| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/07/2004 | EP1378936A2 Electrostatic chuck |
| 01/07/2004 | EP1378935A2 A method to form both high and low-K materials in one plane on a substrate, and their application in mixed mode circuits |
| 01/07/2004 | EP1378934A1 Production method of iii nitride compound semiconductor, and iii nitride compound semiconductor element based on it |
| 01/07/2004 | EP1378932A2 Semiconductor chip mounting apparatus and mounting method |
| 01/07/2004 | EP1378931A2 Substrate cleaning apparatus and substrate cleaning method |
| 01/07/2004 | EP1378928A2 Non-magnetic robotic manipulators for moving objects relative to a charged-particle-beam optical system |
| 01/07/2004 | EP1378918A1 Multi-layered film reflector manufacturing method |
| 01/07/2004 | EP1378797A2 Wavefront aberration correction system |
| 01/07/2004 | EP1378796A1 Composition for forming antireflection film for lithography |
| 01/07/2004 | EP1378795A1 Resist composition and patterning process |
| 01/07/2004 | EP1378788A2 Transverse electric-field type liquid crystal display device, process of manufacturing the same, and scan-exposing device |
| 01/07/2004 | EP1378782A2 Deformable mirror with passive and active actuators |
| 01/07/2004 | EP1378780A2 Projection optical system, exposure apparatus, and device production method |
| 01/07/2004 | EP1378591A1 Method for removing defects in crystals |
| 01/07/2004 | EP1378487A1 Nanostructure, Electron Emitting Device, Carbon Nanotube Device, and Method of Producing the Same |
| 01/07/2004 | EP1378486A1 Nanostructure, electron emitting device, carbon nanotube device, and method of producing the same |
| 01/07/2004 | EP1378347A1 Method for reducing shrinkage during sintering low-temperature ceramic |
| 01/07/2004 | EP1378060A2 Monotonic dynamic-static pseudo-nmos logic circuit and method of forming a logic gate array |
| 01/07/2004 | EP1378037A1 Injection seeded f2 laser with line selection and discrimination |
| 01/07/2004 | EP1378036A1 Injection seeded laser with precise timing control |
| 01/07/2004 | EP1378035A1 Injection seeded f 2? laser with pre-injected filter |
| 01/07/2004 | EP1378012A2 Gallium nitride material devices including backside vias and methods of fabrication |
| 01/07/2004 | EP1378009A2 Field-effect transistor structure and method of manufacture |
| 01/07/2004 | EP1378006A2 Method of fabricating an oxide layer on a silicon carbide layer utilizing an anneal in a hydrogen environment |
| 01/07/2004 | EP1378005A2 Methods for improved planarization post cmp processing |
| 01/07/2004 | EP1378004A2 Detachable substrate with controlled mechanical hold and method for production thereof |
| 01/07/2004 | EP1378003A2 Detachable substrate or detachable structure and method for the production thereof |
| 01/07/2004 | EP1378002A2 Metal-insulator-metal capacitor in copper |
| 01/07/2004 | EP1378000A2 Conductive collar surrounding semiconductor workpiece in plasma chamber |
| 01/07/2004 | EP1377999A1 Inductively coupled plasma source with controllable power distribution |
| 01/07/2004 | EP1377983A2 Reference for mram cell |
| 01/07/2004 | EP1377881A2 Scanning probe based lithographic alignment |
| 01/07/2004 | EP1377879A2 Photoresist compositions comprising solvents for short wavelength imaging |
| 01/07/2004 | EP1377876A1 High resolution resists for next generation lithographies |
| 01/07/2004 | EP1377842A1 Method of detecting carrier dose of a semiconductor wafer |
| 01/07/2004 | EP1377697A1 Suppression of n-type autodoping in low-temperature si and sige epitaxy |
| 01/07/2004 | EP1377696A1 Back-end metallisation process |
| 01/07/2004 | EP1377394A1 Label sheet for cleaning and conveying member having cleaning function |
| 01/07/2004 | EP1214635B9 A system and method for a digital mass flow controller |
| 01/07/2004 | EP1115900B1 Methods for preparing ruthenium metal films |
| 01/07/2004 | EP1062468B1 A package for storing contaminant-sensitive articles |
| 01/07/2004 | CN2598135Y Chip sticking film remover |
| 01/07/2004 | CN2598134Y Polymer composite nano-particle molecular film |
| 01/07/2004 | CN2598023Y 图形发生器 Graphics Generator |
| 01/07/2004 | CN2597491Y 热处理装置 Heat treatment device |
| 01/07/2004 | CN1466860A Method and apparatus for generating X-ray or EUV radiation |
| 01/07/2004 | CN1466779A Semiconductor device and its manufacturing method |
| 01/07/2004 | CN1466778A Electronic parts |
| 01/07/2004 | CN1466777A Semiconductor element and method of manufacturing and multi-layer printed circuit board and mfg. method |
| 01/07/2004 | CN1466776A Method for manufacturing semiconductor device |
| 01/07/2004 | CN1466775A Electrode structure, and method for manufacturing thin-film structure |
| 01/07/2004 | CN1466773A Substrate and method for producing same, and thin film structure |
| 01/07/2004 | CN1466772A Fluid delivery module fluid delivery ring and methods for making the same |
| 01/07/2004 | CN1466732A Smart load port with integrated carrier monitoring and fad-wide carrier management system |
| 01/07/2004 | CN1466708A Photoresist stripper/cleaner compositions containing aromatic acid inhibitors |
| 01/07/2004 | CN1466707A Pinhole defect repair by resist blow |
| 01/07/2004 | CN1466706A Photosensitive resin composition |
| 01/07/2004 | CN1466676A In-situ method and apparatus for end point detection in chemical mechanical polishing |
| 01/07/2004 | CN1466670A System and method for controlling movement of a workpiece in a thermal processing system |
| 01/07/2004 | CN1466226A EFT with neck shape channel and mfg. method thereof |
| 01/07/2004 | CN1466225A Double carrier transistor and making method thereof |
| 01/07/2004 | CN1466224A Separation grid type flash memory and mfg. method thereof |
| 01/07/2004 | CN1466222A Semiconductor device with capacitor |
| 01/07/2004 | CN1466221A Non-volatile memory cell and fabrication method thereof |
| 01/07/2004 | CN1466220A Embedded bit line structure and mfg. method thereof |
| 01/07/2004 | CN1466219A AND gate logic device with monowall carbon nano tube strucure and mfg. method |
| 01/07/2004 | CN1466218A RAM made of carbon nano tube and preparation method thereof |
| 01/07/2004 | CN1466216A Carbon nano tube logic OR gate device and preparation method thereof |
| 01/07/2004 | CN1466214A Carbon nano tube type integrated EFI and preparation process thereof |
| 01/07/2004 | CN1466213A Multi-chip semiconductor package and mfg. method thereof |
| 01/07/2004 | CN1466211A Semiconductor package and mfg. method thereof |
| 01/07/2004 | CN1466207A Metal pad and junction pad area structure |
| 01/07/2004 | CN1466205A Flip Chip type semiconductor package using leadframe as chip carrier |
| 01/07/2004 | CN1466204A Leadframe for preventing pin from short circuit and method for making semiconductor package having same |
| 01/07/2004 | CN1466200A Semiconductor chip carrier, semiconductor package component and semiconductor package method |
| 01/07/2004 | CN1466199A Chip carrier holed semiconductor package element and mfg. method thereof |
| 01/07/2004 | CN1466197A Sequare shape pin-free planar semiconductor package structure and mfg. method |
| 01/07/2004 | CN1466196A Method for mfg. mask ROM |
| 01/07/2004 | CN1466195A Method for mfg. mask ROM |
| 01/07/2004 | CN1466194A Method for mfg. Y-direction antomatic oriented mask ROM |
| 01/07/2004 | CN1466193A Multi-bit memory unit and mfg. method thereof |
| 01/07/2004 | CN1466192A Method for promoting performance of flash memory by using microcrystalline silicon film as floating gate |
| 01/07/2004 | CN1466191A Method for forming multi-layer conductive line |
| 01/07/2004 | CN1466190A Method for forming copper metal line |
| 01/07/2004 | CN1466189A Method for making air bridge on substrate |
| 01/07/2004 | CN1466188A Method for correcting convex block outline |
| 01/07/2004 | CN1466187A Barrier layer free inner wiring technology and structure with multi-layer seed layers |
| 01/07/2004 | CN1466186A Method for integrating high-voltage element mfg. process and mixed signal element mfg. process |
| 01/07/2004 | CN1466185A Method for realizing high speed celf transmission |
| 01/07/2004 | CN1466182A Apparatus and method for cleaning probe card contacts |
| 01/07/2004 | CN1466181A Improved technology for package of lattic array element |
| 01/07/2004 | CN1466180A Chip storage method for preventing welding pad from fluorating and chip storage conveyer |
| 01/07/2004 | CN1466179A Opened leadframe type semiconductor package structure and mfg process |
| 01/07/2004 | CN1466178A Semiconductor package method |
| 01/07/2004 | CN1466177A Method for making metal semiconductor transistor |
| 01/07/2004 | CN1466176A Method for making source-and-drain structure with improved proximity effect |
| 01/07/2004 | CN1466175A EFT structure with elongation strain channel layer and mfg. method thereof |
| 01/07/2004 | CN1466174A Wafer pressure adjusting system for wafer-lapping machine |
| 01/07/2004 | CN1466173A Method for cleaning wafer after metal plasma etching |
| 01/07/2004 | CN1466172A Back side metallization technology for eutectic welding |