Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2003
05/29/2003US20030100196 Compensating chemical mechanical wafer polishing apparatus and method
05/29/2003US20030100195 Semiconductor device having an indium doped dielectric layer located therein and a method of manufacture therefor
05/29/2003US20030100194 Method of manufacturing semiconductor device
05/29/2003US20030100193 Method for forming a dielectric layer in a semiconductor device
05/29/2003US20030100191 Etching liquid
05/29/2003US20030100190 Process for forming a damascene structure
05/29/2003US20030100189 Method for increasing the capacity of an integrated circuit device
05/29/2003US20030100188 Method of forming dual damascene structure
05/29/2003US20030100187 Dispersion containing pyrogenically manufactured abrasive particles with superparamagnetic domains
05/29/2003US20030100186 CMP slurry and method of manufacturing semiconductor device
05/29/2003US20030100184 Method of forming a semiconductor device with a multi-layer WSix film with small grain size structure, and a semiconductor device having a polysilicon layer with a multi-layer WSix film formed thereon
05/29/2003US20030100183 CVD of PtRh with good adhesion and morphology
05/29/2003US20030100182 Method for formation of copper diffusion barrier film using aluminum
05/29/2003US20030100181 Semiconductor device having multi-layer copper line and method of forming the same
05/29/2003US20030100180 Metal contact and process
05/29/2003US20030100179 DRAM and MOS transistor manufacturing
05/29/2003US20030100178 Method for manufacturing a semiconductor device
05/29/2003US20030100177 Method of manufacturing semiconductor device
05/29/2003US20030100176 Metal via contact of a semiconductor device and method for fabricating the same
05/29/2003US20030100175 Low dielectric constant material, process for preparing the same, insulating film comprising the same and semiconductor device
05/29/2003US20030100173 Method of manufacturing semiconductor device
05/29/2003US20030100172 Gate-contact structure and method for forming the same
05/29/2003US20030100171 Method of fabricating system on chip device
05/29/2003US20030100170 Fast diffusion recipe for silicon by NO complexes
05/29/2003US20030100169 Laser treatment device, laser treatment method, and semiconductor device fabrication method
05/29/2003US20030100168 Method of shallow trench isolation
05/29/2003US20030100167 Manufacturing method of semiconductor device
05/29/2003US20030100166 Method for avoiding the effects of lack of uniformity in trench isolated integrated circuits
05/29/2003US20030100165 Use of selective oxidation to improve LDMOS power transistors
05/29/2003US20030100164 Method of forming a capacitor
05/29/2003US20030100163 Method of forming a device
05/29/2003US20030100162 Method for forming capacitor of semiconductor device
05/29/2003US20030100161 Manufacturing method for semiconductor device
05/29/2003US20030100160 Method for making self-registering non-lithographic transistors with ultrashort channel lengths
05/29/2003US20030100159 Method and apparatus for fabricating self-aligned contacts in an integrated circuit
05/29/2003US20030100158 Memory device having buried source/drain region and fabrication thereof
05/29/2003US20030100157 Flash memory with protruded floating gate
05/29/2003US20030100156 Fabrication method of semiconductor device with capacitor
05/29/2003US20030100155 Method for fabricating semiconductor devices having dual gate oxide layers
05/29/2003US20030100153 Method of manufacturing a semiconductor memory, and method of manufacturing a semiconductor device comprising the semiconductor memory
05/29/2003US20030100152 Semiconductor device and method for manufacturing the same
05/29/2003US20030100151 Method of manufacturing a semiconductor device
05/29/2003US20030100150 Semiconductor device and manufacturing method thereof
05/29/2003US20030100149 Method for manufacturing and structure of semiconductor device with polysilicon definition structure
05/29/2003US20030100147 Method of affixing a heat sink to a substrate and package thereof
05/29/2003US20030100146 Method of fabricating multilayer ceramic substrate
05/29/2003US20030100145 Metal plated spring structure
05/29/2003US20030100144 Process for chemically mechanically polishing wafers
05/29/2003US20030100143 Forming defect prevention trenches in dicing streets
05/29/2003US20030100142 Semiconductor package and method for fabricating the same
05/29/2003US20030100141 Method and apparatus for gate blocking X-outs during a molding process
05/29/2003US20030100138 Manufacturing method for two-dimensional image detectors and two-dimensional image detectors
05/29/2003US20030100136 Thin film membrane structure
05/29/2003US20030100134 Drift region positioned on cathode comprising multiple doped epilayers
05/29/2003US20030100133 System-on-chip breakpoint synchronization
05/29/2003US20030100132 Method of forming a test pattern, method of measuring an etching characteristic using the same and a circuit for measuring the etching characteristic
05/29/2003US20030099908 Photoresist stripping solution and a method of stripping photoresists using the same
05/29/2003US20030099907 Process of rectifying a wafer thickness
05/29/2003US20030099900 Chemical amplification type positive resist composition
05/29/2003US20030099899 Photoimageable composition
05/29/2003US20030099845 Monomolecular films and monomolecular built-up films having conductivity; electronic devices
05/29/2003US20030099844 For producing silica/organic polymer composite thin film and porous silica thin film; semiconductors
05/29/2003US20030099843 Reduced dielectric constant
05/29/2003US20030099776 Film forming method and film forming apparatus
05/29/2003US20030099767 Bumping process for chip scale packaging
05/29/2003US20030099766 Forming a device layer on a substrate; forming at least one disposable part in selected region of device layer; patterning the device layer in the selected region; selectively removing the at least one disposable part from device layer
05/29/2003US20030099737 Forming tool for forming a contoured microelectronic spring mold
05/29/2003US20030099535 Manufacturing apparatus of semiconductor device having introducing section and withdrawing section
05/29/2003US20030099527 Substrate transfer apparatus, substrate processing apparatus and holding table
05/29/2003US20030099392 Method for detecting defects
05/29/2003US20030099324 X-ray exposure method, x-ray exposure apparatus, fine structure and semiconductor device
05/29/2003US20030099210 Radio frequency data communications device
05/29/2003US20030099145 Low voltage operation of static random access memory
05/29/2003US20030099132 Semiconductor memory device including bit select circuit
05/29/2003US20030099131 Semiconductor memory cell and semiconductor component as well as manufacturing methods therefore
05/29/2003US20030099085 Surface flashover resistant capacitors and method for producing same
05/29/2003US20030099084 Surface flashover resistant capacitors and method for producing same
05/29/2003US20030099049 Wire bonding apparatus
05/29/2003US20030099047 Correction of birefringence in cubic crystalline optical systems
05/29/2003US20030099040 Illumination system with a plurality of individual gratings
05/29/2003US20030099034 Reflective projection lens for EUV-photolithography
05/29/2003US20030099026 Defective pixel compensation method
05/29/2003US20030098977 Alignment measuring method of photolithography process
05/29/2003US20030098970 Method and apparatus for detecting aberrations in a projection lens utilized for projection optics
05/29/2003US20030098966 Stage system and stage driving method for use in exposure apparatus
05/29/2003US20030098962 Positioning apparatus and method for manufacturing same
05/29/2003US20030098961 Stage apparatus and exposure apparatus
05/29/2003US20030098960 Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses
05/29/2003US20030098940 Conductive member and liquid crystal display having the same
05/29/2003US20030098935 Liquid crystal display having reduced flicker
05/29/2003US20030098859 Semiconductor device and liquid crystal panel driver device
05/29/2003US20030098767 Process for fabricating an electronic component incorporating an inductive microcomponent
05/29/2003US20030098766 Process for fabricating an electronic component incorporating an inductive microcomponent
05/29/2003US20030098741 Semiconductor integrated circuit
05/29/2003US20030098739 Reduced potential generation circuit operable at low power-supply potential
05/29/2003US20030098736 Semiconductor integrated circuit device and method of manufacturing the same
05/29/2003US20030098730 Semiconductor integrated circuit device
05/29/2003US20030098728 Semiconductor device
05/29/2003US20030098707 Method of controlling bond process quality by measuring wire bond features
05/29/2003US20030098706 Charge detector semiconductor component, system comprising a charge detector semiconductor component and a reference semiconductor component, wafer, use of a wafer, and method for the qualitative and quantitative measurement of charging of a wafer
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