Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2003
06/05/2003US20030102158 Laminate having plated microvia interconnects and method for forming the same
06/05/2003US20030102156 Ball grid array package
06/05/2003US20030102154 Methods of making anisotropic conductive elements for use in microelectronic packaging
06/05/2003US20030102117 Heat radiation fin using a carbon fiber reinforced resin as heat radiation plates standing on a substrate
06/05/2003US20030102087 Plasma processing apparatus and processing method
06/05/2003US20030102084 Cluster tool for wafer processing having an electron beam exposure module
06/05/2003US20030102083 Apparatus and method for monitoring plasma processing apparatus
06/05/2003US20030102082 Sample separating apparatus and method, and substrate manufacturing method
06/05/2003US20030102079 Method of joining components
06/05/2003US20030102019 Centrifugal spray processor and retrofit kit
06/05/2003US20030102017 Substrate processing apparatus
06/05/2003US20030102016 Conveying by sliding over surface; washing, distribution of fluid, drying
06/05/2003US20030102015 Semiconductor handling; barrier to prevent fluid flow; hermetic sealed door; spraying cleaning fluids
06/05/2003US20030102008 Method and system providing high flux of point of use activated reactive species for semiconductor processing
06/05/2003US20030101935 Dose uniformity control for plasma doping systems
06/05/2003US20030101934 Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processes
06/05/2003US20030101929 Substrate processing apparatus
06/05/2003US20030101928 Dual cup spin coating system
06/05/2003US20030101927 Apparatus and method for growth of a thin film
06/05/2003US20030101618 Wafer dryers for semiconductor cleaning apparatuses
06/05/2003US20030101616 Surface tension effect dryer with porous vessel walls
06/05/2003US20030101615 Apparatus and method for preventing a wafer mapping system of an SMIF system from being polluted by corrosive gases remaining on wafers
06/05/2003US20030101613 Cleaning efficiency improvement in a high density plasma process chamber using thermally hot gas
06/05/2003US20030101612 Apparatus, method and system for the treatment of a wafer
06/05/2003US20030101584 Bump and method of forming bump
06/05/2003US20030101583 Method for assembling die package
06/05/2003US20030101582 Adjusting fillet geometry to couple a heat spreader to a chip carrier
06/05/2003US20030101577 Modular substrate measurement system
06/05/2003US20030101576 Apparatus for mounting semiconductor chips
06/05/2003US20030101575 Manufacturing system incorporating telemetry and/or remote control
06/05/2003DE20220315U1 Device for etching semiconductor body has substrate electrode arranged in etching chamber, and units for etching semiconductor body received by electrode
06/05/2003DE19942447C2 Speicherzellenanordnung und Verfahren zu deren Betrieb Memory cell arrangement and method of operation
06/05/2003DE10137872C1 Wire bond contact e.g. for contacting semiconducting chips has transition between flattened wire end, wire near intermediate contact surface on which electrically conducting surface is formed
06/05/2003CA2467703A1 Mesoporous materials and methods
06/04/2003EP1317139A2 An image sensor clock driver having efficient energy consumption
06/04/2003EP1317044A2 Semiconductor integrated circuit
06/04/2003EP1317036A2 Semiconductor laser diode and method for fabricating the same
06/04/2003EP1317002A2 Poly-silicon layer of a thin film transistor and display device having the same
06/04/2003EP1317001A1 A semiconductor device
06/04/2003EP1316999A1 Method and device of contacting power electronic devices
06/04/2003EP1316996A2 Semiconductor device
06/04/2003EP1316995A1 Semiconductor device and method for manufacturing the same
06/04/2003EP1316994A2 Use of fluoropolymer coating for planarizing and passivating integrated circuit devices
06/04/2003EP1316992A2 Method for processing a semiconductor wafer and laminate substrate used as a support for said semiconductor wafer in said method
06/04/2003EP1316991A1 Method of polishing semiconductor wafer
06/04/2003EP1316990A2 Positioning apparatus and method for manufacturing same
06/04/2003EP1316989A2 Method and apparatus for calibrating marking position in chip scale marker
06/04/2003EP1316974A1 Fabrication process for electronic component with incorporated microinductance
06/04/2003EP1316912A2 Protection of exposed semiconductor chip using thin polymer coatings
06/04/2003EP1316871A2 Reduced potential generation circuit operable at low power-supply potential
06/04/2003EP1316851A2 Multiple exposure method with reduction of printed assist features
06/04/2003EP1316848A2 Optical member for photolithography and method for evaluating the same
06/04/2003EP1316832A1 Relay image optical system, and illuminating optical device and exposure system provided with the optical system
06/04/2003EP1316803A2 Lithographic contact elements
06/04/2003EP1316626A2 Transparent conductive layer forming method, transparent conductive layer formed by the method, and material comprising the layer
06/04/2003EP1316522A2 Spool gripper and method of handling a spool using the same
06/04/2003EP1316394A2 A robot arm composed of two parallelogramms having a good resistance to deformation
06/04/2003EP1316393A1 Abrasive machine and method of abrading a workpiece using a pressure vessel
06/04/2003EP1316245A1 Electromagnetic radiation generation using a laser produced plasma
06/04/2003EP1316116A1 Organic field effect transistor, method for structuring an ofet and integrated circuit
06/04/2003EP1316115A2 Metal catalyst technique for texturing silicon solar cells
06/04/2003EP1316111A2 Method of processing a semiconductor wafer
06/04/2003EP1316110A2 Electrostatic chuck with porous regions
06/04/2003EP1316109A1 A method of forming a bottom-gate thin film transistor
06/04/2003EP1316108A1 Low-dielectric silicon nitride film and method of forming the same, semiconductor device and fabrication process thereof
06/04/2003EP1316107A2 Method of forming a pre-metal dielectric film on a semiconductor substrate
06/04/2003EP1316106A2 High density mram cell array
06/04/2003EP1316091A2 Mtj mram parallel-parallel architecture
06/04/2003EP1316090A2 Non-volatile passive matrix and method for readout of the same
06/04/2003EP1316050A2 Smart load port with integrated carrier monitoring and fab-wide carrier management system
06/04/2003EP1315997A1 Resist pattern swelling material, and method for patterning using same
06/04/2003EP1315996A1 A method of illuminating a photomask using chevron illumination
06/04/2003EP1315854A2 Apparatus and method for cleaning a bell jar in a barrel epitaxial reactor
06/04/2003EP1315852A1 Epitaxial wafer apparatus
06/04/2003EP1315792A2 Composition for cleaning chemical mechanical planarization apparatus
06/04/2003EP1315667A1 Single molecule array on silicon substrate for quantum computer
06/04/2003EP1315605A2 A mold
06/04/2003EP1315598A2 Method and apparatus for measuring a polishing condition
06/04/2003EP1216476B1 Self-erasing memory cell
06/04/2003EP1144158B1 Stiffly bonded thin abrasive wheel
06/04/2003EP1135693B1 Probe card for probing wafers with raised contact elements
06/04/2003EP1135690B1 Lithographic contact elements
06/04/2003EP1092233A4 Method of forming a thin film
06/04/2003EP1084001B1 Wafer loading apparatus
06/04/2003EP0951063B1 Process for producing a semiconductor device
06/04/2003EP0921871B1 Removal of material by radiation applied at an oblique angle
06/04/2003EP0895706B1 Method and apparatus for generating x-ray or euv radiation
06/04/2003EP0834100B1 Photolithographic apparatus
06/04/2003EP0812258B1 Electrical feedthroughs for ceramic circuit board support substrates
06/04/2003CN2554797Y Mechane base structure of semiconductor device processing equipment
06/04/2003CN1422442A A high voltage thin film transistor with improved on-state characteristics and method for making same
06/04/2003CN1422439A Method of manufacturing a heterojunction BICOMS integrated circuit
06/04/2003CN1422438A Wafer preparation apparatus
06/04/2003CN1422395A Self-compensating mark arrangement for stepper alignment
06/04/2003CN1422315A Die-attaching paste and semiconductor device
06/04/2003CN1422314A System for the preferential removal of silicon oxide
06/04/2003CN1422310A Coating composition for the production of insulating thin films
06/04/2003CN1422200A Integrated chemical-mechanical polishing
06/04/2003CN1421935A Polycrystalline silicon layer of thin film transistor and display thereof
06/04/2003CN1421934A MOS element with double gate insulating layer and its manufacture
1 ... 4667 4668 4669 4670 4671 4672 4673 4674 4675 4676 4677 4678 4679 4680 4681 4682 4683 4684 4685 4686 4687 ... 6590