| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 01/02/1997 | EP0531292B1 Photoresist stripper |
| 01/02/1997 | DE19626261A1 IC pattern and metal surface test object observation differential interference microscope |
| 01/02/1997 | DE19626003A1 Enhanced resist compsn. for deep UV exposure and alkaline development |
| 01/02/1997 | DE19625894A1 Lithographic photomask production apparatus for LSI semiconductor manufacture |
| 01/02/1997 | DE19625669A1 Compatibility precision measurement mark for semiconductor photomask manufacture |
| 01/02/1997 | DE19625595A1 Verfahren zur Bildung feiner Muster eines Halbleiterelements A method for forming fine patterns of a semiconductor element |
| 01/02/1997 | DE19624649A1 Maske zur Überprüfung der Linsenverzerrung bei einem Stepper Mask to check the lens distortion with a stepper |
| 01/02/1997 | DE19524099A1 Verfahren zur Herstellung von Formeinsätzen Process for the preparation of mold inserts |
| 01/02/1997 | DE19522936A1 Verfahren und Vorrichtung zum Strukturieren einer photolithographischen Schicht Method and device for structuring a photolithographic layer |
| 01/01/1997 | CN1139219A Ultraviolet transducing film and its production and use |
| 12/31/1996 | US5590239 Planar uniform heating surface with additional circumscribing ring |
| 12/31/1996 | US5589735 Fluorescent tube in which are encapsulated a cathode, an anode and a buffer gas; power source |
| 12/31/1996 | US5589553 Photoresists |
| 12/31/1996 | US5589424 Photodefinable dielectric layers comprising poly(aromatic diacetylenes) |
| 12/31/1996 | US5589319 Photosensitive polyimide resin composition |
| 12/31/1996 | US5589315 Shelf life, screen printing |
| 12/31/1996 | US5589306 Photosensitive resin composition for producing a relief printing plate |
| 12/31/1996 | US5589270 Electroconductive polymer, semiconductors |
| 12/31/1996 | US5589250 Resin compositions and printed circuit boards using the same |
| 12/31/1996 | US5588359 Method for forming a screen for screen printing a pattern of small closely spaced features onto a substrate |
| 12/27/1996 | WO1996042036A1 Self-trapping and self-focusing of optical beams in photopolymers |
| 12/27/1996 | WO1996042035A1 Photosensitive paste, plasma display, and process for the production thereof |
| 12/27/1996 | EP0750231A1 Exposure apparatus and exposure method using the same |
| 12/27/1996 | EP0750230A2 Negative type photosensitive compositions |
| 12/27/1996 | EP0750229A1 Liquid photosensitive resin composition for forming relief structures |
| 12/27/1996 | EP0750227A1 Imaging element and method for making lithographic printing plates according to the silver salt diffusion transfer process |
| 12/27/1996 | EP0750002A2 Process for the preparation of poly-o-hydroxy amides |
| 12/27/1996 | EP0749594A1 Stable, ionomeric photoresist emulsion and process of preparation and use thereof |
| 12/27/1996 | EP0749474A1 Microfabricated capsules for isolation of cell transplants |
| 12/27/1996 | EP0749352A1 Microfabricated particle filter |
| 12/27/1996 | EP0749347A1 Processes and devices for removing coating layers from printed circuit boards |
| 12/25/1996 | CN1138524A FM and AM netting method |
| 12/24/1996 | US5587834 Semiconductor device manufacturing method and projection exposure apparatus using the same |
| 12/24/1996 | US5587794 Surface position detection apparatus |
| 12/24/1996 | US5587492 Polyhydric phenol compound and positive resist composition comprising the same |
| 12/24/1996 | US5587275 Photosensitive resin composition and a process for forming a patterned polyimide film using the same |
| 12/24/1996 | US5587274 Polymer having an acid value of 2 to 200; a photoactivator which generates an acid in response to light irradiation |
| 12/24/1996 | US5587273 Molecularly imprinted materials, method for their preparation and devices employing such materials |
| 12/24/1996 | US5587272 Process for preparing multiple color proofs |
| 12/24/1996 | US5587271 Damping solution contains clay incorporating inorganic polyphosphate peptiser |
| 12/24/1996 | US5587267 Method of forming photoresist film exhibiting uniform reflectivity through electrostatic deposition |
| 12/24/1996 | US5587261 UV/EB curable butyl copolymers for lithographic and corrosion-resistant coating |
| 12/24/1996 | US5587260 Method of forming a functional film |
| 12/24/1996 | CA2011927C Microlithographic method for producing thick, vertically-walled photoresist patterns |
| 12/24/1996 | CA2000070C Image forming method and image forming medium |
| 12/19/1996 | WO1996041370A1 Removal of material by polarized radiation and back side application of radiation |
| 12/19/1996 | WO1996041368A1 Multilayer high vertical aspect ratio thin film structures |
| 12/19/1996 | WO1996041240A1 Water photoresist emulsions and methods of preparation thereof |
| 12/19/1996 | WO1996041239A1 Photohardenable epoxy composition |
| 12/19/1996 | WO1996041238A1 Stabilizers for use with photoacid precursor formulations |
| 12/19/1996 | WO1996041237A1 Sensitizers and photoacid precursors |
| 12/19/1996 | WO1996041236A1 Therapeutic microdevices and methods of making and using same |
| 12/19/1996 | WO1996041235A1 Molecularly imprinted materials, method for their preparation and devices employing such materials |
| 12/19/1996 | WO1996041204A1 Method and apparatus for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus |
| 12/19/1996 | WO1996040800A1 Peroxide and radiation curable compositions containing isobutylene copolymers having acrylate functionality |
| 12/19/1996 | WO1996040729A1 A method of cross-linking amino acid-containing polymers using photoactivatable chemical cross-linkers |
| 12/19/1996 | WO1996040528A1 Thiol-containing photosensitive polymeric foam compositions |
| 12/19/1996 | WO1996040420A1 Micromachined porous membranes with bulksupport |
| 12/19/1996 | WO1996034745A3 Exposure process and device |
| 12/19/1996 | CA2570713A1 Removal of material by polarized radiation and back side application of radiation |
| 12/19/1996 | CA2222595A1 Therapeutic microdevices and methods of making and using same |
| 12/19/1996 | CA2222239A1 A method of crosslinking amino acid-containing polymers using photoactivatable chemical cross-linkers |
| 12/18/1996 | EP0749046A1 Positive-working photoresist composition |
| 12/18/1996 | EP0749045A2 Photosensitive compositions and their use in lithographic plates |
| 12/18/1996 | EP0749044A2 Positive-working photoresist composition |
| 12/18/1996 | EP0749043A2 Process for production of ink jet head |
| 12/18/1996 | EP0748951A1 Active anti-vibration apparatus and method of manufacturing the same |
| 12/18/1996 | EP0738285A4 Cationic polymerization |
| 12/18/1996 | EP0572524B1 Red sensitive photopolymerizable compositions |
| 12/18/1996 | CN1137979A Support material for making color test prints in analog proof system |
| 12/18/1996 | CN1137948A Liquid supplying apparatus |
| 12/17/1996 | US5586159 Substrate holding system and exposure apparatus having the same |
| 12/17/1996 | US5586059 Automated data management system for analysis and control of photolithography stepper performance |
| 12/17/1996 | US5585972 Arbitrarily wide lens array with an image field to span the width of a substrate |
| 12/17/1996 | US5585923 Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means |
| 12/17/1996 | US5585904 Drum type image transfer apparatus |
| 12/17/1996 | US5585886 Apparatus for printing a photosensitive material and positioning device |
| 12/17/1996 | US5585507 Alkylsulfonium salts and photoresist compositions containing the same |
| 12/17/1996 | US5585450 Photodefinable polymers |
| 12/17/1996 | US5585416 UV/EB curable butyl copolymers for lithographic and corrosion-resistant coating applications |
| 12/17/1996 | US5585225 UV/EB curable butyl copolymers for lithographic and corrosion-resistant coating applications |
| 12/17/1996 | US5585224 Covering reverse surface having etched recesses with barrier film having controllable adhesion, then etching recesses in front surface to connect with those on reverse and treating film to reduce adhesion |
| 12/17/1996 | US5585223 Radiation activation; heating; etching |
| 12/17/1996 | US5585222 Resist composition and process for forming resist pattern |
| 12/17/1996 | US5585221 Active energy ray-curing resin composition |
| 12/17/1996 | US5585220 Resist composition with radiation sensitive acid generator |
| 12/17/1996 | US5585219 Resist composition and process for forming resist pattern |
| 12/17/1996 | US5585218 Photoresist composition containing alkyletherified polyvinylphenol |
| 12/17/1996 | US5585217 Polyamic acid composition |
| 12/17/1996 | US5585211 Fabrication and use of sub-micron dimensional standard |
| 12/17/1996 | US5585210 Mask pattern of a semiconductor device and a method of manufacturing fine patterns using the same |
| 12/12/1996 | WO1996039294A1 Vacuum lamination device and vacuum lamination method |
| 12/12/1996 | WO1996031807A3 Platesetter |
| 12/12/1996 | DE19622464A1 Licht- und wärmehärtbare Zusammensetzung, die mit einer wässerigen Alkalilösung entwickelbar ist Photocurable and thermosetting composition which is developable with an aqueous alkali solution |
| 12/12/1996 | DE19521170A1 Mfg. channel structures in substrates for integrated optical components |
| 12/11/1996 | EP0748009A2 Output control method for excimer laser |
| 12/11/1996 | EP0747773A1 Method and apparatus for treating developer for pigment-containing nonsilver photosensitive material, and automatic developing machine |
| 12/11/1996 | EP0747772A1 Illumination device for a projection microlithography tool |
| 12/11/1996 | EP0747771A2 Photopolymerizable composition |
| 12/11/1996 | EP0747770A2 One-package type photosolder resist composition developable with aqueous alkali solution and method for production of printed circuit board by use thereof |