Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2003
05/22/2003US20030096438 Method of manufacturing image sensor for reducing dark current
05/22/2003US20030096437 Coplanarity inspection system of package and method thereof
05/22/2003US20030096196 Process for curing of a resist which has been applied to a large substrate, and device for carrying out of the process
05/22/2003US20030096195 Methods of masking and etching a semiconductor substrate, and ion implant lithography methods of processing a semiconductor substrate
05/22/2003US20030096193 Lithographic projection apparatus, device manufacturing method and device manufactured thereby
05/22/2003US20030096191 Comprises phenolic resin and polysiloxane; excellent adhesion to metal substrate
05/22/2003US20030096189 Onium salts and positive resist materials using the same
05/22/2003US20030096179 Methods and devices for measuring and adjusting illumination uniformity obtained from a charged-particle illumination-optical system
05/22/2003US20030096177 Capable of minimizing the effect of optical proximity; photoresists; for production of semiconductors
05/22/2003US20030096176 Photomask, microstructure, manufacturing method of photomask, and aligner
05/22/2003US20030096174 Mask and method of manufacturing the same
05/22/2003US20030096098 Semiconductor with coordinatively irregular structures
05/22/2003US20030096090 Etch-stop resins
05/22/2003US20030096085 Greensheet carriers and processing thereof
05/22/2003US20030095910 Method of forming a crystalline phase material
05/22/2003US20030095894 Suctioning the fluid through gel film to filter out the objects; micro-particles can be removed by keeping suction pressure weak to keep rate fixed and to maintain capacity while delaying clogging of second filter
05/22/2003US20030095796 Apparatus for the uniform heating of substrates or of surfaces, and the use thereof
05/22/2003US20030095623 Illumination system that suppresses debris from a ligh source
05/22/2003US20030095472 Chemical concentration control device for semiconductor processing apparatus
05/22/2003US20030095467 Test circuit for testing semiconductor memory
05/22/2003US20030095451 Laser link structure capable of preventing an upper crack and broadening an energy window of a laser beam, and fuse box using the same
05/22/2003US20030095448 Semiconductor integrated circuit device
05/22/2003US20030095445 Semiconductor memory device
05/22/2003US20030095443 System and methods for manufacturing non-volatile semiconductor memory apparatus
05/22/2003US20030095441 Semiconductor memory having storage cells storing multiple bits and a method of driving the same
05/22/2003US20030095440 Nonvolatile semiconductor memory device
05/22/2003US20030095435 Non-volatile semiconductor memory device with a memory array preventing generation of a through current path
05/22/2003US20030095434 Semiconductor integrated circuit device
05/22/2003US20030095429 Semiconductor memory device
05/22/2003US20030095428 6F2 DRAM array, a DRAM array formed on a semiconductive substrate, a method of forming memory cells in a 6F2 DRAM array and a method of isolating a single row of memory cells in a 6F2 DRAM array
05/22/2003US20030095393 Wireless bonded semiconductor device and method for packaging the same
05/22/2003US20030095392 Method and apparatus for supporting circuit component having solder column array interconnects using interposed support shims
05/22/2003US20030095370 Electrostatic chucks
05/22/2003US20030095345 Optical unit, exposure unit and optical devices
05/22/2003US20030095267 Focus masking structures, focus patterns and measurements thereof
05/22/2003US20030095265 Interferometric cyclic error compensation
05/22/2003US20030095247 provided with a substrate, a plurality of measurement patterns, a light blocking film and a plurality of reference patterns
05/22/2003US20030095245 Structure for attaching a pellicle to a photo-mask
05/22/2003US20030095244 Wafer holder
05/22/2003US20030095242 Semiconductor manufacturing apparatus
05/22/2003US20030095241 Interferometric alignment system for use in vacuum-based lithographic apparatus
05/22/2003US20030095240 Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
05/22/2003US20030095227 Method of mounting flexible circuit boards, and display device
05/22/2003US20030095175 Laser beam pattern generator having rotating scanner compensator and method
05/22/2003US20030095116 Reflective type semiconductor display device
05/22/2003US20030095028 Chip inductor and manufacturing method therefor
05/22/2003US20030094995 Fuse circuit
05/22/2003US20030094969 Semiconductor device
05/22/2003US20030094954 Battery voltage detecting circuit
05/22/2003US20030094934 Semiconductor integrated circuit device and method of design of semiconductor integrated circuit device
05/22/2003US20030094824 Wafer clamping mechanism
05/22/2003US20030094773 Rotary vacuum-chuck with water-assisted labyrinth seal
05/22/2003US20030094708 Semiconductor device and method for manufacturing it
05/22/2003US20030094705 Semiconductor device and method of manufacturing the same
05/22/2003US20030094700 Light signal processing system
05/22/2003US20030094698 Semiconductor device and method for fabricating the same
05/22/2003US20030094695 Process for producing a semiconductor chip
05/22/2003US20030094693 Multi-chip module packaging device
05/22/2003US20030094686 Semiconductor device and method for manufacturing same
05/22/2003US20030094685 Semiconductor device and module of the same
05/22/2003US20030094684 Center pad type IC chip with jumpers, method of processing the same and multi chip package
05/22/2003US20030094681 Semiconductor device having chip scale package
05/22/2003US20030094680 Packaging mold with electrostatic discharge protection
05/22/2003US20030094679 Semiconductor device
05/22/2003US20030094678 Wireless bonded semiconductor device and method for packaging the same
05/22/2003US20030094675 Semiconductor device
05/22/2003US20030094674 Semiconductor wafer
05/22/2003US20030094673 Semiconductor device and method having multiple subcollectors formed on a common wafer
05/22/2003US20030094672 Heterojunction bipolar transistor containing at least one silicon carbide layer
05/22/2003US20030094669 Semiconductor device and manufacturing method for the same
05/22/2003US20030094668 Integrated schottky barrier diode and manufacturing method thereof
05/22/2003US20030094662 MOS transistor having a T-shaped gate electrode and method for fabricating the same
05/22/2003US20030094661 Multi-threshold MIS integrated circuit device and circuit design method thereof
05/22/2003US20030094660 Method for fabricating different gate oxide thickness within the same chip
05/22/2003US20030094659 Method of fabricating dual threshold voltage n-channel and p-channel mosfets with a single extra masked implant operation
05/22/2003US20030094658 Thin film transistor and method of manufacturing the same
05/22/2003US20030094657 Cmos-compatible lateral dmos transistor and method for producing such a transistor
05/22/2003US20030094656 Semiconductor integrated circuit
05/22/2003US20030094654 High energy deep oxygen implant creates a deep buried oxide layer and a first Si intermediate layer; lower energy oxygen implant creates a shallow buried oxide layer and a second Si intermediate layer
05/22/2003US20030094653 Method and semiconductor structure for implementing reach through buried interconnect for silicon-on insulator (SOI) devices
05/22/2003US20030094651 Transistor in semiconductor devices and method of manufacturing the same
05/22/2003US20030094650 Trench-gate semiconductor devices and the manufacture thereof
05/22/2003US20030094649 Field effect transistor semiconductor device
05/22/2003US20030094647 Semiconductor memory element, semiconductor device and control method thereof
05/22/2003US20030094646 Semiconductor device and method for manufacturing semiconductor device
05/22/2003US20030094645 Capacitor having a structure capable of restraining deterioration of dielectric film, semiconductor device having the capacitor and method of manufacturing the same
05/22/2003US20030094644 Method for manufacturing semiconductor device and capacitor
05/22/2003US20030094643 Semiconductor device and method for manufacturing the same
05/22/2003US20030094642 Method and apparatus for voltage stiffening in an integrated circuit
05/22/2003US20030094641 Methods of forming semiconductor circuitry, and semiconductor constructions
05/22/2003US20030094640 Semiconductor device and method for driving the same
05/22/2003US20030094639 Semiconductor device having ferroelectric memory cells and method of manufacturing the same
05/22/2003US20030094638 Weak ferroelectric transistor
05/22/2003US20030094637 Semiconductor device, method for fabricating the semiconductor device and semiconductor integrated circuit
05/22/2003US20030094636 Both an insulating gate type transistor for high voltage and one for low voltage are formed in the same step
05/22/2003US20030094635 Semiconductor memory device including multi-layer gate structure
05/22/2003US20030094634 Bonding pad structure of a semiconductor device and method for manufacturing the same
05/22/2003US20030094633 Field effect transistor assemblies, integrated circuitry, and methods of forming field effect transistors and integrated circuitry
05/22/2003US20030094632 Semiconductor device and manufacturing method of the same
05/22/2003US20030094627 Semiconductor device and a method of manufacturing the same
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