Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2003
11/05/2003CN1453850A Semiconductor with Si-Ge grid and producing method thereof
11/05/2003CN1453849A Virtual pattern automatic generating method
11/05/2003CN1453848A Semiconductor element and producing method thereof
11/05/2003CN1453847A Semiconductor device and producing method thereof, circuit substrate and electronic instrument
11/05/2003CN1453846A Method of forming embolism and hole
11/05/2003CN1453845A Manufacture of deep-channel capacitor
11/05/2003CN1453844A Ferroelectric capacitor with gap
11/05/2003CN1453843A Wafer holding system
11/05/2003CN1453842A Ball array-type test card
11/05/2003CN1453840A Prepn of P-type zinc oxide film
11/05/2003CN1453839A Prepn of metal cilicide
11/05/2003CN1453838A Manufacture of MOSFET element with improved stability
11/05/2003CN1453837A Making process of self-aligned metal silicide
11/05/2003CN1453836A Method for producing semiconductor device
11/05/2003CN1453835A Method of preventing tungsten plug from corrosion
11/05/2003CN1453834A Semiconductor device and producing method and electroplating liquid
11/05/2003CN1453833A Silicon nitride film producing method and apparatus for producing silicon nitride film
11/05/2003CN1453832A Gas phase growth method of oxidative dielectric thin film
11/05/2003CN1453830A Plasma etching electrode with excellent heat resistance and dry etching apparatus using the same
11/05/2003CN1453829A Etching agent and etching method
11/05/2003CN1453828A Polishing pad
11/05/2003CN1453827A Chip cleaning system
11/05/2003CN1453826A Dielectric layer flattening method
11/05/2003CN1453825A Manufacture of lower capacitor electrode plate for memory
11/05/2003CN1453824A Semiconductor device producing process
11/05/2003CN1453823A Pattern forming method and method for producing semiconductor device
11/05/2003CN1453822A Method for coating semiconductor substrate with mixture containing bonding reinforcing agent
11/05/2003CN1453803A Solid inducer and producing method thereof
11/05/2003CN1453798A Analytical system of semiconductor device
11/05/2003CN1453791A Conductor structure of magnetic storing device
11/05/2003CN1453790A Thin film magnetic memory of shortened data reading data line charging time
11/05/2003CN1453646A Offset printing equipment, device producing method and produced device thereby
11/05/2003CN1453645A Projection optical system, exposure apparatus with the same system and exposure method
11/05/2003CN1453644A System and method for improving line width control in photoetching apparatus
11/05/2003CN1453643A System and method for improving line width control in use of photoetching apparatus of illuminating system with prenumerical value aperture control
11/05/2003CN1453642A Projection optical system, its producing method, exposure apparatus and exposure method
11/05/2003CN1453640A Method for producing sub-photoetching size passage
11/05/2003CN1453638A Method for producing sub-photoetching dimensional line and space pattern of pressing & printing nano-photoetching
11/05/2003CN1453637A Driving apparatus, exposuring apparatus and device producing method
11/05/2003CN1453636A Producing method of electronic apparatus and producing apparatus thereof
11/05/2003CN1453635A Apparatus and system for improving phase-shift mask image performance and its method
11/05/2003CN1453597A Optical elements, it metal mould and method for processing optical elements
11/05/2003CN1453593A Logic cluster fault testing method for non-boundary scanning device
11/05/2003CN1453328A Aqueous dispersion body for chemical mechanical grinding
11/05/2003CN1453197A Conveying positioning method and its equipment for conveyed articles
11/05/2003CN1453095A Ceramic base
11/05/2003CN1127204C Planar resist structure esp encapsulation for electric components with planar anti-corrosion structure and thermomechanical method for prodn thereof
11/05/2003CN1127150C Electrode structure process for production thereof
11/05/2003CN1127149C Method for solving door interference of insulator base silicon transmission
11/05/2003CN1127148C Insulated gate type semiconductor device and manufacturing method thereof
11/05/2003CN1127144C Integrated circuit device and process for its manufacture
11/05/2003CN1127142C Semiconductor device
11/05/2003CN1127139C Package for mating with a semiconductor chip and method of manufacture
11/05/2003CN1127138C Vacuum package shell and packaging method for full-metal low-temp micro-electromechanical system
11/05/2003CN1127137C Method for manufacturing capacitor structure of high-density DRAM
11/05/2003CN1127136C Method for producing RAM unit array
11/05/2003CN1127135C Method for producing horizontal channel capacitor and DRAM array
11/05/2003CN1127134C Method for fabricating semiconductor memory device
11/05/2003CN1127133C Crack stops
11/05/2003CN1127132C Copper interconnect structure and method of formation
11/05/2003CN1127131C Improved substrate structure for covering holes in semiconductor device and forming method thereof
11/05/2003CN1127130C Technology for making capacitor buried chip in channel dynamic RAM
11/05/2003CN1127129C Method for controllinkg thickness of layers formed by deposition equipment for processing semiconductors
11/05/2003CN1127128C Semiconductor device having simple protective structure and process of fabrication thereof
11/05/2003CN1127127C Semiconductor chip device and its packaging method
11/05/2003CN1127126C Method of manufacturing thin film transistor
11/05/2003CN1127125C Method for manufacturing semiconductor device capable of effectively carrying out hydrogen passivation
11/05/2003CN1127124C Fabrication of trench capacitors using disposable hard mask
11/05/2003CN1127123C Method for forming contact plugs of semiconductor device
11/05/2003CN1127122C Substrate processing method
11/05/2003CN1127121C Detergent for producing process of semiconductor device or liquid crystal device
11/05/2003CN1127120C Semiconductor substrate and its mfg. method
11/05/2003CN1126991C Photosensitive member, process for its production image, forming apparatus having photosensitive member and image forming process
11/05/2003CN1126823C Wire-bonding alloy composites
11/05/2003CN1126702C Wafer carrier with low tolerance accumulation and assembling method thereof
11/05/2003CN1126610C Semiconductor automatic processing equipment and method
11/05/2003CN1126609C Process and apparatus for treating workpiece of semiconductor wafer
11/04/2003USRE38296 Semiconductor memory device with recessed array region
11/04/2003US6643840 Designing method of semiconductor integrated circuit using library storing mask pattern of macro circuit and designing apparatus executing the same
11/04/2003US6643835 Computer-aided design supporting system in which cells can be arranged independently
11/04/2003US6643834 Method of and apparatus for designing layout of analog cells, and computer product
11/04/2003US6643830 Fault portion locating method for semiconductor integrated circuit device
11/04/2003US6643826 Semiconductor circuit connection data base and method of designing semiconductor circuit using the data base
11/04/2003US6643809 Semiconductor device and semiconductor device testing method
11/04/2003US6643604 System for uniformly heating photoresist
11/04/2003US6643564 Method of determining retreat permission position of carrier arm and teaching device thereof
11/04/2003US6643563 Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
11/04/2003US6643559 Method for monitoring a semiconductor fabrication process for processing a substrate
11/04/2003US6643558 Installation for processing wafers
11/04/2003US6643557 Method and apparatus for using scatterometry to perform feedback and feed-forward control
11/04/2003US6643434 Passive alignment using slanted wall pedestal
11/04/2003US6643394 Visual inspection apparatus and method
11/04/2003US6643217 Semiconductor memory device permitting early detection of defective test data
11/04/2003US6643207 High-voltage detection circuit for a semiconductor memory
11/04/2003US6643193 Semiconductor device, microcomputer and flash memory
11/04/2003US6643188 Non-volatile semiconductor memory device adapted to store a multi-valued data in a single memory cell
11/04/2003US6643186 Nonvolatile memory structures and fabrication methods
11/04/2003US6643175 Nonvolatile semiconductor storage device and test method therefor
11/04/2003US6643173 Semiconductor memory device operating in low power supply voltage and low power consumption
11/04/2003US6643170 Method for operating a multi-level memory cell
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