| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/15/2003 | US6593190 Non-volatile memory device having a bit line contact pad and method for manufacturing the same |
| 07/15/2003 | US6593189 Semiconductor memory reducing current consumption and narrow channel effect and method of manufacturing the same |
| 07/15/2003 | US6593188 Non-volatile memory device having a silicide layer and fabrication method thereof |
| 07/15/2003 | US6593187 Method to fabricate a square poly spacer in flash |
| 07/15/2003 | US6593186 Method for manufacturing non-volatile semiconductor memory device |
| 07/15/2003 | US6593185 Method of forming embedded capacitor structure applied to logic integrated circuit |
| 07/15/2003 | US6593184 Semiconductor device with stacked memory and logic substrates and method for fabricating the same |
| 07/15/2003 | US6593183 Semiconductor processing method using a barrier layer |
| 07/15/2003 | US6593182 Method for forming multiple gate oxide layer with the plasma oxygen doping |
| 07/15/2003 | US6593181 Tailored insulator properties for devices |
| 07/15/2003 | US6593180 Method of manufacturing semiconductor device |
| 07/15/2003 | US6593179 Method of manufacturing a semiconductor device |
| 07/15/2003 | US6593178 BI-CMOS integrated circuit |
| 07/15/2003 | US6593177 Self aligned method of forming a semiconductor memory array of floating gate memory cells, and a memory array made thereby |
| 07/15/2003 | US6593175 Method of controlling a shape of an oxide layer formed on a substrate |
| 07/15/2003 | US6593174 Field effect transistor having dielectrically isolated sources and drains and method for making same |
| 07/15/2003 | US6593173 Low defect density, thin-layer, SOI substrates |
| 07/15/2003 | US6593171 Stereolithographic methods for fabricating hermetic semiconductor device packages and semiconductor devices including stereolithographically fabricated hermetic packages |
| 07/15/2003 | US6593170 Semiconductor wafer dividing method |
| 07/15/2003 | US6593169 Method of making hybrid integrated circuit device |
| 07/15/2003 | US6593168 Method and apparatus for accurate alignment of integrated circuit in flip-chip configuration |
| 07/15/2003 | US6593165 Circuit-incorporating light receiving device and method of fabricating the same |
| 07/15/2003 | US6593163 Double-sided trench fill for electrical isolation of microelectromechanical system structures |
| 07/15/2003 | US6593161 System and method for cleaning ozone oxidation |
| 07/15/2003 | US6593158 Semiconductor memory and manufacturing method of the same |
| 07/15/2003 | US6593156 Non-destructive inspection method |
| 07/15/2003 | US6593155 Method for determination of cure and oxidation of spin-on dielectric polymers |
| 07/15/2003 | US6593154 Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafers |
| 07/15/2003 | US6593153 Method of and apparatus for measuring lattice-constant, and computer program |
| 07/15/2003 | US6593151 Method for regular detection of phosphorus striations in a multi-layered film stack |
| 07/15/2003 | US6593149 Manufacturing method for ferroelectric thin film using sol-gel process |
| 07/15/2003 | US6593077 Providing a reaction mixture comprising a silicon source, a pyridine compound, a catalyst and an aqueous reduction oxidation solution |
| 07/15/2003 | US6593063 Method of manufacturing a semiconductor device having an improved fine structure |
| 07/15/2003 | US6593058 Photoresists, polymers and processes for microlithography |
| 07/15/2003 | US6593045 Substrate processing apparatus and method |
| 07/15/2003 | US6593043 Composition of positive photosensitive resin precursor, and display device thereof |
| 07/15/2003 | US6593036 Structure for a reflection lithography mask and method for making same |
| 07/15/2003 | US6593016 Group III nitride compound semiconductor device and producing method thereof |
| 07/15/2003 | US6592980 Mesoporous films having reduced dielectric constants |
| 07/15/2003 | US6592942 Method for vapour deposition of a film onto a substrate |
| 07/15/2003 | US6592939 System for and method of using developer as a solvent to spread photoresist faster and reduce photoresist consumption |
| 07/15/2003 | US6592936 Spin coating method and coating apparatus |
| 07/15/2003 | US6592932 Nozzle arm movement for resist development |
| 07/15/2003 | US6592840 Forming solution free of organics for use in electronics; catalytically converting hydrogen and oxygen, electrochemi-cally reducing oxygen or electrolyzing an acidic ammonium sulfate solution |
| 07/15/2003 | US6592817 Monitoring an effluent from a chamber |
| 07/15/2003 | US6592783 Anisotropic conductive adhesive film |
| 07/15/2003 | US6592777 Manufacture and cleaning of a semiconductor |
| 07/15/2003 | US6592776 Imidazole, benzotriazole, benzimidiazole or benzothiazole film-forming agent and such as uriedopropyltrimethoxysilane; reducing defects |
| 07/15/2003 | US6592771 Vapor-phase processing method and apparatus therefor |
| 07/15/2003 | US6592770 Method of treating an isulating layer |
| 07/15/2003 | US6592729 In-line sputtering apparatus |
| 07/15/2003 | US6592710 Apparatus for controlling the voltage applied to an electrostatic shield used in a plasma generator |
| 07/15/2003 | US6592708 Filter apparatus and method therefor |
| 07/15/2003 | US6592707 Corrosion-resistant protective coating for an apparatus and method for processing a substrate |
| 07/15/2003 | US6592679 Clean method for vacuum holding of substrates |
| 07/15/2003 | US6592678 Dipping in bath of continuously supplied pure water; injecting chemical from storage container |
| 07/15/2003 | US6592677 Method of forming a semiconductor device by simultaneously cleaning both sides of a wafer using different cleaning solutions |
| 07/15/2003 | US6592676 Chemical solution and method for reducing the metal contamination on the surface of a semiconductor substrate |
| 07/15/2003 | US6592674 Chemical vapor deposition apparatus and chemical vapor deposition method |
| 07/15/2003 | US6592673 Apparatus and method for detecting a presence or position of a substrate |
| 07/15/2003 | US6592671 Apparatus for clamping a planar substrate |
| 07/15/2003 | US6592664 Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate |
| 07/15/2003 | US6592443 Method and apparatus for forming and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates |
| 07/15/2003 | US6592439 Platen for retaining polishing material |
| 07/15/2003 | US6592438 CMP platen with patterned surface |
| 07/15/2003 | US6592433 Method for defect reduction |
| 07/15/2003 | US6592352 Offset edges mold for plastic packaging of integrated semiconductor devices |
| 07/15/2003 | US6592325 Air-suspended die sorter |
| 07/15/2003 | US6592323 Plate member carrier |
| 07/15/2003 | US6592322 Personal guided transport vehicle |
| 07/15/2003 | US6592318 Docking cart with integrated load port |
| 07/15/2003 | US6592317 Pod loader interface end effectors |
| 07/15/2003 | US6592080 Automatic transport system |
| 07/15/2003 | US6591992 Boat for cleaning ball grid array packages |
| 07/15/2003 | US6591987 Wafer retainer |
| 07/15/2003 | US6591960 Edge grip aligner with buffering capabilities |
| 07/15/2003 | US6591845 Apparatus and method for processing the surface of a workpiece with ozone |
| 07/15/2003 | US6591494 Method for manufacturing a non-contact type IC card |
| 07/15/2003 | US6591491 Method for producing multilayer circuit board |
| 07/15/2003 | CA2206139C Cleaning methods of porous surface and semiconductor surface |
| 07/15/2003 | CA2195038C Integrated circuit packaging structure |
| 07/15/2003 | CA2126446C Single crystal silicon arrayed devices for projection displays |
| 07/10/2003 | WO2003056641A1 Self-aligned printing |
| 07/10/2003 | WO2003056634A1 Semiconductor photodetector and its production method |
| 07/10/2003 | WO2003056630A2 Transistor |
| 07/10/2003 | WO2003056629A1 Wide bandgap bipolar transistors |
| 07/10/2003 | WO2003056628A1 Negative differential resistance field effect transistor (ndr-fet) & circuits using the same |
| 07/10/2003 | WO2003056625A2 Wirebond structure and method of wire bonding a microelectronic die |
| 07/10/2003 | WO2003056624A1 Processed body carrying device, and processing system with carrying device |
| 07/10/2003 | WO2003056623A1 Method and apparatus for inspecting and packing chips |
| 07/10/2003 | WO2003056622A1 Substrate treating method and production method for semiconductor device |
| 07/10/2003 | WO2003056621A1 Method for vanishing defects in single crystal silicon and single crystal silicon |
| 07/10/2003 | WO2003056620A1 Methods for planarization of group viii metal-containing surfaces using complexing agents |
| 07/10/2003 | WO2003056619A2 Selective deposition of a barrier layer on a dielectric material |
| 07/10/2003 | WO2003056618A1 Plasma treatment apparatus |
| 07/10/2003 | WO2003056617A1 Etching method and plasma etching device |
| 07/10/2003 | WO2003056616A1 A chemistry for etching quaternary interface layers on ingaasp mostly formed between gaas and inxga(1-x)p layers |
| 07/10/2003 | WO2003056615A1 Solvent for treating polysilazane and method of treating polysilazane with the solvent |
| 07/10/2003 | WO2003056614A1 Substrate processing apparatus and method |
| 07/10/2003 | WO2003056613A1 Semiconductor device and method for fabricating the same |