Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2003
07/24/2003US20030136684 Positioning a substrate with a pad partially submersed in the electrolyte, monitoring an electrical signal by a computer
07/24/2003US20030136665 Methods of etching insulative materials, of forming electrical devices, and of forming capacitors
07/24/2003US20030136664 Enclosure containing water support and magnet
07/24/2003US20030136573 Semiconductor device
07/24/2003US20030136523 Component bonder and bonding tool
07/24/2003US20030136520 Ceramic substrate support
07/24/2003US20030136519 Matching circuit and plasma processing apparatus
07/24/2003US20030136517 Vacuum-processing apparatus and method for vacuum-processing an object
07/24/2003US20030136516 Gas diffussion plate for use in ICP etcher
07/24/2003US20030136515 Processing apparatus
07/24/2003US20030136514 Method of supercritical processing of a workpiece
07/24/2003US20030136513 Semiconductor manufacturing apparatus
07/24/2003US20030136512 Device manufacturing-related apparatus, reticle, and device manufacturing method
07/24/2003US20030136511 Method and apparatus for monitoring a process by employing principal component analysis
07/24/2003US20030136446 Gas isolation box
07/24/2003US20030136432 Method and apparatus for transferring chips
07/24/2003US20030136431 Method and apparatus for cleaning of microelectronic workpieces after chemical-mechanical planarization
07/24/2003US20030136429 Vapor cleaning and liquid rinsing process vessel
07/24/2003US20030136425 Radiation absorption by by-products; determination, calibration; for semiconductors
07/24/2003US20030136423 Semiconductor device production method and semiconductor device production apparatus
07/24/2003US20030136422 Selectively clean various surfaces of a microelectronic workpiece using vibrational, megasonics energy
07/24/2003US20030136365 Exhaust pipe with reactive by-product adhesion preventing means and method of preventing the adhesion
07/24/2003US20030136343 Apparatus for sealing a vacuum chamber
07/24/2003US20030136341 Wafer lift pin for manufacturing a semiconductor device
07/24/2003US20030136333 Preparation method of a coating of gallium nitride
07/24/2003US20030136332 In situ application of etch back for improved deposition into high-aspect-ratio features
07/24/2003US20030136331 Crystal growth method of oxide, cerium oxide, promethium oxide, multi-layered structure of oxides, manufacturing method of field effect transistor, manufacturing method of ferroelectric non-volatile memory and ferroelectric non-volatile memory
07/24/2003US20030136309 Stage device and angle detecting device
07/24/2003US20030136087 Apparatus and method for populating transport tapes
07/24/2003US20030136055 Abrasive composition containing organic particles for chemical mechanical planarization
07/24/2003US20030135997 Conductive material and method for filling via-hole
07/24/2003US20030135996 Electronic device and a method of manufacturing the same
07/24/2003DE10153615C1 Electronic component manufacturing method has several components formed on components sections of lead frame before separation from latter
07/24/2003CA2474112A1 Plasma display panel having trench discharge cell and method of fabricating the same
07/24/2003CA2473734A1 Adaptive threshold voltage control with positive body bias for n and p-channel transistors
07/24/2003CA2471596A1 Contamination suppression in chemical fluid deposition
07/23/2003EP1329964A2 Piezoelectric element, liquid jetting head, and method for manufacturing thereof
07/23/2003EP1329961A2 Semiconductor light-emitting element and method of manufacturing the same
07/23/2003EP1329959A1 Heterojunction biopolar transistor and semiconductor integrated circuit device using the same
07/23/2003EP1329957A2 Memory structure and method of making
07/23/2003EP1329956A2 Semiconductor device and its manufacturing method
07/23/2003EP1329955A2 Process for forming a multicolor display
07/23/2003EP1329952A2 Method for fixing chip carriers
07/23/2003EP1329950A2 Magnetoresistive integrated circuit device and method of manufacturing the same
07/23/2003EP1329949A2 Semiconductor device and method of manufacturing semiconductor device
07/23/2003EP1329948A1 High speed silicon etching method
07/23/2003EP1329946A2 Manufacturing method of semiconductor device including a laser crystallization step
07/23/2003EP1329938A2 Ion irradiation system
07/23/2003EP1329937A2 Annular illumination method for charged particle projection optics
07/23/2003EP1329895A2 High-density magnetic random access memory device and method of operating the same
07/23/2003EP1329771A2 Method of two dimensional feature model calibration and optimization
07/23/2003EP1329770A1 Lithographic apparatus and device manufacturing method
07/23/2003EP1329710A2 Pattern test device
07/23/2003EP1329686A2 Integrated measuring instrument
07/23/2003EP1329526A1 High purity zirconium or hafnium, sputtering target comprising the high purity zirconium or hafnium and thin film formed using the target, and method for producing high purity zirconium or hafnium and method for producing powder of high purity zirconium or hafnium
07/23/2003EP1329290A2 Chemical mechanical planarization or polishing pad with sections having varied groove patterns
07/23/2003EP1328982A2 Device enclosures and devices with integrated battery
07/23/2003EP1328977A1 Method for producing a gate oxide formed on a semiconductor substrate
07/23/2003EP1328975A2 Method of fabricating heterojunction photodiodes integrated with cmos
07/23/2003EP1328972A2 Vertical transistor dram cell and method of making the same
07/23/2003EP1328971A2 Improved test structures and methods for inspecting and utilizing the same
07/23/2003EP1328970A2 Method for producing a dmos transistor
07/23/2003EP1328969A1 Miniaturised ldd-type mos transistors
07/23/2003EP1328968A1 Method and device for cleaning a semiconductor wafer
07/23/2003EP1328967A1 Highly selective ionic lithography method
07/23/2003EP1328966A2 System and method to control radial delta temperature
07/23/2003EP1328965A1 Treatment device for wafers
07/23/2003EP1328964A1 Monolithic lead-salt infrared radiation detectors
07/23/2003EP1328847A1 Fabrication of nanoelectronic circuits
07/23/2003EP1328774A1 Improved overlay alignment measurement mark
07/23/2003EP1328601A2 Energy-beam-curable thermal-releasable pressure-sensitive adhesive sheet and method for producing cut pieces using the same
07/23/2003EP1328571A1 A process for preparing organic silicate polymer
07/23/2003EP1328403A1 A method for separating a film and a substrate
07/23/2003EP1328373A2 Method and materials for printing particle-enhanced electrical contacts
07/23/2003EP1328372A1 Control of laser machining
07/23/2003EP1277232A4 Three dimensional device integration method and integrated device
07/23/2003EP1227912A4 Methods and apparatuses for planarizing microelectronic substrate assemblies
07/23/2003EP0981936A4 Plasma focus high energy photon source
07/23/2003EP0946900B1 Lithographic pneumatic support device with controlled gas supply
07/23/2003EP0942583B1 A display type image sensor
07/23/2003EP0840941B1 Method of and apparatus for controlling reactive impedances of a matching network connected between an rf source and an rf plasma processor
07/23/2003CN2562363Y Extra-thin IC package device
07/23/2003CN1432196A 双极型晶体管 Bipolar transistor
07/23/2003CN1432194A In situ and ex situ etching process for STI with oxide collar application
07/23/2003CN1432193A Method and device for fleed out control in solder bonding
07/23/2003CN1432192A Method of doping silicon with phosphorus and growing oxide on silicon in presence of steam
07/23/2003CN1432191A Mfg. method of monocrystal silicon (SOI) on insulator
07/23/2003CN1432190A Enhanced resist strip in dielectric ethcher using downstream plasma
07/23/2003CN1432187A Method and appts. for controlling ion implantation during vacuum fluctuation
07/23/2003CN1432147A Flow control of process gas in semiconductor mfg.
07/23/2003CN1432146A Plug and play sensor integration for process module
07/23/2003CN1432142A 多光束图案生成器 The multi-beam pattern generator
07/23/2003CN1432125A Method and appts. for controlling level of liquids
07/23/2003CN1432071A Visibly marked parts and method for using same
07/23/2003CN1431788A Method by using signal transmission dynamic analysis to assist analysis of circuit cross talk
07/23/2003CN1431719A Silicon field-effect transistors on quasi insulators and implement method
07/23/2003CN1431718A Multigrid thin film transistor utilizing metal for inducing horizontal crystallizing and its mfg. method
07/23/2003CN1431717A Structure for lowering series resistor between source and drain in silicon transistors on insulator as well as implement method
07/23/2003CN1431716A Semiconductor device and mfg. method of semiconductor device
07/23/2003CN1431714A Semi-conductor device and its mfg. method