| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/24/2003 | US20030139070 Surface mounted device type package using coaxial cable |
| 07/24/2003 | US20030139069 Planarization of silicon carbide hardmask material |
| 07/24/2003 | US20030139068 Method of Illumination with linearly polarized laser radiation |
| 07/24/2003 | US20030139067 Water and method for storing silicon wafer |
| 07/24/2003 | US20030139066 Laser annealing method and laser annealing device |
| 07/24/2003 | US20030139065 Method for scaling down thickness of ONO film with remote plasma nitridation |
| 07/24/2003 | US20030139064 Method for forming dielectric thin film and dielectric thin film formed thereby |
| 07/24/2003 | US20030139063 Method of forming coating film, method of manufacturing semiconductor device and coating solution |
| 07/24/2003 | US20030139062 Method for fabricating an ultralow dielectric constant material |
| 07/24/2003 | US20030139061 Barrier in gate stack for improved gate dielectric integrity |
| 07/24/2003 | US20030139060 Method of manufacturing semiconductor light emitting device and oxidation furnace |
| 07/24/2003 | US20030139059 Post-planarization clean-up |
| 07/24/2003 | US20030139058 Method to prevent electrical shorts between tungsten interconnects |
| 07/24/2003 | US20030139055 Method of manufacturing mask and method of manufacturing semiconductor integrated circuit device |
| 07/24/2003 | US20030139054 Pattern formation method |
| 07/24/2003 | US20030139053 Method and system to provide electroplanarization of a workpiece with a conducting material layer |
| 07/24/2003 | US20030139052 Process for integration of a trench for capacitors and removal of black silicon |
| 07/24/2003 | US20030139051 Method of forming a semiconductor device using a carbon doped oxide layer to control the chemical mechanical polishing of a dielectric layer |
| 07/24/2003 | US20030139050 Tungsten polishing solution |
| 07/24/2003 | US20030139049 Method for manufacturing semiconductor device and polishing apparatus |
| 07/24/2003 | US20030139048 CMP slurry additive for foreign matter detection |
| 07/24/2003 | US20030139047 Metal polishing slurry having a static etch inhibitor and method of formulation |
| 07/24/2003 | US20030139046 Method and apparatus for cleaning semiconductor device and method of fabricating semiconductor device |
| 07/24/2003 | US20030139045 Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device |
| 07/24/2003 | US20030139044 Moving apparatus and control method therefor, and device manufacturing method |
| 07/24/2003 | US20030139043 Apparatus and method for monitoring a plasma etch process |
| 07/24/2003 | US20030139042 Method in connection with the production of a template and the template thus produced |
| 07/24/2003 | US20030139039 Doped aluminum oxide dielectrics |
| 07/24/2003 | US20030139038 Method for manufacturing semiconductor element |
| 07/24/2003 | US20030139037 Nitrde semiconductor element and production method thereof |
| 07/24/2003 | US20030139036 Semiconductor device and method for fabricating the same |
| 07/24/2003 | US20030139035 Reacting a gas mixture containing hydrogen, argon, an aliphatic unsaturated hydrocarbon with double or triple bond, and an organosilicon compound in a plasma to deposit silicon carbide on a substrate |
| 07/24/2003 | US20030139034 Dual damascene structure and method of making same |
| 07/24/2003 | US20030139033 Copper reflow process |
| 07/24/2003 | US20030139032 Metal post manufacturing method |
| 07/24/2003 | US20030139031 Semiconductor device and method of manufacturing the same |
| 07/24/2003 | US20030139030 Ring positionable about a periphery of a contact pad, semiconductor device components including same, and methods for positioning the ring around a contact pad |
| 07/24/2003 | US20030139029 Joining semiconductor units with bonding material |
| 07/24/2003 | US20030139028 Methods of forming integrated circuit devices including fuse wires having reduced cross-sectional areas and related structures |
| 07/24/2003 | US20030139027 Semiconductor integrated circuit device and a method of manufacturing the same |
| 07/24/2003 | US20030139026 Methods of forming binary noncrystalline oxide analogs of silicon dioxide |
| 07/24/2003 | US20030139025 Method of forming a MOS transistor with improved threshold voltage stability |
| 07/24/2003 | US20030139024 Electrostatic discharge protection circuit of non-gated diode and fabrication method thereof |
| 07/24/2003 | US20030139023 Ultimate SIMOX |
| 07/24/2003 | US20030139022 Gettering of SOI wafers without regions of heavy doping |
| 07/24/2003 | US20030139021 Methods of wafer level fabrication and assembly of chip scale packages |
| 07/24/2003 | US20030139020 Semiconductor die package with semiconductor die having side electrical connection |
| 07/24/2003 | US20030139019 Adhesive sheet for affixation of a wafer and method for processing using the same |
| 07/24/2003 | US20030139017 Method for fabricating capacitors |
| 07/24/2003 | US20030139015 Micro fabrication with vortex shaped spirally topographically tapered spirally patterned conductor layer and method for fabrication thereof |
| 07/24/2003 | US20030139014 Method of fabricating a device having a desired non-planar surface or profile and device produced thereby |
| 07/24/2003 | US20030139013 Semiconductor devices and methods for fabricating the same |
| 07/24/2003 | US20030139012 Method for manufacturing semiconductor device with semiconductor region inserted into trench |
| 07/24/2003 | US20030139011 Multigate semiconductor device with vertical channel current and method of fabrication |
| 07/24/2003 | US20030139010 Method of forming a semiconductor array of floating gate memory cells having strap regions and a peripheral logic device region, and the array of memory cells formed thereby |
| 07/24/2003 | US20030139008 Method of manufacturing semiconductor device |
| 07/24/2003 | US20030139007 Dynamic random access memory circuitry |
| 07/24/2003 | US20030139006 Method for producing capacitor structures |
| 07/24/2003 | US20030139005 Process conditions and precursors for atomic layer deposition (ald) of al2o3 |
| 07/24/2003 | US20030139004 Method of manufacturing semiconductor device |
| 07/24/2003 | US20030139003 Porous gas sensors and method of preparation thereof |
| 07/24/2003 | US20030139002 Short-channel schottky-barrier MOSFET device and manufacturing method |
| 07/24/2003 | US20030139001 Field effect transistor having source and/or drain forming schottky or schottky-like contact with strained semiconductor substrate |
| 07/24/2003 | US20030139000 Method of creating high-quality relaxed SiGe-on-insulator for strained Si CMOS applications |
| 07/24/2003 | US20030138999 Laser irradiation apparatus |
| 07/24/2003 | US20030138998 Semiconductor device and method of fabricating the same |
| 07/24/2003 | US20030138997 Methods of forming silicon-on-insulator comprising integrated circuitry, and wafer bonding methods of forming silicon-on-insulator comprising integrated circuitry |
| 07/24/2003 | US20030138996 Semiconductor device and method of fabricating the same |
| 07/24/2003 | US20030138993 Method and apparatus for manufacturing semiconductor device |
| 07/24/2003 | US20030138992 Multilayered circuit substrate, semiconductor device and method of producing same |
| 07/24/2003 | US20030138987 Gamma ray detector |
| 07/24/2003 | US20030138986 Microelectronic mechanical system and methods |
| 07/24/2003 | US20030138984 Chemistry for etching quaternary interface layers on InGaAsP mostly formed between GaAs and InxGa(1-x)P layers |
| 07/24/2003 | US20030138983 Selective growth method, and semiconductor light emitting device and fabrication method thereof |
| 07/24/2003 | US20030138980 Method of temporarily securing a die to a burn-in carrier |
| 07/24/2003 | US20030138979 Method for evaluating impurity concentrations in semiconductor substrates |
| 07/24/2003 | US20030138978 Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data |
| 07/24/2003 | US20030138977 Method for producing a ferroelectric layer |
| 07/24/2003 | US20030138736 Method for decreasing surface defects of patterned resist layer |
| 07/24/2003 | US20030138735 Exposing surface of underlying antireflective film containing silicon oxynitride to plasma (oxygen) for amplification/development |
| 07/24/2003 | US20030138726 Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices |
| 07/24/2003 | US20030138725 Comprises alkali-soluble polymer (polyvinylphenol), photoacid generator (triphenyl sulfonium trifluoromethanesulfonic acid), and adamantyl alcohol capable of dehydration bonding with polymer; antiswelling; improved resolution |
| 07/24/2003 | US20030138724 Comprises alkali soluble polymer (polyvinylphenol), photoacid generator (triphenyl sulfonium trifluoromethanesulfonate), and adamantyl alcohol capable of dehydration bonding with polymer; antiswelling; improved resolution |
| 07/24/2003 | US20030138710 Comparing an analysis of the purity of stripper composition with that of the reference and then replacing or delivering to the next station; automatic; semiconductor, semiconductor device or a liquid crystal display device |
| 07/24/2003 | US20030138707 Depositing a first material on a substrate and applying a thermal treatment to the substrate at >300 degrees Celsius before completing the deposition of the first material; stress relieving; dimensional stability; flatness; semiconductors |
| 07/24/2003 | US20030138704 Optical-mechanical feature fabrication during manufacture of semiconductors and other micro-devices and nano-devices that include micron and sub-micron features |
| 07/24/2003 | US20030138644 Apparatus and method for cleaning test probes |
| 07/24/2003 | US20030138611 Multilayer structure used especially as a material of high relative permittivity |
| 07/24/2003 | US20030138588 Methods for reducing the curvature in boron-doped silicon micromachined structures |
| 07/24/2003 | US20030138563 Ion processing element with composite media |
| 07/24/2003 | US20030138562 Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD |
| 07/24/2003 | US20030138560 Apparatus and method for heating substrates |
| 07/24/2003 | US20030138555 Thermal transfer of microstructured layers |
| 07/24/2003 | US20030138552 Method of preventing organic contamination from the atmosphere of electronic device substrates and electronic device substrates treated therewith |
| 07/24/2003 | US20030138551 Improved throughput and reduced consumption of treatment solutions when performing pre-dispenses for respective purposes, such as applying photoresist coatings to semiconductor wafers, by omitting unnecessary pre-dispenses |
| 07/24/2003 | US20030138028 Wafer temperature detection device for ion implanter |
| 07/24/2003 | US20030138010 Monolithically integrated switching circuit for regulating the luminous power of a laser diode |
| 07/24/2003 | US20030137892 Semiconductor memory device |
| 07/24/2003 | US20030137883 Half power supply voltage generator and semiconductor memory device using the same |
| 07/24/2003 | US20030137879 Semiconductor memory device having controlled impurity concentration profile, method for manufacturing thereof, and semiconductor manufacturing apparatus |