Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
05/1997
05/13/1997US5629805 Aligner equipped with annular illumination system for annular illumination light with large illuminance
05/13/1997US5629772 Method of measuring lithographic process
05/13/1997US5629358 Photocurable resin composition containing acrylate silane and epoxy silane and/or their hydrolysis products
05/13/1997US5629356 Photocurable composition containing ethylenically unsaturated photopolymerizable compound and the aminoacetophenone
05/13/1997US5629355 Polymeric sulfonium salt photoinitiators
05/13/1997US5629354 Photopolymerization initiator system comprising a spectral sensitizer and a polycarboxylic acid co-initiator
05/13/1997US5629137 Method of repairing an integrated circuit structure
05/13/1997US5629136 Polysiloxanes
05/13/1997US5629135 Alkali-soluble resin, crosslinker, photoacid generator, solvent
05/13/1997US5629134 Solvent, alkali soluble resin, acid generator, pyridine salt
05/13/1997US5629133 Polyethersiloxane block copolymer
05/13/1997US5629132 Method for engraving and/or etching with image-carrying mask and photo-sensitive laminate film for use in making the mask
05/13/1997US5629131 Image receiving layer for use in a silver salt diffusion transfer process
05/13/1997US5629129 Heat sensitive ink sheet and image forming method
05/13/1997US5629128 Alkali-soluble resin and 1,2-naphthoquinone-diazido-sufonate of a polyhydroxy compound
05/13/1997US5629127 Positive electron beam resist composition containing cresolnovolak resin, select additive and methyl gallate/1,2-naphthoquinonediazido-4-sulfonyl chloride reaction product
05/13/1997US5629113 Photomask used by photolithography and a process of producing same
05/13/1997US5629044 Compact disc coating and handling system
05/13/1997CA2122868C Process for the patterned metallisation of structured printed circuit boards
05/09/1997WO1997016482A2 Low-shrinkage light-curable resin
05/09/1997WO1997016470A1 Photosensitive resin composition
05/09/1997WO1997016469A1 A solvent-free, radiation-curable, optical glass fiber coating composition and solvent-free method for making a solvent-free, radiation-curable, optical glass fiber coating composition
05/09/1997WO1997016406A1 Photosensitive intramolecular electron transfer compounds
05/09/1997CA2236667A1 A solvent-free, radiation-curable, optical glass fiber coating composition and solvent-free method for making a solvent-free, radiation-curable, optical glass fiber coating composition
05/07/1997EP0772189A2 Exposure apparatus and method
05/07/1997EP0772089A2 Low optical dot gain color proof composites
05/07/1997EP0772086A1 Imaging element for making an improved printing plate according to the silver salt diffusion transfer process
05/07/1997EP0771796A1 Substituted S-triazines and process for their preparation
05/07/1997EP0771645A1 On-press development of a lithographic printing plate having an aryldiazosulfonate resin in a photosensitive layer
05/07/1997DE19644797A1 Oximsulfonsäureester und deren Verwendung als latente Sulfonsäuren Oximsulfonsäureester and the use thereof as latent sulfonic acids
05/07/1997DE19600427A1 Semiconductor wafer aligner with marker
05/07/1997CN1149341A Dry-developable positive resist
05/07/1997CN1149144A Strong ultraviolet laser technology of monitoring fake products
05/06/1997US5627872 Stationary exit window for X-ray lithography beamline
05/06/1997US5627627 Exposure control apparatus and method
05/06/1997US5627626 Projectin exposure apparatus
05/06/1997US5627625 Pattern projecting method
05/06/1997US5627624 Integrated circuit test reticle and alignment mark optimization method
05/06/1997US5627430 Discharge lamp having a cathode with a sintered tip insert
05/06/1997US5627378 Die set for automatic UV exposure system
05/06/1997US5627365 Scanning near-field optic/atomic force microscope in which imaging light is controlled in relation to a vibrating position of an optical fiber probe
05/06/1997US5627353 Fullerene filled with active materials
05/06/1997US5627112 Method of making suspended microstructures
05/06/1997US5627013 Method of forming a fine pattern of ferroelectric film
05/06/1997US5627011 High resolution i-line photoresist of high sensitivity
05/06/1997US5627010 Photoimageable resist compositions containing photobase generator
05/06/1997US5627009 Process for the production of a multicolored image
05/06/1997US5627006 Resist material
05/06/1997US5626991 Manufacture of flat panel displays
05/06/1997US5626967 Structure and method for exposing photoresist
05/06/1997US5626913 Supplying a cleaning solution onto an object and performing a process on said object in which these steps at least partially overlap
05/06/1997US5626796 Light sensitive composition for black matrix, substrate for color filter, and liquid crystal display
05/06/1997US5626784 In-situ sizing of photolithographic mask or the like, and frame therefore
05/06/1997US5626782 Postexposure baking apparatus for forming fine resist pattern
05/06/1997US5626774 Copper foil carrier
05/02/1997EP0770926A2 Method for forming fine pattern of semiconductor device
05/02/1997EP0770925A2 Photoprocessing method
05/02/1997EP0770924A2 Process for microstructuring of polymeric materials
05/02/1997EP0770923A1 Photosensitive resin composition and photosensitive resin laminated film containing the same
05/02/1997EP0770922A1 Method of removing surface stickiness of relief printing plate made from photosensitive resin
05/02/1997EP0770918A2 Film winder
05/02/1997EP0770911A1 Light-sensitive sheet having aluminum alloy support and silver halide light-sensitive material using the same
05/02/1997EP0770895A2 Projection optical system and exposure apparatus provided therewith
05/02/1997EP0770499A1 Method of forming layer on substrate and article formed thereby
05/02/1997EP0770494A2 A method for making a lithographic printing plate involving on press development
05/02/1997EP0770053A1 Positive photoactive compounds based on 2,6-dinitrobenzyl groups
05/02/1997EP0546196B1 Synthetic quartz glass optical member for excimer laser and production thereof
05/01/1997WO1997015946A1 Method of manufacturing a semiconductor device
05/01/1997WO1997015533A1 Photo-encoded selective etching for glass based microtechnology applications
05/01/1997CA2189110A1 Oximesulfonic acid esters and the use thereof as latent sulfonic acids
04/1997
04/30/1997CN1148850A Stilbzaolium salt, and preparation and use thereof
04/30/1997CN1148637A Figure forming method
04/29/1997US5625526 Electrostatic chuck
04/29/1997US5625471 Dual plate holographic imaging technique and masks
04/29/1997US5625453 System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating
04/29/1997US5625436 Scanning type exposure apparatus and exposure method
04/29/1997US5625433 Apparatus and method for developing resist coated on a substrate
04/29/1997US5625403 Method and apparatus for recording on optically-sensitive media
04/29/1997US5625020 Photoresist composition
04/29/1997US5624789 Metal ion reduction in top anti-reflective coatings for photoresisis
04/29/1997US5624788 Organic silicon compound, resist thermal polymerization composition and photopolymerization composition
04/29/1997US5624787 Nitrogenous compound and sulfonium compound for positive photoresists
04/29/1997US5624785 Imaging element comprising a photoacid-sensitive composition and a method for producing lithographic plates therewith
04/29/1997US5624784 Kit of parts for making an alkaline processing liquid for processing a lithographic printing plate
04/29/1997US5624783 Imaging element for making a lithographic printing plate
04/29/1997US5624782 Method of manufacturing thick-film resistor elements
04/29/1997US5624781 Positive type anionic electrodeposition photo-resist composition and process for pattern formation using said composition
04/29/1997US5624773 Resolution-enhancing optical phase structure for a projection illumination system
04/29/1997US5623853 Precision motion stage with single guide beam and follower stage
04/24/1997WO1997014737A1 Liquid curable resin composition
04/24/1997WO1997011406A3 Black-and-white photothermografic and thermografic elements comprising amine compounds as contrast enhancers
04/24/1997DE19541075C1 Photohärtbares Harz mit geringem Schwund und dessen Verwendung in einem Stereolithographieverfahren The photocurable resin with low shrinkage and its use in a stereolithography process
04/24/1997DE19539039A1 Improved manufacture of micro-mechanical and micro-optical devices
04/23/1997EP0769807A2 Reticle container with corner holding
04/23/1997EP0769800A2 An apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used
04/23/1997EP0769761A1 Method for generating patterns
04/23/1997EP0769725A2 Photoresist development method and apparatus
04/23/1997EP0769724A1 On the press development of a diazo based printing plate
04/23/1997EP0769723A1 Method for preparing physical development nuclei for use in silver salt diffusion transfer process
04/23/1997EP0769722A1 An imaging element and method for making a lithographic printing plate according to silver salt diffusion transfer processing