Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2003
11/11/2003US6645826 Semiconductor device and method of fabricating the same
11/11/2003US6645825 Planarization of shallow trench isolation (STI)
11/11/2003US6645823 Reticle and method of fabricating semiconductor device
11/11/2003US6645822 Method for manufacturing a semiconductor circuit system
11/11/2003US6645821 Method of producing a thin film resistor in an integrated circuit
11/11/2003US6645819 Self-aligned fabrication method for a semiconductor device
11/11/2003US6645818 Method to fabricate dual-metal gate for N- and P-FETs
11/11/2003US6645817 Method of manufacturing a semiconductor device comprising MOS-transistors having gate oxides of different thicknesses
11/11/2003US6645816 Fabricating memory device having buried source/drain region and fabrication thereof
11/11/2003US6645815 Forming Metal-oxide-semiconductor field-effect transistor (MOSFET) by patterned implantation mask comprising insulating region and apertures over epitaxial layer, wherein electro-conductive dopant is implanted and diffused through
11/11/2003US6645814 Method of forming an array of FLASH field effect transistors and circuitry peripheral to such array
11/11/2003US6645812 Method for fabricating a non-volatile semiconductor memory cell with a separate tunnel window
11/11/2003US6645811 Capacitor using high dielectric constant film for semiconductor memory device and fabrication method therefor
11/11/2003US6645810 Method to fabricate MIM capacitor using damascene process
11/11/2003US6645809 Process for producing a capacitor configuration
11/11/2003US6645808 Method and device for providing double cell density in SDRAM and in DDR SDRAM
11/11/2003US6645807 Method for manufacturing semiconductor device
11/11/2003US6645806 Methods of forming DRAMS, methods of forming access transistors for DRAM devices, and methods of forming transistor source/drain regions
11/11/2003US6645805 Method for forming dielectric film of capacitor
11/11/2003US6645804 System for fabricating a metal/anti-reflective coating/insulator/metal (MAIM) capacitor
11/11/2003US6645803 Method for modifying the doping level of a silicon layer
11/11/2003US6645801 Salicided gate for virtual ground arrays
11/11/2003US6645800 Method for the production of a field-effect structure
11/11/2003US6645799 Method of manufacturing a dual gate semiconductor device with a poly-metal electrode
11/11/2003US6645798 Metal gate engineering for surface p-channel devices
11/11/2003US6645797 Method for forming fins in a FinFET device using sacrificial carbon layer
11/11/2003US6645796 Method and semiconductor structure for implementing reach through buried interconnect for silicon-on-insulator (SOI) devices
11/11/2003US6645795 Polysilicon doped transistor using silicon-on-insulator and double silicon-on-insulator
11/11/2003US6645794 Method of manufacturing a semiconductor device by monolithically forming a sealing resin for sealing a chip and a reinforcing frame by transfer molding
11/11/2003US6645792 Lead frame and method for fabricating resin-encapsulated semiconductor device
11/11/2003US6645791 Semiconductor die package including carrier with mask
11/11/2003US6645790 System and method for prototyping and fabricating complex microwave circuits
11/11/2003US6645789 On chip alpha-particle detector
11/11/2003US6645787 Gamma ray detector
11/11/2003US6645782 Qualitative method for troubleshooting a dielectric tool
11/11/2003US6645781 Method to determine a complete etch in integrated devices
11/11/2003US6645780 Method and apparatus for combining integrated and offline metrology for process control
11/11/2003US6645779 Multilayer; semiconductor substrate, transistor, dielectric
11/11/2003US6645744 Using baths to which are added a biogenic catalyst (in particular, an enzyme) which selectively acts (etching) upon a preselectable thin layer; less expensive and environmentally friendly; thermally controlled; photoresists
11/11/2003US6645707 First exposure step for executing a multiple exposure of a first layer of a substrate by use of plural first masks, a development step for developing the first layer of the substrate and a second exposure step, executed after the
11/11/2003US6645702 Treat resist surface to prevent pattern collapse
11/11/2003US6645698 Photoresist compositions comprising a resin binder having acid labile blocking groups requiring an activation energy in excess of 20 Kcal/mol. for deblocking, a photoacid generator capable of generating a halogenated sulfonic acid upon
11/11/2003US6645694 Pattern formation material and pattern formation method
11/11/2003US6645693 Resist composition
11/11/2003US6645692 Mixture of acid generator, binder and surfactant
11/11/2003US6645682 Thinner for rinsing photoresist and method of treating photoresist layer
11/11/2003US6645677 Preparation of patterned reticles to be used as masks in the production of semiconductor and other devices. Methods and devices are described utilizing resist and transfer layers over a masking layer on a reticle. The methods and devices
11/11/2003US6645676 Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus
11/11/2003US6645639 Epitaxial oxide films via nitride conversion
11/11/2003US6645632 Blend of polyimide and epoxy resin
11/11/2003US6645606 Electrical device having metal pad bonded with metal wiring and manufacturing method thereof
11/11/2003US6645574 Method of forming a thin film
11/11/2003US6645550 Method of treating a substrate
11/11/2003US6645454 System and method for regulating lateral growth in laser irradiated silicon films
11/11/2003US6645427 With micro alloy stabilizer
11/11/2003US6645401 Conjugated copolymers of dithienothiophene with vinylene or acetylene
11/11/2003US6645398 Sulfur-containing phosphor powders, methods for making phosphor powders and devices incorporating same
11/11/2003US6645355 Semiconductor processing apparatus having lift and tilt mechanism
11/11/2003US6645353 Continuous magnetic field directed at wafer pedestal
11/11/2003US6645346 Workpiece holding device for a bonding apparatus
11/11/2003US6645345 Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing
11/11/2003US6645344 For contacting and regulating the temperature of a semiconductor substrate during processing in a semiconductor processing system
11/11/2003US6645311 Method of reducing water spotting and oxide growth on a semiconductor structure
11/11/2003US6645304 Susceptors for semiconductor-producing apparatuses
11/11/2003US6645302 Vapor phase deposition system
11/11/2003US6645295 Method for manufacturing group III nitride compound semiconductor and a light-emitting device using group III nitride compound semiconductor
11/11/2003US6645264 Composition for forming polishing pad, crosslinked body for polishing pad, polishing pad using the same and method for producing thereof
11/11/2003US6645061 Polishing pad having a grooved pattern for use in chemical mechanical polishing
11/11/2003US6645057 Adjustable and extended guide rings
11/11/2003US6645053 Polishing apparatus
11/11/2003US6645050 Multimode substrate carrier
11/11/2003US6645045 Method of measuring thickness of a semiconductor layer and method of manufacturing a semiconductor substrate
11/11/2003US6644965 Substrate processing apparatus and substrate processing method
11/11/2003US6644964 Durability; breaking resistant plate portion even when subjected to drastic changes in temperature
11/11/2003US6644949 Apparatus for reduced flash encapsulation of microelectronic devices
11/11/2003US6644855 Stage device, exposure apparatus, device manufacturing method and movement guidance method
11/11/2003US6644477 Wafer container cushion system
11/11/2003US6644327 Ultrasonic cleaner and wet treatment nozzle comprising the same
11/11/2003US6644324 Laser discharge chamber passivation by plasma
11/11/2003US6644238 Conveyorized vacuum injection system
11/11/2003US6643952 Reducing process time by monitoring vapor concentration
11/11/2003US6643923 Processes for manufacturing flexible wiring boards
11/11/2003US6643922 Device testing contactor, method of producing the same, and device testing carrier
11/11/2003US6643893 Apparatus for cleaning semiconductor wafers in a vacuum environment
11/11/2003US6643882 Substrate cleaning apparatus
11/11/2003CA2299131C Semiconductor device
11/10/2003CA2385911A1 Method and apparatus for two dimensional assembly of particles
11/06/2003WO2003092337A2 Method and apparatus for shaping thin films in the near-edge regions of in-process semiconductor substrates
11/06/2003WO2003092085A1 Organic semiconductor device, rf modulation circuit, and ic card
11/06/2003WO2003092079A1 Enhanced cutoff frequency silicon germanium transistor
11/06/2003WO2003092078A1 Semiconductor element and manufacturing method thereof
11/06/2003WO2003092077A2 Electronic displays
11/06/2003WO2003092076A1 Magnetic memory and its operating method
11/06/2003WO2003092074A1 Low input capacitance electrostatic discharge protection circuit utilizing feedback
11/06/2003WO2003092070A2 Power and ground shield mesh to remove both capacitive and inductive signal coupling effects of routing in integrated circuit device
11/06/2003WO2003092069A1 Method of calibrating marking in laser marking system
11/06/2003WO2003092068A1 Substrate conveying mechanism and substrate conveying method
11/06/2003WO2003092066A1 A solder interconnection having a layered barrier structure and method for forming same
11/06/2003WO2003092065A1 High resistance silicon wafer and method for production thereof
11/06/2003WO2003092064A1 Member for semiconductor manufacturing system and its manufacturing method
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