Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2004
01/02/2004EP1376599A2 Magnetic memory device having XP Cell and STR Cell in one Chip
01/02/2004EP1376598A1 Memory cell and memory device
01/02/2004EP1376594A1 Three-dimensional memory storage device
01/02/2004EP1376462A1 Method for manufacturing a tape
01/02/2004EP1376242A1 Over-coating agent for forming fine patterns and a method of forming fine patterns using it
01/02/2004EP1376240A2 Laser beam control for an exposure apparatus
01/02/2004EP1376238A2 A system for correcting aberration and distortion in EUV litography
01/02/2004EP1376235A2 Full-contact type exposure device
01/02/2004EP1376233A2 Method of producing a resin for a radiation-sensitive material
01/02/2004EP1376205A1 Connection means for making an electrical connection betweeen a cell, in particular comprising liquid crystals, and a driving or supply circuit
01/02/2004EP1376191A1 Deformable mirror actuation system
01/02/2004EP1376185A2 Minimizing thermal distortion effects on EUV mirror
01/02/2004EP1376183A2 Optical-element mountings exhibiting reduced deformation of optical elements held thereby
01/02/2004EP1376144A2 Test data analysis system
01/02/2004EP1376140A2 Probe card contact block and apparatus for electrical connection
01/02/2004EP1376092A2 Method and device for controlling thermal distortion in elements of a lithography system
01/02/2004EP1376052A2 System and method for automated focus measuring of a lithography tool
01/02/2004EP1375699A1 Method for forming metal pattern
01/02/2004EP1375698A1 Sputter device
01/02/2004EP1375559A1 Dielectrics with copper diffusion barrier
01/02/2004EP1375417A2 Bridges for microelectromechanical structures
01/02/2004EP1375414A2 Chemical delivery systems and methods of delivery
01/02/2004EP1375066A2 Wafer polishing apparatus and cleaning method using inert gas
01/02/2004EP1375048A1 Wire bonding device
01/02/2004EP1374658A1 A substrate for mounting a semiconductor
01/02/2004EP1374402A1 Buffer circuit having reduced leakage current and method of reducing leakage current in a field programmable device
01/02/2004EP1374318A2 Silicon-on-insulator (soi) trench photodiode and method of forming same
01/02/2004EP1374314A1 Integrated toroidal coil inductors for ic devices
01/02/2004EP1374313A1 Electronic devices comprising thin-film transistors, and their manufacture
01/02/2004EP1374312A2 Field-effect transistor structure and method of manufacture
01/02/2004EP1374311A1 High k dielectric film and method for making
01/02/2004EP1374310A2 Nanofabrication
01/02/2004EP1374309A1 Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
01/02/2004EP1374308A2 Memory cell array with individually addressable memory cells and method for the production thereof
01/02/2004EP1374304A1 High frequency integrated circuit (hfic) microsystems assembly and method for fabricating the same
01/02/2004EP1374301A2 Method of manufacturing a semiconductor device with metallization layers interconnected by tungsten plugs
01/02/2004EP1374300A2 Damascene processing using dielectric barrier films
01/02/2004EP1374298A1 Chip module with bond-wire connections with small loop height
01/02/2004EP1374297A2 Flip chip interconnection using no-clean flux
01/02/2004EP1374296A1 Method for encapsulating a chip having a sensitive surface
01/02/2004EP1374295A2 Method for realizing wiring options in an integrated circuit and a corresponding integrated circuit
01/02/2004EP1374294A2 Fabrication of high resistivity structures using focused ion beams
01/02/2004EP1374293A2 Method for the production of a mosfet with very small channel length
01/02/2004EP1374292A2 A method for fabrication of a high capacitance interpoly dielectric
01/02/2004EP1374291A2 Deposition method over mixed substrates using trisilane
01/02/2004EP1374290A2 Improved process for deposition of semiconductor films
01/02/2004EP1374289A2 Method of forming enhanced transistor gate using e-beam radiation and integrated circuit including this transistor gate
01/02/2004EP1374288A2 Method of plasma etching organic antireflective coating
01/02/2004EP1374287A2 Process for forming sub-lithographic photoresist features
01/02/2004EP1374286A2 Diffuser and rapid cycle chamber
01/02/2004EP1374285A1 Angular spin, rinse, and dry module and methods for making and implementing the same
01/02/2004EP1374284A2 Device for introducing electric components into continuous tapes
01/02/2004EP1374283A2 Acoustic detection of dechucking and apparatus therefor
01/02/2004EP1374282A1 Hybrid deposition system & methods
01/02/2004EP1374277A1 Inductive plasma processor including current sensor for plasma excitation coil
01/02/2004EP1374276A2 Plasma surface treatment method and device for carrying out said method
01/02/2004EP1374275A2 Ion source filament
01/02/2004EP1374106A2 Wireless programmable logic devices
01/02/2004EP1374033A2 Improved high speed data capture circuit for a digital device
01/02/2004EP1374004A2 Flow controller
01/02/2004EP1373997A2 Method and apparatus for controlling a tool using a baseline control script
01/02/2004EP1373996A2 Manufacturing system and method for processing materials
01/02/2004EP1373982A2 Method for adjusting the overlay of two masking planes in a photolithographic process for the production of an integrated circuit
01/02/2004EP1373981A2 Lithographer comprising a mobile lens and method for producing digital holograms in a storage medium
01/02/2004EP1373976A1 Electrochemical pixel device
01/02/2004EP1373869A1 Detection and classification of micro-defects in semi-conductors
01/02/2004EP1373602A1 Process for preparing fluoride monocrystals
01/02/2004EP1373595A1 Method for producing hydrogenated silicon oxycarbide films
01/02/2004EP1373331A2 Thermally cured underlayer for lithographic application
01/02/2004EP1373278A1 Metalloamide and aminosilane precursors for cvd formation of dielectric thin films
01/02/2004EP1373151A1 Oxygen doping of silicon oxyfluoride glass
01/02/2004EP1373099A1 Thin wafer insert
01/02/2004EP1372909A1 Support for a polishing belt
01/02/2004EP1372908A1 Reinforced polishing pad with a shaped or flexible window structure
01/02/2004EP1372907A2 Apparatus and methods for aligning a surface of an active retainer ring with a wafer surface during chemical mechanical polishing
01/02/2004EP1372864A2 Manifolded fluid delivery system
01/02/2004EP1252362B1 Method and device for depositing a precursor on a substrate, said precursor being present in the liquid form
01/02/2004EP1098928B1 Method of producing porous calcined polyimide
01/02/2004EP0956518B1 Interferometer system and lithographic apparatus comprising such a system
01/02/2004EP0934602B1 Short channel flash eeprom device having a double diffused source and method of manufacturing the same
01/02/2004EP0844670B1 Method for manufacturing thin film transistor, liquid crystal display and electronic device both produced by the method
01/02/2004EP0710432B1 Process for manufacturing printed circuit foils or semifinished products for printed circuit foils, and thus manufactured printed circuit foils and semifinished products
01/01/2004US20040003368 Method and apparatus for performing rule-based gate shrink utilizing dipole illumination
01/01/2004US20040003366 Method for making layout data in semiconductor integrated circuit
01/01/2004US20040003359 Semiconductor-device design method, semiconductor-device design program and semiconductor-device design apparatus
01/01/2004US20040003006 Layout pattern verification device for verifying a layout pattern of transistors in the manufacturing of a large scale integrated circuit
01/01/2004US20040002829 Semiconductor test data analysis system
01/01/2004US20040002784 System for and method of processing substrate
01/01/2004US20040002617 Hydrolysis of organosilicon compound; etching photoresist
01/01/2004US20040002573 Mixture of thermosetting resin and adhesion promoter
01/01/2004US20040002572 Mixture of polyamides and polybenzoxazole; heat resistant protective coatings
01/01/2004US20040002430 Using a time critical wafer cleaning solution by combining a chelating agent with an oxidizer at point-of-use
01/01/2004US20040002292 Polishing apparatus, polishing method and method of manufacturing semiconductor device
01/01/2004US20040002291 Partial-membrane carrier head
01/01/2004US20040002277 Apparatus for repairing organic electroluminescent element defects
01/01/2004US20040002227 Apparatus for manufacturing electronic device, method of manufacturing electronic device, and program for manufacturing electronic device
01/01/2004US20040002226 Method for fabricating a nitrided silicon-oxide gate dielectric
01/01/2004US20040002225 Method for fabricating fine features by jet-printing and surface treatment
01/01/2004US20040002224 Substrate processing system and substrate processing method
01/01/2004US20040002223 Method for plasma etching of high-K dielectric materials