| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 09/10/1997 | EP0794458A2 An energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material |
| 09/10/1997 | EP0794457A2 Positive working photosensitive composition |
| 09/10/1997 | EP0794069A2 Planographic orginal plate requiring no fountain solution |
| 09/10/1997 | EP0794067A1 Image forming material and image forming method employing the same |
| 09/10/1997 | EP0794055A2 Waterless planographic printing plate and method of plate making using the same |
| 09/10/1997 | EP0794016A1 Apparatus and method for stamping a surface |
| 09/10/1997 | EP0794015A1 Apparatus and method for patterning a surface |
| 09/10/1997 | EP0793541A1 Nco-terminated vinyl telomers |
| 09/10/1997 | CN1159072A Method of producing thin film tansistor |
| 09/10/1997 | CN1158854A Borate cointiators for photopolymerization |
| 09/09/1997 | US5666206 Exposure system and exposure method |
| 09/09/1997 | US5666205 For transferring a pattern onto a substrate surface |
| 09/09/1997 | US5666190 Method of performing lithography using cantilever array |
| 09/09/1997 | US5666189 Process for performing low wavelength photolithography on semiconductor wafer using afocal concentration |
| 09/09/1997 | US5666176 Process for producing liquid crystal display panel by photolithography using microlenses |
| 09/09/1997 | US5666038 Positioning table device including correction of energization electric current to selected coils of a permanent magnet of a drive device |
| 09/09/1997 | US5665845 Electronic device with a spin-on glass dielectric layer |
| 09/09/1997 | US5665841 Acetal group-containing alkoxy-styrene polymers, method of preparing the same and chemical amplified photoresist composition mainly comprising the same |
| 09/09/1997 | US5665792 Stabilizers for use with photoacid precursor formulations |
| 09/09/1997 | US5665791 Photosensitive polymer films and their method of production |
| 09/09/1997 | US5665688 Photoresist stripping composition |
| 09/09/1997 | US5665645 Method of manufacturing a semiconductor device using reticles |
| 09/09/1997 | US5665527 Process for generating negative tone resist images utilizing carbon dioxide critical fluid |
| 09/09/1997 | US5665526 Thermally stable photoimaging composition |
| 09/09/1997 | US5665523 Heat-resistant negative photoresist composition, photosensitive substrate, and process for forming negative pattern |
| 09/09/1997 | US5665522 Visible image dyes for positive-acting no-process printing plates |
| 09/09/1997 | US5665521 Offset printing plate |
| 09/09/1997 | US5665519 Vertical orienting, chemical amplification type, acid catalyst |
| 09/09/1997 | US5665518 Photoresist and monomer and polymer for composing the photoresist |
| 09/09/1997 | US5665517 Acidic ion exchange resin as a catalyst to synthesize a novolak resin and photoresist composition therefrom |
| 09/09/1997 | US5665516 Imaging element for making lithographic printing plates according to the silver salt diffusion transfer process |
| 09/09/1997 | US5665515 Method for obtaining a printing plate according to the silver salt diffusion transfer process |
| 09/09/1997 | US5665496 Method for producing color filter |
| 09/09/1997 | US5665494 Photosensitive composition for volume hologram recording |
| 09/09/1997 | US5665401 Thickness |
| 09/09/1997 | US5665200 Substrate processing method and substrate processing apparatus |
| 09/04/1997 | WO1997032241A1 Method of determining the radiation dose in a lithographic apparatus, and test mask and apparatus for performing the method |
| 09/04/1997 | WO1997032229A1 Process for the production of optical components with coupled optical waveguides and optical components produced by said method |
| 09/04/1997 | WO1997031774A1 Laser imageable tuned optical cavity thin film and printing plate incorporating the same |
| 09/04/1997 | DE19708201A1 Photopolymerisable composition sensitive to visible and laser light |
| 09/04/1997 | DE19607671A1 Verfahren zur Herstellung optischer Bauelemente mit angekoppelten Lichtwellenleitern und nach diesem Verfahren hergestellte Bauelemente Process for the production of optical components with the coupled optical waveguides and components produced by this process |
| 09/03/1997 | EP0793147A1 Overlay measuring method using correlation function |
| 09/03/1997 | EP0793146A1 Photoimageable, dielectric, crosslinkable, copolyester film-forming mixture |
| 09/03/1997 | EP0793145A1 Photopolymerizable composition for a photosensitive lithographic printing plate and photosensitive lithographic printing plate employing it |
| 09/03/1997 | EP0793144A2 Radiation sensitive composition |
| 09/03/1997 | EP0793073A2 Surface position detecting method and scanning exposure method using the same |
| 09/03/1997 | EP0792756A2 Liquid composition laser marking article and marking process |
| 09/03/1997 | EP0792530A1 Low cost, high average power, high brightness solid state laser |
| 09/03/1997 | EP0792481A1 Process and device for calibrating a laser beam scanning control |
| 09/03/1997 | EP0792478A1 A process for making a flexographic printing plate |
| 09/03/1997 | EP0792195A1 Non-aminic photoresist adhesion promoters for microelectronic applications |
| 09/03/1997 | EP0731909A4 Sensors employing interference of electromagnetic waves passing through waveguides having functionalized surfaces |
| 09/02/1997 | US5664251 Method of making an aperture plate for a multibeam pattern drawing apparatus |
| 09/02/1997 | US5663898 Toolkit and method for diagnosing a problem of bad performance of a lithographic printing plate obtained according to the silver salt diffusion transfer process |
| 09/02/1997 | US5663893 Method for generating proximity correction features for a lithographic mask pattern |
| 09/02/1997 | US5663785 Diffraction pupil filler modified illuminator for annular pupil fills |
| 09/02/1997 | US5663784 Slit-scanning type light exposure apparatus |
| 09/02/1997 | US5663783 Stage-drive controlling device, projection exposure apparatus including the same, and method of controlling the driving of a stage |
| 09/02/1997 | US5663568 Apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used |
| 09/02/1997 | US5663308 Organosilicon polymers, and dyes, exhibiting nonlinear optical response |
| 09/02/1997 | US5663212 Light-sensitive resin composition |
| 09/02/1997 | US5663076 Automating photolithography in the fabrication of integrated circuits |
| 09/02/1997 | US5663038 Process for the preparation of partially protected phenolic resins |
| 09/02/1997 | US5663037 Radiation-sensitive composition containing a resole resin, a novolac resin an infrared absorber and a triazine and use thereof in lithographic printing plates |
| 09/02/1997 | US5663036 Underlaying film, polymer binder and base with azide precursor |
| 09/02/1997 | US5663035 Photosensitive acid generators, photoresists, controlling acid diffusion with iodonium compound |
| 09/02/1997 | US5663033 Preparing a color image |
| 09/02/1997 | US5663032 Photosensitive composition containing photosensitive and heat developable element and polymer element and image-forming method utilizing the same |
| 09/02/1997 | US5663031 Diazo based imaging element having improved resistance against physical damage |
| 09/02/1997 | US5663019 Forming a transparent electroconductive layer and a photosensitive positive layer on a substrate, masking and developing electroconductive layer and forming multiple colored layers on exposed electroconductive layer |
| 09/02/1997 | US5663018 Pattern writing method during X-ray mask fabrication |
| 09/02/1997 | US5663017 Optical corrective techniques with reticle formation and reticle stitching to provide design flexibility |
| 09/02/1997 | US5662410 Light exposure and illuminating device |
| 09/01/1997 | CA2198786A1 Photoimageable, dielectric crosslinkable copolyesters |
| 08/28/1997 | WO1997031298A1 Illumination unit for an optical apparatus |
| 08/28/1997 | WO1997031132A1 RECOVERY OF Mo/Si MULTILAYER COATED OPTICAL SUBSTRATES |
| 08/28/1997 | WO1997031051A1 Composition exhibiting improved fluorescent response |
| 08/28/1997 | WO1997031033A1 Anionic photocatalyst |
| 08/28/1997 | WO1997030819A1 Positioner with long travel in two dimensions |
| 08/28/1997 | DE19628040A1 Bubble removal device for filter |
| 08/27/1997 | EP0791956A2 Electrostatic chuck |
| 08/27/1997 | EP0791950A2 Discharge lamp of the short arc type |
| 08/27/1997 | EP0791859A2 Developer for photosensitive resin printing plate and process for producing photosensitive resin printing plate |
| 08/27/1997 | EP0791858A1 A method for making by phototypesetting a lithographic printing plate according to the silver salt diffusion transfer process |
| 08/27/1997 | EP0791857A1 Imaging element comprising a two-phase layer having a disperse hydrophobic photopolymerisable phase |
| 08/27/1997 | EP0791856A2 Pattern forming material and pattern forming method |
| 08/27/1997 | EP0791189A1 Positioning device with a vibration-free object table |
| 08/27/1997 | EP0791188A1 Dimensionally stable flexographic printing plates |
| 08/27/1997 | EP0561847B1 Photosensitive polymers and printing plates |
| 08/27/1997 | EP0298116B1 Light filters for microelectronics |
| 08/26/1997 | US5661837 Illumination optical apparatus and scanning exposure apparatus using the same |
| 08/26/1997 | US5661601 Projection method and projection system and mask therefor |
| 08/26/1997 | US5661566 Method for making a plurality of printing plates |
| 08/26/1997 | US5661560 Elliptical light measuring method |
| 08/26/1997 | US5661548 Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal |
| 08/26/1997 | US5661547 Exposure method and apparatus and device produced thereby in which a stop includes an opening which is variable to substantially compensate for a change in bandwidth of a laser beam |
| 08/26/1997 | US5661546 Projection exposure apparatus and method with changing imaging characteristics and illumination conditions |
| 08/26/1997 | US5661388 Positioning method and positioning system |
| 08/26/1997 | US5661365 Visible radiation |
| 08/26/1997 | US5660969 Chemical amplification resist and a fabrication process of a semiconductor device that uses such a chemical amplification resist |