| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/01/2004 | US20040002222 Low cost method of providing a semiconductor device having a high channel density |
| 01/01/2004 | US20040002221 Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor |
| 01/01/2004 | US20040002220 Method of purging semiconductor manufacturing apparatus and method of manufacturing semiconductor device |
| 01/01/2004 | US20040002219 Method of forming isolation film |
| 01/01/2004 | US20040002218 Method for patterning dense and isolated features on semiconductor devices |
| 01/01/2004 | US20040002217 Method of defining the dimensions of circuit elements by using spacer deposition techniques |
| 01/01/2004 | US20040002216 Method and system for forming a semiconductor device |
| 01/01/2004 | US20040002214 Method of manufacturing trench structure for device |
| 01/01/2004 | US20040002213 Method for descreasing number of particles during etching process |
| 01/01/2004 | US20040002212 Method for forming copper metal line in semiconductor device |
| 01/01/2004 | US20040002211 Localized doping and/or alloying of metallization for increased interconnect performance |
| 01/01/2004 | US20040002210 Interconnect structure and method for forming |
| 01/01/2004 | US20040002209 Method for forming contact plug of semiconductor device |
| 01/01/2004 | US20040002208 Method of manufacturing semiconductor device having multilevel wiring |
| 01/01/2004 | US20040002207 Method of ultra low-k device fabrication |
| 01/01/2004 | US20040002204 Method for forming amorphous silicon film on single crystal silicon and structure formed |
| 01/01/2004 | US20040002203 Method of making sub-lithographic features |
| 01/01/2004 | US20040002202 Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions |
| 01/01/2004 | US20040002201 Method for manufacturing semiconductor device |
| 01/01/2004 | US20040002200 Method of producing an SOI wafer |
| 01/01/2004 | US20040002198 Seal ring and die corner stress relief pattern design to protect against moisture and metallic impurities |
| 01/01/2004 | US20040002197 Silicon-on-insulator wafer for RF integrated circuit |
| 01/01/2004 | US20040002195 Methods and systems for fabricating nanopores for single-electron devices and single-electron devices including nanopores |
| 01/01/2004 | US20040002194 Method for fabricating raised source/drain of semiconductor device |
| 01/01/2004 | US20040002192 Method for manufacturing non-volatile memory device |
| 01/01/2004 | US20040002191 Method of utilizing fabrication process of poly-si spacer to build flash memory with 2bit/cell |
| 01/01/2004 | US20040002190 Method for fabricating flash memory |
| 01/01/2004 | US20040002189 Method of forming capacitor in semiconductor device by using a polysilicon pattern in a trapezoid shape |
| 01/01/2004 | US20040002188 Method for fabricating MIM capacitor |
| 01/01/2004 | US20040002187 Enhanced on-chip decoupling capacitors and method of making same |
| 01/01/2004 | US20040002185 Method of manufacturing a semiconductor device |
| 01/01/2004 | US20040002183 CVD deposition of M-ON gate dielectrics |
| 01/01/2004 | US20040002182 Method of fabricating discrete nrom cell by self aligned process |
| 01/01/2004 | US20040002181 Microelectronic assembly with die support and method |
| 01/01/2004 | US20040002180 Thin film transistor array panel |
| 01/01/2004 | US20040002179 Glass attachment over micro-lens arrays |
| 01/01/2004 | US20040002178 Bottom antireflection coating color filter process for fabricating solid state image sensors |
| 01/01/2004 | US20040002176 Organic ferroelectric memory cells |
| 01/01/2004 | US20040002173 Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system |
| 01/01/2004 | US20040002172 Methods and apparatus for aligning a wafer in which multiple light beams are used to scan alignment marks |
| 01/01/2004 | US20040002171 Method and apparatus for real time metal film thickness measurement |
| 01/01/2004 | US20040002170 Apparatus for and method of manufacturing a semiconductor device, and cleaning method for use in the apparatus for manufacturing a semiconductor device |
| 01/01/2004 | US20040002068 Compositions and methods for the detection, diagnosis and therapy of hematological malignancies |
| 01/01/2004 | US20040002020 Photoresist residue remover composition |
| 01/01/2004 | US20040002017 Polymers with mixed photoacid-labile groups and photoresists comprising same |
| 01/01/2004 | US20040002007 Oxime derivatives and the use thereof as latent acids |
| 01/01/2004 | US20040001964 Method of manufacturing a structure having pores |
| 01/01/2004 | US20040001918 Uniform thickness; storage containers, discharging nozzle |
| 01/01/2004 | US20040001778 Transistor and sensors made from molecular materials with electric dipoles |
| 01/01/2004 | US20040001750 Dual arm robot |
| 01/01/2004 | US20040001619 An automatic intelligent yield improving and process parameter multivariate system and the anaysis method thereof |
| 01/01/2004 | US20040001384 Semiconductor device |
| 01/01/2004 | US20040001372 Magnetoresistive effect element and magnetic memory device |
| 01/01/2004 | US20040001353 Thin film magnetic memory device suppressing internal magnetic noises |
| 01/01/2004 | US20040001350 Magnetic tunnel junction containing a ferrimagnetic layer and anti-parallel layer |
| 01/01/2004 | US20040001326 Power grid and bump pattern with reduced inductance and resistance |
| 01/01/2004 | US20040001296 Integrated circuit, system development method, and data processing method |
| 01/01/2004 | US20040001244 Semiconductor device and method for forming the same using cubic crystalline optical system with reduced birefringence |
| 01/01/2004 | US20040001192 System and method for automated focus measuring of a lithography tool |
| 01/01/2004 | US20040001191 Scanning exposure apparatus and method |
| 01/01/2004 | US20040001190 Projection exposure apparatus and device manufacturing method |
| 01/01/2004 | US20040001188 Lithographic apparatus, device manufacturing method, and device manufactured thereby apparatus |
| 01/01/2004 | US20040001168 Electro-optical device and method for manufacturing semiconductor element |
| 01/01/2004 | US20040001140 Semiconductor chip mounting apparatus and mounting method |
| 01/01/2004 | US20040001096 Data analysis apparatus |
| 01/01/2004 | US20040000968 Integrated passive devices fabricated utilizing multi-layer, organic laminates |
| 01/01/2004 | US20040000944 Switching point detection circuit and semiconductor device using the same |
| 01/01/2004 | US20040000928 Device and method with generic logic blocks |
| 01/01/2004 | US20040000875 Plasma processor with electrode simultaneously responsive to plural frequencies |
| 01/01/2004 | US20040000796 Wafer transfer apparatus and device and method for cleaning robot arm in wafer transfer apparatus |
| 01/01/2004 | US20040000729 Alignment marks of semiconductor device |
| 01/01/2004 | US20040000726 Pad arrangement method for reducing bonding failures and signal skew |
| 01/01/2004 | US20040000725 IC substrate with over voltage protection function and method for manufacturing the same |
| 01/01/2004 | US20040000722 Semiconductor structure |
| 01/01/2004 | US20040000721 Multilayer connecting structure; substrate, dielectrics, vias, sidewall spacers and conductive layer |
| 01/01/2004 | US20040000720 Method of protecting a seed layer for electroplating |
| 01/01/2004 | US20040000719 Semiconductor apparatus of which reliability of interconnections is improved and manufacturing method of the same |
| 01/01/2004 | US20040000718 Porous, film, wiring structure, and method of forming the same |
| 01/01/2004 | US20040000717 Integrated circuit conductive contact structures including grooves and fabrication methods thereof |
| 01/01/2004 | US20040000716 Semiconductor device and method of manufacturing the same |
| 01/01/2004 | US20040000715 Low dielectric constant films derived by sol-gel processing of a hyperbranched polycarbosilane |
| 01/01/2004 | US20040000714 Semiconductor device and manufacturing method therefor |
| 01/01/2004 | US20040000712 Interface adhesive |
| 01/01/2004 | US20040000709 Internal package interconnect with electrically parallel vias |
| 01/01/2004 | US20040000708 Memory expansion and chip scale stacking system and method |
| 01/01/2004 | US20040000706 Semiconductor device, semiconductor package, and method for testing semiconductor device |
| 01/01/2004 | US20040000701 Stand-alone organic-based passive devices |
| 01/01/2004 | US20040000700 Buried zener diode structure and method of manufacture |
| 01/01/2004 | US20040000695 Semiconductor device and method of manufacturing the same |
| 01/01/2004 | US20040000694 Doped buried in semiconductor body; emitter; substrates; integrated circuit; masking substrate; doping; diffusion; controlling thickness |
| 01/01/2004 | US20040000693 Methods of forming contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus and related structures |
| 01/01/2004 | US20040000692 Method and device for determining backgate characteristics |
| 01/01/2004 | US20040000691 SOI field effect transistor element having a recombination region and method of forming same |
| 01/01/2004 | US20040000690 Method of manufacturing semiconductor device and semiconductor device |
| 01/01/2004 | US20040000688 Non-volatile memory cells utilizing substrate trenches |
| 01/01/2004 | US20040000687 Ferroelectric capacitors with metal oxide for inhibiting fatigue and methods of forming the same |
| 01/01/2004 | US20040000686 Integrated dram process/structure using contact pillars |
| 01/01/2004 | US20040000685 Structure for scalable, low-cost polysilicon dram in a planar capaacitor |
| 01/01/2004 | US20040000684 Semiconductor memory devices and methods for manufacturing the same using sidewall spacers |
| 01/01/2004 | US20040000683 Circuit with buried strap including liner |