| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/13/2004 | US6677192 Method of fabricating a relaxed silicon germanium platform having planarizing for high speed CMOS electronics and high speed analog circuits |
| 01/13/2004 | US6677191 Method of producing a top-gate thin film transistor |
| 01/13/2004 | US6677190 Self-aligned body contact in a semiconductor device |
| 01/13/2004 | US6677189 Method for forming polysilicon thin film transistor with a self-aligned LDD structure |
| 01/13/2004 | US6677185 Method of affixing a heat sink to a substrate and package thereof |
| 01/13/2004 | US6677184 Does not generate noise even when it is used for a pick-up using a three-beam scheme |
| 01/13/2004 | US6677183 Method of separation of semiconductor device |
| 01/13/2004 | US6677182 Technique for suppression of edge current in semiconductor devices |
| 01/13/2004 | US6677181 Method for fabricating stacked chip package device |
| 01/13/2004 | US6677180 Method for manufacturing a low-profile semiconductor device |
| 01/13/2004 | US6677179 Bumps of a chip dipped in a tacky thermosettable flux without filler is placed on an underfill-coated substrate, soldered together and simultaneously curing the underfill; no interference on solder joints; underfill encapsulation |
| 01/13/2004 | US6677177 Solid state image sensor and method for manufacturing the same |
| 01/13/2004 | US6677168 Analysis of ion implant dosage |
| 01/13/2004 | US6677167 Wafer processing apparatus and a wafer stage and a wafer processing method |
| 01/13/2004 | US6677166 Method for confirming alignment of a substrate support mechanism in a semiconductor processing system |
| 01/13/2004 | US6677165 Magnetoresistive random access memory (MRAM) cell patterning |
| 01/13/2004 | US6677108 Exposure of photoresists to radiation; patterning |
| 01/13/2004 | US6677103 Positive-working photoresist composition |
| 01/13/2004 | US6677102 Chemical amplifying type positive resist composition |
| 01/13/2004 | US6677100 Copolymer of an acrylate or methacrylate monomer having a silyl (si), silanol, silanediol, silanetriol, germanyl (ge), or stannous (sn) group, and maleic anhydride; for excimer laser lithography |
| 01/13/2004 | US6677099 Positive type photosensitive polyimide resin composition |
| 01/13/2004 | US6677087 Suitable for a krf excimer laser and especially an arf excimer laser and an f2 excimer |
| 01/13/2004 | US6677062 Substrate with an electrode and method of producing the same |
| 01/13/2004 | US6677055 Preventing the formation of whiskers and recess cavities on lead surfaces |
| 01/13/2004 | US6676990 Minimizing variability; increasing output; lowering cost |
| 01/13/2004 | US6676885 Plural semiconductor devices bonded onto one face of a single circuit board for subsequent batch resin encapsulation of the plural semiconductor devices in a single cavity formed by molding dies |
| 01/13/2004 | US6676843 Magnetically patterning conductors |
| 01/13/2004 | US6676822 Method for electro chemical mechanical deposition |
| 01/13/2004 | US6676812 Alignment mark shielding ring without arcing defect and method for using |
| 01/13/2004 | US6676805 Method of holding substrate and substrate holding system |
| 01/13/2004 | US6676804 Method and apparatus for plasma processing |
| 01/13/2004 | US6676803 Semiconductor device fabricating equipment using radio frequency energy |
| 01/13/2004 | US6676802 Remote exposure of workpieces using a plasma |
| 01/13/2004 | US6676801 Pressure suppression device for chemical mechanical polishing machine and method thereof |
| 01/13/2004 | US6676800 Particle contamination cleaning from substrates using plasmas, reactive gases, and mechanical agitation |
| 01/13/2004 | US6676770 Apparatus and method for removing particles from wafer pods |
| 01/13/2004 | US6676766 Method for cleaning a substrate using a sherbet-like composition |
| 01/13/2004 | US6676765 Method of removing particles and a liquid from a surface of substrate |
| 01/13/2004 | US6676764 Method for cleaning a substrate in selective epitaxial growth process |
| 01/13/2004 | US6676761 Method and apparatus for dechucking a substrate |
| 01/13/2004 | US6676759 Wafer support device in semiconductor manufacturing device |
| 01/13/2004 | US6676758 Gas collector for epitaxial reactor |
| 01/13/2004 | US6676757 Capable of increasing yields of a coating solution and forming an uniform coating film |
| 01/13/2004 | US6676756 Technique for high efficiency metalorganic chemical vapor deposition |
| 01/13/2004 | US6676753 Czochralski pullers for manufacturing monocrystalline silicon ingots, including heat shield having sloped portions |
| 01/13/2004 | US6676751 Epitaxial film produced by sequential hydride vapor phase epitaxy |
| 01/13/2004 | US6676748 Method for manufacturing semiconductor substrate |
| 01/13/2004 | US6676719 Pyrogenic preparation of alkali-doped silica particles for chemical mechanical polishing of semiconductor |
| 01/13/2004 | US6676718 Polishing composition containing polyethylenimine that forms hydrogen bonding sites with hydrated dielectric layer of silica to form protective film |
| 01/13/2004 | US6676493 Integrated planarization and clean wafer processing system |
| 01/13/2004 | US6676491 Cutting to form grooves, grinding a back of the semiconductor wafer to reduce a thickness |
| 01/13/2004 | US6676487 Polishing liquid of silicon dioxide powder; x-ray mask deposited on a semiconductor surface |
| 01/13/2004 | US6676486 Polymeric chemical injection into a water jet to improve cut quality while cutting very brittle materials |
| 01/13/2004 | US6676485 Wet injecting fine abrasives for water jet curved cutting of very brittle materials |
| 01/13/2004 | US6676484 Copper chemical-mechanical polishing process using a fixed abrasive polishing pad and a copper layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad |
| 01/13/2004 | US6676483 Anti-scattering layer for polishing pad windows |
| 01/13/2004 | US6676383 Method and a pump apparatus for the generation of an adjustable, substantially constant volume flow of a fluid and a use of this method |
| 01/13/2004 | US6676365 Air track conveyor system for disk production |
| 01/13/2004 | US6676356 Device for attaching target substrate transfer container to semiconductor processing apparatus |
| 01/13/2004 | US6676289 Temperature measuring method in pattern drawing apparatus |
| 01/13/2004 | US6676005 Wire bonding method and apparatus |
| 01/13/2004 | US6675987 Chemical delivery systems and methods of delivery |
| 01/13/2004 | US6675816 Parallel flat plate |
| 01/13/2004 | US6675737 Plasma processing apparatus |
| 01/13/2004 | US6675666 Substrate transportation apparatus |
| 01/13/2004 | US6675580 PV/thermal solar power assembly |
| 01/13/2004 | US6675472 Preventing burrs wherein the copper plating is performed prior to making the routing of one or more slots by a thin plating; improved castellation via process |
| 01/13/2004 | US6675469 Vapor phase connection techniques |
| 01/13/2004 | US6675465 Pick-up tool |
| 01/13/2004 | US6675450 Method of manufacturing and mounting electronic devices to limit the effects of parasitics |
| 01/13/2004 | CA2322468C Integrated circuit connection using an electrically conductive adhesive |
| 01/08/2004 | WO2004004435A1 Magnetic shielding for electronic circuits which include magnetic materials |
| 01/08/2004 | WO2004004085A2 Nitride semiconductor laser device and a method for improving its performance |
| 01/08/2004 | WO2004004018A1 Semiconductor light-emitting device |
| 01/08/2004 | WO2004004015A2 Soi field effect transistor element having a recombination region and method of forming same |
| 01/08/2004 | WO2004004014A1 Semiconductor device and its manufacturing method |
| 01/08/2004 | WO2004004012A1 Solid imaging device |
| 01/08/2004 | WO2004004011A1 Method for the production of a semiconductor structure comprising a plurality of gate stacks on a semiconductor substrate, and corresponding semiconductor structure |
| 01/08/2004 | WO2004004010A1 Method for the production of mos transistors |
| 01/08/2004 | WO2004004009A1 Semiconductor integrated circuit |
| 01/08/2004 | WO2004004008A1 Integrated circuit having building blocks |
| 01/08/2004 | WO2004004005A1 Semiconductor device and its manufacturing method |
| 01/08/2004 | WO2004004003A1 Multilayer substrate metallization for ic interconnection |
| 01/08/2004 | WO2004003998A1 Method for contacting parts of a component integrated into a semiconductor substrate |
| 01/08/2004 | WO2004003997A2 Silicon-on-insulator wafer for integrated circuit |
| 01/08/2004 | WO2004003996A1 Method of producing an soi wafer |
| 01/08/2004 | WO2004003995A1 Substrate treating apparatus and method for manufacturing semiconductor device |
| 01/08/2004 | WO2004003994A1 Substrate sensor |
| 01/08/2004 | WO2004003993A1 Packaging method and packaging system |
| 01/08/2004 | WO2004003992A1 Cof film carrier tape and its manufacturing method |
| 01/08/2004 | WO2004003991A2 Electronic component with a housing packaging |
| 01/08/2004 | WO2004003990A1 Method of manufacturing cmos devices by the implantation of n- and p-type cluster ions and negative ions |
| 01/08/2004 | WO2004003989A1 Semiconductor device and its manufacturing method |
| 01/08/2004 | WO2004003988A1 Plasma processing method |
| 01/08/2004 | WO2004003987A1 Contamination remover |
| 01/08/2004 | WO2004003986A1 Method and apparatus for applying differential removal rates to a surface of a substrate |
| 01/08/2004 | WO2004003985A1 Mask and production method therefor and production method for semiconductor device |
| 01/08/2004 | WO2004003984A1 Semiconductor producing apparatus |
| 01/08/2004 | WO2004003983A1 Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas |
| 01/08/2004 | WO2004003982A1 Reflection mirror apparatus, exposure apparatus and device manufacturing method |