Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2003
03/06/2003DE10137577C1 Ventilmittel für eine Slurry-Auslassöffnung einer Vorrichtung für Chemisch-Mechanisches Polieren Valve means for a slurry outlet port of a device for chemical-mechanical polishing
03/06/2003DE10134955C1 Anordnung von Gräben in einem Halbleitersubstrat, insbesondere für Grabenkondensatoren Arrangement of trenches in a semiconductor substrate, in particular for grave capacitors
03/06/2003DE10119463C2 Verfahren zur Herstellung einer Chalkogenid-Halbleiterschicht des Typs ABC¶2¶ mit optischer Prozesskontrolle A process for producing a chalcogenide semiconductor layer of the type ABC¶2¶ with optical process control
03/06/2003CA2456769A1 Interconnect module with reduced power distribution impedance
03/06/2003CA2456301A1 Dummy structures to reduce metal recess in electropolishing process
03/05/2003EP1289355A1 Method for producing ceramic substrate
03/05/2003EP1289141A1 Integrated electronic circuit including non-linear devices
03/05/2003EP1289025A1 Method to deposit an oxyde layer on a substrate and photovoltaic cell using such substrate
03/05/2003EP1289024A1 FAMOS memory cell with several programmation logic levels
03/05/2003EP1289023A2 Nonvolatile semiconductor memory device, fabricating method thereof and operation method thereof
03/05/2003EP1289022A2 Power MOSFET transistor and Schottky diode
03/05/2003EP1289018A2 Nonvolatile semiconductor memory device having divided bit lines
03/05/2003EP1289017A2 Semiconductor memory device and method for manufacturing the same
03/05/2003EP1289016A2 ESD protection for CMOS-output stage
03/05/2003EP1289010A1 Semiconductor device without use of chip carrier and method of making the same
03/05/2003EP1289009A2 Mechanical structuring of cover materials for use in electrical component assemblies
03/05/2003EP1289008A2 A semiconductor device and a manufacturing method thereof
03/05/2003EP1289007A2 Method and process of bonding and debonding of device wafers to carrier wafers
03/05/2003EP1289006A1 Wafer supporting device of semiconductor manufacturing device
03/05/2003EP1289005A2 Method for fabricating a bipolar transistor having self-aligned emitter and base
03/05/2003EP1289004A2 Semiconductor device manufacturing method
03/05/2003EP1289003A1 Plasma processing apparatus
03/05/2003EP1289002A2 Wafer holding apparatus
03/05/2003EP1288977A1 Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode
03/05/2003EP1288963A2 Semiconductor integrated circuit
03/05/2003EP1288962A2 Semiconductor memory device including shadow RAM
03/05/2003EP1288819A1 LSI manufacturing support server, LSI manufacturing support method, and LSI manufacturing support program
03/05/2003EP1288717A2 Phase shift mask blank, phase shift mask, and method of manufacture
03/05/2003EP1288703A2 Electric optical apparatus and manufacturing of the same, projection display, and electronic instrument
03/05/2003EP1288511A1 Magnetic bearing and magnetic levitation apparatus
03/05/2003EP1288347A2 Method of manufacturing compund single crystal
03/05/2003EP1288346A2 Method of manufacturing compound single crystal
03/05/2003EP1288333A1 Method for supplying with accuracy a liquid to a CVD apparatus
03/05/2003EP1288332A2 Vacuum processing apparatus and method for processing an object
03/05/2003EP1288163A2 Purified silicon production system
03/05/2003EP1287594A2 Laser system for processing target material
03/05/2003EP1287563A1 Field effect transistor and method for producing a field effect transistor
03/05/2003EP1287562A1 Power mosfet and method of making the same
03/05/2003EP1287560A1 Vertical electrical interconnections in a stack
03/05/2003EP1287556A2 Self-limiting polysilicon buffered locos for dram trench capacitor collar
03/05/2003EP1287555A1 Process for forming doped epitaxial silicon on a silicon substrate
03/05/2003EP1287554A2 Shielding of analog circuits on semiconductor substrates
03/05/2003EP1287553A1 Chip scale surface mounted device and process of manufacture
03/05/2003EP1287552A1 Method of making a power mosfet
03/05/2003EP1287551A1 A method of electronic component fabrication and an electronic component
03/05/2003EP1287550A2 Post chemical-mechanical planarization (cmp) cleaning composition
03/05/2003EP1287549A1 An apparatus and a method for forming a pattern using a crystal structure of material
03/05/2003EP1287548A1 Plasma etching equipment
03/05/2003EP1287546A1 Plasma etching system
03/05/2003EP1287544A1 Method and apparatus for controlling ion implantation during vacuum fluctuation
03/05/2003EP1287527A2 Programming of nonvolatile memory cells
03/05/2003EP1287456A2 Standard block architecture for integrated circuit design
03/05/2003EP1287317A1 Method and apparatus for controlling the level of liquids
03/05/2003EP1287188A1 Epitaxial silicon wafer free from autodoping and backside halo
03/05/2003EP1287187A2 Modified susceptor for use in chemical vapor deposition process
03/05/2003EP1287185A1 Anode assembly for plating and planarizing a conductive layer
03/05/2003EP1287178A1 Method for making an extreme ultraviolet microlithography transmission modulator and resulting modulator
03/05/2003EP1287172A2 High purity niobium and products containing the same, and methods of making the same
03/05/2003EP1287088A1 Polishing composition
03/05/2003EP1286808A2 A chemical-mechanical polishing system for the manufacture of semiconductor devices
03/05/2003EP1286803A1 Method for producing a structural member from plates stacked on top of each other and soldered together
03/05/2003EP1203378B1 Circuit implementation to quench bit line leakage current in programming and over-erase correction modes in flash eeprom
03/05/2003EP1183555A4 Hydrophone assembly
03/05/2003EP1175628A4 Accelerometer transducer used for seismic recording
03/05/2003EP1169657A4 Calibration of sensors
03/05/2003EP1159464A4 Wafer processing reactor having a gas flow control system and method
03/05/2003EP1038420B1 Method for making circuit elements for a z-axis interconnect
03/05/2003EP0937302B1 Spin dependent tunneling memory
03/05/2003EP0931187B1 A METHOD FOR PRODUCING A REGION DOPED WITH BORON IN A SiC-LAYER
03/05/2003CN2539287Y Base for semiconductor wafer processor bench
03/05/2003CN1401142A Method of manufacturing thin-film transistor, and liquid crystal display
03/05/2003CN1401141A Vertical conduction flip chip device with bump contacts on single surface
03/05/2003CN1401140A Dense arrays and charge storage devices, and methods for making same
03/05/2003CN1401139A Semiconductor device and its manufacturing method
03/05/2003CN1401137A Electronic device and method of manufacturing the electronic device
03/05/2003CN1401136A Encapsulation for an electrical component and method for producing the same
03/05/2003CN1401135A Bottom gate type thin film transistor, its manufacturing method and liquid crystal display device using the same
03/05/2003CN1401134A Semiconductor layer doping, method, thin-film semiconductor device manufacturing method, andthin-film semiconductor device
03/05/2003CN1401133A Slip resistant horizontal semiconductor wafer boat
03/05/2003CN1401103A Process monitoring system for lithography lasers
03/05/2003CN1401014A Exhaust pipe with reactive by-product adhesion preventing means and method of preventing the adhesion
03/05/2003CN1400854A Electronic device and its design method and making process, circuit substrate and electronic equipment
03/05/2003CN1400734A Surface acoustic wave element and its making process and surface acoustic wave device with the element and its making process
03/05/2003CN1400673A Electrooptical device and electronic equipment
03/05/2003CN1400672A schottky-barrier diode and its manufacture
03/05/2003CN1400671A Schottky-barrier diode and its manufacture
03/05/2003CN1400669A Longitudinal transistor, memory device and longitudinal transistor making process
03/05/2003CN1400668A Metal oxide semiconductor and its formation method
03/05/2003CN1400663A Formation of inductance in integrated circuit and structure for blocking parasitic current by using P-N element
03/05/2003CN1400660A Semiconductor module and its manufacture
03/05/2003CN1400659A Semiconductor device and its manufacture
03/05/2003CN1400657A Pressure cast power device and its making process
03/05/2003CN1400656A Method for forming flash memory crystal cell
03/05/2003CN1400655A Production method for preventing nitride internal storage crystal cell from being charged and its device
03/05/2003CN1400653A Method for preventing formation of polysilicon longitudinal beam in internal storage component
03/05/2003CN1400652A Shallow chanel isolation method with single mask
03/05/2003CN1400651A Method for forming shallow channel isolation
03/05/2003CN1400650A Method for forming shallow ridge isolation
03/05/2003CN1400649A Method for reducing stress of isolated component to active zone and etching effect
03/05/2003CN1400648A Method for forming shalow ridge isolation structure
1 ... 4762 4763 4764 4765 4766 4767 4768 4769 4770 4771 4772 4773 4774 4775 4776 4777 4778 4779 4780 4781 4782 ... 6590