Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
06/1998
06/23/1998US5770523 Method for removal of photoresist residue after dry metal etch
06/23/1998US5770456 Cyclic nucleic acid and polypeptide arrays
06/23/1998US5770350 Method for forming pattern using multilayer resist
06/23/1998US5770347 Photocurable and thermosetting coating composition and method for formation of solder mask for printed circuit board
06/23/1998US5770346 Photoresist and compounds for composing the photoresist
06/23/1998US5770345 Polymer matrix, photosensitive acid generator, specified dye
06/23/1998US5770343 Acid generating compound; resinous compound with increased solubility; solvent; n,n-dimethyl formamide or n,n-dimethyl acetamide
06/23/1998US5770338 Phase shifting overlay mark that measures exposure energy and focus
06/23/1998US5770337 Focus, microscopes
06/23/1998US5770238 Master disk for making dies for pressing in particular optical disks
06/23/1998US5770096 Forming a plating film on a substrate, a photosensitive film covering the plating film, patternig the resists film by exposure of the film to light using a pattern of photo mask, developing, patterning plating film, etching the substrate
06/23/1998US5770076 Micromachined capsules having porous membranes and bulk supports
06/23/1998US5769948 Semiconductor fabricating apparatus having vacuum control and detection system
06/23/1998US5769946 Coating nozzle and coating device having coating nozzle
06/23/1998US5769389 Apparatus for controlling a flow of a fluid
06/23/1998CA2224925A1 Moving interferometer wafer stage
06/23/1998CA2116331C Water-soluble formulation for masking and the like, and method utilizing the same
06/18/1998WO1998026444A1 Vacuum compatible linear motion device
06/18/1998WO1998026331A1 Variable step height control of lithographic patterning
06/18/1998WO1998026318A1 Assembly of optical components optically aligned and method for making this assembly
06/18/1998WO1997044692A3 Fabrication of small-scale coils and bands as photomasks on optical fibers for generation of in-fiber gratings, electromagnets as micro-nmr coils, microtransformers, and intra-vascular stents
06/18/1998DE19652463A1 Three=dimensional microstructure
06/18/1998CA2244994A1 Vacuum compatible linear motion device
06/17/1998EP0848299A2 Stage and optical projection apparatus
06/17/1998EP0848298A2 Exposure apparatus and methods for using same
06/17/1998EP0848297A2 Method for producing a presensitized printing plate
06/17/1998EP0848296A1 System and method for providing photographic printing plates and the like
06/17/1998EP0848295A1 A method for making an offset printing plate according to the silver salt diffusion transfer process
06/17/1998EP0848294A1 Photo-curable resin composition used for photo-fabrication of three-dimensional objects
06/17/1998EP0848293A1 Photo-curable resin composition
06/17/1998EP0848292A1 Photo-curable resin composition
06/17/1998EP0848291A1 Radiation-sensitive resin composition
06/17/1998EP0848290A1 High resolution positive acting dry film photoresist
06/17/1998EP0848289A1 Negative-working chemical sensitization photoresist composition
06/17/1998EP0848288A1 Resist materials
06/17/1998EP0847853A1 A processless planographic printing plate
06/17/1998EP0847545A2 Process for improving the contrast in the structuring of 3-dimensional surfaces
06/17/1998EP0847329A2 Process for fabricating three-dimensionally structured polymer films for integrated optics
06/17/1998CN1184955A Photosensitive film laminating machine for mfg. lead frame
06/17/1998CN1038806C Process for producing printed wiring board
06/16/1998US5768643 Method of producing photographic relief
06/16/1998US5768339 Collimator for x-ray spectroscopy
06/16/1998US5767959 Lens distortion measurement using moire fringes
06/16/1998US5767949 Exposure apparatus and method
06/16/1998US5767948 Lithographic device with a three-dimensionally positionable mask holder
06/16/1998US5767824 Optical display apparatus
06/16/1998US5767523 Multiple detector alignment system for photolithography
06/16/1998US5767521 Electron-beam lithography system and method for drawing nanometer-order pattern
06/16/1998US5767292 Processes for preparing 1-methoxy-2-propyl 3-(7-diethylamino-2-oxo-2H-chromen-3-yl)-3-oxopropionate
06/16/1998US5767169 Photopolymerizable compositions comprising alkoxyphenyl-substituted bisacylphosphine oxides
06/16/1998US5766980 Method of manufacturing a solid state imaging device
06/16/1998US5766829 Method of phase shift lithography
06/16/1998US5766826 Alkaline developing composition and method of use to process lithographic printing plates
06/16/1998US5766825 Method of forming a resin laying in a surface laminated circuit
06/16/1998US5766824 Method and apparatus for curing photoresist
06/16/1998US5766819 Donor elements, assemblages, and associated processes with flexible ejection layer(s) for laser-induced thermal transfer
06/16/1998US5766809 Method for testing overlay in a semiconductor device utilizing inclined measuring mark
06/16/1998US5766808 Process for forming multilayer lift-off structures
06/16/1998US5766806 Simplified production of integrated circuits
06/16/1998US5766804 Method of optical lithography using phase shift masking
06/16/1998US5766802 Adjustment writing scan width; accuracy
06/16/1998US5766671 Method of an apparatus for forming film on substrate by sensing atmospheric pressure
06/16/1998US5766495 Methods for providing generic and specific artwork on plastic information discs
06/16/1998US5766441 Ultraviolet three-dimensional lithography, dry etching or ablation are combined with micro-electroplating in order to deposit thin metal layer
06/16/1998CA2004069C Polymeric compounds
06/11/1998WO1998025184A1 Process for the production of photosensitive resin printing plates and treating fluid
06/11/1998WO1998025183A1 Inspection of lens error associated with lens heating in a photolithographic system
06/11/1998WO1998025182A1 Reticle that compensates for lens error in a photolithographic system
06/11/1998WO1998025181A1 Optical structures for diffusing light
06/11/1998WO1998025180A1 Methods for fabricating annular mask lens having diffraction-reducing edges
06/11/1998WO1998025090A1 Spherical shaped semiconductor integrated circuit
06/10/1998EP0846985A1 Metal rinsing process with controlled metal microcorrosion reduction
06/10/1998EP0846984A2 Prebaking process for facilitating removal of positive photoresist with stripping solutions
06/10/1998EP0846983A2 Reticle transfer
06/10/1998EP0846681A1 Novel sulfonium salt compounds, polymerization initiator, curable composition, and curing method
06/10/1998EP0749347B1 Processes and devices for removing coating layers from printed circuit boards
06/10/1998EP0462183B1 Free-radical curable compositions
06/10/1998DE19650562A1 Photoinitiatorgemische, enthaltend Acylphosphinoxide und Benzophenonderivate Photoinitiator mixtures containing acylphosphinoxide and benzophenone derivatives
06/10/1998CN1184266A Method and apparatus for producing printing stencil
06/10/1998CN1184265A One-component optical-imagery liquid soldering inhibitor and its preparation
06/10/1998CN1184117A New alpha-aminoacetophenone photoinitiators
06/10/1998CN1184036A Heat-sensitive plate-making paper
06/10/1998CN1038709C Colour filter of liquid crystal display device and method for manufacturing the same
06/09/1998USRE35821 Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer
06/09/1998US5765067 Film rewinder
06/09/1998US5764505 Gas discharge laser control systems using multiple CPU's with shared memory on a common bus
06/09/1998US5764390 Holographic method for generating three dimensional conformal photo-lithographic masks
06/09/1998US5764365 For a thickness measuring device
06/09/1998US5764363 Apparatus for observing a surface using polarized light
06/09/1998US5764361 Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus
06/09/1998US5764345 Methods for detecting inhomogeneities, specifically, striae, infused silica glasses
06/09/1998US5764342 Method and system for controlling the relative size of images formed in light-sensitive media
06/09/1998US5763930 Plasma focus high energy photon source
06/09/1998US5763893 Electron gun and electron-beam transfer apparatus comprising same
06/09/1998US5763892 Ultraviolet irradiator for substrate, substrate treatment system, and method of irradiating substrate with ultraviolet light
06/09/1998US5763536 Photoresist binder consisting of novolak resin or polyvinylphenol resin
06/09/1998US5763328 Ashing a wafer having a wiring layer etched by chlorine using a plasma ashing device
06/09/1998US5763149 Kit of parts for making an alkaline processing liquid for processing a lithographic printing plate
06/09/1998US5763143 Depositing resist layer, masking, developing, baking, etching
06/09/1998US5763142 Method for forming resist pattern
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