030047781 Semiconductor device on silicon-on-insulator and method for manufacturing the semiconductor device
03/13/2003US20030047780 Semiconductor device and method for fabricating the same
03/13/2003US20030047779 Trench-gate semiconductor devices and their manufacture
03/13/2003US20030047778 Semiconductor device and method of manufacturing the same
03/13/2003US20030047777 Edge termination in a trench-gate MOSFET
03/13/2003US20030047775 Capable of electric write and erase operations; quality
03/13/2003US20030047774 Nonvolatile semiconductor memory device, fabricating method thereof and operation method thereof
03/13/2003US20030047771 Semiconductor device and method for fabricating the same
03/13/2003US20030047770 Microelectronic capacitor with barrier layer
03/13/2003US20030047769 High-voltage vertical transistor with a multi-layered extended drain structure
03/13/2003US20030047768 High-voltage vertical transistor with a multi-layered extended drain structure
03/13/2003US20030047767 Integrated circuit configuration having at least one buried circuit element and an insulating layer
03/13/2003US20030047766 Split gate flash memory cell structure and method of manufacturing the same
03/13/2003US20030047764 Ferroelectric memory device and method of forming the same
03/13/2003US20030047763 Semiconductor device and method of manufacturing the same
03/13/2003US20030047759 Integrated circuit, portable device and method for manufacturing an integrated circuit
03/13/2003US20030047756 Programmable memory address and decode circuits with ultra thin vertical body transistors
03/13/2003US20030047755 Floating trap non-volatile semiconductor memory devices including high dielectric constant blocking insulating layers and methods
03/13/2003US20030047754 Multi-chip semiconductor package
03/13/2003US20030047753 Serving as a semiconductor device for amplifying a high-frequency electric power such as a microwave band, a millimeter wave band
03/13/2003US20030047752 Avalanche photodiodes with an impact-ionization-engineered multiplication region
03/13/2003US20030047750 Electrostatic discharge protection silicon controlled rectifier (ESD-SCR) for silicon germanium technologies
03/13/2003US20030047749 Vertical replacement-gate junction field-effect transistor
03/13/2003US20030047747 Non-volatile semiconductor memory with single layer gate structure
03/13/2003US20030047746 GaN substrate formed over GaN layer having discretely formed minute holes produced by use of discretely arranged growth suppression mask elements
03/13/2003US20030047739 Method to GaAs based lasers and a GaAs based laser
03/13/2003US20030047737 Light emitting diode and method for manufacturing the same
03/13/2003US20030047734 Bi-layer silicon film and method of fabrication
03/13/2003US20030047732 Semiconductor device and manufacturing method thereof
03/13/2003US20030047731 Semiconductor device and test device for same
03/13/2003US20030047730 Light emitting device and manufacturing method thereof
03/13/2003US20030047729 Organic thin-film semiconductor element and manufacturing method for the same
03/13/2003US20030047728 Insulation of an mram device through a self-aligned spacer
03/13/2003US20030047710 Chemical-mechanical polishing
03/13/2003US20030047694 Method of measuring aberration of a projection system of a lithographic apparatus, device manufacturing method, and device manufactured thereby
03/13/2003US20030047691 Directing electron beam activated etchant gas toward excess material defect on photolithography mask; directing electron beam toward defect to activate electron beam activated etchant gas near impact point of beam to remove defect
03/13/2003US20030047682 Detecting apparatus and device manufacturing method
03/13/2003US20030047589 Joined article of a supporting member for a semiconductor wafer and a method of producing the same
03/13/2003US20030047555 Heater assembly for heating a wafer
03/13/2003US20030047551 Guard heater and pressure chamber assembly including the same
03/13/2003US20030047543 Wafer dicing device and method
03/13/2003US20030047539 Abrasive free formulations for chemical mechanical polishing of copper and associated materials and method of using same
03/13/2003US20030047537 Etching methods, methods of removing portions of material, and methods of forming silicon nitride spacers
03/13/2003US20030047532 Method of etching ferroelectric layers
03/13/2003US20030047527 Boat for ball attach manufacturing process
03/13/2003US20030047476 Wafer retainer
03/13/2003US20030047442 Creating an electric discharge in a starting gas between two exciting electrodes to which is applied an electric supply voltage, so that the discharge excites at least a portion of the gaseous constituents of the starting gas
03/13/2003US20030047353 Multilayer modules with flexible substrates
03/13/2003US20030047339 Semiconductor device with compliant electrical terminals, apparatus including the semiconductor device, and methods for forming same
03/13/2003US20030047289 Intermediate suction support and its utilisation or producing a thin film structure
03/13/2003US20030047283 Apparatus for supporting a substrate and method of fabricating same
03/13/2003US20030047281 Gas introduction system for temperature adjustment of object to be processed
03/13/2003US20030047280 Peeling method and method of manufacturing semiconductor device
03/13/2003US20030047233 Unified pod quick-opening apparatus
03/13/2003US20030047202 Pressure chamber assembly including drive means
03/13/2003US20030047199 Chamber assembly for use with a substrate
03/13/2003US20030047195 Placing the substrate in a pressure chamber; circulating fluid including dense phase carbon dioxide (CO2) through the chamber such that fluid contacts the substrate; cyclically modulating the phase of the CO2 during circulation
03/13/2003US20030047194 Apparatus and method for cleaning wafers
03/13/2003US20030047192 Single wafer type substrate cleaning method and apparatus
03/13/2003US20030047191 Method and apparatus for plasma cleaning of workpieces
03/13/2003US20030047136 Photoresist supply apparatus capable of controlling flow length of photoresist and method of supplying photoresist using the same
03/13/2003US20030047133 Apparatus and method for photo-induced process
03/13/2003US20030047132 Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition
03/13/2003US20030047129 Method of manufacturing compound single crystal
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