Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2003
11/05/2003EP1359665A2 HBT linearizer and power booster
11/05/2003EP1359624A2 Vertical type MOSFET and manufacturing method thereof
11/05/2003EP1359623A2 Method of fabricating a high-voltage transistor
11/05/2003EP1359622A1 Semiconductor storage device and its manufacturing method
11/05/2003EP1359621A1 Magnetoresistance storage element
11/05/2003EP1359620A2 ESD Protection Of Noise Decoupling Capacitors
11/05/2003EP1359618A2 Semiconductor device
11/05/2003EP1359617A1 Process of fabrication of electronic modules
11/05/2003EP1359616A2 Method and apparatus for improving adhesion between layers in integrated devices
11/05/2003EP1359615A1 Method of delaminating material layers
11/05/2003EP1359614A1 Semiconductor substrates and structures with an oxide layer
11/05/2003EP1359613A2 Method of fabricating high density sub-lithographic features on a substrate
11/05/2003EP1359612A2 Methods of manufacturing a hybrid integrated circuit device
11/05/2003EP1359611A1 Method and device for plasma cvd
11/05/2003EP1359610A1 Substrate heating device and method of purging the device
11/05/2003EP1359609A2 Method of fabricating a sub-lithographic sized via
11/05/2003EP1359608A1 Projection optical system and production method therefor, exposure system and production method therefor, and production method for microdevice
11/05/2003EP1359607A2 Adjustable 3D capacitor and method of manufacture
11/05/2003EP1359606A2 Method for forming a MIM (Metal-Insulator-Metal) capacitor
11/05/2003EP1359605A2 Integration device for a vacuum pumping system in a clean room false floor of a semiconductor components factory
11/05/2003EP1359604A2 Semiconductor components manufacturing facility comprising a ventilated false floor
11/05/2003EP1359602A2 Detection apparatus, detection method and electron beam irradiation apparatus
11/05/2003EP1359590A1 Magnetic memory devices
11/05/2003EP1359589A2 Conductor structure for a magnetic memory
11/05/2003EP1359587A2 Memory cell arrays
11/05/2003EP1359487A2 System and method of operation of a digital mass flow
11/05/2003EP1359470A2 Management system and apparatus, method therefor, and device manufacturing method
11/05/2003EP1359469A1 Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method
11/05/2003EP1359468A2 Management system
11/05/2003EP1359466A1 Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method
11/05/2003EP1359465A2 Acid generator and thin film composition containing the same
11/05/2003EP1359464A2 A method and apparatus for defining mask patterns utilizing a spatial frequency doubling technique
11/05/2003EP1359390A1 Device and method for the automatic control of the state of a surface of a plate by measuring the bonding speed
11/05/2003EP1359144A1 Method for the preparation of bismaleimides
11/05/2003EP1358950A1 Ultrasonic cleaning module
11/05/2003EP1358684A1 Organic field effect transistor with a photostructured gate dielectric, method for the production and use thereof in organic electronics
11/05/2003EP1358681A2 Silicon carbide and related wide-bandgap transistors on semi-insulating epitaxy for high-speed, high-power applications
11/05/2003EP1358679A2 Serial mram device
11/05/2003EP1358678A1 Programmable memory address and decode circuits with ultra thin vertical body transistors
11/05/2003EP1358674A1 Method of manufacturing a display device
11/05/2003EP1358673A1 Chip transfer method and apparatus
11/05/2003EP1358672A1 Method and apparatus for removing a carrier part from a carrier, and a productremoved from a carrier
11/05/2003EP1358671A2 Method for producing ferroelectric capacitors and integrated semiconductor memory chips
11/05/2003EP1358670A2 Process and apparatus for removing residues from the microstructure of an object
11/05/2003EP1358669A2 Dynamic memory based on single electron storage
11/05/2003EP1358655A2 Mram architecture and system
11/05/2003EP1358623A2 Method and apparatus for inspecting a substrate
11/05/2003EP1358498A1 Input/output continuity test mode circuit
11/05/2003EP1358368A1 Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition
11/05/2003EP1358364A2 Method and device for the metered delivery of low volumetric flows
11/05/2003EP1358363A2 Diamond coatings on reactor wall and method of manufacturing thereof
11/05/2003EP1358291A2 Method for adhering substrates using light activatable adhesive film
11/05/2003EP1358289A2 Alkali metal-containing polishing system and method
11/05/2003EP1358046A1 Non-slip polisher head backing film
11/05/2003EP1358045A1 Pressure vessel systems and methods for dispensing liquid chemical compositions
11/05/2003EP1358021A1 Inverted pressure vessel with shielded closure mechanism
11/05/2003EP1269538B1 Method of forming a stacked-die integrated circuit chip package on a wafer level
11/05/2003EP1222621B1 Integrated circuit and circuit arrangement for supplying an integrated circuit with electricity
11/05/2003EP1157460B1 Surface wave device connected to a base with conductive adhesive
11/05/2003EP1156884B1 Device and method for applying adhesive material onto planar components and the use thereof
11/05/2003EP1153980B1 Epoxy resin composition
11/05/2003EP1141611B1 System for conveying liquids without pulsing
11/05/2003EP0942331B1 Antireflection or light-absorbing coating composition and polymer therefor
11/05/2003EP0939972A4 Plasma etch reactor and method
11/05/2003EP0925605A4 Method and apparatus for etching a semiconductor wafer
11/05/2003EP0806126B1 Method and apparatus for generating plasma
11/05/2003EP0727869B1 Booster
11/05/2003CN2585416Y Semiconductor chip and wiring substrate, semiconductor wafer, semiconductor device, wire substrate and electronic machine
11/05/2003CN2585405Y Means for supporting semiconductor wafer
11/05/2003CN1454394A Multiphase low dielectric constant material and method of deposition
11/05/2003CN1454393A Solder bump and wire bonding by infrared heating
11/05/2003CN1454392A Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
11/05/2003CN1454391A Method for predicting consumption of consumable part, method for predicting deposited-film thickness, and plasma processor
11/05/2003CN1454334A Photoresist remover composition comprising ammonium fluoride
11/05/2003CN1454333A Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
11/05/2003CN1454332A Phase shift masking for complex patterns
11/05/2003CN1454314A X-ray measuring and testing system
11/05/2003CN1454266A Anode assembly for plating and planarizing a conductive layer
11/05/2003CN1454131A Polishing pad with built-in optical sensor
11/05/2003CN1454121A Process and system for determining acceptability of fluid dispense
11/05/2003CN1453885A Nitrides semiconductor luminous elements and producing method thereof
11/05/2003CN1453882A Semiconductor device and producing method thereof
11/05/2003CN1453880A MOSFET and its manufacture
11/05/2003CN1453878A Method for forming semiconductor memory array and memory array produced thereby
11/05/2003CN1453877A Monocrystalline/polycrystalline flash memory unit structure and array with low operation voltage
11/05/2003CN1453876A Non-volatile memory without antenna effect and its manufacture
11/05/2003CN1453875A Semiconductor device with analog capacitor
11/05/2003CN1453874A Thin film memory, array and operating method and producing method thereof
11/05/2003CN1453872A Flash memory and its producing method
11/05/2003CN1453871A Chip semiconductor device mixed formed with store and logic circuit and producing method thereof
11/05/2003CN1453870A Semiconductor integrated circuit apparatus and mounting base plate apparatus and wiring cut-off method thereof
11/05/2003CN1453868A Multi-chip package and producing method thereof
11/05/2003CN1453863A Connection terminal and producing method thereof, semiconductor device and producing method thereof
11/05/2003CN1453857A Method for producing mixed integrated circuit apparatus
11/05/2003CN1453856A Manufacture of memory unit of discontinuous nitride ROM
11/05/2003CN1453855A Method for producing capacitor utilizing electrochemical deposition
11/05/2003CN1453854A Method for producing semiconductor memory
11/05/2003CN1453853A Non-volatile DRAM
11/05/2003CN1453852A Method of decreasing random faults of flash memory
11/05/2003CN1453851A Method of improving reliability of flash memory