Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2003
11/20/2003CA2484653A1 Method and apparatus for two dimensional assembly of particles
11/20/2003CA2481018A1 Data archive recovery
11/19/2003EP1363402A2 Semiconductor device and manufacturing method for the same
11/19/2003EP1363395A1 Method for manufacturing surface acoustic wave device and inspecting instrument
11/19/2003EP1363334A1 Gallium nitride-based compound semiconductor device with a ZnO electrode
11/19/2003EP1363333A1 Semiconductor device and its manufacturing method
11/19/2003EP1363332A1 Semiconductor device and method of manufacturing the same
11/19/2003EP1363327A2 High speed electronic interconnection using a detachable substrate
11/19/2003EP1363324A1 Method for manufacturing non-volatile memory device
11/19/2003EP1363323A2 Apparatus and method for determining electrical properties of a semiconductor wafer
11/19/2003EP1363322A2 GaN single-crystal substrate, nitride type semiconductor epitaxial substrate, nitride type semiconductor device, and methods of making the same
11/19/2003EP1363321A2 Post-CMP washing liquid composition
11/19/2003EP1363320A1 Ferroelectric thin film, metal thin film or oxide thin film, and method and apparatus for preparation thereof, and electric or electronic device using said thin film
11/19/2003EP1363319A2 Method of transferring a laminate and method of manufacturing a semiconductor device
11/19/2003EP1363318A1 Method for making nitride semiconductor substrate and method for making nitride semiconductor device
11/19/2003EP1363317A2 Ferroelectric capacitor, method of manufacturing same, and semiconductor memory device
11/19/2003EP1363316A2 Ceramic susceptor
11/19/2003EP1363210A1 Design method for gate array integrated circuit
11/19/2003EP1363167A2 Method of producing compound semiconductor device
11/19/2003EP1363166A2 Apparatus and method for writing a lithographic pattern
11/19/2003EP1363165A1 Form-error-cancelling mirror-support devices and related methods, and microlithography systems comprising same
11/19/2003EP1363164A1 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
11/19/2003EP1362670A2 Method and apparatus for chemical mechanical polishing
11/19/2003EP1362475A1 Photodiode cmos imager with column-feedback soft-reset
11/19/2003EP1362424A2 Three terminal noninverting transistor switch background of the invention
11/19/2003EP1362378A2 Chemical mechanical polishing of copper-oxide damascene structures
11/19/2003EP1362377A2 Multilayer capacitor structure having an array of concentric ring-shaped plates for deep sub-micron cmos
11/19/2003EP1362374A2 Organic light emitting diode display having shield electrodes
11/19/2003EP1362373A2 Method and apparatus for considering diagonal wiring in placement
11/19/2003EP1362369A2 Electroconductive connection between a chip and a coupling element in addition to a security element, security document and a valuable document containing a connection of said type
11/19/2003EP1362368A2 Method for making electronic devices including silicon and ltcc and devices produced thereby
11/19/2003EP1362366A1 Method for etching a hardmask layer and a metal layer
11/19/2003EP1362365A2 Chemical-mechanical planarization using ozone
11/19/2003EP1362364A2 Semiconductor package and method of preparing same
11/19/2003EP1362363A2 Apparatus and methods for manipulating semiconductor wafers
11/19/2003EP1362362A2 Wafer area pressure control
11/19/2003EP1362332A1 Time-detection device and time- detection method by using a semi-conductor element
11/19/2003EP1362263A1 Method of alignment
11/19/2003EP1362262A1 Semiconductor developing agent
11/19/2003EP1362261A1 Method for exposing at least one or at least two semiconductor wafers
11/19/2003EP1362132A2 Rejuvenation of refractory metal products
11/19/2003EP1362005A2 Method for forming microelectronic spring structures on a substrate
11/19/2003EP1023582B1 Improved sample inspection system
11/19/2003EP1016140B1 Method for wiring semi-conductor components in order to prevent product piracy and manipulation, semi-conductor component made according to this method and use of said semi-conductor component in a chip card
11/19/2003EP0958326B1 Method for gluing a surface to a component
11/19/2003EP0938596B1 Apparatus for reducing polymer deposition on substrate support
11/19/2003EP0745935B1 Analog boundary scan cell
11/19/2003CN1457514A SOI LDMOS transistor structure having improved switching characteristics
11/19/2003CN1457511A Thin film transistors and method of manufacture
11/19/2003CN1457510A Apparatus and method of inspecting semiconductor wafer
11/19/2003CN1457509A Method for depositing selected thickness of interlevel dielectric material to achieve optimum global planarity on semiconductor wafer
11/19/2003CN1457508A Method of forming insulating film and method of producing semiconductor device
11/19/2003CN1457507A Method of manufacturing compound semiconductor wafer
11/19/2003CN1457506A Polishing compound and method for polishing substrate
11/19/2003CN1457505A Fluid pressure imprint lithography
11/19/2003CN1457504A Method of making electronic materials
11/19/2003CN1457503A Dry isotropic removal of inorganic anti-reflective coating after poly gate etching
11/19/2003CN1457502A Process and apparatus for removing residues from microstructure of object
11/19/2003CN1457451A Display and its manufacturing method
11/19/2003CN1457450A 显示器装置 Display device
11/19/2003CN1457332A Process for producing perfluorocarbons and use thereof
11/19/2003CN1457283A Non-slip polisher head backing film
11/19/2003CN1457282A Method of retrofitting probe station
11/19/2003CN1457220A Active matrix organic electrogenerated luminescent device and manufacturing method thereof
11/19/2003CN1457135A 换流器控制器 Inverter controller
11/19/2003CN1457104A Silicon photoelectric detector passivating method
11/19/2003CN1457103A 薄膜晶体管及其制造方法 A thin film transistor and manufacturing method thereof
11/19/2003CN1457101A Dynamic memory
11/19/2003CN1457099A Stacked capacitor structure and producing method thereof
11/19/2003CN1457097A Bidirectional controllable thyristors for electrostatic discharge protection
11/19/2003CN1457095A Semiconductor device with siliceous metal wiring layer and manufacturing method thereof
11/19/2003CN1457094A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
11/19/2003CN1457090A Method for manufacturing semiconductor component
11/19/2003CN1457089A Printed circuit board throuth-hole making method
11/19/2003CN1457088A Producing process for SOI MOSFET device with channels with electric and heating channels
11/19/2003CN1457087A Contact hole forming method of semiconductor component
11/19/2003CN1457086A Base electrode producing method
11/19/2003CN1457085A High-level silane composition and silicon film forming method utilizing it
11/19/2003CN1457084A Maintaining method and system for semiconductor manufacture
11/19/2003CN1457083A Treating method and treating device
11/19/2003CN1456959A Semiconductor memory compoent face down chip interface circuit and face down chip interface method
11/19/2003CN1456940A Photoetching device, component manufacturing method and component therefrom
11/19/2003CN1456939A Substrate processing method and processor
11/19/2003CN1456938A System and method for protecting templates by two-piece cover
11/19/2003CN1456937A Component manufacturing method, component therefrom and computer programm
11/19/2003CN1456936A Offset press and component manufacturing method
11/19/2003CN1456933A Sucker, photoetching projective apparatus, method for producing sucker and component producing method
11/19/2003CN1456931A Electrooptical device and manufacturing method for semiconductor device
11/19/2003CN1456904A Exposuring device for illuminating sensitive substrate
11/19/2003CN1456711A Electroplating method
11/19/2003CN1456709A Chemical agent supplier
11/19/2003CN1456580A Photosensitive polymer and amplified chemical photoresist agent composition containing it
11/19/2003CN1456395A Ultrasonic cleaning assembly
11/19/2003CN1128476C Monochip microwave integrated circuit
11/19/2003CN1128475C Semiconductor device
11/19/2003CN1128474C Method for manufacturing semiconductor memory device for preventing bit line oxidation and semiconductor memory device
11/19/2003CN1128473C Silicon complementary metal oxide semiconductor body contact on insulator formed by grating
11/19/2003CN1128472C Through isolation method by using composite oxide film
11/19/2003CN1128471C Method of utilizing grain of polysilicon half-ball for etching and shaping capacitor
11/19/2003CN1128470C Bulk production process of thinned wafer separated from carrier and its equipment
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