Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2003
06/12/2003US20030106924 Electronic circuit device and method for manufacturing the same
06/12/2003US20030106923 Wire bonding apparatus with spurious vibration releasing structure
06/12/2003US20030106881 Dry surface cleaning apparatus
06/12/2003US20030106866 Heat sinks holding kit and storage rack for semiconductor chip
06/12/2003US20030106831 Wafer enclosure sealing arrangement for wafer containers
06/12/2003US20030106830 Wafer support attachment for a semi-conductor wafer transport container
06/12/2003US20030106807 Semiconductors; integrated circuits
06/12/2003US20030106789 Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece
06/12/2003US20030106776 Work conveying system and traveling path sealing structure in the work conveying system
06/12/2003US20030106707 Packaged integrated circuit and method therefor
06/12/2003US20030106647 Apparatus for holding an object to be processed
06/12/2003US20030106645 Vacuum plasma processor apparatus and method
06/12/2003US20030106642 Semiconductor processing module with integrated feedback/feed forward metrology
06/12/2003US20030106597 Gas supply unit
06/12/2003US20030106575 Wafer guide and cleaning apparatus having the same
06/12/2003US20030106574 Clean method and apparatus for vacuum holding of substrates
06/12/2003US20030106573 Using a remover including carbon dioxide (CO2), an additive for removing the residues and a cosolvent for dissolving the additive in CO2 at a pressurized fluid condition; for removing resist from semiconductor
06/12/2003US20030106572 System and method for ozonated water cleaning
06/12/2003US20030106571 For semiconductor wafers; substrate waiting portion arranged below a processing portion, and a substrate lifter capable of vertical movement that moves processing portion to the waiting portion
06/12/2003US20030106567 Semiconductor substrate cleaning apparatus, method of cleaning semiconductor substrate and method of manufacturing semiconductor device
06/12/2003US20030106566 Method and apparatus for cleaning substrates
06/12/2003US20030106495 Heat treatment system and method
06/12/2003US20030106494 Gas supplying apparatus and method of testing the same for clogs
06/12/2003US20030106482 High resistivity silicon wafer having electrically inactive dopant and method of producing same
06/12/2003US20030106443 Method of resin-sealing electronic parts, and stencil printing plate used therefor
06/12/2003US20030106239 System and method for drying semiconductor substrate
06/12/2003US20030106213 Angled flying lead wire bonding process
06/12/2003US20030106212 Method of attaching a heat sink to an IC package
06/12/2003US20030106209 Method and apparatus for manufacturing known good semiconductor die
06/12/2003US20030106208 Mounting and curing chips on a substrate so as to minimize gap
06/12/2003US20030106196 Sputter mask plate having surfaces and apertures having dual counterbore construction
06/12/2003DE10142073C1 Verfahren und Vorrichtung zum Verbinden und Trennen von Systemwafern und Trägerwafern Method and apparatus for connecting and disconnecting system wafers and carrier wafers
06/12/2003CA2468520A1 Strain balanced nitride heterojunction transistors and methods of fabricating strain balanced nitride heterojunction transistors
06/11/2003EP1318548A2 Ferroelectric capacitor having upper electrode lamination and manufacure thereof
06/11/2003EP1318546A1 Semiconductor device
06/11/2003EP1318544A1 Method for manufacturing semiconductor device packages
06/11/2003EP1318543A2 Semiconductor device and manufacturing method thereof
06/11/2003EP1318542A1 Cleaning gasses and etching gases
06/11/2003EP1318541A2 Aligning mask segments to provide an assembled mask for producing oled devices
06/11/2003EP1318539A1 Corrector for the correction of first-order colour aberrations, first grade
06/11/2003EP1318523A1 Method of controlling magnetization easy axis in ferromagnetic films using voltage, ultrahigh-density, low power, nonvolatile magnetic memory using the control method and method of writing information on the magnetic memory
06/11/2003EP1318490A2 Manufacturing system incorporating telemetry and/or remote control
06/11/2003EP1318432A1 Photoresist residue removing liquid composition
06/11/2003EP1318430A2 Reticle chambers and reticle cassettes providing temperature control and ready exchange of reticles for exposure
06/11/2003EP1318425A2 Catadioptric optical system and exposure apparatus equipped with the same
06/11/2003EP1318424A2 Non-contacting holding device for an optical component
06/11/2003EP1318392A1 Surface inspection system
06/11/2003EP1318210A2 Method for deposition and etching of a dielectric layer
06/11/2003EP1318209A1 Sputtering apparatus and film forming method
06/11/2003EP1318208A2 Method of depositing heusler alloy thin film by co-sputtering
06/11/2003EP1318078A1 Packaging bag for semiconductor wafer and method of packaging semiconductor wafer using the packaging bag
06/11/2003EP1317994A2 Positioning device for semiconductor objects
06/11/2003EP1317806A1 Method and device for measuring cavitation
06/11/2003EP1317801A2 Thick film millimeter wave transceiver module
06/11/2003EP1317778A1 Photovoltaic component and module
06/11/2003EP1317777A1 Semiconductor memory cell comprising a trench capacitor and a select transistor and a method for the production thereof
06/11/2003EP1317775A2 Materials having low dielectric constants and methods of making
06/11/2003EP1317773A2 Direct build-up layer on an encapsulated die package having a moisture barrier structure
06/11/2003EP1317772A1 Semiconductor interconnection structure and method of fabrication
06/11/2003EP1317771A1 Improved semiconductor structure and method of fabrication
06/11/2003EP1317770A2 Formation of self-aligned passivation for interconnect to minimize electromigration
06/11/2003EP1317769A2 Connection for conducting high frequency signal between a circuit and a discrete electrical component
06/11/2003EP1317768A1 Dry isotropic removal of inorganic anti-reflective coating after poly gate etching
06/11/2003EP1317767A1 Method for selective metal film layer removal using carbon dioxide jet spray
06/11/2003EP1317766A1 Ultra fast rapid thermal processing chamber and method of use
06/11/2003EP1317764A2 Faraday system for ion implanters
06/11/2003EP1317694A2 Adaptive sampling method for improved control in semiconductor manufacturing
06/11/2003EP1317692A2 Method for improving image quality and for increasing writing speed during exposure of light-sensitive layers
06/11/2003EP1218202B1 Method and compositions for printing substrates
06/11/2003EP1190322B1 Semiconductor parallel tester
06/11/2003EP1090077A4 Molecular coatings
06/11/2003EP1072040B1 Non-volatile storage latch
06/11/2003EP1015843B1 Lever arm for a scanning microscope
06/11/2003EP0962048B1 System for high power RF plasma processing
06/11/2003EP0888618B1 Second-layer phase change memory array on top of a logic device
06/11/2003CN1423841A Thin film transistors
06/11/2003CN1423840A High speed trench DMOS
06/11/2003CN1423837A Method of fabrication dual threshold voltage N-channel and P-channel MOSFETS with a single extra masked implant operation
06/11/2003CN1423836A Junction field-effect transistor and method of manufacture thereof
06/11/2003CN1423835A Inhibition of titanium corrosion
06/11/2003CN1423834A UV prtreatment process for ultra-thin oxynitride for formation of silicon nitridefilms
06/11/2003CN1423833A Method and apparatus for plasma cleaning of workpieces
06/11/2003CN1423832A Method for establishing ultra-thin gate insulator using anneal in ammonia
06/11/2003CN1423830A A vertically configured chamber used for multiple processes
06/11/2003CN1423828A Method and apparatus for controlling the volume of a plasma
06/11/2003CN1423827A Method and apparatus for producing uniform process rates
06/11/2003CN1423826A Temperature control system for plasma processing apparatus
06/11/2003CN1423825A Plasma processing system with dynamic gas distribution control
06/11/2003CN1423824A Materials and gas chemistries for processing systems
06/11/2003CN1423760A Chemically amplified resist and a resist composition
06/11/2003CN1423750A Probe card device and probe for use therein
06/11/2003CN1423674A Flame retardant epoxy molding compositions
06/11/2003CN1423596A Thermal mass transfer donor element with light-to-heat conversion layer
06/11/2003CN1423420A Multi-threshold MIS integrated circuit device and circuit designing method
06/11/2003CN1423367A Method and apparatus for directiy changing over electrolytical formed autenna
06/11/2003CN1423346A Method for forming semiconductor element with metal base board
06/11/2003CN1423343A Semiconductor of storage unit storage unit storing multiple places and driving method thereof
06/11/2003CN1423339A Integrated circuit with double floated gate-pole storage crystal cell and manufacturing method thereof
06/11/2003CN1423336A Three-dimensional read-only memory integrated circuit
06/11/2003CN1423335A Semiconductor memory device
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