Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2003
03/06/2003US20030042554 Semiconductor integrated circuit device
03/06/2003US20030042553 Semiconductor memory device
03/06/2003US20030042552 Semiconductor device having metal silicide layer and method of manufacturing the same
03/06/2003US20030042551 Partially removable spacer with salicide formation
03/06/2003US20030042550 High aspect ratio contact structure with reduced silicon consumption
03/06/2003US20030042548 Stable dielectric transistor, capacitors over substrate
03/06/2003US20030042547 Metal source and drain mos transistor, and method for making same
03/06/2003US20030042546 Froming isolation channel in substrate; masking, etching, patterning
03/06/2003US20030042545 Multilayer transistor over radiation transparent substrate; liquid crystals display; annealing, crystallization under vacuum
03/06/2003US20030042544 Semiconductor device having a shallow trench isolation and method of fabricating the same
03/06/2003US20030042543 Semiconductor device
03/06/2003US20030042542 Semiconductor device having a thin film transistor and manufacturing method thereof
03/06/2003US20030042541 Method of making a high-voltage transistor with buried conduction regions
03/06/2003US20030042540 Source-down power transistor
03/06/2003US20030042539 Shallow trench isolation type semiconductor device and method of forming the same
03/06/2003US20030042538 Silicon carbide power device having protective diode and method for manufacturing silicon carbide power device having protective diode
03/06/2003US20030042535 Semiconductor device and manufacturing thereof
03/06/2003US20030042534 Scalable flash/NV structures and devices with extended endurance
03/06/2003US20030042533 Semiconductor memory device and manufacturing method thereof
03/06/2003US20030042532 In service programmable logic arrays with low tunnel barrier interpoly insulators
03/06/2003US20030042531 Flash memory element and manufacturing method thereof
03/06/2003US20030042530 Non-volatile semiconductor memory device and fabrication method therefor
03/06/2003US20030042529 Non-volatile semiconductor memory device and semiconductor integrated circuit
03/06/2003US20030042528 Sram cells with repressed floating gate memory, low tunnel barrier interpoly insulators
03/06/2003US20030042527 Programmable array logic or memory devices with asymmetrical tunnel barriers
03/06/2003US20030042526 Forming dielectric using nitrogen oxides; annealing
03/06/2003US20030042525 Semiconductor apparatus having vertical structure
03/06/2003US20030042524 Vertical internally-connected trench cell (V-ICTC) and formation method for semiconductor memory devices
03/06/2003US20030042522 Semiconductor memory device and method for manufacturing the same
03/06/2003US20030042521 Semiconductor device having capacitor and method of manufacturing the same
03/06/2003US20030042520 Semiconductor integrated circuit device and a method of manufacturing the same
03/06/2003US20030042519 Joining active material on semiconductor substrate; etching isolation zone forming channel; insertion capacitor node
03/06/2003US20030042518 Semiconductor integrated circuit device
03/06/2003US20030042517 Field-effect transistor having a contact to one of its doping regions, and method for fabricating the transistor
03/06/2003US20030042516 Technique to control tunneling currents in dram capacitors, cells, and devices
03/06/2003US20030042515 Improved silicide process using high k-dielectrics
03/06/2003US20030042514 Sidewall strap for complementary semiconductor structures and method of making same
03/06/2003US20030042512 Vertical transistor and method of making
03/06/2003US20030042508 Open pattern inductor
03/06/2003US20030042504 High speed semiconductior substrate; forming plug, patterning electrode
03/06/2003US20030042502 Heterojunction field effect transistor and manufacturing method therefor
03/06/2003US20030042501 Formation of insulating aluminum oxide in semiconductor substrates
03/06/2003US20030042499 ESD protection for a CMOS output stage
03/06/2003US20030042498 Method of forming a substrate-triggered SCR device in CMOS technology
03/06/2003US20030042496 Forming nitrides; etching
03/06/2003US20030042491 Silicon carbide semiconductor device and manufacturing method
03/06/2003US20030042490 Image sensor having large micro-lenses at the peripheral regions
03/06/2003US20030042489 Localized array threshold voltage implant to enhance charge storage within DRAM memory cells
03/06/2003US20030042486 Semiconductor device and method of production thereof
03/06/2003US20030042485 Semiconductor integrated circuit device capable of tuning of internal power supply voltages generated by a plurality of internal power generating circuits
03/06/2003US20030042484 Thin film transistor
03/06/2003US20030042482 Thin film transistor array substrate having laser illumination indicator
03/06/2003US20030042480 Power transistor, semiconductor substrate for devices and method for manufacturing same
03/06/2003US20030042479 Optical semiconductor devices and fabrication method
03/06/2003US20030042471 Conjugated copolymers of dithienothiophene with vinylene or acetylene
03/06/2003US20030042465 Etching dielectrics using fluorohydrocarbon mixture
03/06/2003US20030042433 Methods for determining a pattern on a microlithography reticle to minimize proximity effects in pattern elements in chips located on substrate
03/06/2003US20030042432 Method for molecular nitrogen implantation dosage monitoring
03/06/2003US20030042430 Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device
03/06/2003US20030042427 Method and apparatus for tuning ion implanters
03/06/2003US20030042419 Method and apparatus for detecting a wafer's posture on a susceptor
03/06/2003US20030042397 Laser annealing apparatus and method of fabricating thin film transistor
03/06/2003US20030042247 Ceramic heater
03/06/2003US20030042245 Ceramic substrate and process for producing the same
03/06/2003US20030042225 Apparatus and method for cleaning wafers with contact holes or via holes
03/06/2003US20030042224 Method for preparing ball grid array board
03/06/2003US20030042223 Etch mask
03/06/2003US20030042133 Method for depositing a metal barrier layer
03/06/2003US20030042115 Conveyor, method for conveying a semiconductor wafer, and method for manufacturing a semiconductor device
03/06/2003US20030042047 Solder bonding method, and electronic device and process for fabricating the same
03/06/2003US20030042035 Overmolded circuit board with underfilled surface-mount component and method therefor
03/06/2003US20030042006 Advanced microelectronic heat dissipation package and method for its manufacture
03/06/2003US20030041972 Plasma processing apparatus
03/06/2003US20030041971 Substrate processing system for performing exposure process in gas atmosphere
03/06/2003US20030041970 Wafer processing machine
03/06/2003US20030041968 Substrate processing apparatus
03/06/2003US20030041947 Method for sinter distortion control
03/06/2003US20030041910 Fluid control apparatus
03/06/2003US20030041893 Solar cell, method for manufacturing the same, and apparatus for manufacturing the same
03/06/2003US20030041881 For peeling and removal of disused material such as photoresist films; for use on semiconductor wafers, hard discs, liquid crystal displays, or flat panel displays in lithography
03/06/2003US20030041879 For removing material from the edge of a disk (semiconductor wafer) via etching
03/06/2003US20030041878 Comprises using a brush relative to a rotating wafer which is moved from the center to the outer circumference of the wafer while discharging cleaning liquid (demineralized water)
03/06/2003US20030041877 State of the art constant flow device
03/06/2003US20030041876 Method and device for removing particles on semiconductor wafers
03/06/2003US20030041805 Apparatus for improved low pressure inductively coupled high density plasma reactor
03/06/2003US20030041804 HDP-CVD apparatus
03/06/2003US20030041803 Semiconductor device, a method of manufacturing the semiconductor device, and an apparatus for manufacturing the semiconductor device
03/06/2003US20030041802 Vacuum pumping system and method for monitoring of the same
03/06/2003US20030041799 Modified susceptor for use in chemical vapor deposition process
03/06/2003US20030041798 Coated silicon wafer and process for its production
03/06/2003US20030041796 Method for producing silicon single crystal having no flaw
03/06/2003US20030041762 Method for preventing distortions in a flexibly transferred feature pattern
03/06/2003US20030041761 Method for removing unwanted particles from a surface used in the process of flexibly transferring a feature pattern from an inked surface to a substrate
03/06/2003US20030041456 Method for the manufacture of cooling devices
03/06/2003US20030041455 Connection of electrical contacts utilizing a combination laser and fiber optic push connect system
03/06/2003US20030041452 Filling plugs through chemical mechanical polish
03/06/2003US20030041451 Microelectronic joining processes
03/06/2003DE20217828U1 Contactless transponder for adhesive foil for goods and packaging has semiconductor chip and transponder antenna embedded in adhesive material
03/06/2003DE10147927C1 New poly-o-hydroxyamides, used for producing polybenzoxazoles e.g. dielectric of electronic device, has di(2-hydroxyphenyl)alkane-1,1'-diyl and diphenylalkane-1,1'-diyl groups in chain and unsaturated acyl end-cap groups
03/06/2003DE10141841C1 Verfahren zur Herstellung einer selbstjustierenden Maske A method for preparing a self-aligning mask
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