Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2003
07/31/2003US20030142539 Spin switch and magnetic storage element using it
07/31/2003US20030142538 Semiconductor memory
07/31/2003US20030142533 Semiconductor device and method for driving the same
07/31/2003US20030142528 Semiconductor device
07/31/2003US20030142526 Semiconductor integrated circuit device
07/31/2003US20030142459 Integrated circuit
07/31/2003US20030142458 Storage nodes of stacked capacitors and methods for manufacturing the same
07/31/2003US20030142410 Exposure apparatus, control method thereof, and device manufacturing method using the same
07/31/2003US20030142346 IC chip, print apparatus, and heat generation warning method
07/31/2003US20030142322 Wavefront splitting element for EUV light and phase measuring apparatus using the same
07/31/2003US20030142321 Positioning stage device
07/31/2003US20030142313 Position detection apparatus and exposure apparatus
07/31/2003US20030142300 Ring chuck to hold 200 and 300 MM wafer
07/31/2003US20030142286 Exposing pattern on a semiconductor substrate in a shape adjusted with a first degree of freedom; exposing exposing a second pattern, while second pattern is aligned with first pattern, in a shape adjusted with a second degree of freedom
07/31/2003US20030142283 EUV condenser with non-imaging optics
07/31/2003US20030142280 Lithographic apparatus and device manufacturing method
07/31/2003US20030142260 Liquid crystal display device and method for manufacturing the same
07/31/2003US20030142198 Plasma light source apparatus, exposure apparatus and its control method and device fabrication method
07/31/2003US20030142052 Drive circuit including a plurality of transistors characteristics of which are made to differ from one another, and a display apparatus including the drive circuit
07/31/2003US20030141926 Semiconductor integrated circuit device
07/31/2003US20030141922 256 Meg dynamic random access memory
07/31/2003US20030141915 Delay control circuit device, and a semiconductor integrated circuit device and a delay control method using said delay control circuit device
07/31/2003US20030141905 Logical circuit and semiconductor device
07/31/2003US20030141898 Programmable logic devices with function-specific blocks
07/31/2003US20030141886 Semiconductor test board for fine ball pitch ball grid array package
07/31/2003US20030141884 Contactor having conductive particles in a hole as a contact electrode
07/31/2003US20030141861 Probe station
07/31/2003US20030141825 Close coupled match structure for RF drive electrode
07/31/2003US20030141807 Display device
07/31/2003US20030141784 Megasonic probe energy director
07/31/2003US20030141782 Adhesive connection for a stress-sensitive component
07/31/2003US20030141769 Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatus
07/31/2003US20030141606 For use in manufacturing semiconductor device
07/31/2003US20030141603 Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument
07/31/2003US20030141601 Semiconductor device with tapered contact hole and wire groove
07/31/2003US20030141599 A structure for forming a laser circuit having low penetration ohmic contact providing impurity gettering and the resultant laser circuit
07/31/2003US20030141597 Semiconductor apparatus having contacts of multiple heights and method of making same
07/31/2003US20030141596 Wiring board, semiconductor device, and method of manufacturing wiring board
07/31/2003US20030141595 System and method for providing mechanical planarization of a sequential build up substrate for an integrated circuit package
07/31/2003US20030141594 Semiconductor device with source line having reduced resistance and manufacturing method therefor
07/31/2003US20030141593 Flip-chip without bumps and polymer for board assembly
07/31/2003US20030141592 Dual cure B-stageable underfill for wafer level
07/31/2003US20030141589 Encapsulated high-frequency electrical circuit
07/31/2003US20030141588 Semiconductor device
07/31/2003US20030141587 Split-gate power module and method for suppressing oscillation therein
07/31/2003US20030141586 Module with adhesively attached heat sink
07/31/2003US20030141584 Variable rotational assignment of interconnect levels in integrated circuit fabrication
07/31/2003US20030141583 Stacked package
07/31/2003US20030141582 Stack type flip-chip package
07/31/2003US20030141575 Semiconductor package with die pad having recessed portion
07/31/2003US20030141574 Wiring line for high frequency
07/31/2003US20030141573 Electron beam annealing of metals, alloys, nitrides and silicides
07/31/2003US20030141572 Apparatus and method for investigating semiconductors wafer
07/31/2003US20030141571 Semiconductor device and manufacturing method thereof
07/31/2003US20030141570 Efficiency
07/31/2003US20030141569 Fin-type resistors
07/31/2003US20030141568 Semiconductor device and manufacturing method thereof
07/31/2003US20030141567 Method of improving copper interconnects of semiconductor devices for bonding
07/31/2003US20030141566 Method of simultaneously manufacturing a metal oxide semiconductor device and a bipolar device
07/31/2003US20030141565 Diode
07/31/2003US20030141560 Forming gate dielectric layer over a substrate; forming a silicon nitride barrier layer by reacting tetrachlorosilane with ammonia through a chemical vapor deposition, whereby the silicon nitride barrier layer blocks diffusion of impurities
07/31/2003US20030141559 Efficiency
07/31/2003US20030141558 Semiconductor integrated circuit device and a method of manufacturing thereof
07/31/2003US20030141557 Method for manufacturing semiconductor integrated circuit device
07/31/2003US20030141556 Semiconductor memory device
07/31/2003US20030141555 Butting contact structure and method incorporating with a silicide inserted between a contact region and a conductor for a small contact window
07/31/2003US20030141554 Method for fabricating a semiconductor device having contacts self-aligned with a gate electrode thereof
07/31/2003US20030141552 Semiconductor devices and methods of manufacturing the same
07/31/2003US20030141551 Having T-shaped gate structure; efficiency
07/31/2003US20030141550 Transistor with reduced short channel effects and method
07/31/2003US20030141549 Efficiency
07/31/2003US20030141548 High mobility transistors in soi and method for forming
07/31/2003US20030141547 SOI semiconductor device and method for producing the same
07/31/2003US20030141546 MOS semiconductor device and method of manufacturing the same
07/31/2003US20030141545 Semiconductor device
07/31/2003US20030141543 Body contact mosfet
07/31/2003US20030141542 Insulated gate semiconductor device and method of manufacturing the same
07/31/2003US20030141541 Dual-bit flash memory cells for forming high-density memory arrays
07/31/2003US20030141540 Nonvolatile semiconductor memory device and method for fabricating the same
07/31/2003US20030141538 Semiconductor device, nonvolatile semiconductor storage apparatus using the device, and manufacture method of the device
07/31/2003US20030141537 System for multiple input floating gate structures
07/31/2003US20030141536 Integrated circuit with a dielectric layer exposed to a hydrogen-bearing nitrogen source
07/31/2003US20030141535 Fabrication method for flash memory
07/31/2003US20030141534 Method of fabricating a polysilicon capacitor utilizing FET and bipolar base polysilicon layers
07/31/2003US20030141533 Semiconductor integrated circuit device and manufacturing method thereof
07/31/2003US20030141532 Non-volatile semiconductor memory device of which bit line withstand voltage can be increased
07/31/2003US20030141531 Semiconductor device having capacitor
07/31/2003US20030141530 Semiconductor device and manufacturing method thereof
07/31/2003US20030141529 Semiconductor apparatus having a built-in-electric coil and a method of making the semiconductor apparatus
07/31/2003US20030141528 Semiconductor memory device and method for producing the same
07/31/2003US20030141527 Memory devices, capacitors
07/31/2003US20030141525 Forming a transistor body on a substrate; implanting a source at first end and implanting a drain at secon end of transistor body; forming gate structures adjacent the transistor body vertical edge
07/31/2003US20030141524 Organic semiconductor device and method
07/31/2003US20030141521 Semiconductor device and method of manufacturing the same
07/31/2003US20030141520 Semiconductor device manufacturing method
07/31/2003US20030141519 Partially relaxed channel HEMT device
07/31/2003US20030141518 Semiconductor device and equipment for communication system
07/31/2003US20030141514 Method of manufacturing semiconductor device having trench filled up with gate electrode
07/31/2003US20030141513 Manufacturing process of pn junction diode device and pn junction diode device
07/31/2003US20030141512 Semiconductor component and method for fabricating a semiconductor component
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