Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2003
03/25/2003US6537880 Method of fabricating a high density NAND stacked gate flash memory device having narrow pitch isolation and large capacitance between control and floating gates
03/25/2003US6537879 Process for manufacturing a non-volatile memory cell with a floating gate region autoaligned to the isolation and with a high coupling coefficient
03/25/2003US6537878 Fabrication method of static random access memory cell
03/25/2003US6537877 Semiconductor memory device
03/25/2003US6537876 Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process
03/25/2003US6537875 Semiconductor memory device for reducing damage to interlevel dielectric layer and fabrication method thereof
03/25/2003US6537874 Method for fabricating semiconductor device having a capacitor
03/25/2003US6537873 Integrated circuit comprising a memory cell of the DRAM type, and fabrication process
03/25/2003US6537872 Method of fabricating a DRAM cell capacitor
03/25/2003US6537871 Circuit and method for an open bit line memory cell with a vertical transistor and trench plate trench capacitor
03/25/2003US6537870 Method of forming an integrated circuit comprising a self aligned trench
03/25/2003US6537869 Semiconductor devices having a non-volatile memory transistor and methods for manufacturing the same
03/25/2003US6537867 High speed low voltage semiconductor devices and method of fabrication
03/25/2003US6537866 Method of forming narrow insulating spacers for use in reducing minimum component size
03/25/2003US6537865 Semiconductor device and process of fabricating same
03/25/2003US6537864 Method of fabricating a thin film transistor using electromagnetic wave heating of an amorphous semiconductor film
03/25/2003US6537863 Laser beam scanning method
03/25/2003US6537862 Method of forming semiconductor device having a GAA type transistor
03/25/2003US6537861 SOI transistor with body contact and method of forming same
03/25/2003US6537860 Method of fabricating power VLSI diode devices
03/25/2003US6537859 Semiconductor device baking method
03/25/2003US6537858 Method for manufacturing semiconductor device
03/25/2003US6537855 Semiconductor device and method of manufacturing the same
03/25/2003US6537854 Method for bonding IC chips having multi-layered bumps with corrugated surfaces and devices formed
03/25/2003US6537853 Overmolding encapsulation process
03/25/2003US6537851 Method of connecting a bumped compliant conductive trace to a semiconductor chip
03/25/2003US6537850 Method for fabricating semiconductor components with terminal contacts having alternate electrical paths
03/25/2003US6537849 Seal ring structure for radio frequency integrated circuits
03/25/2003US6537846 Substrate bonding using a selenidation reaction
03/25/2003US6537845 Chemical surface deposition of ultra-thin semiconductors
03/25/2003US6537844 Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server
03/25/2003US6537842 Methods for fabricating protective structures for bond wires
03/25/2003US6537838 Forming semiconductor structures including activated acceptors in buried p-type III-V layers
03/25/2003US6537837 Pattern formation method using two alternating phase shift masks
03/25/2003US6537836 Semiconductor structures and manufacturing methods
03/25/2003US6537835 Method of manufacturing semiconductor device and apparatus of automatically adjusting semiconductor pattern
03/25/2003US6537834 Method and apparatus for determining and assessing chamber inconsistency in a tool
03/25/2003US6537832 Measuring apparatus and film formation method
03/25/2003US6537831 Method for selecting components for a matched set using a multi wafer interposer
03/25/2003US6537830 Method of making ferroelectric FET with polycrystalline crystallographically oriented ferroelectric material
03/25/2003US6537733 Method of depositing low dielectric constant silicon carbide layers
03/25/2003US6537732 Resist pattern and method of forming same, method of forming thin-film pattern, and method of manufacturing micro device
03/25/2003US6537728 Structures, lithographic mask forming solutions, mask forming methods, field emission display emitter mask forming methods, and methods of forming plural field emission display emitters
03/25/2003US6537727 Resist composition comprising photosensitive polymer having loctone in its backbone
03/25/2003US6537726 Polymeric unit derived from 3-hydroxy-1-adamantyl(meth)acrylate and polymeric unit derived from beta-(meth)acryloyloxy-gamma-butyrolactone; adhesion, sensitivity, resolution
03/25/2003US6537724 Photoresist composition for resist flow process, and process for forming contact hole using the same
03/25/2003US6537719 Photosensitive resin composition
03/25/2003US6537718 Positive photoresist composition for exposure to far ultraviolet ray
03/25/2003US6537713 Multilayer alignment keys and alignment method using the same
03/25/2003US6537709 Photo mask having film formed from halftone material, method of manufacturing photo mask, and method of manufacturing semiconductor device
03/25/2003US6537677 Process for fabricating films of uniform properties on semiconductor devices
03/25/2003US6537655 Epitaxial silicon wafer with intrinsic gettering and a method for the preparation thereof
03/25/2003US6537627 Precision product container
03/25/2003US6537621 Method of forming a titanium film and a barrier film on a surface of a substrate through lamination
03/25/2003US6537613 Process for metal metalloid oxides and nitrides with compositional gradients
03/25/2003US6537606 System and method for improving thin films by gas cluster ion beam processing
03/25/2003US6537563 Dental acid etchant composition and method of use
03/25/2003US6537513 Depositing such as gallium or aluminum buffer layer at a temperature below crystalization point; lower defects
03/25/2003US6537482 Underfill and encapsulation of carrier substrate-mounted flip-chip components using stereolithography
03/25/2003US6537462 Ruthenium and ruthenium dioxide removal method and material
03/25/2003US6537461 Process for treating solid surface and substrate surface
03/25/2003US6537460 Method for detecting an end point of etching in a plasma-enhanced etching process
03/25/2003US6537429 Diamond coatings on reactor wall and method of manufacturing thereof
03/25/2003US6537422 Single-substrate-heat-processing apparatus for semiconductor process
03/25/2003US6537420 Method and apparatus for restricting process fluid flow within a showerhead assembly
03/25/2003US6537419 Gas distribution plate assembly for providing laminar gas flow across the surface of a substrate
03/25/2003US6537418 Spatially uniform gas supply and pump configuration for large wafer diameters
03/25/2003US6537417 Apparatus for processing samples
03/25/2003US6537416 Wafer chuck for use in edge bevel removal of copper from silicon wafers
03/25/2003US6537415 Apparatus for processing samples
03/25/2003US6537400 Automated method of attaching flip chip devices to a substrate
03/25/2003US6537381 Method for cleaning and treating a semiconductor wafer after chemical mechanical polishing
03/25/2003US6537380 Fluorinated solvent compositions containing ozone
03/25/2003US6537373 Method of forming film and apparatus thereof
03/25/2003US6537370 Process for obtaining a layer of single-crystal germanium on a substrate of single-crystal silicon, and products obtained
03/25/2003US6537369 SiGeC semiconductor crystal and production method thereof
03/25/2003US6537368 Ideal oxygen precipitating epitaxial silicon wafers and oxygen out-diffusion-less process therefor
03/25/2003US6537361 Method of the synthesis and control of PGO spin-coating precursor solutions
03/25/2003US6537347 Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus
03/25/2003US6537144 Method and apparatus for enhanced CMP using metals having reductive properties
03/25/2003US6537143 Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus
03/25/2003US6537141 Non-slip polisher head backing film
03/25/2003US6537137 Methods for chemical-mechanical polishing of semiconductor wafers
03/25/2003US6537134 Polishing pad comprising a filled translucent region
03/25/2003US6537051 Encapsulation mold with a castellated inner surface
03/25/2003US6537012 Vacuum processing apparatus and a vacuum processing system
03/25/2003US6537011 Method and apparatus for transferring and supporting a substrate
03/25/2003US6537010 Wafer boat support and method for twin tower wafer boat loader
03/25/2003US6536964 Spin coating film thickness can be maintained at a predetermined thickness even when the atmospheric pressure changes in a clean room; semiconductor wafers, photoresists
03/25/2003US6536813 SMIF container latch mechanism
03/25/2003US6536777 Semiconductor integrated circuits; etching plasma
03/25/2003US6536755 Wafer latch with a ball bearing assembly
03/25/2003US6536719 Single-handed cord/cable management device
03/25/2003US6536653 One-step bumping/bonding method for forming semiconductor packages
03/25/2003US6536649 Method of preventing residue contamination of semiconductor devices during furnace processing
03/25/2003US6536608 Single cast vertical wafer boat with a Y shaped column rack
03/25/2003US6536592 Transportable container having an indicator
03/25/2003US6536455 Cleaning solution flows onto said plate
03/25/2003US6536454 Device for treating a disc-shaped object
03/25/2003US6536452 Processing apparatus and processing method
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