Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2003
06/10/2003US6576977 Low cost bias technique for dual plate integrated capacitors
06/10/2003US6576976 Semiconductor integrated circuit with an insulation structure having reduced permittivity
06/10/2003US6576973 N-type silicon carbide layer of low doping level formed by epitaxy on a silicon carbide substrate of high doping level, in which the periphery of the active area of the diode is coated with a P-type epitaxial silicon carbide layer
06/10/2003US6576970 Bonding pad structure of semiconductor device and method for fabricating the same
06/10/2003US6576969 Magneto-resistive device having soft reference layer
06/10/2003US6576967 Semiconductor structure and process for forming a metal oxy-nitride dielectric layer
06/10/2003US6576966 Field-effect transistor having multi-part channel
06/10/2003US6576965 Semiconductor device with lightly doped drain layer
06/10/2003US6576964 Dielectric layer for a semiconductor device having less current leakage and increased capacitance
06/10/2003US6576963 Semiconductor device having transistor
06/10/2003US6576957 Etch-stopped SOI back-gate contact
06/10/2003US6576956 Semiconductor integrated circuit and method of manufacturing the same
06/10/2003US6576954 Trench MOSFET formed using selective epitaxial growth
06/10/2003US6576953 Vertical semiconductor component with source-down design and corresponding fabrication method
06/10/2003US6576952 Trench DMOS structure with peripheral trench with no source regions
06/10/2003US6576951 Four-terminal system for reading the state of a phase qubit
06/10/2003US6576950 EEPROM type non-volatile memory cell and corresponding production method
06/10/2003US6576949 Integrated circuit having optimized gate coupling capacitance
06/10/2003US6576948 Integrated circuit configuration and method for manufacturing it
06/10/2003US6576947 Cylindrical capacitor and method for fabricating same
06/10/2003US6576946 Semiconductor device comprising capacitor cells, bit lines, word lines, and MOS transistors in a memory cell area over a semiconductor substrate
06/10/2003US6576945 Structure and method for a compact trench-capacitor DRAM cell with body contact
06/10/2003US6576944 Self-aligned nitride pattern for improved process window
06/10/2003US6576943 Semiconductor device for reducing leak currents and controlling a threshold voltage and using a thin channel structure
06/10/2003US6576942 Diffusion prevention film and a semiconductor storage device
06/10/2003US6576941 Ferroelectric capacitors on protruding portions of conductive plugs having a smaller cross-sectional size than base portions thereof
06/10/2003US6576940 Semiconductor device having a solid state image sensing device and manufacturing method thereof
06/10/2003US6576939 Two conductive layers have different oxidation rates when exposed to an oxidizing atmosphere
06/10/2003US6576937 Semiconductor device and power amplifier using the same
06/10/2003US6576932 Increasing the brightness of III-nitride light emitting devices
06/10/2003US6576929 Silicon carbide semiconductor device and manufacturing method
06/10/2003US6576928 Semiconductor device capacitor with high permittivity tantalum pentoxide/niobium pentoxide dielectric
06/10/2003US6576927 Semiconductor device and GaN-based field effect transistor for use in the same
06/10/2003US6576926 Semiconductor device and fabrication method thereof
06/10/2003US6576924 Semiconductor device having at least a pixel unit and a driver circuit unit over a same substrate
06/10/2003US6576922 Ferroelectric capacitor plasma charging monitor
06/10/2003US6576919 Method of determining movement sequence and apparatus for realizing it
06/10/2003US6576912 Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window
06/10/2003US6576899 Direct detection of low-energy charged particles using metal oxide semiconductor circuitry
06/10/2003US6576873 Semiconductor manufacturing apparatus for photolithographic process
06/10/2003US6576870 Apparatus with double laser beams for cutting two bonded glass substrates and method thereof
06/10/2003US6576867 Method and apparatus for removal of mold flash
06/10/2003US6576860 Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate
06/10/2003US6576848 Integrated circuit chip wiring structure with crossover capability and method of manufacturing the same
06/10/2003US6576681 Antireflective porogens
06/10/2003US6576572 Method of heating a substrate using a variable surface hot plate for improved bake uniformity
06/10/2003US6576571 Process of vapor phase growth of nitride semiconductor
06/10/2003US6576570 Method for improving thickness uniformity of deposited ozone-teos silicate glass layers
06/10/2003US6576569 Method of plasma-assisted film deposition
06/10/2003US6576568 Using organosilicon compound, nonionic surfactant and acid catalyst
06/10/2003US6576567 Film deposition method and apparatus for semiconductor devices
06/10/2003US6576566 Apparatus and method for forming thin film at low temperature and high deposition rate
06/10/2003US6576565 RTCVD process and reactor for improved conformality and step-coverage
06/10/2003US6576564 Photo-assisted remote plasma apparatus and method
06/10/2003US6576563 Method of manufacturing a semiconductor device employing a fluorine-based etch substantially free of hydrogen
06/10/2003US6576562 Manufacturing method of semiconductor device using mask pattern having high etching resistance
06/10/2003US6576561 Gas assisted method for applying resist stripper and gas-resist stripper combinations
06/10/2003US6576560 Method for avoiding the fluorination of the metal contact of the semiconductor device
06/10/2003US6576559 Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses
06/10/2003US6576558 High aspect ratio shallow trench using silicon implanted oxide
06/10/2003US6576557 Semiconductor processing methods
06/10/2003US6576556 Method of manufacturing semiconductor device and method of manufacturing infrared image sensor
06/10/2003US6576555 Method of making upper conductive line in dual damascene having lower copper lines
06/10/2003US6576554 Slurry for CMP, method of forming thereof and method of manufacturing semiconductor device including a CMP process
06/10/2003US6576553 Chemical mechanical planarization of conductive material
06/10/2003US6576552 Method for polishing semiconductor device
06/10/2003US6576551 Chemical mechanical polish planarizing method with pressure compensating layer
06/10/2003US6576550 ‘Via first’ dual damascene process for copper metallization
06/10/2003US6576549 Fabrication of a metalized blind via
06/10/2003US6576548 Method of manufacturing a semiconductor device with reliable contacts/vias
06/10/2003US6576547 Residue-free contact openings and methods for fabricating same
06/10/2003US6576546 Method of enhancing adhesion of a conductive barrier layer to an underlying conductive plug and contact for ferroelectric applications
06/10/2003US6576545 Semiconductor devices with dual nature capping/ARC layers on fluorine doped silica glass inter-layer dielectrics and method of forming capping/ARC layers
06/10/2003US6576544 Local interconnect
06/10/2003US6576543 Method for selectively depositing diffusion barriers
06/10/2003US6576541 Method and structure for producing bumps on an IC package substrate
06/10/2003US6576540 Method for fabricating substrate within a Ni/Au structure electroplated on electrical contact pads
06/10/2003US6576539 Semiconductor chip assembly with interlocked conductive trace
06/10/2003US6576538 Technique for high efficiency metalorganic chemical vapor deposition
06/10/2003US6576537 Flash memory cell and method for fabricating a flash memory cell
06/10/2003US6576536 Ultra narrow lines for field effect transistors
06/10/2003US6576535 Carbon doped epitaxial layer for high speed CB-CMOS
06/10/2003US6576534 Method for forming a semiconductor
06/10/2003US6576533 Method of forming semiconductor thin film of group III nitride compound semiconductor.
06/10/2003US6576532 Semiconductor device and method therefor
06/10/2003US6576531 Method for cutting semiconductor wafers
06/10/2003US6576530 Method of fabricating shallow trench isolation
06/10/2003US6576529 Method of forming an alignment feature in or on a multilayered semiconductor structure
06/10/2003US6576528 Capacitor for semiconductor memory device and method of manufacturing the same
06/10/2003US6576527 Semiconductor device and method for fabricating the same
06/10/2003US6576526 Darc layer for MIM process integration
06/10/2003US6576525 Damascene capacitor having a recessed plate
06/10/2003US6576524 Method of making a prismatic capacitor
06/10/2003US6576522 Methods for deuterium sintering
06/10/2003US6576521 Method of forming semiconductor device with LDD structure
06/10/2003US6576520 Amorphous carbon layer for improved adhesion of photoresist and method of fabrication
06/10/2003US6576519 Method and apparatus for fabricating self-aligned contacts in an integrated circuit
06/10/2003US6576518 Method of manufacturing a mask ROM semiconductor device
06/10/2003US6576517 Method for obtaining a multi-level ROM in an EEPROM process flow
06/10/2003US6576516 High voltage power MOSFET having a voltage sustaining region that includes doped columns formed by trench etching and diffusion from regions of oppositely doped polysilicon
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