| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 11/05/2003 | EP1359665A2 HBT linearizer and power booster |
| 11/05/2003 | EP1359624A2 Vertical type MOSFET and manufacturing method thereof |
| 11/05/2003 | EP1359623A2 Method of fabricating a high-voltage transistor |
| 11/05/2003 | EP1359622A1 Semiconductor storage device and its manufacturing method |
| 11/05/2003 | EP1359621A1 Magnetoresistance storage element |
| 11/05/2003 | EP1359620A2 ESD Protection Of Noise Decoupling Capacitors |
| 11/05/2003 | EP1359618A2 Semiconductor device |
| 11/05/2003 | EP1359617A1 Process of fabrication of electronic modules |
| 11/05/2003 | EP1359616A2 Method and apparatus for improving adhesion between layers in integrated devices |
| 11/05/2003 | EP1359615A1 Method of delaminating material layers |
| 11/05/2003 | EP1359614A1 Semiconductor substrates and structures with an oxide layer |
| 11/05/2003 | EP1359613A2 Method of fabricating high density sub-lithographic features on a substrate |
| 11/05/2003 | EP1359612A2 Methods of manufacturing a hybrid integrated circuit device |
| 11/05/2003 | EP1359611A1 Method and device for plasma cvd |
| 11/05/2003 | EP1359610A1 Substrate heating device and method of purging the device |
| 11/05/2003 | EP1359609A2 Method of fabricating a sub-lithographic sized via |
| 11/05/2003 | EP1359608A1 Projection optical system and production method therefor, exposure system and production method therefor, and production method for microdevice |
| 11/05/2003 | EP1359607A2 Adjustable 3D capacitor and method of manufacture |
| 11/05/2003 | EP1359606A2 Method for forming a MIM (Metal-Insulator-Metal) capacitor |
| 11/05/2003 | EP1359605A2 Integration device for a vacuum pumping system in a clean room false floor of a semiconductor components factory |
| 11/05/2003 | EP1359604A2 Semiconductor components manufacturing facility comprising a ventilated false floor |
| 11/05/2003 | EP1359602A2 Detection apparatus, detection method and electron beam irradiation apparatus |
| 11/05/2003 | EP1359590A1 Magnetic memory devices |
| 11/05/2003 | EP1359589A2 Conductor structure for a magnetic memory |
| 11/05/2003 | EP1359587A2 Memory cell arrays |
| 11/05/2003 | EP1359487A2 System and method of operation of a digital mass flow |
| 11/05/2003 | EP1359470A2 Management system and apparatus, method therefor, and device manufacturing method |
| 11/05/2003 | EP1359469A1 Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method |
| 11/05/2003 | EP1359468A2 Management system |
| 11/05/2003 | EP1359466A1 Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method |
| 11/05/2003 | EP1359465A2 Acid generator and thin film composition containing the same |
| 11/05/2003 | EP1359464A2 A method and apparatus for defining mask patterns utilizing a spatial frequency doubling technique |
| 11/05/2003 | EP1359390A1 Device and method for the automatic control of the state of a surface of a plate by measuring the bonding speed |
| 11/05/2003 | EP1359144A1 Method for the preparation of bismaleimides |
| 11/05/2003 | EP1358950A1 Ultrasonic cleaning module |
| 11/05/2003 | EP1358684A1 Organic field effect transistor with a photostructured gate dielectric, method for the production and use thereof in organic electronics |
| 11/05/2003 | EP1358681A2 Silicon carbide and related wide-bandgap transistors on semi-insulating epitaxy for high-speed, high-power applications |
| 11/05/2003 | EP1358679A2 Serial mram device |
| 11/05/2003 | EP1358678A1 Programmable memory address and decode circuits with ultra thin vertical body transistors |
| 11/05/2003 | EP1358674A1 Method of manufacturing a display device |
| 11/05/2003 | EP1358673A1 Chip transfer method and apparatus |
| 11/05/2003 | EP1358672A1 Method and apparatus for removing a carrier part from a carrier, and a productremoved from a carrier |
| 11/05/2003 | EP1358671A2 Method for producing ferroelectric capacitors and integrated semiconductor memory chips |
| 11/05/2003 | EP1358670A2 Process and apparatus for removing residues from the microstructure of an object |
| 11/05/2003 | EP1358669A2 Dynamic memory based on single electron storage |
| 11/05/2003 | EP1358655A2 Mram architecture and system |
| 11/05/2003 | EP1358623A2 Method and apparatus for inspecting a substrate |
| 11/05/2003 | EP1358498A1 Input/output continuity test mode circuit |
| 11/05/2003 | EP1358368A1 Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
| 11/05/2003 | EP1358364A2 Method and device for the metered delivery of low volumetric flows |
| 11/05/2003 | EP1358363A2 Diamond coatings on reactor wall and method of manufacturing thereof |
| 11/05/2003 | EP1358291A2 Method for adhering substrates using light activatable adhesive film |
| 11/05/2003 | EP1358289A2 Alkali metal-containing polishing system and method |
| 11/05/2003 | EP1358046A1 Non-slip polisher head backing film |
| 11/05/2003 | EP1358045A1 Pressure vessel systems and methods for dispensing liquid chemical compositions |
| 11/05/2003 | EP1358021A1 Inverted pressure vessel with shielded closure mechanism |
| 11/05/2003 | EP1269538B1 Method of forming a stacked-die integrated circuit chip package on a wafer level |
| 11/05/2003 | EP1222621B1 Integrated circuit and circuit arrangement for supplying an integrated circuit with electricity |
| 11/05/2003 | EP1157460B1 Surface wave device connected to a base with conductive adhesive |
| 11/05/2003 | EP1156884B1 Device and method for applying adhesive material onto planar components and the use thereof |
| 11/05/2003 | EP1153980B1 Epoxy resin composition |
| 11/05/2003 | EP1141611B1 System for conveying liquids without pulsing |
| 11/05/2003 | EP0942331B1 Antireflection or light-absorbing coating composition and polymer therefor |
| 11/05/2003 | EP0939972A4 Plasma etch reactor and method |
| 11/05/2003 | EP0925605A4 Method and apparatus for etching a semiconductor wafer |
| 11/05/2003 | EP0806126B1 Method and apparatus for generating plasma |
| 11/05/2003 | EP0727869B1 Booster |
| 11/05/2003 | CN2585416Y Semiconductor chip and wiring substrate, semiconductor wafer, semiconductor device, wire substrate and electronic machine |
| 11/05/2003 | CN2585405Y Means for supporting semiconductor wafer |
| 11/05/2003 | CN1454394A Multiphase low dielectric constant material and method of deposition |
| 11/05/2003 | CN1454393A Solder bump and wire bonding by infrared heating |
| 11/05/2003 | CN1454392A Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
| 11/05/2003 | CN1454391A Method for predicting consumption of consumable part, method for predicting deposited-film thickness, and plasma processor |
| 11/05/2003 | CN1454334A Photoresist remover composition comprising ammonium fluoride |
| 11/05/2003 | CN1454333A Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography |
| 11/05/2003 | CN1454332A Phase shift masking for complex patterns |
| 11/05/2003 | CN1454314A X-ray measuring and testing system |
| 11/05/2003 | CN1454266A Anode assembly for plating and planarizing a conductive layer |
| 11/05/2003 | CN1454131A Polishing pad with built-in optical sensor |
| 11/05/2003 | CN1454121A Process and system for determining acceptability of fluid dispense |
| 11/05/2003 | CN1453885A Nitrides semiconductor luminous elements and producing method thereof |
| 11/05/2003 | CN1453882A Semiconductor device and producing method thereof |
| 11/05/2003 | CN1453880A MOSFET and its manufacture |
| 11/05/2003 | CN1453878A Method for forming semiconductor memory array and memory array produced thereby |
| 11/05/2003 | CN1453877A Monocrystalline/polycrystalline flash memory unit structure and array with low operation voltage |
| 11/05/2003 | CN1453876A Non-volatile memory without antenna effect and its manufacture |
| 11/05/2003 | CN1453875A Semiconductor device with analog capacitor |
| 11/05/2003 | CN1453874A Thin film memory, array and operating method and producing method thereof |
| 11/05/2003 | CN1453872A Flash memory and its producing method |
| 11/05/2003 | CN1453871A Chip semiconductor device mixed formed with store and logic circuit and producing method thereof |
| 11/05/2003 | CN1453870A Semiconductor integrated circuit apparatus and mounting base plate apparatus and wiring cut-off method thereof |
| 11/05/2003 | CN1453868A Multi-chip package and producing method thereof |
| 11/05/2003 | CN1453863A Connection terminal and producing method thereof, semiconductor device and producing method thereof |
| 11/05/2003 | CN1453857A Method for producing mixed integrated circuit apparatus |
| 11/05/2003 | CN1453856A Manufacture of memory unit of discontinuous nitride ROM |
| 11/05/2003 | CN1453855A Method for producing capacitor utilizing electrochemical deposition |
| 11/05/2003 | CN1453854A Method for producing semiconductor memory |
| 11/05/2003 | CN1453853A Non-volatile DRAM |
| 11/05/2003 | CN1453852A Method of decreasing random faults of flash memory |
| 11/05/2003 | CN1453851A Method of improving reliability of flash memory |