Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2003
06/03/2003US6573179 Forming a strong interface between interconnect and encapsulation to minimize electromigration
06/03/2003US6573178 Manufacturing method for semiconductor device and semiconductor manufacturing apparatus
06/03/2003US6573177 Protection layer to prevent under-layer damage during deposition
06/03/2003US6573176 Method for forming dual damascene line structure
06/03/2003US6573175 Dry low k film application for interlevel dielectric and method of cleaning etched features
06/03/2003US6573174 Method for reducing surface defects of semiconductor substrates
06/03/2003US6573173 Method for forming a copper interconnect using a multi-platen chemical mechanical polishing (CMP) process
06/03/2003US6573172 Methods for improving carrier mobility of PMOS and NMOS devices
06/03/2003US6573171 Semiconductor device and manufacturing process thereof
06/03/2003US6573170 Process for multilayer wiring connections and bonding pad adhesion to dielectric in a semiconductor integrated circuit device
06/03/2003US6573169 Highly conductive composite polysilicon gate for CMOS integrated circuits
06/03/2003US6573168 A wet or dry etching, in which high etching selectivity between dummy dielectric pattern and interdielectric layer pattern is used
06/03/2003US6573167 Using a carbon film as an etch hardmask for hard-to-etch materials
06/03/2003US6573166 Method of fabricating a LDD with different resistance value
06/03/2003US6573165 Method of providing polysilicon spacer for implantation
06/03/2003US6573164 Method of epitaxially growing device structures with sharp layer interfaces utilizing HVPE
06/03/2003US6573163 Method of optimizing channel characteristics using multiple masks to form laterally crystallized ELA poly-Si films
06/03/2003US6573162 Laser irradiation apparatus and method of fabricating a semiconductor device
06/03/2003US6573161 Thin film semiconductor device fabrication process
06/03/2003US6573160 Method of recrystallizing an amorphous region of a semiconductor
06/03/2003US6573159 Method for thermally annealing silicon wafer and silicon wafer
06/03/2003US6573158 Methods of processing semiconductor wafer and producing IC card, and carrier
06/03/2003US6573157 Method of manufacturing semiconductor device, narrow pitch connector, electrostatic actuator, piezoelectric actuator, ink jet head, ink jet printer, micromachine, liquid crystal panel, and electronic device
06/03/2003US6573156 Low defect method for die singulation and for structural support for handling thin film devices
06/03/2003US6573155 Contact structure of substrates of touch panel and method of bonding the same
06/03/2003US6573153 Method of manufacturing semiconductor device
06/03/2003US6573152 Self-planarizing process for shallow trench isolation
06/03/2003US6573150 Integration of CVD tantalum oxide with titanium nitride and tantalum nitride to form MIM capacitors
06/03/2003US6573149 Semiconductor device having a metal gate with a work function compatible with a semiconductor device
06/03/2003US6573148 Methods for making semiconductor inductor
06/03/2003US6573147 Method of forming a semiconductor device having contact using crack-protecting layer
06/03/2003US6573146 Methods of manufacturing complementary bipolar transistors
06/03/2003US6573145 Process for producing an MOS field effect transistor with a recombination zone
06/03/2003US6573144 Method for manufacturing a semiconductor device having lateral MOSFET (LDMOS)
06/03/2003US6573143 Trench transistor structure and formation method
06/03/2003US6573142 Method to fabricate self-aligned source and drain in split gate flash
06/03/2003US6573141 In-situ etch and pre-clean for high quality thin oxides
06/03/2003US6573140 Process for making a dual bit memory device with isolated polysilicon floating gates
06/03/2003US6573139 Method of fabricating cell of flash memory device
06/03/2003US6573137 Single sided buried strap
06/03/2003US6573136 Isolating a vertical gate contact structure
06/03/2003US6573135 Simultaneous formation of bottom electrodes and their respective openings of capacitors in both a memory cell region and logic region
06/03/2003US6573134 Dual metal gate CMOS devices and method for making the same
06/03/2003US6573133 Method of forming spacers in CMOS devices
06/03/2003US6573132 Method for fabricating a semiconductor device having contacts self-aligned with a gate electrode thereof
06/03/2003US6573131 Silica zeolite low-k dielectric thin films and methods for their production
06/03/2003US6573130 Process for manufacturing electronic devices having non-salicidated non-volatile memory cells, non-salicidated HV transistors, and salicidated-junction LV transistors
06/03/2003US6573129 Gate electrode formation in double-recessed transistor by two-step etching
06/03/2003US6573127 Thin-film transistor and method of making same
06/03/2003US6573126 Process for producing semiconductor article using graded epitaxial growth
06/03/2003US6573125 Method of opening repair fuse of semiconductor device
06/03/2003US6573123 Semiconductor chip package and manufacturing method thereof
06/03/2003US6573122 Wafer level insulation underfill for die attach
06/03/2003US6573121 Semiconductor device, method for fabricating the semiconductor device, lead frame and method for producing the lead frame
06/03/2003US6573119 Semiconductor device and method of manufacture thereof
06/03/2003US6573112 Semiconductor device manufacturing method
06/03/2003US6573111 Method of making a semiconductor device with capacitor element
06/03/2003US6573031 Apparatus and method of thermal processing and method of pattern formation
06/03/2003US6573030 Forming integrated circuit by thermally decomposing gas mixture comprising hydrocarbon and inert gas
06/03/2003US6573029 Patterning capacitors of dynamic random access memories with increaced capacity and reduced area without deformation
06/03/2003US6573028 Reducing number of fabricating steps
06/03/2003US6573027 Forming pattern having narrow spacings with no thinning
06/03/2003US6573023 Masking, screen printing; for field emission display in electronics/semiconductors
06/03/2003US6573015 Automatic realization of best focus position quickly and accurately
06/03/2003US6573014 Dividing patterns
06/03/2003US6573012 Derived from dienes having protected hydroxyl groups; dur-ability, etching resistance, reproducibility, adhesiveness, resolution; deep ultraviolet light lithography
06/03/2003US6572982 Electromigration-resistant copper microstructure
06/03/2003US6572980 Curable epoxy or episulfide containing aromatic compound and curing agent; repair, replacement, recovery and/or recycling of electronics
06/03/2003US6572974 Modification of infrared reflectivity using silicon dioxide thin films derived from silsesquioxane resins
06/03/2003US6572963 Process of forming a pattern on a substrate
06/03/2003US6572944 Structure for fabricating a special-purpose die using a polymerizable tape
06/03/2003US6572925 Doped silica
06/03/2003US6572923 Asymmetric organocyclosiloxanes and their use for making organosilicon polymer low-k dielectric film
06/03/2003US6572917 Manufacturing method of magnetic memory device
06/03/2003US6572781 Microelectronic packaging methods and components
06/03/2003US6572755 Pressing workpiece against polishing surface while causing relative motion between workpiece and polishing surface, supplying an electrolyte solution to polishing surface, applying a voltage between both surfaces
06/03/2003US6572742 Apparatus for electrochemical fabrication using a conformable mask
06/03/2003US6572732 Parallel-plate electrode plasma reactor having an inductive antenna coupling power through a parallel plate electrode
06/03/2003US6572731 Self-siphoning CMP tool design for applications such as copper CMP and low-k dielectric CMP
06/03/2003US6572710 For cleaning semiconductor substrate; efficiency
06/03/2003US6572701 System for separating and recovering waste fluid and spin coater
06/03/2003US6572468 Clean room device
06/03/2003US6572461 Method for producing wafer notches with rounded corners and a tool therefor
06/03/2003US6572454 Apparatus and method of conditioning polishing pads of chemical-mechanical polishing system
06/03/2003US6572453 Multi-fluid polishing process
06/03/2003US6572449 Dewatered CMP polishing compositions and methods for using same
06/03/2003US6572440 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization
06/03/2003US6572438 Structure of polishing head of polishing apparatus
06/03/2003US6572321 Loader conveyor for substrate processing system
06/03/2003US6572320 Robot for handling workpieces in an automated processing system
06/03/2003US6572285 Photoresist developing nozzle, photoresist developing apparatus, and photoresist developing method
06/03/2003US6572252 System and method for illuminating a semiconductor processing system
06/03/2003US6572010 Coaters comprising electrolytic cells, fluid flow enclosures, etching, cleaning, conveyor lithography and substrate handling stations used for electrodeposition of metals and/or alloys on semiconductor substrates
06/03/2003US6572005 Bump-joining method
06/03/2003US6572001 Bonding system
06/03/2003US6571859 Heat sink and process and molding tool for production of same
06/03/2003US6571806 Method for drying a substrate
06/03/2003US6571657 Multiple blade robot adjustment apparatus and associated method
06/03/2003US6571530 Component taping method and apparatus
06/03/2003US6571488 System for sensing position of spin dryer cover
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