Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
02/1998
02/25/1998EP0825491A2 Exposure apparatus of reduced projection scanning type
02/25/1998EP0825201A1 Photocurable composition and curing process therefor
02/25/1998EP0825022A1 Digital control strip for imageable media
02/25/1998EP0825021A2 Thin-film imaging recording contructions incorporating matallic inorganic layers and optical interference structures
02/25/1998EP0824722A1 Differential interferometer system and lithographic step-and-scan apparatus provided with such a system
02/25/1998EP0824721A1 Imaging system and apparatus for ultraviolet lithography
02/25/1998EP0824720A1 Acid bleachable dye containing lithographic printing plate composition
02/25/1998EP0824719A1 A process for obtaining a lift-off imaging profile
02/25/1998EP0824399A1 Laser exposure apparatus
02/25/1998CN2275283Y Device for photoetching double face film
02/25/1998CN1174547A Functionalised photoinitiators, derivatives and macromeres therefrom and their use
02/25/1998CN1174525A Process for functionalisation of surfaces
02/25/1998CN1174402A Charged-beam exposure mask and charged-beam exposure method
02/25/1998CN1174343A Management device of photoetching film stripping liquid
02/25/1998CN1174342A Sculpture technology for composite containing polyurethane
02/25/1998CN1037552C Negative photosensitive printed board and its making method
02/24/1998US5721619 Misregistration detecting marks for pattern formed on semiconductor substrate
02/24/1998US5721608 Projection exposure method and apparatus
02/24/1998US5721606 Large-area, high-throughput, high-resolution, scan-and-repeat, projection patterning system employing sub-full mask
02/24/1998US5721605 Alignment device and method with focus detection system
02/24/1998US5721292 Acylphosphine oxides
02/24/1998US5721288 Photopolymerizable composition including a photopolymerization initiation system having excellent light sensitivity to visible light
02/24/1998US5721131 Surface modification of polymers with self-assembled monolayers that promote adhesion, outgrowth and differentiation of biological cells
02/24/1998US5721091 Composition for forming an electrically conductive layer to be used in patterning
02/24/1998US5721090 Method of etching a substrate
02/24/1998US5721089 Coating with blend of colorant and resin
02/24/1998US5721088 Cationic or anionic positive-acting photoresists containing a photosensitive component and a microgel
02/24/1998US5721087 Irradiating precursor comprising support having first layer for converting laser beam to heat and second layer having ink-repellant surface to conduct image exposure, pressing adhesive sheet on second layer, separating adhesive sheet
02/24/1998US5721079 Length of optical path is adjusted such that the magnification factor in the emission of nonexposure light matches the magnification factor in emission of exposure light
02/24/1998US5721078 Photoresists tetragon shapes with incline, spacing containing phenolic resin blends including a naphthoquinone diazides and a negative working agent
02/24/1998US5721077 Coating with blend of colorant and resin
02/24/1998US5721076 Color filters and materials and resins therefor
02/24/1998US5721074 Method for fabricating a light exposure mask comprising the use of a process defect inspection system
02/24/1998US5720814 Photoresist coating apparatus
02/19/1998WO1998007071A1 Aqueous antireflective coatings for photoresist compositions
02/19/1998WO1998007070A1 Antireflective coatings for photoresist compositions
02/19/1998WO1998007069A1 Polymer-based micromachining technology for microfluidic devices
02/18/1998EP0824224A1 Apparatus for processing photosensitive material
02/18/1998EP0824223A1 Photosensitive resin composition for far-ultraviolet exposure
02/18/1998EP0824222A1 Photo recording medium
02/18/1998EP0823977A1 Lithopraphic apparatus for step-and-scan imaging of a mask pattern
02/18/1998CN1173928A Photoactive compounds
02/18/1998CN1173843A Embossed substrate and photoreceptor device incorporating the same and method
02/18/1998CN1173648A Precoating sensitive plate and its prodn. method
02/18/1998CN1173647A Photoresist composition
02/18/1998CN1037475C Support element for an automatic loading tray of an exposure unit for silicon wafers
02/17/1998US5719915 X-ray dispersing/focusing device and method of producing same
02/17/1998US5719704 Projection exposure apparatus
02/17/1998US5719698 Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
02/17/1998US5719617 Illumination system for superposing light beams one upon another on a surface using a projecting system having different focal point positions
02/17/1998US5719605 Large array heater chips for thermal ink jet printheads
02/17/1998US5719495 Apparatus for semiconductor device fabrication diagnosis and prognosis
02/17/1998US5719009 Laser ablatable photosensitive elements utilized to make flexographic printing plates
02/17/1998US5719008 Photoresist composition comprising a polyfunctional vinyl ether compound
02/17/1998US5719005 Variations of tackiness in photosensitive layer
02/17/1998US5719004 Positive photoresist composition containing a 2,4-dinitro-1-naphthol
02/17/1998US5719003 Method for increasing the differential solubility of an imaged photoresist through hydroxy group blocking via reaction with vinyl ethers
02/17/1998US5718992 Substrate having light shielding layer
02/17/1998US5718763 Resist processing apparatus for a rectangular substrate
02/12/1998WO1998006009A1 Lithography system with remote multisensor alignment
02/12/1998WO1998006008A1 Positive photoresist composition containing a 2,4-dinitro-1-naphthol
02/12/1998WO1998006007A1 A method of forming a monolayer of particles, and products formed thereby
02/12/1998WO1998005712A1 Black photosensitive resin composition, color filter made by using the same, and process for the production thereof
02/12/1998CA2233721A1 A method of forming a monolayer of particles, and products formed thereby
02/11/1998EP0823667A2 Alignment apparatus and exposure apparatus equipped with same
02/11/1998EP0823666A1 Method and apparatus for an automated plate handler with cassette loading system and cover removal mechanism
02/11/1998EP0823665A2 Cassette for storing and accessing plates within an automated plate handler
02/11/1998EP0823664A1 Method and apparatus for an automated plate handler with slip sheet removal
02/11/1998EP0823663A1 Method and apparatus for an automated plate handler with elevator and table support mechanism
02/11/1998EP0823662A2 Projection exposure apparatus
02/11/1998EP0823661A1 Composition for anti-reflective coating material
02/11/1998EP0823660A2 Photoresist layer supporting polyester film and photoresist film laminate
02/11/1998EP0823659A1 Negative type image recording material
02/11/1998EP0823460A1 Water-base photosensitive resin composition
02/11/1998EP0823334A2 Image forming material and image forming method employing the same
02/11/1998EP0823327A2 Positive photosensitive composition, positive photosensitive lithographic printing plate and method for making positive photosensitive lithographic printing plate
02/11/1998EP0823073A1 Illumination unit for an optical apparatus
02/11/1998EP0823072A1 Deep pattern micro-lithography
02/11/1998EP0823071A1 On-press removable overcoat for lithographic printing plates
02/11/1998EP0823070A1 Negative-acting no-process printing plates
02/11/1998EP0822881A1 Method and apparatus for step and repeat exposures
02/11/1998EP0556357B1 Silver image bleaching solution and process
02/11/1998CN1173227A Polymers based on block copolymers
02/11/1998CN1173148A NCO-terminated vinyl telomers
02/11/1998CN1172972A Ultraviolet-curable composition and method for forming cured-product patterns therefrom
02/11/1998CN1172971A Improved photoresist material containing photosensitive component for cathod-ray tube and its preparation method
02/11/1998CN1172970A Improved photoresist material and its preparation method
02/11/1998CN1037397C Method of and apparatus for cover sheet removal from laminated board
02/11/1998CN1037376C Method of making relief plate
02/10/1998US5717612 Post-exposure bake simulator for chemically amplified photoresists
02/10/1998US5717518 Broad spectrum ultraviolet catadioptric imaging system
02/10/1998US5717483 Illumination optical apparatus and method and exposure apparatus using the illumination optical apparatus and method
02/10/1998US5717482 Stage apparatus and method of mounting a substrate on a substrate holding surface of a substrate chuck in which a substrate is mounted in a Z-axis direction
02/10/1998US5717281 Improved video image contrast
02/10/1998US5717251 Semiconductor integrated circuit device having minature multi-level wiring structure low in parasitic capacitance
02/10/1998US5717218 Focal plane phase-shifting lithography
02/10/1998US5717003 Acid-curable binder systems containing 1,2-disulfones
02/10/1998US5716763 Liquid immersion heating process for substrate temperature uniformity
02/10/1998US5716759 Method and apparatus for producing integrated circuit devices
02/10/1998US5716758 Process for forming fine pattern for semiconductor device utilizing multiple interlaced exposure masks