Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2003
05/15/2003US20030089456 Apparatus and method for supplying chemicals in chemical mechanical polishing systems
05/15/2003US20030089455 Member separating apparatus and processing apparatus
05/15/2003US20030089429 Textured-grain-powder metallurgy tantalum sputter target
05/15/2003US20030089395 System and method for using bent pipes in high-purity fluid handling systems
05/15/2003US20030089394 Plugging a device having an access passageway communicating the vacuum microcavity with ambient
05/15/2003US20030089393 Method for producing a solar cell, and solar cell
05/15/2003US20030089382 Novel post etching treatment process for high density oxide etcher
05/15/2003US20030089315 Metal film production apparatus
05/15/2003US20030089314 Plasma CVD film-forming device
05/15/2003US20030089313 Cassette table of a semiconductor fabricating apparatus
05/15/2003US20030089308 Apparatus and method for growth of a thin film
05/15/2003US20030089307 Method and device for growing large-volume oriented monocrystals
05/15/2003US20030089206 Method of aligning a workpiece in a cutting machine
05/15/2003US20030089184 Feeder for polyhedron inspection, and polyhedron inspector
05/15/2003US20030089132 Heat treatment apparatus and heat treatment method of substrate
05/15/2003US20030088995 Method and apparatus for processing wafers under pressure
05/15/2003US20030088978 Process for manufacturing multiple layer wiring substrate onto which thin film capacitor is incorporated
05/15/2003US20030088977 Method and apparatus for gate blocking X-outs during a molding process
05/15/2003US20030088976 Method and apparatus for gate blocking X-outs during a molding process
05/15/2003US20030088973 Method and apparatus for automatically positioning electronic dice within component packages
05/15/2003US20030088959 Wafer transfer apparatus
05/15/2003DE20303815U1 Silicon etching composition used in semiconductor industry contains hydrogen fluoride and chlorine
05/15/2003DE19655164C2 DRAM Memory cell using FET for computer system
05/15/2003DE10227936C1 Method for making contactless chip card modules comprises stamping out module supports from metal strip, on to which electronic components are fitted and plastic injected
05/15/2003CA2465882A1 Method for making a semiconductor photodetector, in particular in the low-energy uv-x domain, and photodetector obtained by said method
05/15/2003CA2465162A1 Silicon on insulator device with improved heat removal and method of manufacture
05/15/2003CA2464405A1 Large area silicon carbide devices and manufacturing methods therefor
05/14/2003EP1311067A1 Integrated series schottky and FET to allow negative drain voltage
05/14/2003EP1311007A1 Piezoelectric actuator, lithographic apparatus and device manufacturing method
05/14/2003EP1311002A1 Semiconductor light-emitting device and method for manufacturing semiconductor light-emitting device
05/14/2003EP1311000A2 Semiconductor memory having storage cells storing multiple bits and a method of manufacturing the same
05/14/2003EP1310998A2 Semiconductor device
05/14/2003EP1310994A1 Nonvolatile memory device and method for manufacturing the same
05/14/2003EP1310992A1 Microparticle arrangement film, electrical connection film, electrical connection structure, and microparticle arrangement method
05/14/2003EP1310991A2 Composite die mounting foil for chip-scale semiconductor packages
05/14/2003EP1310990A1 Bonding method with improved alignment
05/14/2003EP1310989A1 Detergent composition
05/14/2003EP1310988A1 Semiconductor device and method of manufacture thereof
05/14/2003EP1310987A1 Method of producing semiconductor integrated circuit device and method of producing multi-chip module
05/14/2003EP1310986A1 Transfer mechanism for a die presentation package
05/14/2003EP1310981A1 Toroidal low-field reactive gas source
05/14/2003EP1310980A1 Toroidal low-field reactive gas source
05/14/2003EP1310978A1 High performance source for electron beam projection lithography
05/14/2003EP1310962A1 Magnetic memory cell
05/14/2003EP1310934A1 Image display unit and production method for image display unit
05/14/2003EP1310827A2 Photomask with dust-proofing device and exposure method using the same
05/14/2003EP1310582A1 Process for electrolytic copper plating
05/14/2003EP1310319A1 Wire bonder and testing method for wire bonds
05/14/2003EP1310004A2 Organic field-effect transistor (ofet), a production method therefor, an integrated circuit constructed from the same and their uses
05/14/2003EP1310000A1 A power mos transistor comprising a plurality of transistor segments with different threshold voltages
05/14/2003EP1309999A2 Semiconductor component and a method for identifying a semiconductor component
05/14/2003EP1309998A1 Method for electrically connecting a semiconductor component to an electrical subassembly
05/14/2003EP1309997A2 Electrical component assembly and method of fabrication
05/14/2003EP1309995A2 Method and apparatus for measuring parameters of an electronic device
05/14/2003EP1309993A1 Copper interconnects with improved electromigration resistance and low resistivity
05/14/2003EP1309992A2 Method and apparatus for measuring reflectivity of deposited films
05/14/2003EP1309991A2 A method for producing a metal film, a thin film device having such metal film and a liquid crystal display device having such thin film device
05/14/2003EP1309990A1 Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
05/14/2003EP1309989A2 Process for producing semiconductor article using graded expitaxial growth
05/14/2003EP1309988A1 Method for wafer position data retrieval in semiconductor wafer manufacturing
05/14/2003EP1309987A2 Shape accuracy improvement using a novel calibration approach
05/14/2003EP1309986A2 Chuck with heat exchanger and temperature control fluid
05/14/2003EP1309983A2 Spatial light modulator driven photocathode source electron beam pattern generator
05/14/2003EP1309976A1 Photolithographically-patterned out-of-plane coil structures
05/14/2003EP1309940A1 Method for connecting a chip to the antenna of a radio frequency identification device of a contactless chip card variety
05/14/2003EP1309898A2 Antireflective coating compositions
05/14/2003EP1309897A2 Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
05/14/2003EP1309875A2 Device and method for optical inspection of semiconductor wafer
05/14/2003EP1309849A2 Database interpolation method for optical measurement of diffractive microstructures
05/14/2003EP1309820A2 Automatic refill system for ultra pure or contamination sensitive chemicals
05/14/2003EP1309736A1 Sputtering target
05/14/2003EP1309639A1 Compositions and methods for thermosetting molecules in organic compositions
05/14/2003EP1309447A1 Lead-free alloys with improved wetting properties
05/14/2003EP1309424A2 Abrasive pad for cmp
05/14/2003EP1309422A1 Retaining ring for chemical-mechanical polishing head, polishing apparatus, slurry cycle system, and method
05/14/2003EP1309420A1 Soldering method for mounting electric components
05/14/2003EP1233935B1 Method for attaching a body, which is comprised of a metal matrix composite (mmc) material, to a ceramic body
05/14/2003EP1232293B1 Method for regulating sputtering processes
05/14/2003EP1149329B1 Aligning device for assembling microsystems
05/14/2003EP1111508B1 Integrated circuit with calibration means for calibrating an electronic module, and method for calibrating an electronic module in an integrated circuit
05/14/2003EP0979531B1 Silicon carbide field conrolled bipolar switch
05/14/2003EP0871843B1 Mounting member and method for clamping a flat thin conductive workpiece
05/14/2003EP0857336B1 Method and apparatus for identifying characters on a plurality of silicon wafers
05/14/2003EP0836232B1 Tunnelling device and method of producing a tunnelling device
05/14/2003EP0819318B1 A solder bump structure for a microelectronic substrate
05/14/2003EP0745211B1 Grating-grating interferometric alignment system
05/14/2003CN2550898Y Improved crystal circle grinding positioning ring
05/14/2003CN1418374A Vertical electrical interconnestions in stack
05/14/2003CN1418372A Method for forming high quality multiple thickness oxide layers by using high temperature descum
05/14/2003CN1418365A Automated reference cell trimming verify
05/14/2003CN1418330A Method and composition for removing sodium-containing material from microcircuit substrates
05/14/2003CN1418322A ultra high resolution imaging devices
05/14/2003CN1418264A Device providing electrical contact to surface of semiconductor workpiece during metal plating
05/14/2003CN1418134A Method and device for ultrasonic vibration
05/14/2003CN1418056A Workpiece conveying robot
05/14/2003CN1418048A Built-in module in element and its making process
05/14/2003CN1417907A Semiconductor laser device, light pick-up and making equipment and method thereof
05/14/2003CN1417867A Integrated schottky barrier diode and its manufacture
05/14/2003CN1417863A Plate display and its making process
05/14/2003CN1417861A 3D memory equipment with great memory capacity
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