Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2003
05/06/2003US6559030 Method of forming a recessed polysilicon filled trench
05/06/2003US6559029 Method of fabricating semiconductor device having trench isolation structure
05/06/2003US6559028 Method of topography management in semiconductor formation
05/06/2003US6559027 Semiconductor device and process for producing the sme
05/06/2003US6559026 Trench fill with HDP-CVD process including coupled high power density plasma deposition
05/06/2003US6559025 Method for manufacturing a capacitor
05/06/2003US6559023 Method of fabricating a semiconductor device with phosphorous and boron ion implantation, and by annealing to control impurity concentration thereof
05/06/2003US6559022 Method for independent control of polycrystalline silicon-germanium in an HBT
05/06/2003US6559021 Method of producing a Si-Ge base heterojunction bipolar device
05/06/2003US6559020 Bipolar device with silicon germanium (SiGe) base region
05/06/2003US6559018 Silicon implant in a salicided cobalt layer to reduce cobalt-silicon agglomeration
05/06/2003US6559017 Method of using amorphous carbon as spacer material in a disposable spacer process
05/06/2003US6559016 Method of manufacturing low-leakage, high-performance device
05/06/2003US6559015 Fabrication of field effect transistor with dual laser thermal anneal processes
05/06/2003US6559014 Preparation of composite high-K / standard-K dielectrics for semiconductor devices
05/06/2003US6559013 Method for fabricating mask ROM device
05/06/2003US6559012 Method for manufacturing semiconductor integrated circuit device having floating gate and deposited film
05/06/2003US6559011 Dual level gate process for hot carrier control in double diffused MOS transistors
05/06/2003US6559010 Method for forming embedded non-volatile memory
05/06/2003US6559009 Method of fabricating a high-coupling ratio flash memory
05/06/2003US6559008 Non-volatile memory cells with selectively formed floating gate
05/06/2003US6559007 Method for forming flash memory device having a tunnel dielectric comprising nitrided oxide
05/06/2003US6559006 Semiconductor integrated circuit and method for manufacturing the same
05/06/2003US6559005 Method for fabricating capacitor electrodes
05/06/2003US6559004 Method for forming three dimensional semiconductor structure and three dimensional capacitor
05/06/2003US6559003 Method of producing a ferroelectric semiconductor memory
05/06/2003US6559002 Rough oxide hard mask for DT surface area enhancement for DT DRAM
05/06/2003US6559001 Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor
05/06/2003US6559000 Method of manufacturing a capacitor in a semiconductor device
05/06/2003US6558999 Method for forming a storage electrode on a semiconductor device
05/06/2003US6558998 SOI type integrated circuit with a decoupling capacity and process for embodiment of such a circuit
05/06/2003US6558997 Method for fabricating the control and floating gate electrodes without having their upper surface silicided
05/06/2003US6558996 Edge structure for relaxing electric field of semiconductor device having an embedded type diffusion structure
05/06/2003US6558995 Holographic, laser-induced fabrication of indium nitride quantum wires and quantum dots
05/06/2003US6558994 Dual silicon-on-insulator device wafer die
05/06/2003US6558993 Semiconductor device and method of manufacturing the same
05/06/2003US6558992 Method to fabricate flat panel display
05/06/2003US6558991 Laser irradiation apparatus and laser irradiation method
05/06/2003US6558990 SOI substrate, method of manufacture thereof, and semiconductor device using SOI substrate
05/06/2003US6558989 Method for crystallizing silicon film and thin film transistor and fabricating method using the same
05/06/2003US6558988 Method for manufacturing crystalline semiconductor thin film and thin film transistor
05/06/2003US6558987 Thin film transistor and method of fabricating the same
05/06/2003US6558986 Method of crystallizing amorphous silicon thin film and method of fabricating polysilicon thin film transistor using the crystallization method
05/06/2003US6558984 Trench schottky barrier rectifier and method of making the same
05/06/2003US6558983 Semiconductor apparatus and method for manufacturing the same
05/06/2003US6558982 Semiconductor device manufacturing method and mold die
05/06/2003US6558981 Method for making an encapsulated semiconductor chip module
05/06/2003US6558980 Plastic molded type semiconductor device and fabrication process thereof
05/06/2003US6558979 Use of palladium in IC manufacturing with conductive polymer bump
05/06/2003US6558977 Semiconductor device and method for fabricating the same
05/06/2003US6558975 Process for producing semiconductor device
05/06/2003US6558974 Electrical detection of V-groove width
05/06/2003US6558973 Metamorphic long wavelength high-speed photodiode
05/06/2003US6558966 Apparatus and methods of packaging and testing die
05/06/2003US6558965 Measuring BARC thickness using scatterometry
05/06/2003US6558964 Method and apparatus for monitoring a semiconductor wafer during a spin drying operation
05/06/2003US6558963 Method and system for controlling the plasma treatment of a titanium nitride layer formed by a chemical vapor deposition process
05/06/2003US6558962 Method of manufacturing semiconductor devices with use of wafer carrier having conditioning units
05/06/2003US6558883 Apparatus and method for patterning a semiconductor wafer
05/06/2003US6558882 Laser working method
05/06/2003US6558881 Resolution; lithography; semiconductors
05/06/2003US6558879 Photoresist stripper/cleaner compositions containing aromatic acid inhibitors
05/06/2003US6558877 Jet coating method for semiconductor processing
05/06/2003US6558859 Method of checking pattern measurement and image recognition assisting pattern
05/06/2003US6558855 For semiconductor device, integrated circuit device, a superconductor device, micromachine, and electronic devices, in particular suitable for forming very fine patterns
05/06/2003US6558853 Method for manufacturing exposure mask, exposure apparatus and semiconductor device
05/06/2003US6558852 Exposure method, reticle, and method of manufacturing semiconductor device
05/06/2003US6558812 Liquid epoxy resin composition and semiconductor device
05/06/2003US6558802 Silicon-on-silicon hybrid wafer assembly
05/06/2003US6558756 From organosilicon compound
05/06/2003US6558755 Plasma curing process for porous silica thin film
05/06/2003US6558750 Method of processing and plating planar articles
05/06/2003US6558747 Method of forming insulating film and process for producing semiconductor device
05/06/2003US6558739 Titanium nitride/titanium tungsten alloy composite barrier layer for integrated circuits
05/06/2003US6558562 Work piece wand and method for processing work pieces using a work piece handling wand
05/06/2003US6558518 Method and apparatus for plating substrate and plating facility
05/06/2003US6558517 Physical vapor deposition methods
05/06/2003US6558509 Dual wafer load lock
05/06/2003US6558508 Processing apparatus having dielectric plates linked together by electrostatic force
05/06/2003US6558507 Plasma processing apparatus
05/06/2003US6558506 Etching system and etching chamber
05/06/2003US6558505 Method and apparatus for processing semiconductor substrates
05/06/2003US6558478 Method of and apparatus for cleaning substrate
05/06/2003US6558477 Immersing the substrate in water solvent, injecting ozone oxidizer, rotating substrate
05/06/2003US6558476 For processing and cleaning semiconductor wafers
05/06/2003US6558474 Method for rinsing the backside of a semiconductor wafer
05/06/2003US6558471 Scrubber operation
05/06/2003US6558470 Reactor for processing a microelectronic workpiece
05/06/2003US6558463 For forming a uniform film free from uneven coating (striation)
05/06/2003US6558239 Polishing apparatus
05/06/2003US6558233 Wafer polishing method, wafer cleaning method and wafer protective film
05/06/2003US6558229 Polishing apparatus
05/06/2003US6558228 Method of unloading substrates in chemical-mechanical polishing apparatus
05/06/2003US6558226 Polishing apparatus
05/06/2003US6558168 Probe card
05/06/2003US6558158 To heat semiconductor wafers
05/06/2003US6558110 Tray input-output module
05/06/2003US6558107 Robot arm mechanism
05/06/2003US6558100 Vacuum processing apparatus and a vacuum processing system
05/06/2003US6558053 Substrate processing apparatus
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