| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 06/18/1997 | EP0720756B1 Process for producing microstructure bodies |
| 06/18/1997 | CN1152278A Lithographic form plate |
| 06/18/1997 | CN1152157A Pattern forming method |
| 06/18/1997 | CN1152136A Apparatus for projection exposure and method thereof |
| 06/17/1997 | US5640473 Method and apparatus for generating an optical beam for use in an imaging system |
| 06/17/1997 | US5640440 Substrate conveying system |
| 06/17/1997 | US5640284 Optical reflector, illumination optical system, light source system and illumination optical apparatus |
| 06/17/1997 | US5640257 Apparatus and method for the manufacture of high uniformity total internal reflection holograms |
| 06/17/1997 | US5640243 Position detection method |
| 06/17/1997 | US5640233 Plate correction technique for imaging systems |
| 06/17/1997 | US5640227 Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern |
| 06/17/1997 | US5639802 Photohardenable photosensitive compositions |
| 06/17/1997 | US5639687 Method for forming an integrated circuit pattern on a semiconductor substrate using silicon-rich silicon nitride |
| 06/17/1997 | US5639587 1,2-naphthoquinonediazidesulfonic monoester of specific polyhydroxy compounds and 1,2-napthoquinonediazidesulfonic esters of specific polyhydroxy compounds; high resolution and sensitivity |
| 06/17/1997 | US5639579 Solid state cameras, liquid crystal displays |
| 06/17/1997 | US5639546 Cured layer of a crosslinked polymer matrix and dispersed colloidal metal oxide particles |
| 06/17/1997 | US5639413 Three-dimensional objets; using an epoxy-functional silicon containing monomer |
| 06/17/1997 | US5638687 Substrate cooling method and apparatus |
| 06/13/1997 | CA2192604A1 High numerical aperture ring field optical reduction system |
| 06/12/1997 | WO1997021151A1 A method and an apparatus for illuminating points on a photosensitive medium |
| 06/12/1997 | WO1997021146A1 Imaging a lithographic printing plate |
| 06/12/1997 | WO1997020873A1 Isolation of novolak resin without high temperature distillation and photoresist composition therefrom |
| 06/12/1997 | WO1997020696A2 Transfer printing medium |
| 06/12/1997 | DE19650722A1 Belichtungsverfahren und -vorrichtung zum Bilden von Mikromustern An exposure method and apparatus for forming micropatterns |
| 06/12/1997 | DE19545821A1 Vorrichtung zum Belichten von Druckplatten Apparatus for exposing printing plates |
| 06/12/1997 | CA2239577A1 Transfer printing medium |
| 06/12/1997 | CA2238385A1 Imaging a lithographic printing plate |
| 06/12/1997 | CA2190712A1 Method for forming re-entrant photoresist lift-off profile for thin film device processing and a thin film device made thereby |
| 06/11/1997 | EP0778613A1 Pattern formation method |
| 06/11/1997 | EP0778499A1 On the press development of a diazo based printing plate |
| 06/11/1997 | EP0778498A2 Semiconductor exposure device |
| 06/11/1997 | EP0778497A1 Aqueous developable negative acting photosensitive composition having improved image contrast |
| 06/11/1997 | EP0778496A2 Method and apparatus for depositing antireflective coating |
| 06/11/1997 | EP0778495A1 Resist composition with radiation sensitive acid generator |
| 06/11/1997 | EP0778494A2 Negative working diazo color proofing sheet with adhesive layer having reduced tackiness |
| 06/11/1997 | EP0778297A1 Hydrophilic copolymer, process for producing same, photosensitive composition, and photosensitive rubber plate |
| 06/11/1997 | EP0778292A2 Method for the production of anhydride modified polyvinyl acetals useful for photosensitive compositions |
| 06/11/1997 | EP0778158A1 Lithographic printing plates having a smooth, shiny surface |
| 06/11/1997 | EP0777694A1 Metal ion reduction in novolak resin solution using an anion exchange resin |
| 06/11/1997 | EP0678107B1 Toughened photocurable polymer composition for processible flexographic printing plates |
| 06/11/1997 | CN1151609A Method for planarizing non planar layer |
| 06/11/1997 | CN1151535A Exposure method and exposure system |
| 06/11/1997 | CN1035116C Hologenated hydrocarbon solvents and thereof |
| 06/10/1997 | US5638223 Projection type exposure apparatus and method with detachable and attachable lens barrel units |
| 06/10/1997 | US5638218 Catadioptric projection apparatus |
| 06/10/1997 | US5638211 Method and apparatus for increasing the resolution power of projection lithography exposure system |
| 06/10/1997 | US5638179 Method for measuring amount of bend of moving mirror |
| 06/10/1997 | US5638168 Lens evaluating device |
| 06/10/1997 | US5637907 Three dimensional semiconductor circuit structure with optical interconnection |
| 06/10/1997 | US5637549 Stable multicolor film; wrinkle resistance |
| 06/10/1997 | US5637443 Process for producing patterned resin films which includes pretreatment with water soluble salt aqueous solution prior to film development |
| 06/10/1997 | US5637442 Method for treating photolithographic developer and stripper waste streams containing resist or solder mask and gamma butyrolactone or benzyl alcohol |
| 06/10/1997 | US5637441 Multilayer; aluminum, or alloy thereof, and hydrophilic polymer |
| 06/10/1997 | US5637440 Hydrolysis of an organometallic compound under the effect of radiation |
| 06/10/1997 | US5637438 Flexible transparent support; photosensitive layer; thermoplastic adhesive |
| 06/10/1997 | US5637437 Imaging element and method for making a lithographic printing plate according to the silver salt diffusion transfer process |
| 06/10/1997 | US5637436 Using a solvent mixtures |
| 06/10/1997 | US5637435 Containing upper and lower photosensitive layers on support having hydrophilic surface, upper layer of organic solvent-soluble diazo resin and lower layer of water-soluble diazo resin of specified concentrations and thicknesses |
| 06/10/1997 | US5637428 Positive working photosensitive composition |
| 06/10/1997 | US5637424 Using phase shift mask, capable of improving contrast of pattern while suppressing sub peaks |
| 06/10/1997 | US5637380 Composition for a protective film, color filter-provided substrate using it and liquid crystal display device |
| 06/10/1997 | US5637148 Apparatus for coating board-shaped piece material on both sides |
| 06/10/1997 | US5636572 Seamless offset lithographic printing members for use with laser-discharge imaging apparatus |
| 06/05/1997 | WO1997020254A1 Photosensitive composition |
| 06/05/1997 | WO1997020252A1 Donor elements and processes for thermal dye transfer by laser |
| 06/05/1997 | WO1997019969A1 Metal ion reduction in photoresist compositions by chelating ion exchange resin |
| 06/05/1997 | WO1997007970A3 Process for fabricating three-dimensionally structured polymer films for integrated optics |
| 06/05/1997 | DE19649447A1 Vinyl-4-t-butoxycarbonyloxybenzal-vinylalkohol-vinylacetat-Copolymer, Vinyl-4-t-butoxycarbonyloxybenzal-vinyl-4- hydroxybenzal-vinylalkohol-vinylacetat und deren Herstellungsverfahren Vinyl 4-t-butoxycarbonyloxybenzal-vinyl alcohol-vinyl acetate copolymer, vinyl 4-t-butoxycarbonyloxybenzal-vinyl-4-hydroxybenzal-vinyl alcohol-vinyl acetate and their method of preparation |
| 06/05/1997 | DE19546140A1 Photoempfindliche Zusammensetzung A photosensitive composition |
| 06/05/1997 | CA2238833A1 Photosensitive composition |
| 06/05/1997 | CA2191946A1 Method for the production of anhydride modified polyvinyl acetals useful for photosensitive compositions |
| 06/05/1997 | CA2191055A1 Aqueous developable negative acting photosensitive composition having improved image contrast |
| 06/05/1997 | CA2190923A1 Lithographic printing plates having a smooth, shiny surface |
| 06/05/1997 | CA2190920A1 Negative working diazo color proofing sheet with adhesive layer having reduced tackiness |
| 06/04/1997 | EP0777147A1 Method of forming a pattern and projecting exposure apparatus |
| 06/04/1997 | EP0776770A1 Substrate made out of aluminium or its alloy with hydrophilic layer and method of preparation thereof |
| 06/04/1997 | CN1151034A Photolithography method and photolithography system for performing method |
| 06/03/1997 | US5636066 Projection exposure apparatus |
| 06/03/1997 | US5636007 Method of reproducing images of plurality of copy pages on single plate |
| 06/03/1997 | US5636005 Optical projection aligner equipped with rotatable fly-eye lens unit |
| 06/03/1997 | US5636004 Projection exposure method and apparatus |
| 06/03/1997 | US5636003 Illumination optical apparatus and scanning exposure apparatus |
| 06/03/1997 | US5636002 Optical system |
| 06/03/1997 | US5636000 Projection optical system and projection exposure apparatus using the same |
| 06/03/1997 | US5635976 Method and apparatus for the production of a structure by focused laser radiation on a photosensitively coated substrate |
| 06/03/1997 | US5635722 Projection exposure method and apparatus capable of performing focus detection with high accuracy |
| 06/03/1997 | US5635424 High-density bond pad layout arrangements for semiconductor dies, and connecting to the bond pads |
| 06/03/1997 | US5635339 3-heteroaramatic-substituted acrylonitrile compounds as co-developers for black-and-white photothermographic and thermographic elements |
| 06/03/1997 | US5635338 Energy sensitive materials and methods for their use |
| 06/03/1997 | US5635337 Coating substrate with multiple photoresist layers having successively larger apertures to form step pattern, transferring configuration to substrate by concurrent etching of photoresist and substrate |
| 06/03/1997 | US5635336 Method for the preparation of a pattern overlay accuracy-measuring mark |
| 06/03/1997 | US5635335 Method for fabricating semiconductor device utilizing dual photoresist films imaged with same exposure mask |
| 06/03/1997 | US5635333 Antireflective coating process |
| 06/03/1997 | US5635332 Alkylsulfonium salts and photoresist compositions containing the same |
| 06/03/1997 | US5635331 Substrate and a color proofing article having release agent/adhesive mixture coated thereon |
| 06/03/1997 | US5635330 Finisher at 30°-60° C. in method for making an offset printing plate according to the silver salt diffusion transfer process |
| 06/03/1997 | US5635329 Quinonediazide, solvent and specific alkali-soluble novolak resins |
| 06/03/1997 | US5635328 Light-sensitive lithographic printing plate utilizing o-quinone diazide light-sensitive layer containing cyclic clathrate compound |
| 06/03/1997 | US5635321 Method for preparing a lithographic printing plate |
| 06/03/1997 | US5635318 Method for making a lithographic printing plate with frequency modulated halftone dots |