Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2003
12/23/2003US6667224 Method to eliminate inverse narrow width effect in small geometry MOS transistors
12/23/2003US6667223 High aspect ratio high density plasma (HDP) oxide gapfill method in a lines and space pattern
12/23/2003US6667222 Method to combine zero-etch and STI-etch processes into one process
12/23/2003US6667221 Method of manufacturing semiconductor device
12/23/2003US6667220 Method for forming junction electrode of semiconductor device
12/23/2003US6667219 Methods for forming void regions, dielectric regions and capacitor constructions
12/23/2003US6667218 Enhancing semiconductor structure surface area using HSG and etching
12/23/2003US6667217 Method of fabricating a damascene copper inductor structure using a sub-0.18 um CMOS process
12/23/2003US6667216 Semiconductor device and method of fabricating the same
12/23/2003US6667215 Method of making transistors
12/23/2003US6667214 Non-volatile semiconductor memory devices and methods for manufacturing the same
12/23/2003US6667213 Method of fabricating a high-voltage transistor with a multi-layered extended drain structure
12/23/2003US6667212 Alignment system for planar charge trapping dielectric memory cell lithography
12/23/2003US6667211 Non-volatile semiconductor memory device and method of manufacturing the same
12/23/2003US6667210 Flash memory cell process using a hardmask
12/23/2003US6667209 Methods for forming semiconductor device capacitors that include an adhesive spacer that ensures stable operation
12/23/2003US6667208 Method for manufacturing a capacitor lower electrode over a transistor and a bit line corresponding to a cell area of a semiconductor device
12/23/2003US6667207 High-dielectric constant insulators for FEOL capacitors
12/23/2003US6667206 Method of manufacturing semiconductor device
12/23/2003US6667205 Method of forming retrograde n-well and p-well
12/23/2003US6667204 Semiconductor device and method of forming the same
12/23/2003US6667203 Method of fabricating a MOS capacitor
12/23/2003US6667202 Semiconductor device and method for making the same
12/23/2003US6667201 Method for manufacturing flash memory cell
12/23/2003US6667200 Method for forming transistor of semiconductor device
12/23/2003US6667199 Semiconductor device having a replacement gate type field effect transistor and its manufacturing method
12/23/2003US6667198 Method and photo mask for manufacturing an array substrate
12/23/2003US6667197 Method for differential oxidation rate reduction for n-type and p-type materials
12/23/2003US6667196 Method for real-time monitoring and controlling perovskite oxide film growth and semiconductor structure formed using the method
12/23/2003US6667193 Semiconductor device and a method of manufacturing the same
12/23/2003US6667192 Device and method for making devices comprising at least a chip fixed on a support
12/23/2003US6667190 Method for high layout density integrated circuit package substrate
12/23/2003US6667188 Thin film transistor and method for fabricating same
12/23/2003US6667186 Method of isolating semiconductor laser diode
12/23/2003US6667185 Method of fabricating nitride semiconductor device
12/23/2003US6667184 Single crystal GaN substrate, method of growing same and method of producing same
12/23/2003US6667147 Electronic device manufacture
12/23/2003US6667145 Resist composition comprising as a base resin a polymer having highly adherent, highly rigid units and especially suited as micropatterning material for VLSI fabrication, and (2) a patterning process using the resist
12/23/2003US6667139 Setting the exposure amount and the focus value in forming a pattern by transferring a circuit pattern on a mask onto a resist film.
12/23/2003US6667135 Method of manufacturing a photomask
12/23/2003US6667102 Microelectronics
12/23/2003US6667073 Leadframe for enhanced downbond registration during automatic wire bond process
12/23/2003US6667072 Sustains surface flattening method by employing participation of porous materials such as zeolites, zeolite like, mesoporous and mesoporous composites; planarized substrate comprises ceramic substrate, buffer layer, nanostructure layer
12/23/2003US6666997 Method for removing cleaning compound flash from mold vents
12/23/2003US6666986 Mixtures of cleaning compounds used on semiconductor substrates
12/23/2003US6666980 Method for manufacturing a resistor
12/23/2003US6666959 Semiconductor workpiece proximity plating methods and apparatus
12/23/2003US6666957 Magnetron sputtering system and photomask blank production method based on the same
12/23/2003US6666949 Uniform temperature workpiece holder
12/23/2003US6666943 Film transfer method
12/23/2003US6666928 Chamber assembly for use with a substrate
12/23/2003US6666922 System for processing a workpiece
12/23/2003US6666921 Chemical vapor deposition apparatus and chemical vapor deposition method
12/23/2003US6666915 Method for the preparation of an epitaxial silicon wafer with intrinsic gettering
12/23/2003US6666756 Wafer carrier head assembly
12/23/2003US6666752 Wafer retainer and method for attaching/detaching the wafer retainer to/from polishing machine base plate
12/23/2003US6666751 Deformable pad for chemical mechanical polishing
12/23/2003US6666611 Three degree of freedom joint
12/23/2003US6666560 Reflection type demagnification optical system, exposure apparatus, and device fabricating method
12/23/2003US6666369 Semiconductor device manufacturing method, electronic parts mounting method and heating/melting process equipment
12/23/2003US6666368 Methods and systems for positioning substrates using spring force of phase-changeable bumps therebetween
12/23/2003US6666031 Fluid temperature control apparatus
12/23/2003US6665952 Method for heat processing of substrate
12/23/2003US6665933 Process for fabricating heat sink with high-density fins
12/23/2003US6665931 Wiring method for forming conductor wire on a substrate board
12/18/2003WO2003105544A1 Plasma processing device
12/18/2003WO2003105288A1 Contact for spiral contactor and spiral contactor
12/18/2003WO2003105238A1 Polycrystalline thin-film solar cells
12/18/2003WO2003105236A1 Display unit and production method therefor, and projection type display unit
12/18/2003WO2003105235A1 Semiconductor device including insulated-gate field-effect transistor and its manufacturing method
12/18/2003WO2003105234A1 Semiconductor device and semiconductor device manufacturing method
12/18/2003WO2003105233A1 Elevated source and drain elements for strained-channel heteroju nction field-effect transistors
12/18/2003WO2003105232A1 Dopen region in an soi substrate
12/18/2003WO2003105231A1 Method for producing nrom-memory cells with trench transistors
12/18/2003WO2003105229A2 Resistor network such as a resistor ladder network and a method for manufacturing such a resistor network
12/18/2003WO2003105227A2 Data carrier comprising an integrated circuit with an esd protection circuit
12/18/2003WO2003105223A2 Quad flat non-leaded package comprising a semiconductor device
12/18/2003WO2003105222A1 Method for contact bonding electronic components on an insulating substrate and component module produced according to said method
12/18/2003WO2003105221A1 Cmos transistors with differentially strained channels of different thickness
12/18/2003WO2003105220A1 Method for filling trench and relief geometries in semiconductor structures
12/18/2003WO2003105219A1 A method of fabricating a substrate comprising a useful layer of a monocrystalline semiconductor material
12/18/2003WO2003105218A1 Receiving container body for object to be processed
12/18/2003WO2003105217A1 Wafer pre-alignment apparatus and method
12/18/2003WO2003105216A1 Container conveying system
12/18/2003WO2003105214A1 Bonding tool and joining device for electronic component
12/18/2003WO2003105213A2 Method of manufacturing an electronic device
12/18/2003WO2003105211A1 Method for producing a hetero-bipolar transistor and hetero-bipolar-transistor
12/18/2003WO2003105209A1 Method for producing polycrystalline silicon substrate for solar cell
12/18/2003WO2003105208A1 Cleaning and drying device
12/18/2003WO2003105207A1 Feed-through process and amplifier with feed-through
12/18/2003WO2003105206A1 Growing source and drain elements by selecive epitaxy
12/18/2003WO2003105205A1 Hafnium-aluminum oxide dielectric films
12/18/2003WO2003105204A2 Semiconductor devices having strained dual channel layers
12/18/2003WO2003105202A1 Wave aberration measuring instrument, exposure apparatus, semiconductor device manufacturing system, and method for manufacturing same
12/18/2003WO2003105201A1 Substrate processing device, substrate processing method, and developing device
12/18/2003WO2003105200A1 Substrate processing apparatus and substrate processing method
12/18/2003WO2003105199A1 Heater module for semiconductor production system
12/18/2003WO2003105198A1 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
12/18/2003WO2003105196A2 Method for controlling etch bias of carbon doped oxide films
12/18/2003WO2003105195A2 Method to perform deep implants without scattering to adjacent areas
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