Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2003
12/25/2003US20030235962 Method of manufacturing a semiconductor integrated circuit device
12/25/2003US20030235961 Cyclical sequential deposition of multicomponent films
12/25/2003US20030235960 Method for manufacturing semiconductor device
12/25/2003US20030235959 Self-aligned differential oxidation in trenches by ion implantation
12/25/2003US20030235958 Thicker oxide formation at the trench bottom by selective oxide deposition
12/25/2003US20030235957 Method and structure for graded gate oxides on vertical and non-planar surfaces
12/25/2003US20030235956 Method of forming an array of flash field effect transistors and circuitry peripheral to such array
12/25/2003US20030235955 Method for fabricating y-direction, self-alignment mask rom device
12/25/2003US20030235954 Method for fabricating floating gate
12/25/2003US20030235953 Semiconductor device and method of manufacturing the same
12/25/2003US20030235952 Method for manufacturing non-volatile memory device
12/25/2003US20030235951 Manufacturing method for semiconductor storage device
12/25/2003US20030235949 Memory device with reduced cell size
12/25/2003US20030235948 Methods for fabricating semiconductor devices by forming grooves across alternating elongated regions
12/25/2003US20030235947 Method for fabricating capacitor in semiconductor device
12/25/2003US20030235946 Methods of forming integrated circuit memory devices that include a plurality of landing pad holes that are arranged in a staggered pattern and integrated circuit memory devices formed thereby
12/25/2003US20030235945 Methods of forming spaced conductive regions, and methods of forming capacitor constructions
12/25/2003US20030235944 Semiconductor device manufacturing method
12/25/2003US20030235943 Notched damascene planar poly/metal gate and methods thereof
12/25/2003US20030235942 Semiconductor device
12/25/2003US20030235941 Method of fabricating mask ROM
12/25/2003US20030235940 Manufacturing method of semiconductor device
12/25/2003US20030235939 Method and apparatus for manufacturing semiconductor apparatus
12/25/2003US20030235938 Method of manufacturing semiconductor resin molding and resin member employed therefor
12/25/2003US20030235937 Method of thinning a wafer utilizing a laminated reinforcing layer over the device side
12/25/2003US20030235936 Schottky barrier CMOS device and method
12/25/2003US20030235934 Layers of group III-nitride semiconductor made by processes with multi-step epitaxial growths
12/25/2003US20030235932 Integrated driver process flow
12/25/2003US20030235931 Ge photodetectors
12/25/2003US20030235930 Multi-impression nanofeature production
12/25/2003US20030235928 Metrology for monitoring a rapid thermal annealing process
12/25/2003US20030235927 Switchable circuit devices; and methods of forming switchable circuit devices
12/25/2003US20030235853 Solid phase synthesis; for drug screening
12/25/2003US20030235790 Method for forming opening and application thereof
12/25/2003US20030235789 Photolithography process for Mask ROM coding
12/25/2003US20030235788 Negative resist composition comprising hydroxy-substituted base polymer and si-containing crosslinker having epoxy ring and a method for patterning semiconductor devices using the same
12/25/2003US20030235786 Developer-soluble metal alkoxide coatings for microelectronic applications
12/25/2003US20030235785 Negative photoresists for short wavelength imaging
12/25/2003US20030235784 Organic anti-reflective coating composition and method for forming photoresist patterns using the same
12/25/2003US20030235782 Useful for imaging negative and positive patterns in the production of semiconductor devices
12/25/2003US20030235781 Used in manufacturing a semiconductor device
12/25/2003US20030235778 Photoresist compositions for short wavelength imaging
12/25/2003US20030235775 Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds
12/25/2003US20030235767 Phase shift mask blank, phase shift mask, and method of manufacture
12/25/2003US20030235766 Method of designing phase grating pattern for use in modifying illumination in an exposure process, and method of manufacturing a photo mask system having the phase grating pattern
12/25/2003US20030235765 Uniformity
12/25/2003US20030235710 Semiconductor device comprising substrate having first layer of dielectric material, second layer of amorphous silicon, amorphous germanium or alloys thereof, and third layer; second layer provides adhesion between first and third layers
12/25/2003US20030235682 Method and device for controlling thermal distortion in elements of a lithography system
12/25/2003US20030235486 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
12/25/2003US20030235330 Position detection apparatus, position detection method, exposure apparatus, device manufacturing method, and substrate
12/25/2003US20030235101 Semiconductor integrated circuit device
12/25/2003US20030235095 Semiconductor memory device with an improved memory cell structure and method of operating the same
12/25/2003US20030235091 Semiconductor device without adverse effects caused by inclinations of word line and bit line
12/25/2003US20030235090 Semiconductor memory device with reduced package test time
12/25/2003US20030235088 Low cost high density rectifier matrix memory
12/25/2003US20030235082 Single-poly EEPROM
12/25/2003US20030235079 Nor flash memory cell with high storage density
12/25/2003US20030235078 Deep wordline trench to shield cross coupling between adjacent cells for scaled nand
12/25/2003US20030235075 Vertical NROM having a storage density of 1bit per 1F2
12/25/2003US20030235074 Magnetic memory device
12/25/2003US20030235072 Magnetic random access memory (MRAM) for spontaneous hall effect and method of writing and reading data using the MRAM
12/25/2003US20030235071 Magnetic memory device having XP cell and STr cell in one chip
12/25/2003US20030235070 Thin film magnetic memory device and semiconductor integrated circuit device including the same as one of circuit blocks
12/25/2003US20030235069 Thin film magnetic memory device conducting read operation by a self-reference method
12/25/2003US20030235067 Ferroelectric non-volatile memory device, and driving method thereof
12/25/2003US20030235064 Method of forming a non-volatile electron storage memory and the resulting device
12/25/2003US20030235063 Memory storage device
12/25/2003US20030235058 Semiconductor integrated circuit device
12/25/2003US20030235041 Container for an electronic component
12/25/2003US20030235020 Electrostatic breakdown preventing circuit for semiconductor device
12/25/2003US20030234989 Optical-element mountings exhibiting reduced deformation of optical elements held thereby
12/25/2003US20030234981 Correction of birefringence in cubic crystalline optical systems
12/25/2003US20030234971 Electro-optical device and electronic apparatus
12/25/2003US20030234970 Deformable mirror actuation system
12/25/2003US20030234939 Alignment apparatus, control method therefor, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
12/25/2003US20030234929 Method and system to reduce/detect a presence of gas in a flow of a cleaning fluid
12/25/2003US20030234919 Full-contact type exposure device
12/25/2003US20030234912 Projection optical system, exposure apparatus and exposure method
12/25/2003US20030234899 Electro-optical device and electronic apparatus
12/25/2003US20030234854 Laser beam source control method and unit, exposure method and apparatus, and device manufacturing method
12/25/2003US20030234703 Bridges for microelectromechanical structures
12/25/2003US20030234661 Semiconductor device and test method for the same
12/25/2003US20030234657 Method for producing a probe, mask for producing the probe, and probe
12/25/2003US20030234655 System and method for using a capacitance measurement to monitor the manufacture of a semiconductor
12/25/2003US20030234548 Wafer handler
12/25/2003US20030234465 Directional assembly of carbon nanotube strings
12/25/2003US20030234454 Integrated circuit package and method of manufacturing the integrated circuit package
12/25/2003US20030234453 Flip chip interconncetion structure and process of making the same
12/25/2003US20030234452 Optical integrated circuit element package and process for making the same
12/25/2003US20030234451 Stabilized wire bonded electrical connections and method of making same
12/25/2003US20030234450 Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device
12/25/2003US20030234449 Memory device and method of production and method of use of same and semiconductor device and method of production of same
12/25/2003US20030234446 Frame has a perforation to form, between a central platform and a peripheral part located a certain distance apart, radiating elongate leads
12/25/2003US20030234442 Semiconductor package and method for fabricating the same
12/25/2003US20030234439 SiGe gate electrodes on SiGe subtrates and methods of making the same
12/25/2003US20030234438 Integrated circuit structure for mixed-signal RF applications and circuits
12/25/2003US20030234437 Inductor for semiconductor integrated circuit and method of fabricating the same
12/25/2003US20030234436 Semiconductor device with a spiral inductor and magnetic material
12/25/2003US20030234434 Semiconductor device
12/25/2003US20030234433 Forming isolation regions associated with a semiconductor substrate.
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