Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2003
11/13/2003US20030209466 Tray for electronic parts
11/13/2003US20030209448 Forming grooves; fluid flow; polishing surfaces
11/13/2003US20030209445 Forming electrical contactors; uniform electrodeposition; integrated circuits
11/13/2003US20030209430 Ion beam irradiation apparatus for suppressing charge up of substrate and method for the same
11/13/2003US20030209429 Method and apparatus for processing a substrate with minimal edge exclusion
11/13/2003US20030209425 Device providing electrical contact to the surface of a semiconductor workpiece during processing
11/13/2003US20030209422 Multiple-step sputter deposition
11/13/2003US20030209404 Automated processing system
11/13/2003US20030209327 Temperature control for single substrate semiconductor processing reactor
11/13/2003US20030209326 Process and system for heating semiconductor substrates in a processing chamber containing a susceptor
11/13/2003US20030209325 Auto-centering device for mechanical clamp
11/13/2003US20030209324 Plasma reactor with reduced reaction chamber
11/13/2003US20030209323 Production apparatus for manufacturing semiconductor device
11/13/2003US20030209322 Methods and apparatus for maintaining a pressure within an environmentally controlled chamber
11/13/2003US20030209321 Scanning type etcher design for precision process control
11/13/2003US20030209320 Planarization system with multiple polishing pads
11/13/2003US20030209310 Apparatus, system and method to reduce wafer warpage
11/13/2003US20030209260 Ferris wheel-like stripping or cleaning mechanism for semiconductor fabrication
11/13/2003US20030209259 Robot controller; drainage and supply valves
11/13/2003US20030209255 Concurrent cleaning , etching; supplying fluid to backing of wafer
11/13/2003US20030209201 Slightly foamed solid rubber portion with a core bar embedded therein; used in an automobile
11/13/2003US20030209200 Temperature control for single substrate semiconductor processing reactor
11/13/2003US20030209193 Atomic layer CVD
11/13/2003US20030209192 Formation method for semiconductor layer
11/13/2003US20030209185 GaN single-crystal substrate, nitride type semiconductor epitaxial substrate, nitride type semiconductor device, and methods of making the same
11/13/2003US20030209117 In-process tape bur monitoring
11/13/2003US20030209097 Sensor device for non-intrusive diagnosis of a semiconductor processing system
11/13/2003US20030209069 Chemical bath having liquid level indications in outer trough
11/13/2003US20030209050 Apparatus and method for calibrating the position of a wafer platform in an ion implanter
11/13/2003US20030208922 Apparatus and method for preventing droplets on wafers during solvent drying process
11/13/2003CA2485099A1 Apparatus including ion transport detecting structures and methods of use
11/13/2003CA2483403A1 High voltage switching devices and process for forming same
11/12/2003EP1361782A1 Plasma device and plasma generating method
11/12/2003EP1361657A1 Surface acoustic wave device, its manufacturing method, and electronic circuit device
11/12/2003EP1361619A2 Organic thin-film transistor, organic thin-film transistor sheet and manufacturing method thereof
11/12/2003EP1361616A1 Compound semiconductor element based on group iii element nitride
11/12/2003EP1361614A1 Semiconductor device manufacturing method
11/12/2003EP1361612A2 Organic substrate for flip chip bonding
11/12/2003EP1361610A1 Carburetor, various types of devices using the carburetor, and method of vaporization
11/12/2003EP1361608A2 Providing electrical connection between an active region and a conductive layer in a semiconductor device using carbon nanotubes
11/12/2003EP1361607A1 Semiconductor device and its production method
11/12/2003EP1361606A1 Method of producing electronic device material
11/12/2003EP1361605A1 Method for producing material of electronic device
11/12/2003EP1361603A2 Method for manufacturing electronic circuits integrated on a semiconductor substrate
11/12/2003EP1361602A2 Method for shaping a periphal edge of a wafer
11/12/2003EP1361601A2 Method for producing a long wavelength indium gallium arsenide nitride (InGaAsN) active region
11/12/2003EP1361600A2 Substrate treating apparatus
11/12/2003EP1361486A2 Moving member mechanism and control method therefor
11/12/2003EP1361480A1 Residue reducing stable concentrate
11/12/2003EP1361298A1 Semiconductor crystal growing method and semiconductor light-emitting device
11/12/2003EP1361294A1 Plasma CVD apparatus
11/12/2003EP1361293A1 Method of forming silicon thin film and silicon thin film solar cell
11/12/2003EP1361192A2 Methods of metal coating contact holes in mems and similar applications
11/12/2003EP1361023A2 Polishing articles for electrochemical mechanical polishing of substrates
11/12/2003EP1360882A1 A stackable microcircuit layer formed from a plastic encapsulated microcircuit and method of making the same
11/12/2003EP1360724A2 Method of fabricating integrated circuits, providing improved so-called "saw bow" conductive tracks
11/12/2003EP1360723A2 High performance silicon contact for flip chip
11/12/2003EP1360722A2 Method of manufacturing a semiconductor device and a semiconductor device obtained by means of said method
11/12/2003EP1360719A1 Molds for wafer scale molding of protective caps
11/12/2003EP1360718A2 Integrated circuit arrangement consisting of a flat substrate
11/12/2003EP1360717A1 Lead-free solder structure and method for high fatigue life
11/12/2003EP1360716A2 Bonded structure using reacted borosilicate mixture
11/12/2003EP1360715A2 Contacting microchips by means of pressure
11/12/2003EP1360713A1 Light emitting semiconductor package
11/12/2003EP1360712A2 Post chemical-mechanical planarization (cmp) cleaning composition
11/12/2003EP1360711A1 Semiconductor arrangement and method for etching a layer of said semiconductor arrangement using an etching mask containing silicon
11/12/2003EP1360693A1 Programmable fuse and antifuse and method therefor
11/12/2003EP1360692A2 Method for writing into magnetoresistive memory cells and magnetoresistive memory which can be written into according to said method
11/12/2003EP1360555A1 Fused silica pellicle
11/12/2003EP1360554A1 Process control for micro-lithography
11/12/2003EP1360553A2 Dry multilayer inorganic alloy thermal resist film for lithographic processing and image creation
11/12/2003EP1360552A1 Fabrication of structures of metal/semiconductor compound by x-ray/euv projection lithography
11/12/2003EP1360513A1 Multiple-capture dft system for detecting or locating crossing clock-domain faults during self-test or scan test
11/12/2003EP1360476A2 Automated control of metal thickness during film deposition
11/12/2003EP1360474A2 Laser scanning wafer inspection using nonlinear optical phenomena
11/12/2003EP1360348A1 Method and apparatus for controlling thickness uniformity of electroplated layer
11/12/2003EP1360077A1 Compositions for cleaning organic and plasma etched residues for semiconductor devices
11/12/2003EP1360034A1 Fixed abrasive article for use in modifying a semiconductor wafer
11/12/2003EP1360033A1 Abrasive article suitable for modifying a semiconductor wafer
11/12/2003EP1192593B1 Device and method for making devices comprising at least a chip mounted on a support
11/12/2003EP1186054B1 Current controlled field effect transistor
11/12/2003EP1017877B1 Cvd chamber inner lining
11/12/2003EP1008178B1 Method of producing a read-only memory
11/12/2003EP1007308B1 Aerosol method and apparatus, particulate products, and electronic devices made therefrom
11/12/2003EP0985229B1 Method for mos transistor isolation
11/12/2003EP0929819B1 Membrane probing system with local contact scrub
11/12/2003EP0799439B2 Positioning device with a force actuator system for compensating centre-of-gravity displacements
11/12/2003EP0676087B1 Fabricating stacks of ic chips by segmenting a larger stack
11/12/2003CN1455959A Photoelectric component and assembly
11/12/2003CN1455958A Semiconductor device
11/12/2003CN1455951A Lift type substrate treatment device, and substrate treatment system with the substrate treatment device
11/12/2003CN1455950A Integrated shallow trench isolation process
11/12/2003CN1455949A Method for stopping leakage of gas in container and container having such structure
11/12/2003CN1455948A Substrate treating device
11/12/2003CN1455947A Substrate processing apparatus
11/12/2003CN1455888A Method and system of automatic fluid dispensing for imprint lithography processes
11/12/2003CN1455871A 集成电路 IC
11/12/2003CN1455738A Method for providing recess pattern in foil
11/12/2003CN1455708A Method and equipment for cleaning substrate
11/12/2003CN1455628A Organic-electroluminescence display device and its mfg. method
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