| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/13/2004 | US6677655 Silicon wafer with embedded optoelectronic material for monolithic OEIC |
| 01/13/2004 | US6677652 Metal layer deposited over gate dielectric layer in active area, oxygen ions implanted into metal layer in active area to form metal layer which is oxidized to form metal oxide layer, layers patterned to form metal and metal oxide gates |
| 01/13/2004 | US6677651 Semiconductor device and method for manufacturing the same |
| 01/13/2004 | US6677650 Silicon plugs and local interconnect for embedded memory and system-on-chip (SOC) applications |
| 01/13/2004 | US6677649 SRAM cells with two P-well structure |
| 01/13/2004 | US6677648 Device having a silicon oxide film containing krypton |
| 01/13/2004 | US6677646 Method and structure of a disposable reversed spacer process for high performance recessed channel CMOS |
| 01/13/2004 | US6677645 Body contact MOSFET |
| 01/13/2004 | US6677644 Semiconductor integrated circuit having low voltage and high voltage transistors |
| 01/13/2004 | US6677643 Super-junction semiconductor device |
| 01/13/2004 | US6677642 Field effect transistor structure and method of manufacture |
| 01/13/2004 | US6677641 Semiconductor structure with improved smaller forward voltage loss and higher blocking capability |
| 01/13/2004 | US6677640 Memory cell with tight coupling |
| 01/13/2004 | US6677639 Non-volatile memory device and method for fabricating the same |
| 01/13/2004 | US6677638 Nonvolatile memory device and method for fabricating the same |
| 01/13/2004 | US6677637 Intralevel decoupling capacitor, method of manufacture and testing circuit of the same |
| 01/13/2004 | US6677636 Structure for reducing contact aspect ratios |
| 01/13/2004 | US6677635 Stacked MIMCap between Cu dual damascene levels |
| 01/13/2004 | US6677634 Method for fabricating semiconductor device |
| 01/13/2004 | US6677633 Semiconductor device |
| 01/13/2004 | US6677632 Method of forming a metal to polysilicon contact in oxygen environment |
| 01/13/2004 | US6677631 MRAM memory elements and method for manufacture of MRAM memory elements |
| 01/13/2004 | US6677630 Semiconductor device having ferroelectric film and manufacturing method thereof |
| 01/13/2004 | US6677629 Electric or electronic component and application as non volatile memory and device with surface acoustic waves |
| 01/13/2004 | US6677625 Bipolar transistor |
| 01/13/2004 | US6677623 Bed structure underlying electrode pad of semiconductor device and method for manufacturing same |
| 01/13/2004 | US6677622 Semiconductor device having insulated gate bipolar transistor with dielectric isolation structure |
| 01/13/2004 | US6677616 Fabrication method of thin film transistor substrate for X-ray detector |
| 01/13/2004 | US6677613 Semiconductor device and method of fabricating the same |
| 01/13/2004 | US6677612 Method for fabricating a simplified CMOS polysilicon thin film transistor and resulting structure |
| 01/13/2004 | US6677611 Thin film circuit |
| 01/13/2004 | US6677609 Thin film transistor, manufacturing method thereof, and circuit and liquid crystal display device using the thin film transistor |
| 01/13/2004 | US6677607 Organic semiconductor device having an oxide layer |
| 01/13/2004 | US6677606 Dopa and dopamine modification of metal oxide semiconductors, method for attaching biological molecules to semiconductors |
| 01/13/2004 | US6677600 EUV radiation source |
| 01/13/2004 | US6677599 System and method for uniformly implanting a wafer with an ion beam |
| 01/13/2004 | US6677598 Beam uniformity and angular distribution measurement system |
| 01/13/2004 | US6677594 Scanning wheel for ion implantation process chamber |
| 01/13/2004 | US6677586 Methods and apparatus for electron beam inspection of samples |
| 01/13/2004 | US6677557 Ceramic heater |
| 01/13/2004 | US6677553 Laser processing apparatus |
| 01/13/2004 | US6677552 System and method for laser micro-machining |
| 01/13/2004 | US6677549 Plasma processing apparatus having permeable window covered with light shielding film |
| 01/13/2004 | US6677286 Water, solvent, dicarboxylic acid, base, and source of fluoride; cleaning compound for microelectronics |
| 01/13/2004 | US6677255 Method for removing fences without reduction of ONO film thickness |
| 01/13/2004 | US6677254 Processes for making a barrier between a dielectric and a conductor and products produced therefrom |
| 01/13/2004 | US6677253 Carbon doped oxide deposition |
| 01/13/2004 | US6677252 Exposed to radiation at a first wavelength to cure the planarization material and is exposed to radiation at a second wavelength to cause changes to the planarization material that facilitate separation |
| 01/13/2004 | US6677251 Method for forming a hydrophilic surface on low-k dielectric insulating layers for improved adhesion |
| 01/13/2004 | US6677250 CVD apparatuses and methods of forming a layer over a semiconductor substrate |
| 01/13/2004 | US6677249 Method for manufacturing breakaway layers for detaching deposited layer systems |
| 01/13/2004 | US6677248 Coaxial type signal line and manufacturing method thereof |
| 01/13/2004 | US6677247 Method of increasing the etch selectivity of a contact sidewall to a preclean etchant |
| 01/13/2004 | US6677246 Endpoint detection in the etching of dielectric layers |
| 01/13/2004 | US6677245 Contact structure production method |
| 01/13/2004 | US6677244 Specimen surface processing method |
| 01/13/2004 | US6677242 Integrated shallow trench isolation approach |
| 01/13/2004 | US6677240 Method for patterning dense and isolated features on semiconductor devices |
| 01/13/2004 | US6677239 Methods and compositions for chemical mechanical polishing |
| 01/13/2004 | US6677238 System and methods for fabrication of a thin film pattern |
| 01/13/2004 | US6677237 Semiconductor chip, semiconductor device, circuit board and electronic equipment and production methods for them |
| 01/13/2004 | US6677236 Semiconductor device fabrication method for interconnects that suppresses loss of interconnect metal |
| 01/13/2004 | US6677235 Silicon die with metal feed through structure |
| 01/13/2004 | US6677234 Method of selectively forming silicide |
| 01/13/2004 | US6677233 Material deposition from a liquefied gas solution |
| 01/13/2004 | US6677232 Method for fabricating metal conductors and multi-level interconnects in a semiconductor device |
| 01/13/2004 | US6677231 Method for increasing adhesion ability of dielectric material in semiconductor |
| 01/13/2004 | US6677230 Method of manufacturing semiconductor device |
| 01/13/2004 | US6677229 Solder bump transfer sheet, method for producing the same, and methods for fabricating semiconductor device and printed board |
| 01/13/2004 | US6677227 Metal contactor flanges; connecting circuits |
| 01/13/2004 | US6677226 Method for forming an integrated circuit having a bonding pad and a fuse |
| 01/13/2004 | US6677224 Method of forming stacked gate for flash memories |
| 01/13/2004 | US6677223 Transistor with highly uniform threshold voltage |
| 01/13/2004 | US6677222 Method of manufacturing semiconductor device with polysilicon film |
| 01/13/2004 | US6677221 Semiconductor device and the fabricating method therefor |
| 01/13/2004 | US6677220 Antifuse structure and method of making |
| 01/13/2004 | US6677219 Method of forming a ball grid array package |
| 01/13/2004 | US6677218 Method for filling trenches in integrated semiconductor circuits |
| 01/13/2004 | US6677217 Methods for manufacturing integrated circuit metal-insulator-metal capacitors including hemispherical grain lumps |
| 01/13/2004 | US6677216 Method of making IC capacitor |
| 01/13/2004 | US6677215 Method of fabricating a diode protecting a gate electrode of a field effect transistor |
| 01/13/2004 | US6677213 SONOS structure including a deuterated oxide-silicon interface and method for making the same |
| 01/13/2004 | US6677212 Elevated source/drain field effect transistor and method for making the same |
| 01/13/2004 | US6677211 Method for eliminating polysilicon residue |
| 01/13/2004 | US6677210 High voltage transistors with graded extension |
| 01/13/2004 | US6677209 Low dielectric constant STI with SOI devices |
| 01/13/2004 | US6677208 Transistor with bottomwall/sidewall junction capacitance reduction region and method |
| 01/13/2004 | US6677206 Non-volatile high-performance memory device and relative manufacturing process |
| 01/13/2004 | US6677205 Depositing a first conductive material onto a gate oxide layer formed within trench and pad nitride; depositing a second conductive material; planarizing conductive materials; removing pad nitride; etching to form divot; forming spacer |
| 01/13/2004 | US6677204 Multigate semiconductor device with vertical channel current and method of fabrication |
| 01/13/2004 | US6677203 Method of manufacturing a semiconductor memory device which reduces the minimum area requirements of the device |
| 01/13/2004 | US6677202 Power MOS device with increased channel width and process for forming same |
| 01/13/2004 | US6677201 Method of fabricating thermal CVD oxynitride and BTBAS nitride sidewall spacer for metal oxide semiconductor transistors |
| 01/13/2004 | US6677200 Method of forming non-volatile memory having floating trap type device |
| 01/13/2004 | US6677199 Structure for preventing salicide bridging and method thereof |
| 01/13/2004 | US6677198 Structure of a low-voltage channel write/erase flash memory cell and fabricating method thereof |
| 01/13/2004 | US6677197 High aspect ratio PBL SiN barrier formation |
| 01/13/2004 | US6677196 Semiconductor memory device and method of fabricating the same |
| 01/13/2004 | US6677194 Method of manufacturing a semiconductor integrated circuit device |
| 01/13/2004 | US6677193 Method of producing semiconductor device and its structure |