Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2003
05/08/2003US20030087513 Method for manufacturing semiconductor device
05/08/2003US20030087512 Method of manufacturing a semiconductor device
05/08/2003US20030087510 Method of forming MOS transistor graded junctions using multiple implant of low diffusion specie, and a device formed thereby
05/08/2003US20030087509 Method of making semiconductor device
05/08/2003US20030087508 Method of reducing low-frequency noise for semiconductor devices and circuits
05/08/2003US20030087507 Ozone treatment of a ground semiconductor die to improve adhesive bonding to a substrate
05/08/2003US20030087506 Method of filling substrate depressions with silicon oxide by high-density-plasma vapor phase deposition with participation of H2O2 or H2O as reaction gas
05/08/2003US20030087505 Method and apparatus for adapting a miniature form-factor connector to a standard format fiber optic connector plug
05/08/2003US20030087504 Active wafer cooling during damage engineering implant to enchance buried oxide formation in simox wafers
05/08/2003US20030087503 Process for production of semiconductor substrate
05/08/2003US20030087502 Carrier for used in manufacturing semiconductor encapsulant packages
05/08/2003US20030087501 Capacitor and method of manufacturing the same
05/08/2003US20030087500 Ferroelectric memory device
05/08/2003US20030087499 Process for forming metallized contacts to periphery transistors
05/08/2003US20030087497 Semiconductor device having trench isolation structure and method of fabricating the same
05/08/2003US20030087496 Integrated circuit with a MOS capacitor
05/08/2003US20030087494 Semiconductor device and method for fabricating the same
05/08/2003US20030087493 Scalable flash EEPROM memory cell with floating gate spacer wrapped by control gate, and method of manufacturing the same
05/08/2003US20030087492 Semiconductor device and method of manufacturing the same
05/08/2003US20030087491 Simultaneous formation of bottom electrodes and their respective openings of capacitors in both a memory cell region and logic region
05/08/2003US20030087490 Method for forming an interconnection in a semiconductor element
05/08/2003US20030087489 Semiconductor integrated circuit device
05/08/2003US20030087488 Inductively coupled plasma source for improved process uniformity
05/08/2003US20030087486 Integrated semiconductor light sensor device and corresponding manufacturing process
05/08/2003US20030087485 Dielectric films for narrow gap-fill applications
05/08/2003US20030087484 Metal structures for integrated circuits and methods for making the same
05/08/2003US20030087483 Semiconductor device and method for manufacturing substrate of the same
05/08/2003US20030087482 Shallow trench contact structure to solve the problem or schottky diode leakage
05/08/2003US20030087480 Ferroelectric memory device and method of making the same
05/08/2003US20030087479 Adhesive wafers for die attach application
05/08/2003US20030087478 Semiconductor device and a method of manufacturing the same
05/08/2003US20030087477 Repairable flip clip semiconductor device with excellent packaging reliability and method of manufacturing same
05/08/2003US20030087476 Method of transferring devices, method of arranging devices using the same, and method of manufacturing an image display system
05/08/2003US20030087474 Method of manufacturing modules with an integrated circuit
05/08/2003US20030087472 Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organic precursor compounds
05/08/2003US20030087466 Phototransistor device
05/08/2003US20030087459 Flexible snapshot in endpoint detection
05/08/2003US20030087215 Gas flow through interior cavities; heat exchanging; semiconductors
05/08/2003US20030087197 Biocompatibility protective coating; dielectrics; prevent current leakage
05/08/2003US20030087196 Resist pattern hardening method
05/08/2003US20030087195 Applying electroconductive polymer; masking; exposure to radiation; etching
05/08/2003US20030087194 Pattern formation method
05/08/2003US20030087193 Wavelength-independent exposure pattern generation method and exposure pattern generation system for lithography
05/08/2003US20030087188 Organic anti-reflective coating material and preparation thereof
05/08/2003US20030087187 Thick film photoresist layer laminate, method of manufacturing thick film resist pattern, and method of manufacturing connecting terminal
05/08/2003US20030087185 Organometallic precursor for forming metal pattern and method of forming metal pattern using the same
05/08/2003US20030087184 Mixture containing acid generator and polymer
05/08/2003US20030087181 Polymers, resist compositions and patterning process
05/08/2003US20030087180 Photoresist composition for deep UV radiation containing an additive
05/08/2003US20030087179 Using mixture of alkaline phenolic resin and 1,2-quinoneidazide compound
05/08/2003US20030087167 Method for fabricating a mask for semiconductor structures
05/08/2003US20030087166 Reticle and a method for manufacturing a semiconductor device using the same
05/08/2003US20030087165 Exhaustion, removal of air from photomask and substrate
05/08/2003US20030087130 Magnetic recording media; masking, etching photoresist pattern
05/08/2003US20030087110 Vaporization, decomposition a silicide
05/08/2003US20030087108 Noncracking; protective coatings; low pressure vapor deposition
05/08/2003US20030087096 Carbon film coated member
05/08/2003US20030087088 Resin sealing method for semiconductors and release film used therefor
05/08/2003US20030087082 Siloxane resins
05/08/2003US20030087042 Acid hydrolysis of organosilicon compound; heat treatment inpresence of surfactant
05/08/2003US20030087032 Method for reducing pattern dimension in photoresist layer
05/08/2003US20030086994 Asymmetric transfer molding method and an asymmetric encapsulation made therefrom
05/08/2003US20030086856 For use in optoelectronics and electronic devices; density, hardness
05/08/2003US20030086840 To apply plasma processing on a substrate such as a semiconductor
05/08/2003US20030086775 Mechanism for exchanging chip-carrier plates for use in a hybrid chip-bonding machine
05/08/2003US20030086774 System and method for inhibiting motion of semiconductor wafers in a variable-pressure chamber
05/08/2003US20030086688 Optical disc, recording apparatus, and computer-readable recording medium
05/08/2003US20030086628 Fluid bearings and vacuum chucks and methods for producing same
05/08/2003US20030086459 Semiconductor laser and optical-electronic device
05/08/2003US20030086321 Methods of increasing write selectivity in an MRAM
05/08/2003US20030086313 Magnetic memory device using SOI substrate and method of manufacturing the same
05/08/2003US20030086308 Semiconductor memory device having a trench capacitor and a manufacturing method thereof
05/08/2003US20030086304 Semiconductor memory device
05/08/2003US20030086296 Method of forming and operating trench split gate non-volatile flash memory cell structure
05/08/2003US20030086292 Nonvolatile semiconductor storage device and test method therefor
05/08/2003US20030086290 Semiconductor memory apparatus, semiconductor apparatus, data processing apparatus and computer system
05/08/2003US20030086287 Junction-isolated depletion mode ferroelectric memory devices
05/08/2003US20030086285 Ferroelectric semiconductor memory
05/08/2003US20030086248 Interposer for semiconductor, method for manufacturing same, and semiconductor device using same
05/08/2003US20030086236 Capacitor and semiconductor memory
05/08/2003US20030086183 Projection exposure apparatus for microlithography
05/08/2003US20030086182 Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
05/08/2003US20030086158 Polarization beam splitter for photolithography
05/08/2003US20030086078 Projection exposure apparatus and aberration measurement method
05/08/2003US20030086070 Single aperture optical system for photolithography systems
05/08/2003US20030086046 Reflection-transmission type liquid crystal display device and method for manufacturing the same
05/08/2003US20030086036 Liquid crystal display for enhancing reflection and method of manufacturing the same
05/08/2003US20030085788 Integrated balun and transformer structures
05/08/2003US20030085757 Semiconductor integrated circuit device
05/08/2003US20030085754 Internal power voltage generating circuit
05/08/2003US20030085751 Semiconductor integrated circuit device
05/08/2003US20030085738 Pass-transistor very large scale integration
05/08/2003US20030085730 Apparatus and method for evaluating a wafer of semiconductor material
05/08/2003US20030085728 Device for making pass/fail judgement of semiconductor integrated circuit
05/08/2003US20030085726 Preconditioning integrated circuit for integrated circuit testing
05/08/2003US20030085723 Method and system for compensating thermally induced motion of probe cards
05/08/2003US20030085722 Chip-mounted contact springs
05/08/2003US20030085720 Laser irradiation method and laser irradiation apparatus, and method for fabricating semiconductor device
05/08/2003US20030085663 Electron beam ion source with integral low-temperature vaporizer
05/08/2003US20030085662 Plasma process chamber monitoring method and system used therefor
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