Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2003
06/05/2003US20030104709 Method for heat treatment of silicon wafers and silicon wafer
06/05/2003US20030104708 CVD plasma assisted lower dielectric constant sicoh film
06/05/2003US20030104707 System and method for improved thin dielectric films
06/05/2003US20030104706 Wet-etching method and method for manufacturing semiconductor device
06/05/2003US20030104705 Method of forming ohmic electrode
06/05/2003US20030104704 Method for fabricating semiconductor device
06/05/2003US20030104703 Cleaning composition and method of washing a silicon wafer
06/05/2003US20030104702 Method of patterning lines in semiconductor devices
06/05/2003US20030104701 Method for manufacturing an extended-wing capacitor and the extended-wing capacitor
06/05/2003US20030104699 Slurry for chemical mechanical polishing for copper and method of manufacturing semiconductor device using the slurry
06/05/2003US20030104697 Dry clean method instead of traditional wet clean after metal etch
06/05/2003US20030104696 Method of manufacturing compound semiconductor wafer
06/05/2003US20030104695 Halogen addition for improved adhesion of CVD copper to barrier
06/05/2003US20030104694 Method of fabricating a nickel silicide on a substrate
06/05/2003US20030104693 Use of fluoropolymer coating for planarizing and passivating integrated circuit devices
06/05/2003US20030104692 Method of making a semiconductor device that has copper damascene interconnects with enhanced electromigration reliability
06/05/2003US20030104691 Method for applying uniform pressurized film across wafer
06/05/2003US20030104690 Semiconductor device
06/05/2003US20030104689 Manufacturing method of semiconductor device
06/05/2003US20030104688 Gas dome dielectric system for ULSI interconnects
06/05/2003US20030104687 Temporary chip attach structure with thin films
06/05/2003US20030104686 Semiconductor device and method for manufacturing the same
06/05/2003US20030104684 Iridium conductive electrode/barrier structure and method for same
06/05/2003US20030104683 Method for manufacturing an under-bump metallurgy layer
06/05/2003US20030104682 Semiconductor device, manufacturing method therefor, and semiconductor manufacturing apparatus
06/05/2003US20030104681 Patterned SOI regions on semiconductor chips
06/05/2003US20030104680 Process for the removal of copper from polished boron-doped silicon wafers
06/05/2003US20030104679 Backside metallization on microelectronic dice having beveled sides for effective thermal contact with heat dissipation devices
06/05/2003US20030104678 Method of separating two layers of material from one another
06/05/2003US20030104677 Method of fabricating a semiconductor device using trench isolation method including hydrogen annealing step
06/05/2003US20030104676 Novel method to achieve STI planarization
06/05/2003US20030104675 Method for buffer STI scheme with a hard mask layer as an oxidation barrier
06/05/2003US20030104674 Semiconductor memory device with memory cells having same characteristics and manufacturing method for the same
06/05/2003US20030104673 Method of forming a high K metallic dielectric layer
06/05/2003US20030104672 Method and structure for reducing leakage current in capacitors
06/05/2003US20030104671 Semiconductor integrated circuit device and method of manufacturing the same
06/05/2003US20030104670 Method for fabricating buried bit lines of a mask rom
06/05/2003US20030104669 Methods of forming capacitors and methods of forming capacitor dielectric layers
06/05/2003US20030104668 Capacitor structure of semiconductor device and method for forming the same
06/05/2003US20030104667 Capacitor constructions comprising perovskite-type dielectric materials, and methods of forming capacitor constructions comprising perovskite-type dielectric materials
06/05/2003US20030104666 Method for forming dielectric stack without interfacial layer
06/05/2003US20030104665 Nonvolatile memory device and method of manufacturing same
06/05/2003US20030104664 Silicon film, semiconductor device, and process for forming silicon films
06/05/2003US20030104663 Multiple work function gates
06/05/2003US20030104662 Thin film semiconductor device, production process and information displays
06/05/2003US20030104661 Semiconductor device and fabrication method therefor
06/05/2003US20030104660 Semiconductor device
06/05/2003US20030104659 Method of fabricating semiconductor device
06/05/2003US20030104658 SOI hybrid structure with selective epitaxial growth of silicon
06/05/2003US20030104657 Transfer mold semiconductor packaging processes
06/05/2003US20030104654 Recessed encapsulated microelectronic devices and methods for formation
06/05/2003US20030104653 Recessed encapsulated microelectronic devices and methods for formation
06/05/2003US20030104652 Semiconductor chip package and method of manufacturing same
06/05/2003US20030104651 Low temperature hermetic sealing method having passivation layer
06/05/2003US20030104646 System and method for fabricating a transistor
06/05/2003US20030104645 Method for fabricating semiconductor device
06/05/2003US20030104644 Process for optically erasing charge buildup during fabrication of an integrated circuit
06/05/2003US20030104641 Method of manufacturing a semicondutor device
06/05/2003US20030104640 Method for improving substrate alignment
06/05/2003US20030104639 Method of inspecting holes using charged-particle beam
06/05/2003US20030104638 Method of fabricating capacitor of semiconductor device
06/05/2003US20030104637 Method for manufacturing quantum dotbased manetic random access memory ( mram)
06/05/2003US20030104636 Method and article for concentrating fields at sense layers
06/05/2003US20030104322 Developing solution for photoresist
06/05/2003US20030104320 Solvent free photoresist strip and residue removal processing for post etching of low-k films
06/05/2003US20030104319 Of sub-micron dimensions; ratio of hole-diameter to hole-distance is narrowed to an optimum range of off axis illumination.
06/05/2003US20030104292 Semiconductor device and fabrication method therefor
06/05/2003US20030104290 Resist openings are provided in advance with shapes that compensate for the deformation that occurs when the openings shrink, these openings attain the proper shape after undergoing shrinking and deformation.
06/05/2003US20030104289 Resist openings are provided in advance with shapes that compensate for the deformation that occurs when the openings shrink, these openings attain the proper shape after undergoing shrinking and deformation.
06/05/2003US20030104287 Method of manufacturing mask for electron beam lithography and mask blank for electron beam lithography
06/05/2003US20030104286 Hole printing by packing and unpacking using alternating phase-shifting masks
06/05/2003US20030104225 Process for producing silica-based film, silica-based film, insulating film, and semiconductor device
06/05/2003US20030104222 Arsenic as an n-type dopant; resistivity of 10 Omega cm to 0. 001 Omega cm; nitrogen concentration of 1 x 1013 to 1 x 1015 atoms/cm3; excellent gettering characteristics.
06/05/2003US20030104186 Ceramic substrate
06/05/2003US20030104141 Atmospheric pressure; thin film deposits on silicon surfaces for solar cells
06/05/2003US20030104126 Method for depositing refractory metal layers employing sequential deposition techniques
06/05/2003US20030104120 Immersion deposition of indium or tin on a copper surface; annealing; optional oxidation
06/05/2003US20030103883 Method for treating exhaust gas containing fluorine-containing compound
06/05/2003US20030103871 Minimum volume oven for producing uniform pyrolytic oxide coatings on capacitor anodes
06/05/2003US20030103840 Robot arm mechanism
06/05/2003US20030103836 Substrate processing apparatus with independently configurable integral load locks
06/05/2003US20030103835 Pod cover removing-installing apparatus
06/05/2003US20030103396 Semiconductor memory device capable of switching output data width
06/05/2003US20030103393 Magnetic memory device and method for manufacturing the same
06/05/2003US20030103384 Semiconductor memory and method of driving the same
06/05/2003US20030103382 Nonvolatile semiconductor memory device and manufacturing method thereof
06/05/2003US20030103378 Magnetic random access memory
06/05/2003US20030103375 Junction-isolated depletion mode ferroelectric memory devices
06/05/2003US20030103374 Memory device
06/05/2003US20030103372 Ferroelectric memory and operating method therefor
06/05/2003US20030103371 Method of controlling magnetization easy axis in ferromagnetic films using voltage, ultrahigh-density, low power, nonvolatile magnetic memory using the control method, and method of writing information on the magnetic memory
06/05/2003US20030103367 Quantum dot-based magnetic random access memory (mram) and method for manufacturing same
06/05/2003US20030103339 Image sensor of a quad flat package
06/05/2003US20030103338 Electronic package having multiple-zone interconnects and methods of manufacture
06/05/2003US20030103301 On chip smart capacitors
06/05/2003US20030103203 Surface inspection system
06/05/2003US20030103195 Mask for proximity field optical exposure, exposure apparatus and method therefor
06/05/2003US20030103181 Liquid crystal display device
06/05/2003US20030103176 Reflection type liquid crystal display device and process for producing the same
06/05/2003US20030103155 Image sensor clock driver having efficient energy consumption
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